Fixed protection device and degumming machine

Abstract

The utility model discloses a fixing protection device and a degumming machine, the fixing protection device is used for fixing a crystal ingot, the fixing protection device comprises two first supporting pieces, the two first supporting pieces are oppositely distributed in a spaced mode in the first direction, at least one of the two first supporting pieces is configured to be adjustable in position relative to the other first supporting piece in the first direction, and the first supporting pieces and the second supporting pieces are arranged oppositely. The clamping part is used for clamping the crystal ingot in the first direction; and the two second supporting pieces are oppositely distributed in a spaced mode in the second direction, at least one of the two second supporting pieces is configured to be adjustable in position relative to the other second supporting piece in the first direction so as to be used for clamping the crystal ingot in the second direction, and the first direction intersects with the second direction. According to the fixing and protecting device, the reliability of fixing the crystal ingot can be effectively improved, the wafer is prevented from falling into water or colliding with other parts to cause edge breakage, the yield of products can be improved, the application range of the fixing and protecting device can be effectively enlarged, the labor cost can be reduced, and the satisfaction degree of users can be improved.

Description

Technical Field

[0001] This utility model relates to the field of wafer manufacturing technology, and in particular to a fixing and protection device and a degumming machine having the fixing and protection device. Background Technology

[0002] The processing of semiconductor wafers such as silicon carbide wafers and silicon wafers includes wire cutting. Wire cutting is mainly used to cut ingots into individual wafers. Before wire cutting, the ingot is first glued to the workpiece plate to ensure that the ingot will not move or deform during wire cutting. After wire cutting, in order to obtain clean wafers, a debinding process is required. In the existing technology, the workpiece plate and wafer are usually placed directly on the tray of a heated debinding machine. Due to the lack of protective measures, the debinded wafers are very likely to fall into the water. When the wafers hit the metal tray, they are very likely to chip, affecting the product yield. Manual supervision will increase labor costs, so there is room for improvement. Utility Model Content

[0003] This invention aims to solve at least one of the technical problems existing in the prior art. To this end, this invention proposes a fixing and protection device that can reliably protect crystal ingots, preventing them from falling into water or colliding with other components and causing edge chipping. This improves product yield, effectively expands the applicability of the fixing and protection device, reduces labor costs, and enhances user satisfaction.

[0004] According to an embodiment of the present invention, a fixing and protective device is used to fix a crystal ingot, comprising: two first support members, the two first support members being spaced apart and distributed opposite each other along a first direction, at least one of the two first support members being configured to be positionally adjustable relative to the other along the first direction for clamping the crystal ingot along the first direction; and two second support members, the two second support members being spaced apart and distributed opposite each other along a second direction, at least one of the two second support members being configured to be positionally adjustable relative to the other along the first direction for clamping the crystal ingot along the second direction, wherein the first direction and the second direction intersect.

[0005] According to the present invention, the fixing and protection device can clamp the crystal ingot along the first direction and the second direction by setting two first support members and two second support members respectively. This can effectively improve the reliability of fixing the crystal ingot and prevent the wafer from falling into water or colliding with other components, thus preventing edge chipping. This can help improve the product yield. Furthermore, by constructing at least one of the two first support members to be adjustable in position relative to the other along the first direction, and by constructing at least one of the two second support members to be adjustable in position relative to the other along the second direction, the fixing and protection device can clamp crystal ingots of different sizes along the first direction and the second direction. This can effectively increase the applicability of the fixing and protection device, reduce labor costs, and help improve user satisfaction.

[0006] The fixing protection device according to some embodiments of the present utility model further includes a lifting frame, at least one of the two first support members is adjustablely mounted on the lifting frame along the first direction, and at least one of the two second support members is adjustablely mounted on the first support member along the second direction.

[0007] According to some embodiments of the present invention, the first support member includes a support frame and a support plate. The support frame is adjustablely connected to the lifting frame along the first direction. The support plate is installed on the support frame and extends along the second direction. The second support member is adjustablely connected to the support plate along the second direction.

[0008] The fixing and protective device according to some embodiments of the present utility model further includes a first positioning member. The lifting frame is provided with a plurality of first positioning holes, which are distributed at intervals along the first direction. The support frame is provided with a first positioning mating hole, which is adapted to be positioned and mated with one of the plurality of first positioning holes through the first positioning member.

[0009] According to some embodiments of the present invention, the fixed protection device includes a support frame with a sliding portion and a lifting frame with a sliding guide portion extending along the first direction, wherein the sliding portion and the sliding guide portion are slidably engaged; wherein at least one of the two support frames is provided with a distance sensor.

[0010] According to some embodiments of the present invention, the second support member includes two telescopic plate segments that can be extended and retracted relative to each other, and the two telescopic plate segments are respectively connected to the support plates of the two first support members in a one-to-one correspondence.

[0011] According to some embodiments of the present invention, in the fixed protection device, one of the two telescopic plate segments is provided with a guide rod and the other is provided with a guide groove, the guide rod and the guide groove are inserted into each other and can be telescopically extended; and / or, one of the two telescopic plate segments is provided with a guide member and the other is provided with a guide hole, the guide hole is constructed as an elongated hole extending along the first direction, and the guide member and the guide hole are guided and engaged.

[0012] According to some embodiments of the present invention, each of the telescopic plate segments is provided with a through hole, and the support plate passes through the through hole along the second direction, so that the position of the telescopic plate segment relative to the support plate along the second direction is adjustable; wherein, it further includes a second positioning member, which passes through one of the telescopic plate segment and the support plate and is positioned and cooperates with the other.

[0013] According to some embodiments of the present invention, the fixed protection device has the support frame constructed as an inclined frame, and the two inclined frames are constructed to be inclined from bottom to top in a direction away from each other; or, at least a portion of the support frame is constructed as an arc segment, and the arc segments of the two support frames are symmetrically distributed and are constructed together as an upwardly open flared support structure.

[0014] This utility model also proposes a degumming machine.

[0015] The degumming machine according to the present invention includes the fixing and protection device described in any of the above embodiments.

[0016] The degumming machine and the aforementioned fixing and protection device have the same advantages over the prior art, which will not be elaborated here.

[0017] Additional aspects and advantages of this invention will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the invention. Attached Figure Description

[0018] The above and / or additional aspects and advantages of this utility model will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which:

[0019] Figure 1 This is a schematic diagram of the structure of the fixing and protective device according to an embodiment of the present utility model. Figure 1 ;

[0020] Figure 2 This is a schematic diagram of the structure of the fixing and protective device according to an embodiment of the present utility model. Figure 2 ;

[0021] Figure 3 The fixing and protection device according to the embodiment of this utility model is used in conjunction with the crystal ingot. Figure 1;

[0022] Figure 4 This is a partial exploded view of the fixing and protective device according to an embodiment of the present utility model;

[0023] Figure 5 This is a schematic diagram of the structure of the fixing and protective device according to an embodiment of the present utility model. Figure 3 ;

[0024] Figure 6 The fixing and protection device according to the embodiment of this utility model is used in conjunction with the crystal ingot. Figure 2 ;

[0025] Figure 7 yes Figure 6 A magnified view of a section at point A in the middle;

[0026] Figure 8 yes Figure 6 A partial sectional view at point A in the middle.

[0027] Figure label:

[0028] Fixed protection device 100,

[0029] First support component 1, support frame 11, sliding part 112, arc-shaped section 113, vertical section 114, bending section 115, base section 116, elastic pad 117, flared support structure 118, support plate 12.

[0030] Second support component 2, telescopic plate segment 21, guide rod 211, guide groove 212, guide component 213, guide hole 214, through hole 215, threaded hole 216.

[0031] Lifting frame 3, first positioning hole 31, sliding guide 32, distance sensor 33

[0032] Second positioning component 4,

[0033] Ingot 101, workpiece plate 102. Detailed Implementation

[0034] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0035] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential," etc., indicating the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, features defined with "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0036] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0037] The following is for reference. Figures 1-8 The fixing and protection device 100 according to the embodiment of the present utility model can reliably protect the crystal ingot 101, preventing the wafer from falling into water or colliding with other components and causing edge chipping, thereby improving the product yield, effectively increasing the applicability of the fixing and protection device 100, reducing labor costs, and improving user satisfaction.

[0038] like Figures 1-3 As shown, a fixing and protection device 100 according to an embodiment of the present invention is used to fix a crystal ingot 101 and includes: two first support members 1 and two second support members 2.

[0039] Two first support members 1 are spaced apart and distributed opposite each other along a first direction, and at least one of the two first support members 1 is configured to be adjustable in position relative to the other along the first direction for clamping the ingot 101 along the first direction; two second support members 2 are spaced apart and distributed opposite each other along a second direction, and at least one of the two second support members 2 is configured to be adjustable in position relative to the other along the first direction for clamping the ingot 101 along the second direction, wherein the first direction and the second direction intersect.

[0040] Specifically, the ingot 101 includes multiple wafers. The fixing and protection device 100 is used to fix the ingot 101 to prevent the wafers from falling into the water after debonding, or from colliding with surrounding components after falling and causing chipping. This can help improve the yield. The fixing and protection device 100 includes two first support members 1 and two second support members 2. The two first support members 1 and the two second support members 2 are used to fix the ingot 101 together to prevent the wafers from falling after debonding. Moreover, it can reduce the number of staff and lower labor costs without the need for manual supervision.

[0041] The two first support members 1 are spaced apart and relatively distributed along the first direction, so that the two first support members 1 are facing each other along the first direction and spaced apart by a certain distance, so that the two first support members 1 can clamp the crystal ingot 101 together along the first direction, thus clamping the crystal ingot 101 on both sides along the first direction. Similarly, the two second support members 2 are spaced apart and relatively distributed along the second direction, so that the two second support members 2 are facing each other along the second direction and spaced apart by a certain distance, so that the two second support members 2 can clamp the crystal ingot 101 together along the second direction, thus clamping the crystal ingot 101 on both sides along the second direction. This allows the fixing and protection device 100 to clamp the crystal ingot 101 simultaneously along the first and second directions, clamping the crystal ingot 101 from four positions around the crystal ingot 101 at the same time, which can effectively improve the reliability of fixing the crystal ingot 101 and thus effectively prevent the wafer from falling off.

[0042] Furthermore, the first direction intersects with the second direction, that is, the first direction and the second direction form a certain angle, that is, the first direction and the second direction are not parallel. This can avoid the two first support members 1 and the two second support members 2 clamping the crystal ingot 101 from one direction at the same time, which would reduce the reliability of fixing the crystal ingot 101. Moreover, the crystal ingot 101 is usually placed horizontally, that is, the first direction and the second direction can be any two intersecting directions in the horizontal direction.

[0043] In such Figure 3 In the embodiment shown, the first direction is the left-right direction, and the second direction is the front-back direction. The first direction and the second direction intersect and are perpendicular, so that the two first support members 1 and the two second support members 2 can clamp the crystal ingot 101 from the front-back direction and the left-right direction, respectively, and the crystal ingot 101 can be reliably fixed.

[0044] Furthermore, at least one of the two first support members 1 is configured to be adjustable relative to the other along the first direction. That is, the installation position of at least one first support member 1 in the fixing protection device 100 can be adjusted along the first direction. This allows one of the first support members 1 to be fixedly installed while the other can be detachably installed along the first direction, or both first support members 1 can be detachably installed along the first direction. This allows the distance between the two first support members 1 to be adjusted according to the different dimensions of the crystal ingots 101 along the first direction, so that the fixing protection device 100 can clamp crystal ingots 101 with different dimensions along the first direction, thereby increasing the applicability of the fixing protection device 100.

[0045] Meanwhile, at least one of the two second support members 2 is configured to be adjustable relative to the other along the second direction. That is, the installation position of at least one second support member 2 in the fixing protection device 100 can be adjusted along the second direction. This allows one of the second support members 2 to be fixedly installed while the other can be detachably installed along the second direction, or both second support members 2 can be detachably installed along the second direction. This allows the distance between the two second support members 2 to be adjusted according to the different dimensions of the crystal ingots 101 along the second direction, so that the fixing protection device 100 can clamp crystal ingots 101 with different dimensions along the second direction. This further increases the applicability of the fixing protection device 100, allowing it to clamp crystal ingots 101 with different dimensions along the first and second directions.

[0046] It should be noted that the ingot 101 is usually cylindrical, and the dimensions of the ingot 101 along the first direction and the second direction can be one of the diameter and height of the ingot 101, respectively.

[0047] According to the embodiment of the present invention, the fixing and protection device 100 can clamp the crystal ingot 101 along the first direction and the second direction by setting two first support members 1 and two second support members 2 respectively. This can effectively improve the reliability of fixing the crystal ingot 101, thereby providing reliable protection for the crystal ingot 101 and preventing the wafer from falling into water or colliding with other components and causing chipping. This can help improve the product yield. Furthermore, by constructing at least one of the two first support members 1 to be adjustable in position relative to the other along the first direction, and by constructing at least one of the two second support members 2 to be adjustable in position relative to the other along the second direction, the fixing and protection device 100 can clamp crystal ingots 101 of different sizes along the first direction and the second direction. This can effectively increase the applicability of the fixing and protection device 100, reduce labor costs, and help improve user satisfaction.

[0048] In some embodiments, the fixed protection device 100 further includes a lifting frame 3, at least one of the two first support members 1 is adjustablely mounted on the lifting frame 3 along a first direction, and at least one of the two second support members 2 is adjustablely mounted on the first support member 1 along a second direction.

[0049] Specifically, the lifting frame 3 is used to lift the fixed protection device 100. For example, in a heating degumming machine, the lifting frame 3 can move the fixed protection device 100 closer to or away from the heat source. When it is necessary to degumme the crystal ingot 101, the lifting frame 3 can descend to bring the fixed crystal ingot 101 closer to the heat source so as to achieve degumming by heating. After heating is completed, the lifting frame 3 can rise to move the degummed wafer away from the heat source so as to further process the wafer.

[0050] Meanwhile, by adjusting the position of at least one of the two first support members 1 along the first direction on the lifting frame 3, both first support members 1 can be installed on the lifting frame 3 simultaneously, thereby ensuring the reliability of the first support member 1's operation. Furthermore, by making the position of at least one first support member 1 along the first direction adjustable, the distance between the two first support members 1 can be adjusted by changing the installation position of at least one first support member 1 on the lifting frame 3 along the first direction, so that the fixing protection device 100 can clamp ingots 101 of different sizes along the first direction.

[0051] Furthermore, by adjusting the position of at least one of the two second support members 2 along the second direction on the first support member 1, both second support members 2 can be simultaneously installed on the two first support members 1, thus connecting both second support members 2 to the two first support members 1 simultaneously. This ensures reliable installation of the second support members 2 and guarantees the reliability of their operation. Moreover, by making the position of at least one second support member 2 adjustable along the second direction, the distance between the two second support members 2 can be adjusted by changing the installation position of at least one second support member 2 on the first support member 1 along the second direction. This allows the fixing and protection device 100 to clamp ingots 101 of different sizes along the second direction.

[0052] For example, such as Figures 1-3 and Figures 5-6As shown, the two first support members 1 are adjustable relative to each other along the first direction, so that the two first support members 1 can be detachably connected to the lifting frame 3. This allows for adjustment of the installation position of the two first support members 1 on the lifting frame 3 along the first direction, so that the fixing protection device 100 can clamp the ingots 101 of different sizes along the first direction. Similarly, the two second support members 2 are adjustable relative to each other along the second direction, so that the two second support members 2 can be detachably connected to the two first support members 1 simultaneously. This allows for adjustment of the installation position of the two second support members 2 on the two first support members 1 along the second direction, so that the fixing protection device 100 can clamp the ingots 101 of different sizes along the second direction.

[0053] In some embodiments, the first support member 1 includes a support frame 11 and a support plate 12. The support frame 11 is adjustablely connected to the lifting frame 3 along a first direction. The support plate 12 is mounted on the support frame 11 and extends along a second direction. The second support member 2 is adjustablely connected to the support plate 12 along the second direction.

[0054] Specifically, the first support member 1 is used to clamp the crystal ingot 101 along the first direction. The first support member 1 includes a support frame 11 and a support plate 12. The support frame 11 is used to install the first support member 1, and the support plate 12 is used to clamp the crystal ingot 101. By connecting the support frame 11 to the lifting frame 3, the first support member 1 can be installed, thereby ensuring the reliable operation of the first support member 1. By installing the support plate 12 on the support frame 11, the support plate 12 can be connected to the support frame 11, making the first support member 1 a whole, which can improve the structural strength of the first support member 1 and enable the installation of the support plate 12, thereby ensuring the reliable operation of the support plate 12. The support plate 12 and the support frame 11 can be fixedly connected to further improve the reliability of the connection between the two.

[0055] Furthermore, the position of the support frame 11 along the first direction is adjustable. By changing the installation position of the two support frames 11 on the lifting frame 3, the distance between the two support plates 12 installed on the two support frames 11 is also changed. This allows the fixing and protection device 100 to clamp ingots 101 of different sizes along the first direction. Moreover, by constructing the support plate 12 to extend along the second direction, the support plate 12 can have a certain length along the second direction, which can increase the contact area between the support plate 12 and the ingot 101 when clamping the ingot 101, thereby improving the reliability of the support plate 12 clamping the ingot 101 along the first direction.

[0056] It should be noted that the first support member 1 includes a support frame 11 and a support plate 12. The support frame 11 and the support plate 12 enable the first support member 1 to have a frame structure, which can reduce the weight of the first support member 1 and thus reduce the overall weight of the fixing protection device 100, which is beneficial to the installation of the fixing protection device 100.

[0057] Furthermore, the second support member 2 is connected to the support plate 12, so that the second support member 2 can be constructed to extend along the first direction, and both ends of the second support member 2 can be connected to the two support plates 12 respectively, so that the second support member 2 can be reliably installed, ensuring the reliability of the operation of the second support member 2, and the position of the second support member 2 along the second direction can be adjusted, so that the distance between the two second support members 2 can be adjusted by changing the installation position of the two second support members 2 on the two support plates 12, so that the fixing protection device 100 can clamp the ingots 101 of different sizes along the second direction.

[0058] In some embodiments, the fixed protection device 100 further includes a first positioning member, the lifting frame 3 is provided with a plurality of first positioning holes 31, the plurality of first positioning holes 31 are distributed at intervals along a first direction, the support frame 11 is provided with a first positioning mating hole, the first positioning mating hole is adapted to be positioned and mated with one of the plurality of first positioning holes 31 through the first positioning member.

[0059] Specifically, the installation position of the support frame 11 on the lifting frame 3 is adjustable along the first direction. The lifting frame 3 is provided with a first positioning hole 31, and the support frame 11 is provided with a first positioning mating hole. The first positioning mating hole can be positioned and mated with the first positioning hole 31 by a first positioning member. The first positioning member can be passed through the first positioning hole 31 and positioned and mated with the first positioning mating hole, thereby realizing the connection between the support frame 11 and the lifting frame 3, and thus realizing the installation of the support frame 11. Furthermore, there are multiple first positioning holes 31, that is, the number of first positioning holes 31 can be two, three or more, so that the first positioning mating hole can be selectively positioned and mated with one of the first positioning holes 31 by the first positioning member, so as to adjust the installation position of the support frame 11 on the lifting frame 3.

[0060] Furthermore, the multiple first positioning holes 31 are spaced apart along the first direction, so that the multiple first positioning holes 31 can be set sequentially along the first direction, and there is a certain distance between each two adjacent first positioning holes 31. Then, the first positioning mating hole can be selectively positioned and mated with one of the multiple first positioning holes 31 distributed along the first direction through the first positioning member. This allows the installation position of the support frame 11 on the lifting frame 3 along the first direction to be adjusted, and the distance between the two support plates 12 can be adjusted. This allows the fixing protection device 100 to clamp the ingots 101 of different sizes along the first direction, and avoids interference between the multiple first positioning holes 31, which would reduce the installation reliability of the support frame 11.

[0061] Furthermore, it should be noted that the support frame 11 is installed above the lifting frame 3, and the first positioning mating hole is set at the bottom of the support frame 11 so that the first positioning mating hole can approach the first positioning hole 31, so as to facilitate positioning and mating with the first positioning hole 31 through the first positioning member. Moreover, there are three first positioning mating holes, which are distributed at intervals along the second direction, and the first positioning holes 31 are in three groups. Each group of first positioning holes 31 includes multiple first positioning holes 31 distributed at intervals along the first direction. The three groups of first positioning holes 31 are also distributed at intervals along the second direction. The three first positioning mating holes correspond to the three groups of first positioning holes 31 respectively, so that the three first positioning mating holes can be positioned and mated with the three corresponding first positioning holes 31 distributed along the second direction through the three first positioning members, which can effectively improve the accuracy of the installation position of the support frame 11.

[0062] The first positioning element can be a bolt, the first positioning mating hole can be a threaded hole, and the first positioning hole 31 can be a through hole. The bolt can be threaded through the through hole and threaded into the threaded hole from below the lifting frame 3, thereby achieving reliable installation of the support frame 11.

[0063] In some embodiments, the support frame 11 is provided with a sliding portion 112, and the lifting frame 3 is provided with a sliding guide portion 32 extending in a first direction, wherein the sliding portion 112 and the sliding guide portion 32 are slidably engaged; wherein at least one of the two support frames 11 is provided with a distance sensor 33.

[0064] Specifically, the mounting position of the support frame 11 on the lifting frame 3 is adjustable along the first direction. The support frame 11 has a sliding part 112, and the lifting frame 3 is provided with a sliding guide part 32. The sliding part 112 and the sliding guide part 32 are slidably engaged, so that at least a part of the sliding part 112 can extend into the sliding guide part 32, so that the sliding part 112 can slide along the extension direction of the sliding guide part 32. That is, the sliding guide part 32 can guide the movement of the sliding part 112. The sliding guide part 32 is constructed to extend along the first direction, so that the sliding guide part 32 can make the sliding part 112 slide along the first direction. In turn, the support frame 11 can move along the first direction under the drive of the sliding part 112. That is, the support plate 12 connected to the support frame 11 also moves along the first direction, so that the distance between the two support plates 12 can be adjusted, so that the fixing protection device 100 can clamp the ingots 101 of different sizes along the first direction.

[0065] It should be noted that, for example Figure 2 , Figure 3 , Figure 5 and Figure 6 As shown, the sliding part 112 is formed at the bottom of the support frame 11, and the sliding guide part 32 is provided above the lifting frame 3, so that the sliding part 112 and the sliding guide part 32 can approach each other, thereby facilitating the extension of at least a portion of the sliding part 112 into the sliding guide part 32 so that the two can slide together. There are three sliding parts 112 and three sliding guide parts 32, and the three sliding parts 112 and three sliding guide parts 32 are distributed at intervals along the second direction. The three sliding parts 112 and three sliding guide parts 32 correspond one-to-one. Thus, the reliability and stability of the support frame 11 sliding along the first direction can be improved through the corresponding cooperation between the three sliding parts 112 and three sliding guide parts 32. Moreover, the sliding part 112 can be a slider, and the sliding guide part 32 can be a slide rail.

[0066] Furthermore, at least one of the two support frames 11 is equipped with a distance sensor 33, which can be installed on at least one support frame 11. The distance sensor 33 is used to detect the distance between the two support frames 11, so as to automatically adjust the distance between the two support frames 11, which can automatically adjust the distance between the two support plates 12, thereby improving the convenience of operation. In actual design, the support frame 11 can be connected to a motor so that the distance between the two support frames 11 can be automatically adjusted through the cooperation of the distance sensor 33 and the motor.

[0067] In such Figures 1-3 and Figures 5-6In the embodiment shown, a distance sensor 33 is provided on each of the two support frames 11, and both distance sensors 33 are positioned facing the opposite support frame 11 to facilitate the detection of the distance between the two support frames 11. Moreover, the two distance sensors 33 are spaced apart along the second direction, so that the two distance sensors 33 can detect the distance between the two support frames 11 at two different positions, which can improve the accuracy of the detection results.

[0068] In some embodiments, the second support member 2 includes two telescopic plate segments 21 that can extend and retract relative to each other, and the two telescopic plate segments 21 are respectively connected to the support plates 12 of the two first support members 1 in a one-to-one correspondence.

[0069] Specifically, the second support member 2 includes two telescopic plate segments 21, which can extend and retract relative to each other. The two telescopic plate segments 21 can be connected end to end, so that one telescopic plate segment 21 can extend or retract relative to the other, thereby adjusting the extension length of the second support member 2. The two telescopic plate segments 21 are respectively connected to the support plates 12 of the two first support members 1 in a one-to-one correspondence. The ends of the two telescopic plate segments 21 that are opposite to each other are respectively connected to the two support plates 12 to realize the connection between the second support member 2 and the first support member 1, and thus realize the installation of the second support member 2, which can ensure the reliable operation of the second support member 2.

[0070] The distance between the two support plates 12 is adjustable, and the two telescopic plate segments 21 of the second support member 2 connected between the two support plates 12 are constructed to be relatively telescopic. That is, when the distance between the two support plates 12 is adjusted, the two telescopic plate segments 21 can extend and retract accordingly to adapt to the distance between the two support plates 12, which can improve the reliability of adjusting the distance between the two support plates 12.

[0071] In some embodiments, one of the two telescopic plate segments 21 is provided with a guide rod 211 and the other is provided with a guide groove 212, the guide rod 211 and the guide groove 212 are inserted into each other and can extend and retract relative to each other; and / or, one of the two telescopic plate segments 21 is provided with a guide member 213 and the other is provided with a guide hole 214, the guide hole 214 is constructed as an elongated hole extending along a first direction, and the guide member 213 and the guide hole 214 are guided into each other.

[0072] Specifically, the two telescopic plate segments 21 are telescopic relative to each other, and one of the two telescopic plate segments 21 is provided with a guide rod 211 and the other is provided with a guide groove 212. The guide rod 211 and the guide groove 212 are telescopic relative to each other, so that the relative telescopic extension between the two telescopic plate segments 21 can be achieved by the relative extension between the guide rod 211 and the guide groove 212, thereby adjusting the extension length of the second support member 2. Furthermore, the guide rod 211 and the guide groove 212 are interlocked, so that both the guide rod 211 and the guide groove 212 are constructed to extend along a first direction, and at least a portion of the guide rod 211 extends into the guide groove 212, so that the guide rod 211 can move along the extension direction of the guide groove 212 to achieve the relative extension between the two telescopic plate segments 21. That is, the guide groove 212 can guide the movement of the guide rod 211 to ensure the accuracy of its movement direction, thereby ensuring the reliability of adjusting the extension length of the second support member 2.

[0073] Meanwhile, one of the two telescopic plate segments 21 is provided with a guide member 213 and the other is provided with a guide hole 214. The guide member 213 and the guide hole 214 are guided and cooperated, so that at least a part of the guide member 213 can be extended into the guide hole 214, so that the guide member 213 can slide along the extension direction of the guide hole 214. That is, the guide hole 214 can guide the sliding of the guide member 213. The guide hole 214 is constructed to extend along a first direction, that is, the guide member 213 can slide in the first direction within the guide hole 214. In other words, the telescopic plate segment 21 provided with the guide member 213 can move relative to the telescopic plate segment 21 provided with the guide hole 214 in the first direction, thereby realizing the relative extension and contraction between the two telescopic plate segments 21, and thus adjusting the extension length of the second support member 2.

[0074] And, as Figure 7 As shown, the guide hole 214 is constructed as an elongated hole extending along the first direction, which allows the guide hole 214 to have a certain length, thereby increasing the telescopic distance between the two telescopic plate segments 21, increasing the length adjustment range of the second support member 2, and further increasing the size range of the ingot 101 that can be set between the two support plates 12, which is beneficial to increasing the applicability of the fixing protection device 100.

[0075] And, it should be noted that, such as Figure 8As shown, the guide member 213 can be placed on the guide rod 211, and the guide hole 214 can be connected to the guide groove 212, so that the guide member 213 and the guide rod 211 slide together along the extension direction of the guide hole 214 and the guide groove 212, thereby improving the reliability of the relative extension and contraction of the two telescopic plate segments 21. In actual design, the guide member 213 and the corresponding telescopic plate segment 21 can be detachably installed. After the distance between the two telescopic plate segments 21 is adjusted, the guide member 213 can be passed through the guide hole 214 and pressed against the guide rod 211 or threadedly connected to achieve relative fixation of the two telescopic plate segments 21, thereby ensuring the reliable operation of the second support member 2. The guide member 213 can be a guide bolt.

[0076] In some embodiments, each telescopic plate segment 21 is provided with a through hole 215, and the support plate 12 passes through the through hole 215 along the second direction, so that the position of the telescopic plate segment 21 relative to the support plate 12 along the second direction is adjustable; wherein, a second positioning member 4 is also included, which passes through one of the telescopic plate segment 21 and the support plate 12 and is positioned and engaged with the other.

[0077] Specifically, the two retractable telescopic plate segments 21 are connected to two support plates 12 at their opposite ends. Each telescopic plate segment 21 has a through hole 215, and the support plate 12 is inserted through the through hole 215 along the second direction. The through hole 215 is located at the end of the telescopic plate segment 21 facing the support plate 12, so that the telescopic plate segment 21 can be sleeved on the outside of the support plate 12. This achieves the connection between the support plate 12 and the telescopic plate segment 21, thus realizing the connection between the first support member 1 and the second support member 1. The connection between the two components 2, and the adjustable position of the telescopic plate segment 21 relative to the support plate 12 along the second direction, allows the through hole 215 to be interference-fitted with the support plate 12, thereby allowing the telescopic plate segment 21 to slide along the extension direction of the support plate 12 through the through hole 215. This allows the installation position of the telescopic plate segment 21 on the support plate 12 to be adjusted, thereby adjusting the distance between the two second support components 2, so that the fixing protection device 100 can clamp ingots 101 of different sizes along the second direction.

[0078] Meanwhile, by inserting the second positioning member 4 into one of the telescopic plate segment 21 and the support plate 12 and positioning it in conjunction with the other, the second positioning member 4 can be inserted into the telescopic plate segment 21 and positioned in conjunction with the support plate 12, or the second positioning member 4 can be inserted into the support plate 12 and positioned in conjunction with the telescopic plate segment 21. Both methods can achieve relative fixation between the telescopic plate segment 21 and the support plate 12. After the installation position of the telescopic plate segment 21 on the support plate 12 is adjusted, the two can be relatively fixed by the second positioning member 4 to ensure the reliability of the second support member 2.

[0079] In such Figure 4In the embodiment shown, the second positioning member 4 can be a bolt. A threaded hole 216 is provided at the end of the telescopic plate section 21 facing the support plate 12. The bolt passes through the threaded hole 216 and presses against the support plate 12 to fix the telescopic plate section 21 and the support plate 12 relative to each other, thereby ensuring the reliable operation of the second support member 2.

[0080] In some embodiments, the support frame 11 is configured as an inclined frame, and the two inclined frames are configured to be inclined from bottom to top in a direction away from each other; or, at least a portion of the support frame 11 is configured as an arc segment 113, and the arc segments 113 of the two support frames 11 are symmetrically distributed and are configured together as an upwardly open flared support structure 118.

[0081] Specifically, such as Figure 6 As shown, by constructing the support frame 11 as an inclined frame, the two first support members 1 can be inclined relative to the horizontal plane. Furthermore, by constructing the two inclined frames to be inclined from bottom to top in a direction away from each other, the distance between the two first support members 1 can gradually increase from bottom to top, so that the two first support members 1 can form an flared shape, which facilitates the placement of the crystal ingot 101 between the two first support members 1. Moreover, the two first support members 1 can clamp crystal ingots 101 of different sizes along the first direction, which helps to increase the applicability of the fixing and protection device 100.

[0082] And, as Figure 5 As shown, at least a portion of the support frame 11 is constructed as an arc segment 113, so that the arc segment 113 can adapt to the shape of the crystal ingot 101. The arc segments 113 of the two support frames 11 are symmetrically distributed, so that the crystal ingot 101 can be placed between the two arc segments 113, and the two arc segments 113 can reliably clamp the crystal ingot 101 along the first direction. Moreover, the two arc segments 113 are jointly constructed as an upwardly open flared support structure 118, so that the flared support structure 118 is open upward, so that the crystal ingot 101 can be placed between the two arc segments 113, and the contact area between the first support member 1 and the crystal ingot 101 can be increased, thereby reducing stress concentration and damage to the crystal ingot 101.

[0083] It should be noted that, for example Figure 5 As shown, an elastic pad 117 can be provided on the side of the arc segment 113 that contacts the ingot 101 to reduce the wear of the arc segment 113 on the ingot 101. The support frame 11 is provided with a vertical segment 114, an arc segment 113, a bent segment 115 and a foot segment 116 from top to bottom. The vertical segment 114, the arc segment 113, the bent segment 115 and the foot segment 116 are connected in sequence to form the support frame 11, that is, to form the first support member 1 for clamping the ingot 101. The vertical segment 114 is used to guide the placement of the ingot 101, the bent segment 115 is used to avoid the setting of the workpiece plate 102, and the foot segment 116 can play a supporting role.

[0084] This utility model also proposes a degumming machine.

[0085] The degumming machine according to an embodiment of the present invention includes a fixing and protection device 100 as described in any of the above embodiments. By setting the fixing and protection device 100 in the degumming machine, the crystal ingot 101 can be clamped simultaneously along the first direction and the second direction, which can effectively improve the reliability of fixing the crystal ingot 101, thereby providing reliable protection for the crystal ingot 101 and preventing the wafer from falling into water or colliding with other components and causing chipping. This can help improve the product yield. The degumming machine can be a heated degumming machine, and the lifting frame 3 can move the fixed crystal ingot 101 closer to or away from the heat source to heat and degumme the crystal ingot 101 or move the degummed crystal ingot 101 away from the heat source for the next step.

[0086] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0087] Although embodiments of the present invention have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the claims and their equivalents.

Claims

1. A fixed protective device, characterized in that, The fixing and protection device is used to fix the crystal ingot, including: Two first supports are spaced apart and distributed opposite each other along a first direction, and at least one of the two first supports is configured to be positionally adjustable relative to the other along the first direction for clamping the ingot along the first direction. Two second supports are spaced apart and distributed opposite each other along a second direction. At least one of the two second supports is configured to be positionally adjustable relative to the other along a first direction for clamping the ingot along the second direction, the first direction intersecting the second direction.

2. The fixed protection device according to claim 1, characterized in that, It also includes a lifting frame, at least one of the two first support members being adjustablely mounted on the lifting frame along the first direction, and at least one of the two second support members being adjustablely mounted on the first support member along the second direction.

3. The fixed protection device according to claim 2, characterized in that, The first support member includes a support frame and a support plate. The support frame is adjustablely connected to the lifting frame along the first direction. The support plate is mounted on the support frame and extends along the second direction. The second support member is adjustablely connected to the support plate along the second direction.

4. The fixing protection device according to claim 3, characterized in that, It also includes a first positioning element, the lifting frame is provided with a plurality of first positioning holes, the plurality of first positioning holes are distributed at intervals along the first direction, and the support frame is provided with a first positioning mating hole, the first positioning mating hole being adapted to be positioned and mated with one of the plurality of first positioning holes through the first positioning element.

5. The fixing protection device according to claim 3, characterized in that, The support frame has a sliding portion, and the lifting frame has a sliding guide portion extending along the first direction, wherein the sliding portion and the sliding guide portion are slidably engaged. At least one of the two support frames is equipped with a distance sensor.

6. The fixed protection device according to claim 3, characterized in that, The second support member includes two telescopic plate segments that can extend and retract relative to each other, and the two telescopic plate segments are respectively connected to the support plates of the two first support members in a one-to-one correspondence.

7. The fixing protection device according to claim 6, characterized in that, One of the two telescopic plate segments is provided with a guide rod and the other is provided with a guide groove. The guide rod and the guide groove are inserted into each other and can extend and retract relative to each other. And / or, one of the two telescopic plate segments is provided with a guide and the other is provided with a guide hole, the guide hole being constructed as an elongated hole extending along the first direction, the guide being guided and engaged with the guide hole.

8. The fixed protection device according to claim 6, characterized in that, Each of the telescopic plate segments is provided with a through hole, and the support plate passes through the through hole along the second direction, so that the position of the telescopic plate segment relative to the support plate along the second direction is adjustable; It also includes a second positioning element, which passes through one of the telescopic plate segment and the support plate and is positioned in conjunction with the other.

9. The fixing protection device according to claim 3, characterized in that, The support frame is constructed as an inclined frame, and the two inclined frames are inclined from bottom to top in a direction away from each other; Alternatively, at least a portion of the support frame may be constructed as an arc-shaped segment, and the arc-shaped segments of two support frames may be symmetrically distributed and together constructed as an upwardly open flared support structure.

10. A degumming machine, characterized in that, Includes the fixed protective device as described in any one of claims 1-9.

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