Temperature control mechanism for MPCVD equipment

Abstract

The utility model provides a temperature control mechanism for MPCVD equipment, which relates to the technical field of temperature control of the MPCVD equipment and comprises a water circulation system, the MPCVD equipment, a first cooling unit, a second cooling unit, a first circulating water cooling mechanism and a second circulating water cooling mechanism. The water circulation system comprises a circulating pump, and the pump forms a circulation loop through a water inlet pipe and a water outlet pipe; two independent cooling units are adopted, a first cooling unit for strengthening cooling is arranged in a central area, gradient cooling is conducted on plasma through a cooling medium with a high heat conductivity coefficient, and graphitization phase change induced by local high temperature is effectively restrained; the temperature of the marginal area is controlled by adopting a dynamic temperature control technology, so that the sudden drop of the deposition rate and the generation of amorphous carbon impurities caused by excessive cooling are avoided; the problems that the substrate of the existing MPCVD equipment generally adopts an integral cooling structure design, the temperature rising speeds of the center and the peripheral partition of the substrate are inconsistent, the phenomenon of non-uniform temperature distribution occurs after a certain time, and crystal defects are caused by local temperature difference are solved.

Description

Technical Field

[0001] This utility model belongs to the field of temperature control technology for MPCVD equipment, and more specifically, it relates to a temperature control mechanism for MPCVD equipment. Background Technology

[0002] In the process of growing synthetic diamonds using MPCVD (microwave plasma chemical vapor deposition), there are different requirements for the cooling rate between the center and the periphery of the substrate due to factors such as uneven plasma energy distribution, thermal stress management requirements, and lattice defect control.

[0003] Existing MPCVD equipment typically employs an integral cooling structure design for the substrate. Forcing the substrate center and edges to cool at the same rate in MPCVD directly interferes with plasma stability and chemical activity, causing the following adverse effects on diamond growth:

[0004] 1. Plasma Shrinking;

[0005] 2. Imbalance in the proportion of active groups;

[0006] 3. Thermal electromagnetic interference;

[0007] 4. Separation of gas phase components;

[0008] 5. Lattice stress concentration. Utility Model Content

[0009] To address the aforementioned technical problems, this utility model provides a temperature control mechanism for MPCVD equipment. This mechanism addresses the issue that existing MPCVD equipment typically employs an integrated cooling structure design for the substrate, where the temperature rise rates between the center and peripheral zones of the substrate are not consistent. This results in uneven temperature distribution after a certain period, leading to crystal defects caused by localized temperature differences.

[0010] This utility model provides a temperature control mechanism for MPCVD equipment, achieved through the following specific technical means:

[0011] A temperature control mechanism for an MPCVD (Multi-Level Video Detection) device comprises a water circulation system, an MPCVD device, a first cooling unit, a second cooling unit, a first circulating water cooling mechanism, and a second circulating water cooling mechanism. The water circulation system includes a fixed base plate on which a circulating pump is fixedly mounted. The pump forms a circulation loop through an inlet pipe and an outlet pipe. A filter connector is installed at the end of the inlet pipe, and the outlet pipe has multiple S-bends. Both pipe ends are connected to a water storage tank. A drain pipe with a shut-off valve is installed on one side of the water storage tank. The MPCVD device uses a graphene-copper composite heat dissipation substrate. A molybdenum stage is fixedly connected above it by high thermal conductivity ceramic bolts; the graphene-copper composite heat dissipation substrate integrates two sets of cooling units, including a first cooling unit and a second cooling unit; the first cooling unit is composed of first microchannels arranged in a divergent pattern and converging at the center; the second cooling unit contains multiple sets of second microchannels arranged in a ring; the two sets of microchannels are thermally isolated by aluminum nitride insulating heat pipes; the first circulating water cooling mechanism is composed of a fixed frame, and the S-bend is fixed in the frame; the second circulating water cooling mechanism is fixed to the fixed base plate by a bracket.

[0012] Furthermore, the first cooling unit also includes a first adapter pipe, one end of which is connected to the water inlet pipe and the other end is connected to the first flow control pump; the pump is connected to the junction of the first microchannel through the first inlet pipe, the end of the microchannel abuts against the center area of ​​the bottom of the molybdenum stage, and is connected to the water outlet pipe through the first outlet pipe.

[0013] Furthermore, the second cooling unit also includes a second adapter pipe, one end of which is connected to the water inlet pipe and the other end is connected to the second flow control pump; the pump is connected to the junction of the second microchannel through the second inlet pipe, the end of which abuts the bottom peripheral area of ​​the molybdenum stage and is connected to the water outlet pipe through the second outlet pipe.

[0014] Furthermore, heat dissipation fins are arrayed on both sides of the fixed frame, and fans are configured to be closely attached to the heat dissipation fins; the fans on both sides are rigidly connected by long screws and nuts.

[0015] Furthermore, the second circulating water cooling mechanism includes a crushing hopper, through which a rotating rod is inserted and a crushing blade is installed; a driven gear is provided at one end of the rotating rod.

[0016] Furthermore, the bottom of the crushing hopper is connected to a feeding cylinder, and a rotating shaft with a spiral propulsion structure is installed inside the feeding cylinder; a driving gear is installed on the rotating shaft, which meshes with the driven gear for transmission; one end of the rotating shaft is connected to a rotating motor; an isolation groove with a filter screen is provided below the outlet of the feeding cylinder, and the isolation groove is placed inside the water storage tank.

[0017] Compared with the prior art, the present invention has the following beneficial effects:

[0018] 1. This utility model adopts a dual-path independent cooling unit: the central area is equipped with a first cooling unit for enhanced cooling, which implements gradient cooling of the plasma bombardment area through a cooling medium with a high thermal conductivity, effectively suppressing the graphitization phase transition induced by local high temperature; the edge area adopts dynamic temperature control technology to achieve precise temperature control, avoiding a sudden drop in deposition rate and the generation of amorphous carbon impurities due to excessive cooling.

[0019] 2. In terms of the design of the cooling circulation system, this utility model innovatively adopts a two-stage circulating water cooling mechanism. Specifically, the first circulating water cooling mechanism consists of a finned radiator and an axial flow fan to construct an air-assisted heat dissipation system, which initially cools the heated circulating water. The second circulating water cooling mechanism integrates an ice slurry mixing device, which achieves deep cooling by adding fine ice particles. The cooling water forms a closed loop between the inlet pipe, the outlet pipe, and the water tank, ensuring the recycling of water sources while maintaining the continuous cooling efficiency of the system by dynamically replenishing ice slurry. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of this utility model.

[0021] Figure 2 This is a schematic diagram of the water circulation system of this utility model.

[0022] Figure 3 This is a schematic diagram of the structure of the first cooling unit of this utility model.

[0023] Figure 4 This is a schematic diagram of the structure of the second cooling unit of this utility model.

[0024] Figure 5 This is a schematic diagram of the structure of the first circulating water cooling mechanism of this utility model.

[0025] Figure 6 This is a schematic diagram of the second circulating water cooling mechanism of this utility model.

[0026] In the diagram, the correspondence between component names and drawing numbers is as follows:

[0027] 10. Water circulation system;

[0028] 11. Fixed base plate; 12. Circulating pump; 13. Inlet pipe; 14. Filter connector; 15. Outlet pipe; 16. S-bend; 17. Water storage tank; 18. Drain pipe; 19. Shut-off valve;

[0029] 20. MPCVD equipment;

[0030] 21. Graphene-copper composite heat dissipation substrate; 22. Molybdenum stage; 23. Aluminum nitride insulating heat pipe;

[0031] 30. First cooling unit;

[0032] 31. First transfer pipe; 32. First flow control pump; 33. First inlet pipe; 34. First microchannel; 35. First outlet pipe;

[0033] 40. Second cooling unit;

[0034] 41. Second transfer pipe; 42. Second flow control pump; 43. Second inlet pipe; 44. Second microchannel; 45. Second outlet pipe;

[0035] 50. First circulating water cooling mechanism;

[0036] 51. Fixed frame; 52. Heat dissipation fins; 53. Fan; 54. Long screw;

[0037] 60. Second circulating water cooling mechanism;

[0038] 61. Crushing hopper; 62. Rotating rod; 63. Crushing blade; 64. Driven gear; 65. Feeding cylinder; 66. Screw propulsion structure; 67. Driving gear; 68. Rotating motor; 69. Isolation groove. Detailed Implementation

[0039] The embodiments of this utility model will be described in further detail below with reference to the accompanying drawings and examples. The following examples are for illustrative purposes only and should not be construed as limiting the scope of this utility model.

[0040] Example:

[0041] As attached Figure 1 To be continued Figure 6 As shown:

[0042] This utility model provides a temperature control mechanism for MPCVD equipment. The mechanism comprises a water circulation system 10, an MPCVD device 20, a first cooling unit 30, a second cooling unit 40, a first circulating water cooling mechanism 50, and a second circulating water cooling mechanism 60. The water circulation system 10 includes a fixed base plate 11 on which a circulating pump 12 is fixedly mounted. The pump forms a circulation loop through an inlet pipe 13 and an outlet pipe 15. A filter connector 14 is provided at the end of the inlet pipe 13, and a multi-bend S-shaped section 16 is provided on the outlet pipe 15. Both pipe ends are connected to a water storage tank 17. A drain pipe 18 with a shut-off valve 19 is provided on one side of the water storage tank 17. The MPCVD device 20 uses graphite. A graphene-copper composite heat dissipation substrate 21 is fixedly connected to a molybdenum stage 22 via high thermal conductivity ceramic bolts. The graphene-copper composite heat dissipation substrate 21 integrates two sets of cooling units, including a first cooling unit 30 and a second cooling unit 40. The first cooling unit 30 is composed of first microchannels 34 arranged in a divergent pattern and converging at the center. The second cooling unit 40 contains multiple sets of second microchannels 44 arranged in a ring. The two sets of microchannels are thermally isolated by an aluminum nitride insulating heat pipe 23. The first circulating water cooling mechanism 50 is composed of a fixed frame 51, and an S-bend 16 is fixed within the frame. The second circulating water cooling mechanism 60 is fixed to the fixed base plate 11 by a bracket.

[0043] Among them, such as Figure 3 As shown, the first cooling unit 30 also includes a first transfer pipe 31, one end of which is connected to the water inlet pipe 13 and the other end is connected to the first flow control pump 32. The pump is connected to the junction of the first microchannel 34 through the first inlet pipe 33. The end of the microchannel abuts the bottom center area of ​​the molybdenum stage 22 and is connected to the water outlet pipe 15 through the first outlet pipe 35. The cooling water flows through the first microchannel 34 to cool the center area of ​​the molybdenum stage 22, and the cooling water flow rate is adjusted by the first flow control pump 32 to control the cooling range.

[0044] Among them, such as Figure 4 As shown, the second cooling unit 40 also includes a second transfer pipe 41, one end of which is connected to the water inlet pipe 13 and the other end is connected to the second flow control pump 42. The pump is connected to the junction of the second microchannel 44 through the second inlet pipe 43. The end of the microchannel abuts against the bottom peripheral area of ​​the molybdenum stage 22 and is connected to the water outlet pipe 15 through the second outlet pipe 45. The cooling water flows through the second microchannel 44 to cool the peripheral area of ​​the molybdenum stage 22, and the cooling water flow rate is adjusted by the second flow control pump 42 to control the cooling range.

[0045] Among them, such as Figure 1 and 5As shown, heat dissipation fins 52 are arrayed on both sides of the fixed frame 51, and fans 53 are configured to be closely attached to the heat dissipation fins 52; the fans 53 on both sides are rigidly connected by long screws 54 and nuts; the heat dissipation fins 52 and fans 53 work together to dissipate heat and cool the water in the S-bend section 16 fixed by the fixed frame 51.

[0046] Among them, such as Figure 6 As shown, the second circulating water cooling mechanism 60 includes a crushing hopper 61, through which a rotating rod 62 passes and a crushing blade 63 is installed; a driven gear 64 is provided at one end of the rotating rod 62; the bottom of the crushing hopper 61 is connected to a feeding cylinder 65, and a rotating shaft with a spiral propulsion structure 66 is provided inside the feeding cylinder 65; a driving gear 67 is installed on the rotating shaft, meshing with the driven gear 64 for transmission; one end of the rotating shaft is connected to a rotating motor 68; an isolation groove 69 with a filter screen is provided below the outlet of the feeding cylinder 65, and the isolation groove 69 is placed inside the water storage tank 17; Ice blocks are placed into the crushing hopper 61, and the rotating motor 68 is started to drive the rotating propulsion structure 66 to rotate. At the same time, the driving gear 67 and the driven gear 64 follow the rotation, driving the rotating rod 62 and the crushing blade 63 to rotate. The crushing blade 63 crushes the ice blocks into fragments, which fall into the feeding cylinder 65 and are pushed by the spiral propulsion structure 66 into the isolation trough 69 placed in the water storage tank 17. The filter screen can prevent impurities that may be present in the ice blocks from entering the circulating cooling water. The ice fragments provide secondary heat dissipation and cooling for the water in the water storage tank 17.

[0047] The specific usage and function of this embodiment are as follows:

[0048] In this invention, the circulating pump 12 of the water circulation system 10 forms a closed circulation loop through the inlet pipe 13, the outlet pipe 15, and the water storage tank 17. After the circulating pump 12 is started, cooling water flows in this loop. The substrate is fixed on the molybdenum stage 22, and the first flow control pump 32 is started. The cold water in the inlet pipe 13 enters the first inlet pipe 33 through the first transfer pipe 31. The cooling water flows through the first microchannel 34 to cool the central area of ​​the molybdenum stage 22, and is cooled by the first flow control pump. 32. Adjust the cooling water flow rate to control the temperature drop; start the second flow control pump 42, and the cold water in the inlet pipe 13 enters the second inlet pipe 43 through the second transfer pipe 41. The cooling water flows through the second microchannel 44 to cool the central area of ​​the molybdenum stage 22, and the cooling water flow rate is adjusted by the second flow control pump 42 to control the temperature drop; the cooling water with increased temperature in the first cooling unit 30 and the second cooling unit 40 respectively enters the outlet pipe 15 through the first outlet pipe 35 and the second outlet pipe 45. In the middle; when the water flows through the S-bend 16, the heat dissipation fins 52 and the fan 53 work together to cool the water in the S-bend 16, which is fixed by the fixed frame 51. After cooling, the water returns to the water storage tank 17 through the outlet pipe 15. Ice blocks are put into the crushing hopper 61, the rotating motor 68 is started, and the rotating propulsion structure 66 is driven to rotate. At the same time, the driving gear 67 and the driven gear 64 follow the rotation, driving the rotating rod 62 and the crushing blade 63 to rotate. The ice is broken into fragments by the crushing blade 63. The ice fragments fall into the feeding cylinder 65 and are pushed by the spiral propulsion structure 66 into the isolation tank 69 placed in the water storage tank 17. The filter screen can prevent impurities that may be present in the ice from entering the circulating cooling water. The ice fragments provide secondary heat dissipation and cooling to the water in the water storage tank 17, restoring it to its initial temperature, thereby maintaining the cooling capacity for the substrate. If there is too much water in the water storage tank 17, the shut-off valve 19 can be opened to drain the excess water through the drain pipe 18.

[0049] Any aspects of this utility model not described in detail are well-known technologies to those skilled in the art.

Claims

1. A temperature control mechanism for an MPCVD device, characterized in that: The device consists of a water circulation system (10), an MPCVD device (20), a first cooling unit (30), a second cooling unit (40), a first circulating water cooling mechanism (50), and a second circulating water cooling mechanism (60). The water circulation system (10) includes a fixed base plate (11) on which a circulating pump (12) is fixedly installed. The pump forms a circulation loop through an inlet pipe (13) and an outlet pipe (15). A filter connector (14) is provided at the end of the inlet pipe (13), and a multi-fold S-bend section (16) is provided on the outlet pipe (15). Both pipe ends are connected to a water storage tank (17). A drain pipe (18) with a shut-off valve (19) is provided on one side of the water storage tank (17). The MPCVD device (20) adopts a graphene-copper composite heat dissipation base. A plate (21) is fixedly connected to a molybdenum stage (22) by high thermal conductivity ceramic bolts; the graphene-copper composite heat dissipation substrate (21) integrates two sets of cooling units, including a first cooling unit (30) and a second cooling unit (40); the first cooling unit (30) is composed of a first microchannel (34) arranged in a divergent manner and converging at the center; the second cooling unit (40) contains multiple sets of second microchannels (44) arranged in a ring; the two sets of microchannels are thermally isolated by an aluminum nitride insulating heat pipe (23); the first circulating water cooling mechanism (50) is composed of a fixed frame (51), and the S-bend (16) is fixed in the frame; the second circulating water cooling mechanism (60) is fixed to the fixed base plate (11) by a bracket.

2. The temperature control mechanism for an MPCVD device according to claim 1, characterized in that: The first cooling unit (30) also includes a first adapter pipe (31), one end of which is connected to the water inlet pipe (13) and the other end is connected to the first flow control pump (32); the pump is connected to the junction of the first microchannel (34) through the first inlet pipe (33), the end of the microchannel abuts the bottom center area of ​​the molybdenum stage (22) and is connected to the water outlet pipe (15) through the first outlet pipe (35).

3. The temperature control mechanism for an MPCVD device according to claim 1, characterized in that: The second cooling unit (40) also includes a second adapter pipe (41), one end of which is connected to the water inlet pipe (13) and the other end is connected to the second flow control pump (42); the pump is connected to the junction of the second microchannel (44) through the second inlet pipe (43), the end of which abuts the bottom peripheral area of ​​the molybdenum stage (22) and is connected to the water outlet pipe (15) through the second outlet pipe (45).

4. The temperature control mechanism for an MPCVD device according to claim 1, characterized in that: The fixed frame (51) has heat dissipation fins (52) arranged in an array on both sides, and a fan (53) is configured to be closely attached to the heat dissipation fins (52); the fans (53) on both sides are rigidly connected by a long screw (54) and a nut.

5. The temperature control mechanism for an MPCVD device according to claim 1, characterized in that: The second circulating water cooling mechanism (60) includes a crushing hopper (61), through which a rotating rod (62) passes and a crushing blade (63) is installed; a driven gear (64) is provided at one end of the rotating rod (62).

6. The temperature control mechanism for an MPCVD device according to claim 5, characterized in that: The bottom of the crushing hopper (61) is connected to the feeding cylinder (65), and the feeding cylinder (65) is provided with a rotating shaft with a spiral propulsion structure (66); the rotating shaft is equipped with a driving gear (67) that meshes with the driven gear (64) for transmission; one end of the rotating shaft is connected to a rotating motor (68); an isolation groove (69) with a filter screen is provided below the outlet of the feeding cylinder (65), and the isolation groove (69) is placed inside the water storage tank (17).

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