Modularized flexible film composite coating machine

Abstract

The utility model belongs to the technical field of coating processing equipment, and particularly relates to a modularized flexible film composite coating machine which comprises a vacuum evaporation module, a conveying module and an organic vapor deposition module, the vacuum evaporation module is arranged below the conveying module, the vacuum evaporation module is in sealed threaded connection with the bottom of the conveying module, and the organic vapor deposition module is arranged below the conveying module. The organic vapor deposition module is arranged above the conveying module, and the organic vapor deposition module is in sealed threaded connection with the upper part of the conveying module. Compared with the prior art, the device adopts the combination of organic vapor deposition and vacuum evaporation coating processes for coating, adopts modular assembly, is convenient to disassemble, assemble and maintain, and can adjust the tensile force of the flexible film in real time and observe the coating effect so as to timely adjust and improve the coating yield.

Description

Technical Field

[0001] This utility model relates to the field of coating processing equipment technology, and more specifically, to a modular flexible thin film composite coating machine. Background Technology

[0002] Flexible substrate thin films have a wide range of applications in daily life. With the development of optoelectronic technology, the quality and demand for flexible films are also increasing. Traditionally, flexible thin films are produced using a single method, such as chemical vapor deposition, magnetron sputtering, or evaporation coating.

[0003] Currently, commercially available thin-film coating equipment, such as the one described in patent CN201610840613.5 entitled "A Metallized Thin Film Vacuum Coating Machine," includes a vacuum chamber and a feeding mechanism, a coating mechanism, and a winding mechanism disposed within the vacuum chamber. The feeding mechanism includes a first lifting mechanism and a feeding device; a preheating mechanism is disposed between the feeding mechanism and the coating mechanism; a first movable plate assembly for adjusting the size of the opening of the first evaporation boat is disposed at the top opening area; a second movable plate assembly for adjusting the size of the opening of the second evaporation boat is disposed at the top opening area; thin-film clamping devices are disposed between the feeding mechanism and the coating mechanism, and between the coating mechanism and the winding mechanism; the winding mechanism includes a fifth lifting mechanism and a winding device; the telescopic end of the fifth lifting mechanism cooperates with the winding device to drive the winding device to move up and down.

[0004] The above-mentioned equipment has a high degree of automation and is suitable for processing various types of films. However, it can only operate the vacuum evaporation coating process, and the integrated design of the whole machine is not conducive to maintenance and replacement of parts. In addition, due to the collective sealing, it is impossible to observe the coating effect in real time, nor can it adjust the tension of the flexible film in real time. Utility Model Content

[0005] To address the issues that most commercially available thin-film coating equipment only supports one coating process, has an inconvenient assembly and disassembly structure, is difficult to maintain and replace parts, and cannot monitor the coating effect or adjust the tension of the flexible film in real time due to the sealed structure, we provide a modular flexible thin-film composite coating machine.

[0006] A modular flexible thin film composite coating machine includes a vacuum evaporation module, a conveying module, and an organic vapor deposition module. The vacuum evaporation module is located below the conveying module and is connected to the bottom of the conveying module via a sealed thread. The organic vapor deposition module is located above the conveying module and is connected to the top of the conveying module via a sealed thread.

[0007] Furthermore, the vacuum evaporation module includes an evaporation chamber, an external vacuum pump connected to the outside of the evaporation chamber, an evaporation boat, a heating tube, and a temperature and pressure monitor disposed inside the evaporation chamber, the evaporation boat being disposed at the bottom of the evaporation chamber, the heating tube being disposed on the inner wall of the evaporation chamber, the temperature and pressure monitor being disposed on the outer wall of the evaporation chamber, and an evaporation hole and an evaporation shading net being disposed at the top of the evaporation chamber, the evaporation shading net being disposed above the evaporation hole.

[0008] Furthermore, the organic vapor deposition module includes an organic vapor deposition chamber, an external pressure maintaining pump is connected to the organic vapor deposition chamber, a cathode tube, an organic vapor shading net and a temperature and pressure monitor are installed inside the organic vapor deposition chamber, the cathode tube is installed at the top of the organic vapor deposition chamber, the organic vapor shading net is installed below the cathode tube, and the temperature and pressure monitor is installed on the outer wall of the organic vapor deposition chamber.

[0009] Furthermore, the top of the organic vapor deposition chamber is also equipped with a first photographic module for monitoring the coating effect on the organic vapor shading net.

[0010] Furthermore, the conveying module includes a conveying chamber, which is equipped with a pushing device and a winding device. The winding device includes an unwinding roller, a guide roller, and a take-up roller. The pushing device includes a pushing rod, a flat pusher, and a steel web. The pushing rod is slidably and sealed to the side wall of the conveying chamber. The flat pusher is placed below the organic vapor phase shading net. After being unwound by the unwinding roller, the flexible film is placed above the evaporative shading net and sequentially wound around the guide roller, the steel web, and the flat pusher before being wound up by the take-up roller.

[0011] Furthermore, the conveying chamber is also equipped with a tensioning module for adjusting the tension of the flexible film.

[0012] Furthermore, the push rod is also equipped with a second photography module for monitoring the coating effect on the evaporative shading net.

[0013] Furthermore, a water-cooled delivery pipe is provided on the inner side of the push rod.

[0014] The advantages of this utility model are:

[0015] This invention employs a sealed threaded connection between a vacuum evaporation module, a conveying module, and an organic vapor deposition module. These modules are detachable and easily assembled for maintenance. During operation, the conveying module transports the flexible film, the vacuum evaporation module performs vacuum evaporation coating, and the organic vapor deposition module performs organic vapor deposition coating. The combination of organic vapor deposition and vacuum evaporation coating processes results in a better coating effect. A tensioning module adjusts the tension of the flexible film, making flatness adjustment easier. A photography module allows for real-time observation of the coating status, facilitating real-time adjustment of the flexible film tension and monitoring of the coating effect, thus improving the coating yield. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the modular flexible thin film composite coating machine.

[0018] Figure 2 for Figure 1 Detailed structural diagram.

[0019] Attached image labels:

[0020] 100. Thread; 200. Flexible film; 1. Organic vapor deposition module; 2. Conveying module; 3. Vacuum evaporation module; 11. Pressure maintaining pump; 12. Cathode tube; 13. Organic vapor deposition shading net; 14. Temperature and pressure monitor; 15. First imaging module; 21. Unwinding roller; 22. Guide roller; 23. Flat pusher; 24. Steel web; 25. Push rod; 26. Rewinding roller; 27. Tensioning module; 28. Second imaging module; 31. Vacuum pump; 32. Evaporation boat; 33. Temperature and pressure monitor; 34. Heating tube; 35. Evaporation hole; 36. Evaporation shading net. Detailed Implementation

[0021] To address the issues that most commercially available thin-film coating equipment only supports one coating process, has an inconvenient assembly and disassembly structure, is difficult to maintain and replace parts, and cannot monitor the coating effect or adjust the tension of the flexible film in real time due to the sealed structure, we provide a modular flexible thin-film composite coating machine.

[0022] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0023] It should be noted that the terms such as "inner", "middle" and "one" used in this specification are only for clarity of description and are not intended to limit the scope of implementation of this utility model. Any changes or adjustments to their relative relationships, without substantially altering the technical content, should also be considered as part of the scope of implementation of this utility model, as stated above.

[0024] In the description of this utility model, it should be understood that the terms "upper," "lower," "front," "rear," "left," "right," "vertical," and "horizontal," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, features defined with "first," "second," etc., may explicitly or implicitly include one or more of that feature. In the description of this utility model, it should be noted that unless otherwise explicitly specified and limited, the terms "installed," "connected," and "joined" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal connection of two components. For those skilled in the art, the specific meaning of the above terms in this utility model can be understood through specific circumstances.

[0025] like Figure 1 and 2As shown, this embodiment provides a modular flexible thin film composite coating machine, including a vacuum evaporation module 3, a conveying module 2, and an organic vapor deposition module 1. The vacuum evaporation module 3 is located below the conveying module 2 and is connected to the bottom of the conveying module 2 by a sealed thread. The organic vapor deposition module 1 is located above the conveying module 2 and is connected to the top of the conveying module 2 by a sealed thread. By using a sealed thread connection between the vacuum evaporation module 3, the conveying module 2, and the organic vapor deposition module 1, a thread 100 is formed between the threaded connections. The modules can be disassembled and assembled, facilitating disassembly and maintenance. The sealed thread connection means that each module is connected by a thread and then sealed with a sealing ring, etc., to facilitate vacuuming. For ease of connection, in this embodiment, the equipment uses a cylinder of equal diameter as its outer shape.

[0026] The vacuum evaporation module 3 includes an evaporation chamber, outside which is connected a vacuum pump 31 for evaporating the evaporation chamber. The evaporation chamber is equipped with an evaporation boat 32, a heating tube 34, and a temperature and pressure monitor 33. The evaporation boat 32 is used to evaporate raw materials, the heating tube 34 is used to generate a heat source, and the temperature and pressure monitor is used to detect the vacuum level and temperature inside the evaporation chamber. The evaporation boat 32 is located at the bottom of the evaporation chamber, the heating tube 34 is located on the inner wall of the evaporation chamber, and the temperature and pressure monitor 33 is located on the outer wall of the evaporation chamber. The top of the evaporation chamber is provided with an evaporation hole 35 and an evaporation shading net 36. The evaporation shading net 36 is located above the evaporation hole 35. During operation, the raw materials on the evaporation boat 32 evaporate, and the evaporated gas passes through the evaporation hole 35 and the evaporation shading net 36, depositing above the evaporation shading net 36. The flexible film 200 passes through and is coated.

[0027] The organic vapor deposition module 1 includes an organic vapor deposition chamber, with a pressure maintaining pump 11 connected outside the chamber to maintain the pressure within the chamber. The chamber contains a cathode tube 12, an organic vapor evaporation net 13, and a temperature and pressure monitor 14. The cathode tube 12 is used for organic vapor deposition via cathode arc evaporation source discharge. The temperature and pressure monitor detects the temperature and pressure within the chamber. The cathode tube 12 is located at the top of the chamber, the organic vapor evaporation net 13 is located below it, and the temperature and pressure monitor 14 is located on the outer wall of the chamber. During operation, organic gas is introduced and deposited through the cathode arc evaporation source discharge within the cathode tube 12. The organic gas passes through the organic vapor evaporation net 13 for deposition, and the flexible thin film 200 passes through for coating.

[0028] The top of the organic vapor deposition chamber is also equipped with a first photography module 15 for monitoring the coating effect on the organic vapor phase shading net 13. The coating effect on the organic vapor phase shading net 13 is monitored through the first photography module 15.

[0029] The conveying module 2 includes a conveying chamber, which is equipped with a pushing device and a winding device. The winding device includes an unwinding roller 21, a guide roller 22, and a take-up roller 26. The pushing device includes a pushing rod 25, a flat pusher 23, and a steel web 24. The pushing rod 25 is slidably connected to the side wall of the conveying chamber. The flat pusher 23 is placed below the organic vapor phase shading net 13. After being unwound by the unwinding roller 21, the flexible film is placed above the evaporation shading net 36 and sequentially wound around the guide roller 22, the steel web 24, and the flat pusher 23 before being wound up by the take-up roller 26. During operation, the flexible film is unwound on the unwinding roller 21, passed through the guide roller 22, and then wound up on the take-up roller 26. During this process, the film is coated by passing through the evaporation shading net 36 and the organic vapor phase shading net 13. It should be noted that the pushing rod 25, the flat pusher 23, and the steel web are used to push the flexible film closer to the bottom of the organic vapor phase shading net for coating.

[0030] The conveying chamber is also equipped with a tensioning module 27 for adjusting the tension of the flexible film. The tensioning module 27 is used to adjust the tension by rotating the flexible film when it is relaxed.

[0031] The push rod 25 is also equipped with a second photography module 28 for monitoring the coating effect on the evaporative shading net 36. The second photography module 28 is used to monitor the coating effect on the evaporative shading net 36.

[0032] The inner side of the push rod 25 is provided with a water-cooled conveying pipe, which is used for cooling.

[0033] Through the above methods, this utility model allows the flexible film to be transported by the conveying module 2, vacuum evaporation coating to be performed by the vacuum evaporation module 3, and organic vapor deposition coating to be performed by the organic vapor deposition module 1. The combination of organic vapor deposition and vacuum evaporation coating processes results in a better coating effect. At the same time, the tensioning module 27 is used to adjust the tension of the flexible film, making it easier to adjust the flatness of the flexible film. Meanwhile, the imaging module is used to observe the coating status in real time, thereby facilitating real-time adjustment of the tension of the flexible film and real-time observation of the coating effect, which in turn improves the coating yield.

[0034] The above description is a further detailed explanation of the present utility model in conjunction with specific preferred embodiments. It should not be assumed that the specific implementation of the present utility model is limited to these descriptions. All equivalent changes and modifications made within the scope of this application should still fall within the scope of the present utility model.

Claims

1. A modular flexible thin film composite coating machine, characterized in that, The device includes a vacuum evaporation module, a conveying module, and an organic vapor deposition module. The vacuum evaporation module is located below the conveying module and is connected to the bottom of the conveying module via a sealed thread. The organic vapor deposition module is located above the conveying module and is connected to the top of the conveying module via a sealed thread.

2. The modular flexible thin film composite coating machine according to claim 1, characterized in that, The vacuum evaporation module includes an evaporation chamber, an outer vacuum pump connected to the outside of the evaporation chamber, an evaporation boat, a heating tube, and a temperature and pressure monitor installed inside the evaporation chamber. The evaporation boat is located at the bottom of the evaporation chamber, the heating tube is located on the inner wall of the evaporation chamber, and the temperature and pressure monitor is located on the outer wall of the evaporation chamber. The top of the evaporation chamber is provided with evaporation holes and an evaporation shading net, with the evaporation shading net located above the evaporation holes.

3. The modular flexible thin film composite coating machine according to claim 2, characterized in that, The organic vapor deposition module includes an organic vapor deposition chamber, an outer gas pressure maintaining pump connected to the outer side of the organic vapor deposition chamber, a cathode tube, an organic vapor shading net, and a temperature and pressure monitor installed inside the organic vapor deposition chamber, the cathode tube being installed at the top of the organic vapor deposition chamber, the organic vapor shading net being installed below the cathode tube, and the temperature and pressure monitor being installed on the outer wall of the organic vapor deposition chamber.

4. The modular flexible thin film composite coating machine according to claim 3, characterized in that, The top of the organic vapor deposition chamber is also equipped with a first photographic module for monitoring the coating effect on the organic vapor deposition screen.

5. The modular flexible thin film composite coating machine according to claim 3, characterized in that, The conveying module includes a conveying chamber, which is equipped with a pushing device and a winding device. The winding device includes an unwinding roller, a guide roller, and a take-up roller. The pushing device includes a pushing rod, a flat pusher, and a steel web. The pushing rod is slidably and sealed to the side wall of the conveying chamber. The flat pusher is placed below the organic vapor phase shading net. After being unwound by the unwinding roller, the flexible film is placed above the evaporative shading net and sequentially wound around the guide roller, the steel web, and the flat pusher before being wound up by the take-up roller.

6. The modular flexible thin film composite coating machine according to claim 5, characterized in that, The conveying chamber is also equipped with a tensioning module for adjusting the tension of the flexible film.

7. The modular flexible thin film composite coating machine according to claim 5, characterized in that, The push rod is also equipped with a second photography module for monitoring the coating effect on the evaporative shading net.

8. The modular flexible thin film composite coating machine according to claim 7, characterized in that, A water-cooled delivery pipe is provided on the inner side of the push rod.

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