Inclined carrying device

Abstract

The utility model discloses an inclined carrying device which comprises a carrying body. The front lifting module and the rear lifting module are symmetrically arranged at the two ends of the bottom of the carrying body and each comprise a side plate, a carrying fixing block and a driving assembly. The tops of the side plates are connected with the bottom of the carrying body. The carrying fixing block and the driving assembly are both arranged on the side, facing the carrying assembly, of the side plate. And the two ends of the carrying assembly are rotationally connected with the carrying fixing block, and the carrying assembly is used for bearing a carrier loaded with silicon wafers. And the inclined assembly is arranged on the same side with the rear lifting module and comprises an inclined air cylinder, the inclined air cylinder is arranged below the carrying fixing block, and the telescopic driving end of the inclined air cylinder is connected with the carrying fixing block and used for jacking the carrying fixing block in the rear lifting module so that the carrying assembly can be arranged in an inclined mode. In the carrying process, due to inclination of the silicon wafers and carriers of the silicon wafers carried by the device, liquid medicine on the surfaces of the silicon wafers flows down in an accelerated mode, the falling liquid medicine is still on the original corresponding groove body, and pollution to the next groove body is reduced.

Description

Technical Field

[0001] This utility model relates to the field of cleaning equipment technology, specifically to an inclined conveying device. Background Technology

[0002] In the process of tank cleaning equipment, carriers containing silicon wafers typically need to pass through multiple tanks consecutively. Each tank contains different chemical liquids or pure water. When the carrier is immersed in a tank and moved to the next process tank, the transport device carries a large amount of the chemical liquid from the previous tank into the next tank, affecting the concentration of the chemical liquid in the next tank and thus impacting the process. Conventional transport devices only have simple horizontal and vertical transport functions and cannot ensure that as much water as possible is drained before entering the next tank. If the speed is reduced, it will affect the equipment's capacity. Therefore, the problems of water carryover from carriers and silicon wafers and capacity issues are not effectively resolved. Utility Model Content

[0003] To overcome the above-mentioned shortcomings, the purpose of this utility model is to provide a tilting conveying device to solve the problem of reduced production capacity caused by water on the carrier and silicon wafers mentioned in the background art.

[0004] To achieve the above objectives, the present invention adopts a tilting conveying device, comprising:

[0005] The main transport component extends along the first direction.

[0006] The front lifting module and the rear lifting module are symmetrically arranged at both ends of the bottom of the transport body along the first direction, and each includes a side plate, a transport fixing block, and a drive assembly. The side plate extends along the second direction, and its top is connected to the bottom of the transport body. The transport fixing block and the drive assembly are both located on the side of the side plate facing the transport assembly along the first direction.

[0007] The transport assembly is rotatably connected to the transport fixing block at both ends along the first direction. It is used to carry the carrier containing the silicon wafer and drives the transport fixing block through the drive assembly to move the transport assembly up and down relative to the transport body along the second direction.

[0008] The tilting component, disposed on the same side as the rear lifting module, includes a tilting cylinder. The tilting cylinder is located below the transport fixing block. The telescopic drive end of the tilting cylinder extends along the second direction and is connected to the transport fixing block. It is used to lift the transport fixing block in the rear lifting module along the second direction so that the transporting component is tilted.

[0009] The present invention provides a modular structure for the handling device, comprising a handling main body, a front lifting module, a rear lifting module, and a tilting component. This design makes the assembly and maintenance of the entire device more convenient. The driving component drives the handling fixing block to move the handling component up and down relative to the handling main body in the second direction. Combined with the function of the tilting component, the handling component can be flexibly adjusted at different heights and tilt angles. During the handling process, due to the tilt, more liquid flows off the surface of the silicon wafers and their carriers carried by the device than when they are placed horizontally. The fallen liquid remains on the original corresponding tank, reducing contamination of the next tank and maintaining a stable liquid concentration in the next tank. This reduces the overall COO of the liquid in the equipment, improves productivity, and reduces losses.

[0010] Preferably, the drive assembly includes a ball screw, a fixed bearing, a ball nut, a coupling, and a drive motor. The ball screw extends along the second direction. The fixed bearing is respectively disposed at the upper and lower ends of the ball screw and connected to the side plate. The ball nut is sleeved on the ball screw. The drive motor is disposed within the transport body and is correspondingly arranged with the ball screw along the second direction. The coupling extends along the second direction, with its two ends connected to the top of the drive motor and the top of the ball screw, respectively.

[0011] Preferably, the transport fixing block includes a worktable, a fixing plate, and a square sealing plate. The worktable has a first through hole extending along the second direction, and the ball screw passes through the first through hole. The fixing plate is located on the side of the worktable facing the transport body along the first direction. The square sealing plate covers the side plate along the second direction and is connected to the fixing plate along the first direction. A mounting area is provided at the connection between the square sealing plate and the fixing plate for connecting and mounting the transport assembly.

[0012] Preferably, the tilting assembly further includes a mounting plate disposed below the worktable and having a second through hole extending along the second direction. The ball screw passes through the second through hole, and the ball nut is disposed within the second through hole. The tilting cylinder is disposed on the side of the mounting plate facing the conveying assembly along the first direction. In the front lifting module, the ball nut is disposed within the first through hole of the worktable. In the rear lifting module, the ball nut is not disposed within the first through hole of the worktable.

[0013] Preferably, the handling assembly includes a telescopic beam, a hook plate, and a limiting block. The telescopic beam extends along the first direction and is correspondingly arranged with respect to the mounting area. The telescopic beam is telescopic along the first direction and has ball joint bearings at both ends for rotatable connection with the mounting plate. The hook plate extends along the second direction and is spaced along the first direction on the telescopic beam for supporting a carrier containing silicon wafers. The limiting block is located at the connection between the hook plate and the telescopic beam and abuts against the hook plate for limiting its position.

[0014] Preferably, the tilting conveying device further includes a guide rail body, which is respectively disposed on both sides of the conveying body along the first direction, and a slide rail extending along a third direction is provided at the top. The end of the conveying body is provided with a plurality of arc-shaped connecting blocks, which are spaced apart along the third direction and slidably connected with the slide rail.

[0015] Preferably, the tilting conveying device further includes a gear drive assembly, a bearing housing, and a connecting shaft. The gear drive assembly includes a rack, a transverse gear, a servo motor, a reducer, a first synchronous pulley, a second synchronous pulley, and a synchronous belt. The rack extends along the third direction and is located on the side of the slide rail near the transverse body along the first direction. The first and second synchronous pulleys are located on the side of the rack near the transverse body along the first direction and are spaced apart along the third direction. The connecting shaft extends along the first direction, with both ends connected to the second synchronous pulleys. The bearing housings are spaced apart within the conveying body along the first direction and are rotatably connected to the connecting shaft. The transverse gear is located at the top of the rack and connected to the end of the connecting shaft for meshing and transmission with the rack. The synchronous belt is sequentially wound around the first and second synchronous pulleys. The reducer and the servo motor are sequentially located along the first direction on the side of the first synchronous pulley away from the rack, for driving the first synchronous pulley to rotate the second synchronous pulley and the transverse gear.

[0016] Preferably, the tilting conveying device further includes a sensing and detection assembly, which is respectively disposed near the upper and lower ends of the front lifting module. The assembly includes a photoelectric sensor and a sensing plate. The photoelectric sensor is disposed on one side of the side plate along a third direction. The sensing plate is disposed on one side of the worktable along the third direction and is correspondingly disposed to the photoelectric sensor.

[0017] Preferably, the tilting conveying device further includes multiple anti-collision units, which are disposed on the side of the side plate facing the worktable along the first direction and respectively near the upper and lower ends of the ball screw. Each anti-collision unit includes two anti-collision components spaced apart along a third direction. Each anti-collision component includes a limiting seat and an anti-collision block. The limiting seat extends along the first direction, and the anti-collision block is disposed on the side of the limiting seat along the second direction and is correspondingly disposed with the worktable, for limiting the movement of the anti-collision block against the worktable.

[0018] Preferably, the drive assembly further includes a guide rail and a plurality of sliders. The guide rail is disposed on the side of the side plate facing the ball screw along the first direction, extends along the second direction, and is disposed on both sides of the ball screw along the third direction. The plurality of sliders are disposed on the side facing the ball screw and are correspondingly arranged therewith.

[0019] By adopting the above technical solution, a precise guiding path is provided for the up-and-down movement of the fixed block (worktable) by setting guide rails and multiple sliders, ensuring the linearity and stability of its movement. Attached Figure Description

[0020] Figure 1 This is a perspective view of an embodiment of the tilting conveying device of this utility model;

[0021] Figure 2 This is a perspective view of the rear lifting module of an embodiment of the tilting conveying device of the present invention.

[0022] Figure 3 This is a perspective view of the conveying body of an embodiment of the tilting conveying device of this utility model;

[0023] Figure 4 This is a partial structural schematic diagram of an embodiment of the tilting conveying device of this utility model;

[0024] Figure 5 This is a perspective view of a conveying component according to an embodiment of the tilting conveying device of the present invention;

[0025] In the picture:

[0026] 1. Inclined conveying device;

[0027] 10. Transport body; 11. Arc-shaped connecting block; 12. Front lifting module; 13. Rear lifting module; 14. Side plate; 20. Transport fixing block; 21. Workbench; 210. First through hole; 22. Fixing plate; 23. Square sealing plate; 30. Drive assembly; 31. Ball screw; 32. Fixed bearing; 33. Protective cover; 34. Ball nut; 35. Coupling; 36. Drive motor; 37. Guide rail; 38. Slider; 40. Transport assembly; 41. Telescopic crossbeam frame; 4 2. Hook plate; 43. Limit block; 50. Tilting assembly; 51. Tilting cylinder; 52. Mounting plate; 520. Second through hole; 60. Guide rail body; 61. Slide rail; 62. Rack; 70. Bearing seat; 71. Connecting shaft; 72. Gear drive assembly; 73. Transverse gear; 74. Servo motor; 75. Reducer; 76. First synchronous pulley; 77. Second synchronous pulley; 78. Synchronous belt; 80. Photoelectric sensor; 81. Sensing plate; 90. Limit seat; 91. Anti-collision block. Detailed Implementation

[0028] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the scope of protection of the present invention.

[0029] refer to Figures 1 to 5 , Figure 1 A perspective view of a tilting conveying device 1 provided in an embodiment of the present invention is shown; Figure 2 A perspective view of the rear lifting module 12 in an inclined conveying device 1 provided in an embodiment of the present invention is shown; Figure 3 A perspective view of the conveying body 10 in an inclined conveying device 1 provided in an embodiment of the present invention is shown; Figure 4 This diagram shows a partial structural schematic of an inclined conveying device 1 provided in an embodiment of the present invention; Figure 5 A perspective view of the conveying component 40 in a tilting conveying device 1 provided by an embodiment of the present invention is shown.

[0030] like Figures 1 to 5 As shown, the technical solution adopted by this utility model is a tilting conveying device 1, comprising:

[0031] The main transport body 10, along the first direction ( Figure 1 (Extended in the X direction as shown in the middle).

[0032] The front lifting module 11 and the rear lifting module 12 are symmetrically arranged at both ends of the bottom of the transport body 10 along the first direction, and each includes a side plate 13, a transport fixing block 20, and a drive assembly 30. The side plate 13 is arranged along the second direction ( Figure 1Extending in the Z direction, the top connects to the bottom of the transport body 10. The transport fixing block 20 and the drive assembly 30 are both located on the side of the side plate 13 facing the transport assembly 40 in the first direction.

[0033] The transport assembly 40 is rotatably connected to the transport fixing block 20 at both ends along the first direction. It is used to carry the carrier containing the silicon wafer and drives the transport fixing block 20 through the drive assembly 30 to move the transport assembly 40 up and down relative to the transport body 10 along the second direction.

[0034] The tilting component 50 is disposed on the same side as the rear lifting module 12 and includes a tilting cylinder 51. The tilting cylinder 51 is disposed below the transport fixing block 20. The telescopic drive end of the tilting cylinder 51 extends along the second direction and is connected to the transport fixing block 20. It is used to lift the transport fixing block 20 in the rear lifting module 12 along the second direction so that the transporting component 40 is tilted.

[0035] The tilting conveying device 1 provided in this application is designed as a modular structure consisting of a conveying main body 10, a front lifting module 11, a rear lifting module 12, and a tilting component 50. This design makes the assembly and maintenance of the entire device more convenient. The driving component 30 drives the conveying fixing block 20, causing the conveying component 40 to move up and down relative to the conveying main body 10 along a second direction. Simultaneously, combined with the function of the tilting component 50, the conveying component 40 can be flexibly adjusted at different heights and tilt angles. During the conveying process, due to the tilt, more liquid reagent flows off the surface of the silicon wafers and their carriers compared to when they are placed horizontally. The fallen liquid reagent remains on the original corresponding tank, reducing contamination of the next tank and maintaining a stable liquid reagent concentration in the next tank. This lowers the overall COO of the liquid reagent in the equipment, improves productivity, and reduces losses.

[0036] In some embodiments, reference Figures 1 to 5 The drive assembly 30 includes a ball screw 31, a fixed bearing 32, a ball nut 34, a coupling 35, and a drive motor 36. The ball screw 31 extends along a second direction. The fixed bearing 32 is respectively located at the upper and lower ends of the ball screw 31 and connected to the side plate 13. The ball nut 34 is sleeved on the ball screw 31. The drive motor 36 is located inside the transport body 10 and is correspondingly arranged with the ball screw 31 along the second direction. The coupling 35 extends along the second direction, with its two ends connected to the top of the drive motor 36 and the ball screw 31, respectively.

[0037] For example, the ball screw 31 is a high-precision, high-efficiency transmission element, capable of achieving more precise position control and higher transmission efficiency. The coupling 35 connects the drive motor 36 and the ball screw 31, ensuring smooth and reliable power transmission between them. This connection method reduces vibration and impact during power transmission, improving the stability and service life of the entire drive system. Positioning blocks are respectively located at the upper and lower ends of the ball screw 31 and connected to the side plate 13, effectively limiting the axial and radial displacement of the ball screw 31. The drive motor 36 is located within the transport body 10 and is correspondingly arranged with the ball screw 31 along the second direction. This layout makes the entire drive assembly 30 compact and space-efficient.

[0038] In some embodiments, reference Figures 1 to 5 The transport fixing block 20 includes a worktable 21, a fixing plate 22, and a square sealing plate 23. The worktable 21 has a first through hole 210 extending in a second direction, through which a ball screw 31 passes. The fixing plate 22 is located on the side of the worktable 21 facing the transport body 10 in the first direction. The square sealing plate 23 covers the side plate 13 in the second direction and is connected to the fixing plate 22 on one side in the first direction. A mounting area is provided at the connection between the square sealing plate 23 and the fixing plate 22 for connecting and mounting the transport assembly 40.

[0039] For example, the square cover plate 23 is installed over the side plate 13 along the second direction and connected to the fixing plate 22. This design not only protects internal components (such as the ball screw 31) and prevents dust and debris from entering and affecting their normal operation, but also enhances the structural strength of the entire handling fixing block 20. The connection between the square cover plate 23 and the fixing plate 22 forms a stable frame structure, which can better withstand various forces during handling, such as the weight of the goods and vibrations during handling. Furthermore, protective covers 33 are provided on the top of the square cover plate 23 and the bottom of the side plate 13 for further protection.

[0040] In some embodiments, reference Figures 1 to 5 The tilting assembly 50 also includes a mounting plate 52, which is located below the worktable 21 and has a second through hole 520 extending in a second direction. A ball screw 31 passes through the second through hole 520, and a ball nut 34 is disposed within the second through hole 520. The tilting cylinder 51 is located on the side of the mounting plate 52 facing the conveying assembly 40 in a first direction. In the front lifting module 11, a ball nut 34 is disposed within the first through hole 210 of the worktable 21. In the rear lifting module 12, a ball nut 34 is not disposed within the first through hole 210 of the worktable 21.

[0041] For example, the tilting component 50 is connected to the worktable 21 via the mounting plate 52, and has an independent second through hole 520 for the ball screw 31 to pass through, while the ball nut 34 is disposed in the second through hole 520. This design makes the tilting component 50 more functionally independent, and its movement and control are not affected by the ball nut 34 disposed in the worktable 21 of the front lifting module 11 and the rear lifting module 12. It can directly act on the transport fixing block 20 in the rear lifting module 12 to achieve precise tilt control.

[0042] In some embodiments, reference Figures 1 to 5 The handling assembly 40 includes a telescopic beam 41, a hook plate 42, and a limiting block 43. The telescopic beam 41 extends along a first direction and is correspondingly arranged with respect to the installation area. The telescopic beam 41 is telescopic along the first direction and has ball joint bearings at both ends for rotatable connection with the mounting plate 52. The hook plate 42 extends along a second direction and is spaced along the first direction on the telescopic beam 41 for supporting a carrier containing silicon wafers. The limiting block 43 is located at the connection between the hook plate 42 and the telescopic beam 41 and is used to abut against and limit the movement of the hook plate 42.

[0043] For example, the telescopic beam 41 can extend and retract in a first direction to extend with the ejection of the tilting cylinder 51, stably connecting the front lifting module 11 and the rear lifting module 12. Both ends of the telescopic beam 41 are provided with ball joint swivel bearings, which can rotate according to the extension and retraction of the telescopic beam 41, ensuring that the carrier can be placed stably on the hook plate 42, thereby improving the stability and reliability of handling.

[0044] In some embodiments, reference Figures 1 to 5 The tilting conveying device 1 also includes a guide rail body 60, which is respectively disposed on both sides of the conveying body 10 along the first direction, and has a top disposed along the third direction ( Figure 1 The slide rail 61 extends in the Y direction. The end of the conveying body 10 is provided with multiple arc-shaped connecting blocks 11. The multiple arc-shaped connecting blocks 11 are spaced apart along the third direction and are slidably connected to the slide rail 61. The first direction, the second direction and the third direction are perpendicular to each other.

[0045] For example, guide rail assemblies are respectively disposed on both sides of the transport body 10 along the first direction, ensuring that the transport body 10 can run smoothly along a predetermined trajectory during movement. The design of the arc-shaped connecting block 11 makes the contact between the transport body 10 and the slide rail 61 more stable and uniform, reducing wear and vibration caused by uneven contact points. At the same time, the spacing of the arc-shaped connecting blocks 11 can better distribute the load, further improving the stability and reliability of the entire device.

[0046] In some embodiments, reference Figures 1 to 5The tilting conveying device 1 further includes a gear drive assembly 72, a bearing housing 70, and a connecting shaft 71. The gear drive assembly 72 includes a rack 62, a transverse gear 73, a servo motor 74, a reducer 75, a first synchronous pulley 76, a second synchronous pulley 77, and a synchronous belt 78. The rack 62 extends along a third direction and is located on the side of the slide rail 61 near the transverse body along a first direction. The first synchronous pulley 76 and the second synchronous pulley 77 are located on the side of the rack 62 near the transverse body along the first direction and are spaced apart along a third direction. The connecting shaft 71 extends along the first direction, and both ends are connected to the second synchronous pulley 77. The bearing housing 70 is spaced apart within the conveying body 10 along the first direction and is rotatably connected to the connecting shaft 71. The transverse gear 73 is located on the top of the rack 62 and is connected to the end of the connecting shaft 71 for meshing and transmission with the rack 62. The synchronous belt 78 is sequentially wound around the first synchronous pulley 76 and the second synchronous pulley 77. The reducer 75 and the servo motor 74 are sequentially arranged along the first direction on the side of the first synchronous pulley 76 away from the rack 62, so as to drive the first synchronous pulley 76 to drive the second synchronous pulley 77 and the transverse gear 73 to rotate.

[0047] For example, the precise movement of the conveying body 10 along a third direction is achieved through the meshing transmission of the rack 62 and the transverse gear 73. Compared with traditional belt-driven or chain-driven systems, the gear drive system offers higher precision and stability, enabling more accurate position control. The integrated use of the reducer 75 and the servo motor 74 provides sufficient torque and speed to achieve precise speed control and position feedback. The bearing housing 70 provides stable support for the connecting shaft 71, ensuring its smoothness during operation.

[0048] In some embodiments, reference Figures 1 to 5 The tilting conveying device 1 also includes a sensing and detection assembly, which is respectively arranged near the upper and lower ends of the front lifting module 11. The sensing and detection assembly includes a photoelectric sensor 80 and a sensing plate 81. The photoelectric sensor 80 is located on one side of the side plate 13 along the third direction. The sensing plate 81 is located on one side of the worktable 21 along the third direction and is arranged correspondingly to the photoelectric sensor 80.

[0049] For example, the photoelectric sensor 80 has the characteristic of fast response and can detect the position change of the sensing plate 81 in a timely manner. The sensing and detection component detects the position of the transport fixing block 20 (worktable 21) in real time through the cooperation of the photoelectric sensor 80 and the sensing plate 81, thereby accurately obtaining the up and down position information of the transport fixing block 20 and realizing precise position control.

[0050] In some embodiments, reference Figures 1 to 5The tilting conveying device 1 also includes multiple anti-collision units. These units are located on the side of the side plate 13 facing the worktable 21 along a first direction and are respectively positioned near the upper and lower ends of the ball screw 31. Each anti-collision unit includes two anti-collision components spaced apart along a third direction. Each anti-collision component includes a limiting seat 90 and an anti-collision block 91. The limiting seat 90 extends along the first direction, and the anti-collision block 91 is located on one side of the limiting seat 90 along a second direction and is correspondingly positioned to the worktable 21. The anti-collision block 91 abuts against the worktable 21 for limiting the movement.

[0051] For example, the anti-collision unit, through the anti-collision block 91, abuts against and limits the worktable 21, effectively preventing excessive displacement of the worktable 21 during its vertical movement due to control errors or external forces. The anti-collision unit has a relatively simple structure, making installation and maintenance convenient. If a certain anti-collision component malfunctions, it can be quickly replaced without requiring large-scale disassembly of the entire device. This design reduces maintenance costs and time, and improves the maintainability of the equipment.

[0052] In some embodiments, reference Figures 1 to 5 The drive assembly 30 also includes a guide rail 37 and a plurality of sliders 38. The guide rail 37 is located on the side of the side plate 13 facing the ball screw 31 in a first direction, extends in a second direction, and is located on both sides of the ball screw 31 in a third direction. The plurality of sliders 38 are located on the side facing the ball screw 31 and are correspondingly arranged.

[0053] For example, by setting guide rails 37 and multiple sliders 38, a precise guide path is provided for the up-and-down movement of the transport fixing block 20 (worktable 21), ensuring the linearity and stability of its movement. Guide rails 37 effectively reduce offset and swaying during movement, improving the accuracy of the position adjustment of the transport assembly 40. Furthermore, the arrangement of guide rails 37 and sliders 38 provides additional support to the transport fixing block 20, enhancing the structural strength of the entire drive assembly 30. When transporting heavier goods, guide rails 37 can bear part of the load, reducing the burden on the ball screw 31 and improving the overall load-bearing capacity of the system.

[0054] In some embodiments, the working principle of the tilting conveying device 1 provided in this application is as follows:

[0055] When this device transports a carrier containing silicon wafers, the hook plate 42 hooks onto the carrier and moves along the third direction with the guide rail body 60 to transport it from process tank A to the next process tank B. During this process, the carrier also needs to move in the second direction to immerse itself in or leave the tank. Specifically, after the carrier is immersed in process tank A, the tilting cylinder 51 on one side of the rear lifting module 12 lifts up, while the front lifting module 11 remains stationary. The telescopic crossbeam 41 is extended and tilted, while the front lifting module 11 remains stationary. The transport assembly 40 and the carrier are then tilted with the front lower than the rear. As the front lifting module 11 and the rear lifting module 12 rise simultaneously, the liquid on the carrier and the surface of the silicon wafer will flow down more rapidly due to the tilt, causing a large amount of liquid to fall off its surface. This ensures that most of the liquid in process tank A carried by the carrier remains in tank A, reducing the loss of liquid in tank A. After being horizontally moved above process tank B via guide rail body 60, tilting cylinder 51 first lowers to its original position, and transport component 40 becomes horizontal. Front lifting module 11 and rear lifting module 12, remaining horizontal, are simultaneously lowered, immersing the carrier into process tank B. This completes one set of actions. Because only a small amount of the chemical solution from tank A is carried into process tank B, the amount of pure water required for replacement in tank B is reduced, thus reducing water consumption in tank B.

[0056] The above embodiments are only for illustrating the technical concept and features of this utility model. Their purpose is to enable those skilled in the art to understand the content of this utility model and implement it. They cannot be used to limit the protection scope of this utility model. All equivalent changes or modifications made in accordance with the spirit and essence of this utility model should be covered within the protection scope of this utility model.

Claims

1. A tilting conveying device, characterized in that, include: The transport body extends along the first direction; The front lifting module and the rear lifting module are symmetrically arranged at both ends of the bottom of the transport body along the first direction, and each includes a side plate, a transport fixing block and a drive assembly; the side plate extends along the second direction and its top is connected to the bottom of the transport body; the transport fixing block and the drive assembly are both located on the side of the side plate facing the transport assembly along the first direction; The transport assembly is rotatably connected to the transport fixing block at both ends along the first direction, and is used to carry the carrier containing the silicon wafer. The transport fixing block is driven by the drive assembly to move the transport assembly up and down relative to the transport body along the second direction. The tilting component, disposed on the same side as the rear lifting module, includes a tilting cylinder. The tilting cylinder is located below the transport fixing block. The telescopic drive end of the tilting cylinder extends along the second direction and is connected to the transport fixing block. It is used to lift the transport fixing block in the rear lifting module along the second direction so that the transporting component is tilted.

2. The tilting conveying device according to claim 1, characterized in that, The drive assembly includes a ball screw, a fixed bearing, a ball nut, a coupling, and a drive motor. The ball screw extends along the second direction. The fixed bearing is located at the upper and lower ends of the ball screw and connected to the side plate. The ball nut is sleeved on the ball screw. The drive motor is located inside the transport body and is correspondingly arranged with the ball screw along the second direction. The coupling extends along the second direction, and its two ends are connected to the top of the drive motor and the top of the ball screw, respectively.

3. The tilting conveying device according to claim 2, characterized in that, The transport fixing block includes a worktable, a fixing plate, and a square sealing plate. The worktable has a first through hole extending along the second direction, and the ball screw passes through the first through hole. The fixing plate is located on the side of the worktable facing the transport body along the first direction. The square sealing plate covers the side plate along the second direction and is connected to the fixing plate along the first direction. The connection between the square sealing plate and the fixing plate has an installation area for connecting and installing the transport assembly.

4. The tilting conveying device according to claim 3, characterized in that, The tilting assembly further includes a mounting plate located below the worktable and having a second through hole extending along the second direction. The ball screw passes through the second through hole, and the ball nut is located within the second through hole. The tilting cylinder is located on the side of the mounting plate facing the conveying assembly along the first direction. In the front lifting module, the ball nut is located within the first through hole of the worktable. In the rear lifting module, the ball nut is not located within the first through hole of the worktable.

5. The tilting conveying device according to claim 4, characterized in that, The handling assembly includes a telescopic beam, a hook plate, and a limiting block. The telescopic beam extends along the first direction and is correspondingly arranged with the installation area. The telescopic beam is telescopic along the first direction and has ball joint bearings at both ends for rotatable connection with the installation plate. The hook plate extends along the second direction and is spaced along the first direction on the telescopic beam for supporting a carrier containing silicon wafers. The limiting block is located at the connection between the hook plate and the telescopic beam for abutting and limiting contact with the hook plate.

6. The tilting conveying device according to claim 1, characterized in that, It also includes a guide rail body, which is respectively disposed on both sides of the transport body along the first direction. The top is provided with a slide rail extending along a third direction. The end of the transport body is provided with a plurality of arc-shaped connecting blocks, which are spaced apart along the third direction and are slidably connected with the slide rail.

7. The tilting conveying device according to claim 6, characterized in that, It also includes a gear drive assembly, bearing housings, and a connecting shaft. The gear drive assembly includes a rack, a transverse gear, a servo motor, a reducer, a first synchronous pulley, a second synchronous pulley, and a synchronous belt. The rack extends along the third direction and is located on the side of the slide rail near the transverse body along the first direction. The first and second synchronous pulleys are located on the side of the rack near the transverse body along the first direction and are spaced apart along the third direction. The connecting shaft extends along the first direction and is connected to the second synchronous pulleys at both ends. The bearing housings are spaced apart within the transport body along the first direction and are rotatably connected to the connecting shaft. The transverse gear is located at the top of the rack and connected to the end of the connecting shaft for meshing and transmission with the rack. The synchronous belt is sequentially wound around the first and second synchronous pulleys. The reducer and the servo motor are sequentially located on the side of the first synchronous pulley away from the rack along the first direction for driving the first synchronous pulley to rotate the second synchronous pulley and the transverse gear.

8. The tilting conveying device according to claim 3, characterized in that, It also includes a sensing and detection component, which is respectively disposed near the upper and lower ends of the front lifting module. The sensing and detection component includes a photoelectric sensor and a sensing plate. The photoelectric sensor is disposed on one side of the side plate along the third direction; the sensing plate is disposed on one side of the worktable along the third direction and is disposed corresponding to the photoelectric sensor.

9. The tilting conveying device according to claim 3, characterized in that, It also includes multiple anti-collision units, which are disposed on the side of the side plate facing the worktable along the first direction and respectively near the upper and lower ends of the ball screw; each anti-collision unit includes two anti-collision components spaced apart along the third direction, each anti-collision component including a limiting seat and an anti-collision block, the limiting seat extending along the first direction, the anti-collision block disposed on the side of the limiting seat along the second direction and correspondingly disposed with the worktable, for limiting the anti-collision block to abut against the worktable.

10. The tilting conveying device according to claim 3, characterized in that, The drive assembly further includes a guide rail and a plurality of sliders. The guide rail is located on the side of the side plate facing the ball screw along the first direction, extends along the second direction, and is located on both sides of the ball screw along the third direction. The plurality of sliders are located on the side facing the ball screw and are correspondingly arranged with it.

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