Round target welding positioning clamp

Abstract

The utility model provides a circular target material welding and positioning clamp which comprises a circular positioning base and a positioning ring, the positioning ring is composed of two identical semicircular clamps, protruding pieces are arranged at the two ends of each semicircular clamp respectively, and the protruding pieces are matched with the circular positioning base. When the two identical semicircular clamps are combined into a complete circle, the two protruding pieces making contact with each other are connected through a fastener, and the circular target blank and the back plate located above the circular target blank are coaxially positioned. The circular target material welding positioning clamp can guarantee welding concentricity during brazing welding, the problem of poor welding caused by eccentricity during brazing welding is avoided, the binding rate of brazing welding is improved, and the circular target material welding positioning clamp has the advantages of being simple in structure, high in flexibility and capable of being repeatedly used.

Description

Technical Field

[0001] This utility model belongs to the field of target material preparation technology, and relates to target material welding, and particularly to a circular target material welding positioning fixture. Background Technology

[0002] Brazing refers to placing a filler metal with a melting point lower than that of the workpiece near or between the joint gaps of the workpiece and the workpiece. When the workpiece and the filler metal are heated to a temperature slightly higher than the melting point of the filler metal, the filler metal melts (the workpiece does not melt) and is drawn into and fills the gap between the solid workpiece by capillary action. The liquid filler metal and the workpiece metal diffuse and dissolve with each other, and after condensation, a brazed joint is formed.

[0003] In the field of semiconductor technology, target assemblies are a commonly used material. Target assemblies are formed by welding a target blank and a backplate together, thus requiring welding between them. Brazing is a commonly used welding process for target assemblies, offering advantages over diffusion welding in terms of lower cost and higher efficiency. Currently, there are two engagement methods when brazing the target blank and backplate: one is positive engagement, where the target blank and backplate are wetted separately, and then the welding surface of the target blank is engaged with the backplate; the other is negative engagement, where the target blank and backplate are wetted separately, and then the welding surface of the backplate is engaged with the target blank. In positive engagement, the backplate typically has positioning grooves corresponding to the target blank; during engagement, the target blank is positioned by embedding it into the positioning grooves. However, when the target blank is snapped in reverse, its diameter is slightly larger than that of the back plate, and there is no positioning groove on the target blank. This often leads to eccentricity after snapping. Although the flatness problem of the target material caused by eccentricity can be dealt with by subsequent machining, eccentricity often leads to defects in the weld edge. In particular, when the back plate is snapped on one edge of the target blank, the solder cannot fill the weld gap in the area in time due to the air resistance in the edge gap, resulting in edge welding defects.

[0004] CN117697242A discloses a sputtering target welding method, which employs a shaping device in the centering step. Specifically, three sets of centering units are arranged around the sputtering target, and their synchronous contraction is used to center the sputtering target. Simultaneously, pad units close together with the centering units above the target surface to form a pad group. The sputtering target, the pad group, and the pressure block group above are coaxially arranged. However, the positioning structure in the above technical solution is relatively complex, bulky, and lacks flexibility, making it inconvenient for widespread use.

[0005] CN201596830U discloses a brazing device for precise positioning of a target and a backplate. A circular backplate is placed on a heating platform. Two semi-circular clamps are connected by two pairs of bolts and nuts, tightly fitting onto the outer circumference of the backplate. Multiple adjusting screws are mounted on the complete ring formed by the semi-circular clamps. The target to be brazed is placed in the center of the backplate, solder is applied between the backplate and the target, and tape is affixed to the area on the backplate outside the target. While the brazing device described above has advantages such as high flexibility and simple structure, in actual use, it is necessary to measure the feed rate of each adjusting screw to ensure that the distance from the semi-circular clamps at each adjusting screw position to the outer side of the target is equal, making the adjustment process relatively cumbersome.

[0006] In summary, a novel circular target welding positioning fixture needs to be developed. Utility Model Content

[0007] To address the shortcomings of existing technologies, the present invention aims to provide a circular target welding positioning fixture. This fixture includes a circular positioning base and a positioning ring. The positioning ring is composed of two identical semi-circular clamps, each with protrusions at both ends. When the two identical semi-circular clamps are combined to form a complete circle, the two contacting protrusions are connected by fasteners, enabling coaxial positioning of the circular target blank and the back plate located above it. This circular target welding positioning fixture can ensure welding concentricity during brazing, avoiding welding defects caused by eccentricity during brazing, thereby improving the brazing bonding rate. Furthermore, it has the advantages of simple structure, high flexibility, and reusability.

[0008] To achieve this objective, the present invention adopts the following technical solution:

[0009] A circular target welding positioning fixture, the circular target welding positioning fixture comprising a circular positioning base and a positioning ring;

[0010] The circular positioning base has a receiving groove at its center for accommodating the circular target blank, and the height of the receiving groove is greater than the height of the circular target blank.

[0011] The positioning ring is composed of two identical semi-circular clamps; the cross-section of the semi-circular clamp is L-shaped, including a first semi-circular ring component located below the circular positioning base and a second semi-circular ring component located above the back plate; the inner diameter of the first semi-circular ring component is equal to the diameter of the circular positioning base, and the inner diameter of the second semi-circular ring component is equal to the diameter of the back plate.

[0012] The two ends of the semi-circular clamp are respectively provided with protrusions, so that when two identical semi-circular clamps are combined to form a complete circle, the two protrusions that are in contact are connected by fasteners, so that the circular target blank and the back plate located above it are coaxially positioned; wherein, the diameter of the welding surface of the circular target blank is larger than the diameter of the welding surface of the back plate.

[0013] The circular target welding positioning fixture of this utility model can ensure the concentricity of the welding during brazing, avoid welding defects caused by eccentricity during brazing, thereby improving the brazing bonding rate. It also has the advantages of simple structure, high flexibility and reusability.

[0014] It should be noted that the circular target welding positioning fixture described in this utility model is more suitable for reverse brazing, that is, the diameter of the welding surface of the circular target blank is larger than the diameter of the welding surface of the back plate.

[0015] It should be noted that the inner diameter of the second semi-circular ring component of this utility model being equal to the diameter of the back plate is an ideal state. In order for the two identical semi-circular fixtures to be combined into a complete circle, the back plate and the circular target blank can be coaxially positioned. The inner diameter of the second circular component is 0.5-1mm larger than the diameter of the corresponding back plate.

[0016] As a preferred technical solution of this utility model, the back plate is shaped like a frustum of a cone, the diameter of the circular target blank is between the minimum diameter and the maximum diameter of the back plate, and the inner surface of the second semi-circular component is the side surface of the frustum of a cone corresponding to the back plate; similarly, in order to combine two identical semi-circular fixtures into a complete circle, the back plate and the circular target blank can be coaxially positioned, and the diameter of the inner surface of the second circular component is 0.5-1mm larger than the diameter of the side surface of the frustum of a cone corresponding to the back plate.

[0017] As a preferred technical solution of this utility model, the fasteners are bolts and nuts, and correspondingly, through holes of equal diameter are respectively opened on the two contacting protrusions.

[0018] As a preferred technical solution of this utility model, the diameter of the circular positioning base is 30-50mm larger than the diameter of the circular target blank, for example, 30mm, 33mm, 35mm, 38mm, 40mm, 43mm, 45mm, 47mm or 50mm.

[0019] As a preferred technical solution of this utility model, the thickness of the circular positioning base is 10-15mm greater than the thickness of the circular target blank, for example, 10mm, 11mm, 12mm, 13mm, 14mm or 15mm.

[0020] As a preferred technical solution of this utility model, the diameter of the receiving groove is 1-2 mm larger than the diameter of the circular target blank, for example, 1 mm, 1.1 mm, 1.3 mm, 1.5 mm, 1.6 mm, 1.8 mm or 2 mm.

[0021] As a preferred technical solution of this utility model, the depth of the receiving groove is 5-10mm greater than the thickness of the circular target blank, for example, 5mm, 6mm, 7mm, 8mm, 9mm or 10mm.

[0022] As a preferred technical solution of this utility model, the maximum diameter of the positioning ring is 80-100mm larger than the diameter of the circular target blank, such as 80mm, 82mm, 85mm, 86mm, 88mm, 90mm, 91mm, 93mm, 95mm, 97mm or 100mm.

[0023] As a preferred technical solution of this utility model, the maximum thickness of the positioning ring is 30-40mm greater than the diameter of the circular target blank, for example, 30mm, 31mm, 32mm, 33mm, 34mm, 35mm, 36mm, 37mm, 38mm, 39mm or 40mm.

[0024] As a preferred technical solution of this utility model, the thickness of the second semi-circular ring component is 10-20mm, such as 10mm, 11mm, 12mm, 13mm, 14mm, 15mm, 16mm, 17mm, 18mm, 19mm or 20mm.

[0025] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0026] This invention provides a circular target welding positioning fixture, which includes a circular positioning base and a positioning ring. The circular positioning base is used to accommodate and position the circular target blank, and the positioning ring, which cooperates with the circular positioning base, is used to achieve coaxial positioning of the circular target blank and the back plate located above it. The circular target welding positioning fixture of this invention can ensure welding concentricity during brazing, avoid welding defects caused by eccentricity during brazing, thereby improving the brazing welding bonding rate. It also has the advantages of simple structure, high flexibility, and reusability. Attached Figure Description

[0027] Figure 1 This is a front view of the assembled circular target welding positioning fixture in Embodiment 1 of this utility model;

[0028] Figure 2 for Figure 1 A sectional view;

[0029] Figure 3 This is a top view of the assembled circular target welding positioning fixture in Embodiment 1 of this utility model;

[0030] Among them, 1-circular target blank; 2-back plate; 3-circular positioning base; 31-accommodating groove; 4-positioning ring; 41-first semi-circular ring component; 42-second semi-circular ring component; 5-protrusion; 6-fastener. Detailed Implementation

[0031] To make the technical solution, objectives, and advantages of this utility model clearer, the present utility model will be further described in detail below through specific embodiments and in conjunction with the accompanying drawings. It should be understood that the specific embodiments described herein are for illustration and explanation only and are not intended to limit the present utility model.

[0032] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0033] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. In the fields of electricity and communication, they can refer to a wired connection or a wireless connection. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood according to the specific circumstances.

[0034] Example 1

[0035] This embodiment provides a circular target welding positioning fixture, see reference. Figure 1-3 The circular target welding positioning fixture includes a circular positioning base 3 and a positioning ring 4;

[0036] The circular positioning base 3 has a receiving groove 31 at its center for accommodating the circular target blank 1, and the height of the receiving groove 31 is greater than the height of the circular target blank 1.

[0037] The positioning ring 4 is composed of two identical semi-circular clamps; the cross-section of the semi-circular clamp is L-shaped, including a first semi-circular ring component 41 located below the circular positioning base 3 and a second semi-circular ring component 42 located above the back plate 2; the inner diameter of the first semi-circular ring component 41 is equal to the diameter of the circular positioning base 3, and the inner diameter of the second semi-circular ring component 42 is equal to the diameter of the back plate 2.

[0038] The two ends of the semi-circular clamp are respectively provided with protrusions 5, so that when two identical semi-circular clamps are combined to form a complete circle, the two protrusions 5 that are in contact are connected by fasteners 6, so that the circular target blank 1 and the back plate 2 located above it are coaxially positioned; wherein, the diameter of the welding surface of the circular target blank 1 is larger than the diameter of the welding surface of the back plate 2.

[0039] The back plate 2 is shaped like a frustum of a cone, the diameter of the circular target blank 1 is between the minimum diameter and the maximum diameter of the back plate 2, and the inner surface of the second semi-circular ring component 42 is the side surface of the frustum of a cone corresponding to the back plate 2.

[0040] The fastener 6 is a bolt and a nut, and correspondingly, through holes of the same diameter are opened on the two contacting protrusions 5 respectively;

[0041] Compared to the diameter of the circular target blank 1, the diameter of the circular positioning base 3 is 40mm larger; compared to the thickness of the circular target blank 1, the thickness of the circular positioning base 3 is 12mm larger; compared to the diameter of the circular target blank 1, the diameter of the receiving groove 31 is 1mm larger; compared to the thickness of the circular target blank 1, the depth of the receiving groove 31 is 8mm larger; compared to the diameter of the circular target blank 1, the maximum diameter of the positioning ring 4 is 90mm larger; compared to the diameter of the circular target blank 1, the maximum thickness of the positioning ring 4 is 35mm larger; the thickness of the second semi-circular ring component is 15mm.

[0042] Example 2

[0043] This embodiment provides a circular target welding positioning fixture, which has the same structure as Embodiment 1. The circular target welding positioning fixture includes a circular positioning base 3 and a positioning ring 4.

[0044] The circular positioning base 3 has a receiving groove 31 at its center for accommodating the circular target blank 1, and the height of the receiving groove 31 is greater than the height of the circular target blank 1.

[0045] The positioning ring 4 is composed of two identical semi-circular clamps; the cross-section of the semi-circular clamp is L-shaped, including a first semi-circular ring component 41 located below the circular positioning base 3 and a second semi-circular ring component 42 located above the back plate 2; the inner diameter of the first semi-circular ring component 41 is equal to the diameter of the circular positioning base 3, and the inner diameter of the second semi-circular ring component 42 is equal to the diameter of the back plate 2.

[0046] The two ends of the semi-circular clamp are respectively provided with protrusions 5, so that when two identical semi-circular clamps are combined to form a complete circle, the two protrusions 5 that are in contact are connected by fasteners 6, so that the circular target blank 1 and the back plate 2 located above it are coaxially positioned; wherein, the diameter of the welding surface of the circular target blank 1 is larger than the diameter of the welding surface of the back plate 2.

[0047] The back plate 2 is shaped like a frustum of a cone, the diameter of the circular target blank 1 is between the minimum diameter and the maximum diameter of the back plate 2, and the inner surface of the second semi-circular ring component 42 is the side surface of the frustum of a cone corresponding to the back plate 2.

[0048] The fastener 6 is a bolt and a nut, and correspondingly, through holes of the same diameter are opened on the two contacting protrusions 5 respectively;

[0049] Compared to the diameter of the circular target blank 1, the diameter of the circular positioning base 3 is 30mm larger; compared to the thickness of the circular target blank 1, the thickness of the circular positioning base 3 is 10mm larger; compared to the diameter of the circular target blank 1, the diameter of the receiving groove 31 is 1mm larger; compared to the thickness of the circular target blank 1, the depth of the receiving groove 31 is 5mm larger; compared to the diameter of the circular target blank 1, the maximum diameter of the positioning ring 4 is 80mm larger; compared to the diameter of the circular target blank 1, the maximum thickness of the positioning ring 4 is 30mm larger; the thickness of the second semi-circular ring component is 10mm.

[0050] Example 3

[0051] This embodiment provides a circular target welding positioning fixture, which has the same structure as Embodiment 1. The circular target welding positioning fixture includes a circular positioning base 3 and a positioning ring 4.

[0052] The circular positioning base 3 has a receiving groove 31 at its center for accommodating the circular target blank 1, and the height of the receiving groove 31 is greater than the height of the circular target blank 1.

[0053] The positioning ring 4 is composed of two identical semi-circular clamps; the cross-section of the semi-circular clamp is L-shaped, including a first semi-circular ring component 41 located below the circular positioning base 3 and a second semi-circular ring component 42 located above the back plate 2; the inner diameter of the first semi-circular ring component 41 is equal to the diameter of the circular positioning base 3, and the inner diameter of the second semi-circular ring component 42 is equal to the diameter of the back plate 2.

[0054] The two ends of the semi-circular clamp are respectively provided with protrusions 5, so that when two identical semi-circular clamps are combined to form a complete circle, the two protrusions 5 that are in contact are connected by fasteners 6, so that the circular target blank 1 and the back plate 2 located above it are coaxially positioned; wherein, the diameter of the welding surface of the circular target blank 1 is larger than the diameter of the welding surface of the back plate 2.

[0055] The back plate 2 is shaped like a frustum of a cone, the diameter of the circular target blank 1 is between the minimum diameter and the maximum diameter of the back plate 2, and the inner surface of the second semi-circular ring component 42 is the side surface of the frustum of a cone corresponding to the back plate 2.

[0056] The fastener 6 is a bolt and a nut, and correspondingly, through holes of the same diameter are opened on the two contacting protrusions 5 respectively;

[0057] Compared to the diameter of the circular target blank 1, the diameter of the circular positioning base 3 is 50mm larger; compared to the thickness of the circular target blank 1, the thickness of the circular positioning base 3 is 15mm larger; compared to the diameter of the circular target blank 1, the diameter of the receiving groove 31 is 2mm larger; compared to the thickness of the circular target blank 1, the depth of the receiving groove 31 is 10mm larger; compared to the diameter of the circular target blank 1, the maximum diameter of the positioning ring 4 is 100mm larger; compared to the diameter of the circular target blank 1, the maximum thickness of the positioning ring 4 is 40mm larger; the thickness of the second semi-circular ring component is 20mm.

[0058] For the circular target welding positioning fixture described in the above embodiments, the following process flow is used for brazing the circular target, including:

[0059] (1) Wipe the welding surfaces of the circular target blank and the back plate with a clean cloth soaked in alcohol to remove surface stains;

[0060] (2) Place the circular target blank with the welding surface facing up in the receiving groove of the circular positioning base, and then place it and the separate back plate on the welding platform for heating.

[0061] (3) Place the solder on the welding surfaces of the circular target blank and the back plate respectively and heat it until it melts. Use a steel brush and ultrasonic equipment to wet the welding surfaces so that the solder can fully wet the welding surfaces.

[0062] (4) Attach the welding surface of the back plate to the welding surface of the circular target blank, use the positioning ring to fit the outer edge of the circular positioning base, pass the bolt through the screw hole on the protrusion of the positioning ring, tighten the nut, and the position of the back plate can be adjusted to ensure the concentricity of the welding between the circular target blank and the back plate. After adjustment, the positioning ring can be removed.

[0063] (5) Finally, welding pressure and cooling are performed to achieve brazing of the circular target blank and the back plate.

[0064] The circular target obtained after brazing was tested for welding concentricity and brazing bonding rate. The test results are summarized in Table 1.

[0065] Table 1

[0066] project Example 1 Example 2 Example 3 Welding concentricity 0.8mm 0.6mm 1.1mm Brazing weld bonding rate 99.5％ 99.5％ 99.4％

[0067] In summary, this utility model provides a circular target welding positioning fixture, which includes a circular positioning base and a positioning ring. The positioning ring is composed of two identical semi-circular clamps, each with a protrusion at both ends. When the two identical semi-circular clamps are combined to form a complete circle, the two contacting protrusions are connected by fasteners, enabling the circular target blank and the back plate located above it to achieve coaxial positioning. This circular target welding positioning fixture can ensure welding concentricity during brazing, avoiding welding defects caused by eccentricity during brazing, thereby improving the brazing bonding rate. Furthermore, it has the advantages of simple structure, high flexibility, and reusability.

[0068] The above description is only a specific embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Those skilled in the art should understand that any changes or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present utility model fall within the protection and disclosure scope of the present utility model.

Claims

1. A circular target welding positioning fixture, characterized in that, The circular target welding positioning fixture includes a circular positioning base and a positioning ring; The circular positioning base has a receiving groove at its center for accommodating the circular target blank, and the height of the receiving groove is greater than the height of the circular target blank. The positioning ring is composed of two identical semi-circular clamps; the cross-section of the semi-circular clamp is L-shaped, including a first semi-circular ring component located below the circular positioning base and a second semi-circular ring component located above the back plate; the inner diameter of the first semi-circular ring component is equal to the diameter of the circular positioning base, and the inner diameter of the second semi-circular ring component is equal to the diameter of the back plate. The two ends of the semi-circular clamp are respectively provided with protrusions, so that when two identical semi-circular clamps are combined to form a complete circle, the two protrusions that are in contact are connected by fasteners, so that the circular target blank and the back plate located above it are coaxially positioned; wherein, the diameter of the welding surface of the circular target blank is larger than the diameter of the welding surface of the back plate.

2. The circular target welding positioning fixture according to claim 1, characterized in that, The back plate is shaped like a frustum of a cone, and the diameter of the circular target blank is between the minimum diameter and the maximum diameter of the back plate. The inner surface of the second semi-circular ring component is the frustum of a cone side surface corresponding to the back plate.

3. The circular target welding positioning fixture according to claim 1 or 2, characterized in that, The fasteners are bolts and nuts, and correspondingly, through holes of equal diameter are opened on the two contacting protrusions.

4. The circular target welding positioning fixture according to claim 1 or 2, characterized in that, Compared to the diameter of the circular target blank, the diameter of the circular positioning base is 30-50mm larger.

5. The circular target welding positioning fixture according to claim 1 or 2, characterized in that, Compared to the thickness of the circular target blank, the thickness of the circular positioning base is 10-15 mm greater.

6. The circular target welding positioning fixture according to claim 1 or 2, characterized in that, The diameter of the receiving groove is 1-2 mm larger than the diameter of the circular target blank.

7. The circular target welding positioning fixture according to claim 1 or 2, characterized in that, Compared to the thickness of the circular target blank, the depth of the receiving groove is 5-10 mm greater.

8. The circular target welding positioning fixture according to claim 1 or 2, characterized in that, Compared to the diameter of the circular target blank, the maximum diameter of the positioning ring is 80-100 mm larger.

9. The circular target welding positioning fixture according to claim 1 or 2, characterized in that, Compared to the diameter of the circular target blank, the maximum thickness of the positioning ring is 30-40 mm greater.

10. The circular target welding positioning fixture according to claim 1 or 2, characterized in that, The thickness of the second semi-circular ring component is 10-20mm.

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