Fitting system for temperature prediction of annealing furnace

Abstract

The utility model provides a temperature prediction fitting system for an annealing furnace, which relates to the technical field of temperature prediction fitting of the annealing furnace, receives a predicted temperature value through a predicted temperature receiving module, sends the predicted temperature value to a predicted temperature conversion module and converts the predicted temperature value into a voltage signal, and detects a temperature value in the annealing furnace through a temperature detection block. The polarity judgment module judges the magnitude of a future temperature and a detection temperature according to the voltage signal and sends a temperature rise or drop high level signal to the driving module, and the temperature difference calculation module calculates a voltage difference signal of the temperature according to the voltage signal and sends the voltage difference signal to the fitting regulation and control module; the predicted time difference receiving module is used for sending a predicted time difference to the time difference conversion module to be converted into a time voltage signal, the fitting regulation and control module outputs a power regulation signal to the driving module according to the received temperature and time voltage difference signal, and the driving module controls start, stop and power of the heating equipment and the cooling equipment.

Description

Technical Field

[0001] This utility model relates to the field of annealing furnace temperature prediction and fitting technology, specifically to a system for predicting and fitting the temperature of an annealing furnace. Background Technology

[0002] In modern semiconductor manufacturing and materials processing, annealing furnaces are key equipment for improving material performance and optimizing production processes. As a critical heat treatment device in industrial production, the accuracy and real-time performance of temperature control in annealing furnaces directly determine material performance and product quality. Traditional temperature control methods mainly rely on PID algorithms or fixed-threshold switching control, which suffer from response lag and large overshoot, especially when facing complex process curves or sudden changes in operating conditions, making predictive adjustment difficult. In existing technologies, temperature control systems mostly use software algorithms to process prediction and feedback signals, but due to limitations in software execution cycles and computational delays, they cannot meet the real-time requirements of high-dynamic temperature scenarios. Furthermore, traditional solutions have insufficient ability to fit temperature change trends, resulting in low energy utilization and excessive temperature fluctuations, seriously affecting product consistency and equipment lifespan. Therefore, there is an urgent need for an annealing furnace temperature control system based on hardware circuits to achieve fast response and predictive fitting, in order to solve the above-mentioned technical bottlenecks. Utility Model Content

[0003] The purpose of this invention is to provide a temperature prediction and fitting system for annealing furnaces to solve the problems mentioned in the background art.

[0004] To achieve the above objectives, this utility model provides the following technical solution:

[0005] A temperature prediction and fitting system for annealing furnaces, comprising:

[0006] A predicted temperature receiving module, which is electrically connected to a predicted temperature conversion module, is used to receive the predicted future temperature value of the annealing furnace and send it to the predicted temperature conversion module.

[0007] A predicted temperature conversion module, which is electrically connected to a polarity determination module and a temperature difference calculation module, is used to convert the received predicted future temperature value into a voltage signal and send it to the polarity determination module and the temperature difference calculation module.

[0008] A temperature detection module is installed inside the annealing furnace and is electrically connected to a polarity determination module and a temperature difference calculation module. It is used to detect the temperature value inside the annealing furnace and convert it into a voltage signal to be sent to the polarity determination module and the temperature difference calculation module.

[0009] A polarity determination module, which is electrically connected to the drive module, is used to send high-level signals for heating and cooling to the drive module based on the magnitude of the voltage signal sent by the predicted temperature conversion module and the voltage signal sent by the temperature detection module.

[0010] The temperature difference calculation module is electrically connected to the fitting control module. It is used to calculate the voltage difference signal of temperature based on the magnitude of the voltage signal sent by the predicted temperature conversion module and the voltage signal sent by the temperature detection module, and send it to the fitting control module.

[0011] A predicted time difference receiving module, which is electrically connected to a time difference conversion module, is used to receive the time difference between the predicted future temperature value of the annealing furnace and the current time, and send it to the time difference conversion module.

[0012] A time difference conversion module, which is electrically connected to a fitting control module, is used to convert the received time difference value into a time voltage signal and send it to the fitting control module.

[0013] The fitting and control module is electrically connected to the drive module and is used to output a power adjustment signal to the drive module based on the received voltage difference signal of temperature and voltage difference signal of time.

[0014] The driving module is used to turn the heating device and the cooling device on or off according to the received high-level heating and cooling signals, and to adjust the power of the heating device and the cooling device according to the power adjustment signal.

[0015] Furthermore, the driving module includes a first driving module and a second driving module. The first driving module is electrically connected to the cooling device and is used to turn on the cooling device under a high-level cooling signal and to adjust the power of the cooling device according to a power adjustment signal. The second driving module is electrically connected to the heating device and is used to turn on the heating device under a high-level heating signal and to adjust the power of the heating device according to a power adjustment signal.

[0016] Furthermore, the polarity determination module is a comparator of model LM393, including IN1+, IN1-, OUT1, IN2+, IN2-, and OUT2 terminals. The IN1+ and IN2- terminals are electrically connected to the output terminals of the temperature detection module, the IN1- and IN2+ terminals are electrically connected to the output terminals of the predicted temperature conversion module, the OUT1 terminal is electrically connected to the first driving module, and the OUT2 terminal is electrically connected to the second driving module.

[0017] Furthermore, the temperature difference calculation module includes resistors R1, R2, R3, and R4, and a comparator LM324. The comparator LM324 includes an IN1+ terminal, an IN1- terminal, and an OUT1 terminal. One end of resistor R1 is electrically connected to the output terminal of the temperature detection module, and the other end of resistor R1 is electrically connected to one end of resistor R4 and the IN1- terminal of the comparator. The other end of resistor R4 is electrically connected to the ground terminal GND. One end of resistor R2 is electrically connected to the output terminal of the predicted temperature conversion module, and the other end of resistor R2 is electrically connected to one end of resistor R3 and the IN1+ terminal of the comparator. The other end of resistor R3 is electrically connected to the OUT1 terminal of the comparator.

[0018] Furthermore, the fitting and control module includes an analog multiplier, a PWM controller, resistors R5 and R6, and capacitor C1. The analog multiplier is an AD633, including terminals X1, X2, Y1, Y2, W, VCC, and GND. Terminal X1 is electrically connected to the OUT1 terminal of the comparator in the temperature difference calculation module. Terminals X2 and Y2 of the analog multiplier are electrically connected to the ground terminal GND, and terminal Y1 is electrically connected to the output terminal of the time difference conversion module. The PWM controller is an SG3525, including terminals INV, NINV, and VCC. The system includes terminals R, CT, RT, OUT, VCC, and GND. The INV terminal is electrically connected to the W terminal of the analog multiplier. The INV and VR terminals are connected in series with resistor R5. The CT terminal is connected in series with resistor R6 and ground terminal GND. The RT terminal is connected in series with capacitor C1 and ground terminal GND. The OUT terminal is electrically connected to the first drive module and the second drive module, respectively. The VCC terminals of the analog multiplier and the PWM controller are electrically connected to the power supply terminal VCC, respectively. The GND terminals of the analog multiplier and the PWM controller are electrically connected to the ground terminal GND, respectively.

[0019] Compared with the prior art, the beneficial effects of this utility model are:

[0020] This invention uses a predicted temperature receiving module to receive predicted temperature values ​​and send them to a predicted temperature conversion module to convert them into voltage signals. A temperature detection module detects the temperature value inside the annealing furnace and converts it into a voltage signal. A polarity determination module determines the magnitude of the future temperature and the detected temperature based on the voltage signal and sends a high-level signal for heating or cooling to the drive module. A temperature difference calculation module calculates the voltage difference signal between the temperature and the voltage signal and sends it to a fitting and control module. A predicted time difference receiving module sends the predicted time difference to a time difference conversion module to convert it into a voltage signal for time. The fitting and control module outputs a power adjustment signal to the drive module based on the received voltage difference signal between the temperature and time. The drive module controls the start-up, shutdown, and power of the heating and cooling devices.

[0021] By utilizing a temperature difference calculation module and a time difference conversion module, the difference between the predicted temperature and the real-time detected temperature, as well as the time difference, are converted into voltage signals. Dynamic power adjustment signals are generated through an analog multiplier and a PWM controller, significantly improving the system's response speed to temperature changes and solving the control lag problem caused by software delays in traditional methods. The fitting and control module combines the composite voltage signal of temperature difference and time difference to achieve adaptive tracking of the nonlinear temperature curve in hardware, reducing overshoot and oscillation and narrowing the temperature fluctuation range. At the same time, the polarity judgment module directly controls the start-stop logic of the heating / cooling equipment, reducing ineffective energy consumption. Attached Figure Description

[0022] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the overall system structure of this utility model;

[0024] Figure 2 This is a schematic diagram of the polarity determination module in this utility model;

[0025] Figure 3 This is a schematic diagram of the temperature difference calculation module in this utility model;

[0026] Figure 4 This is a schematic diagram of the fitting and control module in this utility model.

[0027] In the figure: Predicted temperature receiving module 10, predicted temperature conversion module 20, temperature detection module 30, polarity judgment module 40, temperature difference calculation module 50, predicted time difference receiving module 60, time difference conversion module 70, fitting and control module 80, driving module 90, first driving module 91, and second driving module 92. Detailed Implementation

[0028] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0029] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0030] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal connection of two components; and they can refer to a wireless connection or a wired connection. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0031] Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0032] Example:

[0033] Please see Figures 1-4 This utility model provides a technical solution:

[0034] A temperature prediction and fitting system for an annealing furnace includes a predicted temperature receiving module 10, a predicted temperature conversion module 20, a temperature detection module 30, a polarity determination module 40, a temperature difference calculation module 50, a predicted time difference receiving module 60, a time difference conversion module 70, a fitting control module 80, and a drive module 90, wherein:

[0035] The predicted temperature receiving module 10 has an RS485 communication interface of model MAX485, which is electrically connected to the predicted temperature conversion module 20. It is used to receive the predicted future temperature value of the annealing furnace and send it to the predicted temperature conversion module 20.

[0036] The predicted temperature conversion module 20 is an AD5662 digital-to-analog converter, which is electrically connected to the polarity determination module 40 and the temperature difference calculation module 50. It is used to convert the received predicted future temperature value into a voltage signal and send it to the polarity determination module 40 and the temperature difference calculation module 50.

[0037] The temperature detection module 30 is an AD8495 temperature detector, which is installed inside the annealing furnace and electrically connected to the polarity judgment module 40 and the temperature difference calculation module 50. It is used to detect the temperature value inside the annealing furnace and convert it into a voltage signal to be sent to the polarity judgment module 40 and the temperature difference calculation module 50.

[0038] The predicted temperature receiving module 10 acquires the predicted future temperature data of the annealing furnace, which is then converted into a voltage signal by the predicted temperature conversion module 20. At the same time, the temperature detection module 30 monitors the furnace temperature in real time and converts it into a voltage signal. Together, they provide input references for the polarity judgment module 40 and the temperature difference calculation module 50. Through voltage comparison and difference calculation, the temperature trend is dynamically identified, providing basic signal support for subsequent fitting control and drive execution. This constructs a hardware-based temperature prediction and feedback closed-loop system, improving the real-time performance and accuracy of the annealing furnace temperature control.

[0039] The polarity determination module 40 is electrically connected to the drive module 90 and is used to send high-level signals for heating and cooling to the drive module 90 based on the magnitude of the voltage signal sent by the predicted temperature conversion module 20 and the voltage signal sent by the temperature detection module 30.

[0040] In this embodiment, the polarity determination module 40 is a comparator of model LM393, including IN1+ terminal, IN1- terminal, OUT1 terminal, IN2+ terminal, IN2- terminal, and OUT2 terminal. The IN1+ terminal and IN2- terminal are electrically connected to the output terminal of the temperature detection module 30, the IN1- terminal and IN2+ terminal are electrically connected to the output terminal of the predicted temperature conversion module 20, the OUT1 terminal is electrically connected to the first driving module 91, and the OUT2 terminal is electrically connected to the second driving module 92.

[0041] In use, when the temperature of the temperature detection module 30 is higher than the predicted temperature, the voltage at the IN1+ terminal of the comparator connected to the temperature detection module 30 is higher than the voltage of the predicted temperature input at the IN1- terminal. At this time, the OUT1 terminal outputs a high-level signal to the first drive module 91. When the temperature of the temperature detection module 30 is lower than the predicted temperature, the voltage at the IN2- terminal of the comparator connected to the temperature detection module 30 is lower than the voltage of the predicted temperature input at the IN2+ terminal. At this time, the OUT2 terminal outputs a high-level signal to the second drive module 92.

[0042] The temperature difference calculation module 50 is electrically connected to the fitting control module 80. It is used to calculate the voltage difference signal of temperature based on the magnitude of the voltage signal sent by the predicted temperature conversion module 20 and the voltage signal sent by the temperature detection module 30, and send it to the fitting control module 80.

[0043] In this embodiment, the temperature difference calculation module 50 includes resistors R1, R2, R3, and R4, and a comparator LM324. The comparator LM324 includes an IN1+ terminal, an IN1- terminal, and an OUT1 terminal. One end of resistor R1 is electrically connected to the output terminal of the temperature detection module 30, and the other end of resistor R1 is electrically connected to one end of resistor R4 and the IN1- terminal of the comparator. The other end of resistor R4 is electrically connected to the ground terminal GND. One end of resistor R2 is electrically connected to the output terminal of the predicted temperature conversion module 20, and the other end of resistor R2 is electrically connected to one end of resistor R3 and the IN1+ terminal of the comparator. The other end of resistor R3 is electrically connected to the OUT1 terminal of the comparator.

[0044] The comparator LM324, together with resistors R1, R2, R3, and R4, forms a subtractor circuit. The voltage output from the OUT1 terminal of the comparator LM324 is the difference between the voltages input to the IN1+ and IN1- terminals. This voltage difference is used to calculate the voltage difference signal between the predicted temperature and the detected temperature and is then sent to the fitting and control module 80.

[0045] The predicted time difference receiving module 60 has an RS485 communication interface of model MAX485, which is electrically connected to the time difference conversion module 70. It is used to receive the time difference between the predicted future temperature value of the annealing furnace and the current time, and send it to the time difference conversion module 70.

[0046] The time difference conversion module 70 is an AD5662 digital-to-analog converter, which is electrically connected to the fitting and control module 80. It is used to convert the received time difference value into a time voltage signal and send it to the fitting and control module 80.

[0047] The fitting and control module 80 is electrically connected to the drive module 90 and is used to output a power adjustment signal to the drive module 90 based on the received voltage difference signal of temperature and voltage difference signal of time.

[0048] In this embodiment, the fitting and control module 80 includes an analog multiplier, a PWM controller, resistors R5 and R6, and capacitor C1. The analog multiplier is an AD633, a four-quadrant analog multiplier chip that can multiply two analog voltage signals and output their product. The X2 and Y2 terminals are grounded. The voltage difference signal between temperature and time inputs at the X1 and Y1 terminals is the voltage signal to be multiplied. Multiplying the temperature difference and time difference voltage signals generates a dynamic power adjustment signal, including terminals X1, X2, Y1, Y2, W, VCC, and GND. The X1 terminal is electrically connected to the OUT1 terminal of the comparator in the temperature difference calculation module 50. The X2 and Y2 terminals of the analog multiplier are connected to the ground terminal GND. The Y1 terminal is electrically connected to the output terminal of the time difference conversion module 70. The PWM controller is model SG3525, which includes INV, NINV, VR, CT, RT, OUT, VCC, and GND terminals. The INV terminal is electrically connected to the W terminal of the analog multiplier. The NINV and VR terminals are connected in series with resistor R5. The CT terminal is connected in series with resistor R6 and ground terminal GND. The RT terminal is connected in series with capacitor C1 and ground terminal GND. The OUT terminal is electrically connected to the first drive module 91 and the second drive module 92 respectively. The VCC terminals of the analog multiplier and the PWM controller are electrically connected to the power supply terminal VCC respectively. The GND terminals of the analog multiplier and the PWM controller are electrically connected to the ground terminal GND respectively.

[0049] The resistors R5 and R6 connected to the PWM controller, along with the capacitor C1, work together to set the oscillation frequency and timing period of the PWM generator. When the voltage at the INV terminal increases, the duty cycle of the generated PWM wave increases, and the power of the driven device increases accordingly.

[0050] The drive module 90 is an SSR-40DA solid-state relay, used to turn the heating and cooling devices on or off according to the received high-level heating and cooling signals, and to adjust the power of the heating and cooling devices according to the power adjustment signal.

[0051] In this embodiment, the driving module 90 includes a first driving module 91 and a second driving module 92. The first driving module 91 is electrically connected to the cooling device and is used to turn on the cooling device under a high-level cooling signal and to adjust the power of the cooling device according to a power adjustment signal. The second driving module 92 is electrically connected to the heating device and is used to turn on the heating device under a high-level heating signal and to adjust the power of the heating device according to a power adjustment signal.

[0052] Although embodiments of the present invention have been described in conjunction with the accompanying drawings, those skilled in the art can make various modifications and variations without departing from the spirit and scope of the present invention, and such modifications and variations all fall within the scope defined by the appended claims.

Claims

1. A temperature prediction and fitting system for annealing furnaces, characterized in that, include: A predicted temperature receiving module (10) is electrically connected to a predicted temperature conversion module (20) for receiving the predicted future temperature value of the annealing furnace and sending it to the predicted temperature conversion module (20). A predicted temperature conversion module (20) is electrically connected to a polarity judgment module (40) and a temperature difference calculation module (50). It is used to convert the received predicted future temperature value into a voltage signal and send it to the polarity judgment module (40) and the temperature difference calculation module (50). Temperature detection module (30) is installed in the annealing furnace and electrically connected to polarity judgment module (40) and temperature difference calculation module (50). It is used to detect the temperature value in the annealing furnace and convert it into a voltage signal to be sent to polarity judgment module (40) and temperature difference calculation module (50). The polarity determination module (40) is electrically connected to the drive module (90) and is used to send high-level heating and cooling signals to the drive module (90) based on the magnitude of the voltage signal sent by the predicted temperature conversion module (20) and the voltage signal sent by the temperature detection module (30). Temperature difference calculation module (50), which is electrically connected to fitting control module (80), is used to calculate the voltage difference signal of temperature based on the magnitude of the voltage signal sent by the predicted temperature conversion module (20) and the voltage signal sent by the temperature detection module (30), and send it to fitting control module (80). A prediction time difference receiving module (60) is electrically connected to a time difference conversion module (70) for receiving the time difference between the predicted future temperature value of the annealing furnace and the current time, and sending it to the time difference conversion module (70). The time difference conversion module (70) is electrically connected to the fitting control module (80) and is used to convert the received time difference value into a voltage signal of time and send it to the fitting control module (80). Fitting control module (80), which is electrically connected to drive module (90), is used to output power adjustment signal to drive module (90) based on the received voltage difference signal of temperature and voltage difference signal of time. The driving module (90) is used to turn on or off the heating and cooling devices according to the received high-level heating and cooling signals, and to adjust the power of the heating and cooling devices according to the power adjustment signal.

2. The temperature prediction and fitting system for an annealing furnace according to claim 1, characterized in that: The drive module (90) includes a first drive module (91) and a second drive module (92). The first drive module (91) is electrically connected to the cooling device and is used to turn on the cooling device under a high-level cooling signal and to adjust the power of the cooling device according to the power adjustment signal. The second drive module (92) is electrically connected to the heating device and is used to turn on the heating device under a high-level heating signal and to adjust the power of the heating device according to the power adjustment signal.

3. The temperature prediction and fitting system for an annealing furnace according to claim 1, characterized in that: The polarity determination module (40) is a comparator of model LM393, including IN1+, IN1-, OUT1, IN2+, IN2-, and OUT2. The IN1+ and IN2- terminals are electrically connected to the output terminals of the temperature detection module (30), the IN1- and IN2+ terminals are electrically connected to the output terminals of the predicted temperature conversion module (20), the OUT1 terminal is electrically connected to the first driving module (91), and the OUT2 terminal is electrically connected to the second driving module (92).

4. The temperature prediction and fitting system for an annealing furnace according to claim 1, characterized in that: The temperature difference calculation module (50) includes resistors R1, R2, R3, and R4, and comparator LM324. The comparator LM324 includes an IN1+ terminal, an IN1- terminal, and an OUT1 terminal. One end of resistor R1 is electrically connected to the output terminal of the temperature detection module (30), and the other end of resistor R1 is electrically connected to one end of resistor R4 and the IN1- terminal of the comparator. The other end of resistor R4 is electrically connected to the ground terminal GND. One end of resistor R2 is electrically connected to the output terminal of the predicted temperature conversion module (20), and the other end of resistor R2 is electrically connected to one end of resistor R3 and the IN1+ terminal of the comparator. The other end of resistor R3 is electrically connected to the OUT1 terminal of the comparator.

5. The temperature prediction and fitting system for an annealing furnace according to claim 1, characterized in that: The fitting and control module (80) includes an analog multiplier, a PWM controller, resistors R5 and R6, and capacitor C1. The analog multiplier is an AD633, including terminals X1, X2, Y1, Y2, W, VCC, and GND. Terminal X1 is electrically connected to the OUT1 terminal of the comparator in the temperature difference calculation module (50). Terminals X2 and Y2 of the analog multiplier are electrically connected to the ground terminal GND. Terminal Y1 is electrically connected to the output terminal of the time difference conversion module (70). The PWM controller is an SG3525, including terminals INV, NINV, and VR. The INV terminal is electrically connected to the W terminal of the analog multiplier. The INV terminal and VR terminal are connected in series with resistor R5. The CT terminal is connected in series with resistor R6 and ground terminal GND. The RT terminal is connected in series with capacitor C1 and ground terminal GND. The OUT terminal is electrically connected to the first drive module (91) and the second drive module (92) respectively. The VCC terminal of the analog multiplier and the PWM controller are electrically connected to the power supply terminal VCC respectively. The GND terminal of the analog multiplier and the PWM controller are electrically connected to the ground terminal GND respectively.

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