Wafer transfer box storage equipment
By setting up independent sealed compartments, nitrogen gas supply ports, and humidity sensors in the wafer transfer box storage equipment, the humidity of each sealed compartment can be independently controlled, solving the problem of humidity variation in wafer storage equipment and improving the ease of installation and maintenance.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2025-04-11
- Publication Date
- 2026-04-10
AI Technical Summary
Existing wafer transfer box storage equipment causes changes in humidity throughout the entire device when a single wafer transfer box is retrieved, resulting in unsatisfactory humidity control.
Design a wafer transfer box storage device, which adopts multiple independent sealed compartments inside the box. Each sealed compartment is equipped with a nitrogen gas supply port and a humidity sensor. The humidity of each sealed compartment is independently controlled by a nitrogen system. It is also equipped with an independent airtight door and a tooling plate. The tooling plate is equipped with an in-situ sensor. The back of the box has a cable tray to collect gas and control lines.
Independent humidity control is achieved in each sealed compartment, avoiding the impact of removing or placing one wafer turnover box on the humidity in other compartments, simplifying the equipment structure and facilitating installation and maintenance.
Smart Images
Figure CN224111601U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to semiconductor production equipment technical field especially is related to a wafer transfer box storage equipment. BACKGROUND
[0002] In the production link of wafer, the flow between multiple devices is involved, and the demand for long-term storage is also involved. The wafer is circulated and stored by being stored in the wafer turnover box. When storing, a special storage device is generally used, and the storage environment is required to be high. The commonly used method is to fill nitrogen in the storage device to ensure the humidity control of the storage environment.
[0003] However, multiple wafer turnover boxes are usually stored in one storage device, and a set of nitrogen control system is shared. When a single wafer turnover box is taken out, the humidity in the whole device changes, resulting in an undesirable humidity control effect. UTILITY MODEL CONTENT
[0004] The utility model aims at providing a wafer transfer box storage equipment to solve the problem that the wafer transfer box storage equipment in the prior art changes the overall humidity due to the taking and placing of the wafer turnover box.
[0005] The utility model provides a wafer transfer box storage equipment, which comprises a box body, the box body comprises at least two relatively independent sealed warehouses and a nitrogen system, at least one nitrogen gas supply hole and a humidity sensor are arranged in the sealed warehouse, the nitrogen gas supply hole is connected to the nitrogen system through a gas pipeline, the humidity sensor is connected to the nitrogen system through a control line, the nitrogen system controls the opening or closing of the nitrogen gas supply pipeline of the sealed warehouse according to the humidity sensor, the sealed warehouse is provided with an independently opened airtight door, the airtight door is arranged on the front surface of the box body, at least one tool plate is further arranged in the sealed warehouse, the tool plate is used for bearing the wafer transfer box, and an in-place sensor is arranged on the tool plate.
[0006] The back surface of the box body is further provided with a wiring groove, the wiring groove is connected to the at least two sealed warehouses, and the gas pipeline and the control line are connected to the nitrogen system through the wiring groove.
[0007] In an optional embodiment, the box body comprises at least two layers of sealed warehouses, and each layer comprises at least two sealed warehouses.
[0008] In an optional embodiment, the airtight door is a sliding door, and each layer of sealed warehouses is provided with a sliding door driving system, and the sliding door driving system independently controls the airtight door of each sealed warehouse.
[0009] In an optional embodiment, at least three nitrogen gas supply holes are arranged in each sealed warehouse, and the at least three nitrogen gas supply holes are connected to the same gas pipeline.
[0010] In an optional embodiment, the at least three nitrogen gas supply holes are horizontally equidistantly distributed.
[0011] In an optional embodiment, a temperature sensor is further included, which is connected to the nitrogen system through a control line.
[0012] In an optional embodiment, the humidity sensor is arranged on the inner wall of the sealed cabin.
[0013] In an optional embodiment, the humidity sensor is arranged at the middle part of the sealed cabin in height.
[0014] In an optional embodiment, the nitrogen system comprises a flow regulating valve, a digital pressure gauge and a pressure reducing valve.
[0015] In an optional embodiment, the nitrogen system comprises a solenoid valve group, each solenoid valve of the solenoid valve group is connected with a gas pipeline, and each gas pipeline is arranged corresponding to the nitrogen supply hole of one sealed cabin.
[0016] The wafer transfer box storage equipment provided by the utility model has the following beneficial effects:
[0017] 1. A plurality of independent sealed cabins are arranged in the box body, the nitrogen supply hole and the humidity sensor in each sealed cabin independently act, the nitrogen system can independently control the humidity of each sealed cabin, and when a wafer transfer box is taken out or put into one sealed cabin, the humidity in other sealed cabins will not be affected;
[0018] 2. A tool plate is further arranged in the sealed cabin for carrying the wafer transfer box, the in-position sensor on the tool plate can detect whether the wafer transfer box is in position, can be used for cooperating with a transport trolley of the wafer transfer box and the like to detect whether the wafer transfer box is in position, and can also be used for controlling the humidity state in the sealed cabin by the nitrogen system;
[0019] 3. A wiring groove is arranged on the back of the box body to accommodate the gas pipeline and the control line, so that more regular wiring can be realized, the equipment structure is simplified, and the convenience of equipment installation and maintenance is improved. BRIEF DESCRIPTION OF DRAWINGS
[0020] In order to more clearly illustrate the technical scheme in the specific embodiments of the utility model or the prior art, the drawings needed to be used in the specific embodiments or the prior art description will be briefly introduced as follows. Obviously, the drawings in the following description are some embodiments of the utility model, and for those skilled in the art, other drawings can also be obtained without creative labor on the basis of these drawings.
[0021] Figure 1 It is a front structure schematic view of the wafer transfer box storage equipment provided by the utility model embodiment;
[0022] Figure 2The top view of part structure of the wafer transfer box storage equipment is provided.
[0023] Icon: 100 - box body; 110 - sealed bin; 111 - nitrogen gas supply hole; 112 - humidity sensor; 113 - airtight door; 114 - tool plate; 115 - wiring groove; 210 - flow regulating valve; 220 - digital pressure gauge; 230 - pressure reducing valve; 240 - electromagnetic valve group. DETAILED DESCRIPTION
[0024] In order to make the purpose, technical scheme and advantages of the embodiments of the utility model clearer, the technical scheme in the embodiments of the utility model will be described clearly and completely below in combination with the drawings in the embodiments of the utility model. Obviously, the described embodiments are part of the embodiments of the utility model, rather than all the embodiments. The components of the embodiments of the utility model described and shown in the drawings can be arranged and designed in various different configurations.
[0025] Therefore, the following detailed description of the embodiments of the utility model provided in the drawings is not intended to limit the scope of the claimed utility model, but only represents selected embodiments of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by those of ordinary skill in the art without creative labor are within the scope of protection of the utility model.
[0026] It should be noted that: similar labels and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.
[0027] In the description of the utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer" and the like is based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship commonly placed when the utility model product is used, and is only for the convenience of describing the utility model and simplifying the description, and does not indicate or imply that the indicated device or element must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the utility model. In addition, the terms "first", "second", "third" and the like are only used for differentiation in description and cannot be understood as indicating or implying relative importance.
[0028] In addition, the terms "horizontal", "vertical", "overhanging" and the like do not mean that the components must be absolutely horizontal or overhanging, but can be slightly inclined. For example, "horizontal" only means that its direction is relatively more horizontal than "vertical", and does not mean that the structure must be completely horizontal, but can be slightly inclined.
[0029] In the description of the utility model, still need to explain, unless another explicit provision and limitation, term "arrangement", "installation", "link", "connection" should do broad sense understanding, for example, can be fixed connection, also can be detachable connection, or integrally connected;Can be mechanical connection, also can be electrical connection;Can be directly connected, also can pass through the indirect connection of intermediate medium, can be two element internal communication.For ordinary skilled person in the art, the above-mentioned terms can be understood according to the specific meaning of the utility model.
[0030] Some embodiments of the utility model will be described in detail below in conjunction with the drawings.In the case of no conflict, the following examples and features in examples can be combined with each other.
[0031] The utility model embodiment provides a wafer transfer box storage equipment, such as Figure 1 And 2 As shown, including box 100, box 100 includes at least two relative independent sealed storehouse 110 and nitrogen gas system, at least one nitrogen gas supply hole 111 and humidity sensor 112 are equipped in sealed storehouse 110, nitrogen gas supply hole 111 is connected to nitrogen gas system through gas pipeline, humidity sensor 112 is connected to nitrogen gas system through control circuit, and nitrogen gas system controls the opening or closure of nitrogen gas supply pipeline of sealed storehouse 110 according to humidity sensor 112, and sealed storehouse 110 is provided with independently opened airtight door 113, airtight door 113 is arranged at the front of box 100, and at least one tooling plate 114 is further provided in sealed storehouse 110, and tooling plate 114 is used to carry wafer transfer box, and in-place sensor is arranged on tooling plate 114;The back of box 100 is further provided with wiring slot 115, and wiring slot 115 is connected to at least two sealed storehouse 110, and gas pipeline and control circuit are connected to nitrogen gas system through wiring slot 115.
[0032] Among them, Figure 1 It is the front structure schematic diagram of a wafer transfer box storage equipment provided by the utility model embodiment, and the front layout of box 100 is displayed; Figure 2 It is the top view of part structure of a wafer transfer box storage equipment provided by the utility model embodiment, to display the internal structure of sealed storehouse 110 and other related structures.Gas pipeline and control circuit are not shown in the drawing.
[0033] As shown in Figure 1 And 2 Sealed storehouse 110 is arranged in box 100, and nitrogen gas supply hole 111 and humidity sensor 112 in each sealed storehouse 110 independently act, and nitrogen gas system can independently control the humidity of each sealed storehouse 110, and when taking and placing wafer transfer box for one sealed storehouse 110, the humidity in other sealed storehouse 110 will not be affected.
[0034] As shown in Figure 2 , a tooling plate 114 is arranged in the sealed cabin 110 to carry the wafer transfer box. A position sensor on the tooling plate 114 can detect whether the wafer transfer box is in place, which can be used in cooperation with the wafer transfer box transport trolley and the like to detect whether the wafer transfer box is in place, and can also be used for nitrogen system control of the humidity state in the sealed cabin 110. The position sensor on the tooling plate 114 is not shown in the figure, and can specifically be a contact sensor, a distance sensor, etc.
[0035] In the embodiment, as shown in Figure 2 , two tooling plates 114 are arranged in one sealed cabin 110, and each tooling plate 114 corresponds to receive one wafer transfer box. The wafer transfer box transport trolley and the like often can carry two wafer transfer boxes at the same time, and the arrangement of two tooling plates 114 in one sealed cabin 110 can simultaneously receive all wafer transfer boxes of the transport device under the operation of opening the sealed door once, avoiding repeated opening and closing of the sealed door. In other embodiments, optionally, one sealed cabin 110 can also be provided with one tooling plate 114, three tooling plates 114, or four tooling plates 114, or other number of tooling plates 114.
[0036] In the embodiment, as shown in Figure 2 , a wiring groove 115 is arranged on the back of the box body 100 to accommodate the gas pipeline and control circuit, so as to realize more regular wiring, simplify the equipment structure, and improve the convenience of equipment installation and maintenance. In Figure 2 , only the position of the wiring groove 115 is shown, and the wiring groove 115 is actually located below the nitrogen gas supply hole 111. The wiring groove 115 and the sealed cabin 110 are separated by a partition and the like to realize the sealing effect of the sealed cabin 110.
[0037] In the embodiment, as shown in Figure 1 , the box body 100 includes three layers of sealed cabins 110, and each layer includes two sealed cabins 110. The arrangement of three layers of sealed cabins 110 can make full use of the longitudinal space of the equipment and improve the utilization rate of the site. Each layer of sealed cabins 110 is provided with a wiring groove 115, and the gas pipeline and control circuit of all sealed cabins 110 in the layer are connected to the nitrogen system through the wiring groove 115 of the layer.
[0038] In other embodiments, optionally, the box body 100 can also be provided with two layers, four layers or more layers of sealed cabins 110, and each layer can be provided with multiple sealed cabins 110, such as two, three, four, etc.
[0039] In other embodiments, optionally, the box body 100 can be provided with only one layer of sealed cabins 110, and multiple sealed cabins 110 can be arranged transversely.
[0040] In the embodiment, as shown in Figure 1and Figure 2 As shown in FIG. 1, the sealing door 113 is a sliding door, and each sealing chamber 110 is provided with a sliding door driving system for independently controlling the sealing door of each sealing chamber 110. The sliding door as the sealing door 113 has small space occupation when opening and closing, and is convenient for automatic control of the sealing door 113. In addition, since the equipment such as the transport trolley or the transfer robot for taking and placing the wafer transfer box generally operates the wafer transfer box alone, it is not necessary to open multiple sealing doors 113 at the same time, so that the sliding door as the sealing door 113 will not bring additional negative effects.
[0041] In the embodiment, the sealing door 113 in the form of a sliding door can adopt common linear driving forms such as belt transmission and linear module, which is not limited in the application.
[0042] In other embodiments, the sealing door 113 can also adopt forms such as a double-leaf door, a rotating door, and a roller shutter door.
[0043] In the embodiment, as shown in FIG. 1, Figure 1 and Figure 2 As shown in FIG. 1, each sealing chamber 110 is provided with three nitrogen supply holes 111, and the three nitrogen supply holes 111 are connected to the same gas pipeline. In other embodiments, each sealing chamber 110 can also be provided with two, four or more nitrogen supply holes 111. The plurality of nitrogen supply holes 111 can be used to quickly flush nitrogen into the sealing chamber 110. The plurality of nitrogen supply holes 111 connected to the same gas pipeline can simplify the structure arrangement of the gas pipeline, and can simplify the control logic and control method of the nitrogen system.
[0044] In the embodiment, as shown in FIG. 1, Figure 2 The three nitrogen supply holes 111 are distributed laterally equidistantly to improve the uniformity of nitrogen flushing into the sealing chamber 110. In other embodiments, the plurality of nitrogen supply holes 111 can be distributed in a non-equidistant form.
[0045] In other embodiments, the temperature sensor can be connected to the nitrogen system through a control line. Optionally, the temperature sensor can be integrally arranged with the humidity sensor 112, or a temperature and humidity sensor or the like can be used to realize the functions of the temperature sensor and the humidity sensor 112.
[0046] In the embodiment, as shown in FIG. 1, Figure 1 The humidity sensor 112 is arranged on the inner wall of the sealing chamber 110, and the humidity sensor 112 is arranged at the middle part of the sealing chamber 110 in height. In other embodiments, the humidity sensor 112 can also be arranged at other positions such as the bottom or the top of the sealing chamber 110.
[0047] In the embodiment, as shown in FIG. 1, Figure 1As shown, the nitrogen system includes a flow regulating valve 210, a digital pressure gauge 220 and a pressure reducing valve 230, the nitrogen system is connected with an external nitrogen supply pipeline, the functions of regulating nitrogen pressure and regulating nitrogen flow are realized by using the flow regulating valve 210, the digital pressure gauge 220 and the pressure reducing valve 230, after the regulation is completed, the nitrogen can be directly input into the sealed bin 110 through the gas pipeline and the nitrogen supply hole 111.
[0048] In the embodiment, as shown, Figure 2 The nitrogen system includes an electromagnetic valve group 240, each electromagnetic valve in the electromagnetic valve group 240 is connected with a gas pipeline, each gas pipeline is correspondingly arranged with the nitrogen supply hole 111 of one sealed bin 110. Each electromagnetic valve controls the corresponding gas pipeline, thereby controlling the on and off of the nitrogen in the corresponding sealed bin 110.
[0049] Finally, it should be noted that: the above embodiments are only used to illustrate the technical solutions of the present application, and not to limit them; although the present application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that: it can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent replacement for part or all of the technical features; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.
Claims
1. A wafer transfer box storage device, characterized in that, The box (100) includes at least two relatively independent sealed warehouses (110) and a nitrogen system, the sealed warehouse (110) is provided with at least one nitrogen supply hole (111) and a humidity sensor (112) in it, the nitrogen supply hole (111) is connected to the nitrogen system through a gas pipeline, the humidity sensor (112) is connected to the nitrogen system through a control line, the nitrogen system controls the opening or closing of the nitrogen supply pipeline of the sealed warehouse (110) according to the humidity sensor (112), the sealed warehouse (110) is provided with an independently opened sealed door (113), the sealed door (113) is arranged on the front of the box (100), and at least one tooling plate (114) is further arranged in the sealed warehouse (110), the tooling plate (114) is used for carrying a wafer transfer box, and an in-place sensor is arranged on the tooling plate (114). The back of the box (100) is further provided with a wiring slot (115), the wiring slot (115) is connected to at least two sealed warehouses (110), and the gas pipeline and the control line are connected to the nitrogen system through the wiring slot (115).
2. The FOUP storage apparatus of claim 1, wherein, The box (100) includes at least two layers of sealed warehouses (110), and each layer includes at least two sealed warehouses (110).
3. The FOUP storage apparatus of claim 2, wherein, The sealed door (113) is a sliding door, and each layer of sealed warehouses (110) is provided with a sliding door driving system, and the sliding door driving system independently controls the sealed door of each sealed warehouse (110).
4. The FOUP storage apparatus of claim 1, wherein, At least three nitrogen supply holes (111) are arranged in each sealed warehouse (110), and the at least three nitrogen supply holes (111) are connected to the same gas pipeline.
5. The FOUP storage apparatus of claim 4, wherein, The at least three nitrogen supply holes (111) are transversely equidistantly distributed.
6. The FOUP storage apparatus of claim 1, wherein, A temperature sensor is further included, and the temperature sensor is connected to the nitrogen system through a control line.
7. The FOUP storage apparatus of claim 1, wherein, The humidity sensor (112) is arranged on the inner wall of the sealed warehouse (110).
8. The FOUP storage apparatus of claim 7, wherein, The humidity sensor (112) is arranged at the middle part of the sealed warehouse (110) in height.
9. The FOUP storage apparatus of claim 1, wherein, The nitrogen system includes a flow regulating valve (210), a digital pressure gauge (220) and a pressure reducing valve (230).
10. The FOUP storage apparatus of claim 1, wherein, The nitrogen system includes a solenoid valve group (240), each solenoid valve in the solenoid valve group (240) is connected with a gas pipeline, and each gas pipeline is correspondingly arranged with the nitrogen supply hole (111) of one sealed warehouse (110).