Metallographic microscope stage bearing piece jig

Abstract

The utility model discloses a metallographic microscope stage bearing piece jig, which comprises a wafer fixing mechanism and a clamping support arranged at the top of the wafer fixing mechanism, an adjusting mechanism is arranged at the bottom of the wafer fixing mechanism, an adjusting disc is arranged at the top of the adjusting mechanism, the wafer fixing mechanism comprises a fixing support, and the fixing support is arranged on the clamping support. A spiral limiting support is fixedly installed in the fixed support, the clamping support is rotationally connected with the fixed support, a plurality of rotating deflector rods are fixedly installed on the outer side of the clamping support, clamping sliding grooves are formed in the periphery of the interior of the clamping support, clamping sliding rods are fixedly installed in the clamping sliding grooves, and the clamping sliding rods are fixedly connected with the rotating deflector rods. The outer side of the clamping sliding rod is slidably connected with a clamping sliding sleeve, multi-point clamping of a wafer can be achieved through the first arc-shaped plate and the second arc-shaped plate, clamping and fixing of different sizes can be achieved, and meanwhile the stability of wafer clamping is improved.

Description

Technical Field

[0001] This utility model relates to the field of wafer fixture technology, specifically a metallographic microscope stage support fixture. Background Technology

[0002] A wafer is a silicon ingot that has been cut, rolled, sliced, chamfered, polished, laser-etched, and packaged to become the basic raw material for integrated circuit factories. In order to ensure the quality of the wafer, it is usually placed on a microscope stage by a wafer holder after the wafer is manufactured.

[0003] Publication No. CN 217507293 U discloses a microscope stage holder fixture for easy wafer placement and removal. By setting a fixing plate and using a push handle to slide the fixing plate along a groove, it clamps the wafer placed within a retaining edge, thereby improving the wafer's stability and the stability during inspection and observation, thus greatly enhancing the device's practical value. By setting the front end of the fixing plate in an arc shape and symmetrically arranged with the retaining edge, it can clamp and fix wafers of different diameters within a certain diameter range, greatly improving the device's flexibility and practical value. It has advantages such as wafer placement and fixing function, significantly improving stability during moving inspection and observation, and flexible adjustment of the fixed wafer size, greatly enhancing its practical performance and value. It effectively solves the problems and shortcomings of existing devices. However, this patent still has the following problems in actual use:

[0004] Although this microscope stage holder for easy wafer loading and unloading can clamp and fix wafers of different diameters within a certain range by setting the front end of the fixing plate in an arc shape and symmetrically aligning it with the side guard, the curvature of the outer side of the wafer varies with different diameters, while the curvature of the fixing plate is fixed. Therefore, the contact area between the fixing plate and the wafer surface differs when clamping and fixing wafers of different sizes, resulting in varying clamping and fixing effects. Consequently, stable clamping of wafers of different diameters cannot be achieved, and wafer wobbling or movement is likely to occur, affecting wafer observation.

[0005] Therefore, a metallurgical microscope stage support fixture is proposed to solve the problems mentioned above. Utility Model Content

[0006] The purpose of this invention is to provide a metallographic microscope stage support fixture to solve the problem mentioned in the background art. Because the curvature of the outer side of wafers of different diameters is different, while the curvature of the fixing plate is fixed, the contact area between the fixing plate and the wafer surface varies when clamping and fixing wafers of different sizes. Therefore, the clamping and fixing effect is also different. Consequently, when clamping wafers of different diameters, stable clamping of the wafer cannot be achieved, and wafer shaking or movement easily occurs, affecting wafer observation.

[0007] To achieve the above objectives, the present invention provides the following technical solution: a metallurgical microscope stage support fixture, comprising a wafer fixing mechanism and a clamping bracket mounted on the top of the wafer fixing mechanism;

[0008] The wafer fixing mechanism is provided with an adjustment mechanism at its bottom and an adjustment plate at its top.

[0009] Also includes:

[0010] The wafer fixing mechanism includes a fixing support, and a spiral limiting bracket is fixedly installed inside the fixing support. The clamping bracket is rotatably connected to the fixing support.

[0011] The clamping bracket has several rotating levers fixedly installed on its outer side, and clamping grooves are formed around its inner perimeter.

[0012] The clamping slide groove has a clamping sliding rod fixedly installed inside, and a clamping sliding sleeve is slidably connected to the outside of the clamping sliding rod.

[0013] Preferably, a clamping limit card is fixedly installed at the bottom of the clamping sliding sleeve, the clamping limit card is slidably connected to the spiral limit bracket, and a limit slider is fixedly installed at the top of the clamping sliding sleeve, the limit slider is slidably connected to the clamping bracket.

[0014] Preferably, a clamping spring is fixedly installed on one side of the limiting slider, and a spring telescopic rod is provided inside the clamping spring. A first arc-shaped plate is fixedly installed on the side of the clamping spring and the spring telescopic rod away from the limiting slider, and rotating supports are fixedly installed on both sides of the first arc-shaped plate.

[0015] Preferably, a second arc-shaped plate is rotatably connected to the outer side of the rotating support, and a clamping rotating rod is rotatably connected to the inner side of each of the two second arc-shaped plates. The clamping rotating rod is rotatably connected to the limiting slider.

[0016] Preferably, the adjustment mechanism includes an adjustment base, a rotating bracket symmetrically mounted on one side of the top of the adjustment base, a rotating knob rotatably connected to the outer side of the rotating bracket, a rotating worm gear fixedly mounted on one side of the rotating knob, and the rotating worm gear rotatably connected to the rotating bracket.

[0017] Preferably, a rotating worm gear is engaged with one side of the rotating worm, the rotating worm gear is rotatably connected to the adjusting base, the adjusting disc is fixedly installed on the top of the rotating worm gear, and an adjusting groove is provided inside the adjusting disc.

[0018] Preferably, an adjusting sliding rod is fixedly installed inside the adjusting groove, and an adjusting sliding sleeve is slidably connected to the outside of the adjusting sliding rod. The adjusting sliding sleeve is fixedly installed at the bottom of the fixed support, and the fixed support is slidably connected to the adjusting plate.

[0019] Compared with the prior art, the beneficial effects of this utility model are as follows: This metallurgical microscope stage support fixture can achieve multi-point clamping of wafers through the first arc-shaped plate and the second arc-shaped plate, enabling clamping and fixing of different sizes, while improving the stability of wafer clamping. Utilizing the sliding connection between the adjusting sliding sleeve and the adjusting sliding rod, the movement of the fixed support and the wafer can be realized, facilitating wafer observation. The specific details are as follows:

[0020] 1. By setting up a wafer fixing mechanism, wafers of different sizes can be placed on the clamping bracket. By rotating the lever, the clamping bracket can be rotated. Utilizing the sliding connection between the spiral limiting bracket and the clamping limiting card, the clamping limiting card causes the clamping sliding sleeve to slide outside the clamping sliding rod. At the same time, the clamping sliding sleeve causes the limiting slider to move. When the second arc plate contacts the surface of the wafer, the second arc plate can be rotated under the action of the rotating support. At the same time, the elastic force of the clamping spring can be used to move the first arc plate. Through the first and second arc plates, multi-point clamping of the wafer can be achieved, enabling clamping and fixing of different sizes, while improving the stability of wafer clamping.

[0021] 2. By setting up an adjustment mechanism, not only can the rotating knob drive the rotating worm gear to rotate, but the meshing connection between the rotating worm gear and the rotating worm wheel can also be used to rotate the adjustment disk and the wafer. At the same time, the sliding connection between the adjustment sliding sleeve and the adjustment sliding rod can be used to move the fixed support and the wafer, which facilitates the observation of the wafer. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the overall three-dimensional structure of this utility model;

[0023] Figure 2This is a three-dimensional cross-sectional structural diagram of the wafer fixing mechanism in this utility model;

[0024] Figure 3 This is a three-dimensional structural diagram of the clamping sliding rod and clamping sliding sleeve in this utility model;

[0025] Figure 4 This is a three-dimensional structural diagram of the first arc-shaped plate and the second arc-shaped plate in this utility model;

[0026] Figure 5 This is a three-dimensional structural diagram of the adjustment mechanism in this utility model;

[0027] Figure 6 This is a three-dimensional cross-sectional structural diagram of the adjusting disc in this utility model.

[0028] In the diagram: 1. Wafer fixing mechanism; 101. Fixing support; 102. Spiral limiting bracket; 103. Clamping bracket; 104. Rotating lever; 105. Clamping slide groove; 106. Clamping sliding rod; 107. Clamping sliding sleeve; 108. Clamping limiting card; 109. Limiting slider; 110. Clamping spring; 111. Spring telescopic rod; 112. First arc plate; 113. Rotating support; 114. Second arc plate; 115. Clamping rotating rod; 2. Adjustment mechanism; 201. Adjustment base; 202. Rotating bracket; 203. Rotating knob; 204. Rotating worm gear; 205. Rotating worm wheel; 206. Adjustment disc; 207. Adjustment slide groove; 208. Adjustment sliding rod; 209. Adjustment sliding sleeve. Detailed Implementation

[0029] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0030] Please see Figures 1-6This utility model provides a technical solution: a metallurgical microscope stage support fixture, including a wafer fixing mechanism 1 and a clamping bracket 103 installed on the top of the wafer fixing mechanism 1. An adjustment mechanism 2 is provided at the bottom of the wafer fixing mechanism 1, and an adjustment disk 206 is provided at the top of the adjustment mechanism 2. The wafer fixing mechanism 1 includes a fixed support 101, and a spiral limiting bracket 102 is fixedly installed inside the fixed support 101. The clamping bracket 103 is rotatably connected to the fixed support 101. Several rotating levers 104 are fixedly installed on the outer side of the clamping bracket 103, and openings are formed around the inside of the clamping bracket 103. A clamping groove 105 is provided, in which a clamping sliding rod 106 is fixedly installed inside the clamping groove 105. A clamping sliding sleeve 107 is slidably connected to the outside of the clamping sliding rod 106. A clamping limiting card 108 is fixedly installed at the bottom of the clamping sliding sleeve 107 and is slidably connected to a spiral limiting bracket 102. A limiting slider 109 is fixedly installed at the top of the clamping sliding sleeve 107 and is slidably connected to a clamping bracket 103. A clamping spring 110 is fixedly installed on one side of the limiting slider 109. A spring telescopic rod 111 is provided inside the clamping spring 110. A first arc-shaped plate 112 is fixedly installed on the side of the spring telescopic rod 111 away from the limiting slider 109. Rotating supports 113 are fixedly installed on both sides of the first arc-shaped plate 112. A second arc-shaped plate 114 is rotatably connected to the outer side of the rotating supports 113. A clamping rotating rod 115 is rotatably connected to the inner side of each of the two second arc-shaped plates 114. The clamping rotating rod 115 is rotatably connected to the limiting slider 109. Wafers of different sizes are placed on the clamping bracket 103. Rotating the rotating lever 104 drives the clamping bracket 103 to rotate. The spiral limiting bracket 102 and the clamping limiting card 108 slide... The dynamic connection allows the clamping limit card 108 to drive the clamping sliding sleeve 107 to slide outside the clamping sliding rod 106. At the same time, the clamping sliding sleeve 107 drives the limit slider 109 to move. When the second arc plate 114 contacts the surface of the wafer, the second arc plate 114 can rotate under the action of the rotating support 113. At the same time, the first arc plate 112 can move by utilizing the elastic force of the clamping spring 110. Through the first arc plate 112 and the second arc plate 114, multi-point clamping of the wafer can be achieved, which can realize clamping and fixing of different sizes, and at the same time improve the stability of wafer clamping.

[0031] The adjusting mechanism 2 includes an adjusting base 201. A rotating bracket 202 is symmetrically mounted on one side of the top of the adjusting base 201. A rotating knob 203 is rotatably connected to the outer side of the rotating bracket 202. A rotating worm gear 204 is fixedly mounted on one side of the rotating knob 203. The rotating worm gear 204 is rotatably connected to the rotating bracket 202. A rotating worm wheel 205 is meshed with one side of the rotating worm gear 204. The rotating worm wheel 205 is rotatably connected to the adjusting base 201. An adjusting disc 206 is fixedly mounted on the top of the rotating worm wheel 205. An adjusting groove 207 is formed inside the adjusting disc 206. An adjusting mechanism is fixedly mounted inside the adjusting groove 207. The sliding rod 208 is slidably connected to an adjusting sliding sleeve 209, which is fixedly installed at the bottom of the fixed support 101. The fixed support 101 is slidably connected to the adjusting disk 206. The rotating knob 203 drives the rotating worm 204 to rotate. The rotating worm 204 and the rotating worm wheel 205 are meshed together, which enables the adjustment disk 206 to rotate and the wafer to rotate. At the same time, the sliding connection between the adjusting sliding sleeve 209 and the adjusting sliding rod 208 enables the fixed support 101 and the wafer to move, which facilitates the observation of the wafer.

[0032] Working principle: Before using this metallurgical microscope stage and slide holder, it is necessary to check the overall condition of the device to ensure it can function properly. Figure 1 - Figure 6 As shown, firstly, wafers of different sizes are placed on the clamping bracket 103. Rotating the lever 104 causes the clamping bracket 103 to rotate. Utilizing the sliding connection between the spiral limiting bracket 102 and the clamping limiting card 108, the clamping limiting card 108 causes the clamping sliding sleeve 107 to slide outside the clamping sliding rod 106. Simultaneously, the clamping sliding sleeve 107 causes the limiting slider 109 to move. When the second arc-shaped plate 114 contacts the surface of the wafer, the rotation of the second arc-shaped plate 114 is achieved under the action of the rotating support 113. Simultaneously, the elastic force of the clamping spring 110 enables... The movement of the first arc plate 112 enables multi-point clamping of the wafer via the first arc plate 112 and the second arc plate 114, allowing for clamping and fixing of wafers of different sizes while improving the stability of wafer clamping. Secondly, the rotation of the knob 203 drives the rotation of the worm gear 204. Utilizing the meshing connection between the worm gear 204 and the worm wheel 205, the rotation of the adjusting disk 206 is achieved, thus enabling the rotation of the wafer. Simultaneously, the sliding connection between the adjusting sliding sleeve 209 and the adjusting sliding rod 208 allows for the movement of the fixed support 101 and the wafer, facilitating wafer observation.

[0033] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A metallurgical microscope stage support fixture, comprising a wafer fixing mechanism (1) and a clamping bracket (103) mounted on the top of the wafer fixing mechanism (1). The wafer fixing mechanism (1) is provided with an adjustment mechanism (2) at its bottom, and an adjustment disk (206) is provided at the top of the adjustment mechanism (2). Its features are, Also includes: The wafer fixing mechanism (1) includes a fixed support (101), a spiral limiting bracket (102) is fixedly installed inside the fixed support (101), and the clamping bracket (103) is rotatably connected to the fixed support (101). Among them, a number of rotating levers (104) are fixedly installed on the outside of the clamping bracket (103), and clamping grooves (105) are opened around the inside of the clamping bracket (103). The clamping slide groove (105) is fixedly installed with a clamping slide rod (106), and the clamping slide rod (106) is slidably connected with a clamping slide sleeve (107) on the outside.

2. The metallurgical microscope stage support fixture according to claim 1, characterized in that: The bottom of the clamping sliding sleeve (107) is fixedly installed with a clamping limit card (108), which is slidably connected to the spiral limit bracket (102). The top of the clamping sliding sleeve (107) is fixedly installed with a limit slider (109), which is slidably connected to the clamping bracket (103).

3. The metallurgical microscope stage support fixture according to claim 2, characterized in that: A clamping spring (110) is fixedly installed on one side of the limiting slider (109). A spring telescopic rod (111) is provided inside the clamping spring (110). A first arc plate (112) is fixedly installed on the side of the clamping spring (110) and the spring telescopic rod (111) away from the limiting slider (109). Rotating supports (113) are fixedly installed on both sides of the first arc plate (112).

4. The metallurgical microscope stage support fixture according to claim 3, characterized in that: The outer side of the rotating support (113) is rotatably connected to a second arc plate (114), and the inner sides of the two second arc plates (114) are rotatably connected to a clamping rotating rod (115), which is rotatably connected to the limiting slider (109).

5. The metallurgical microscope stage support fixture according to claim 1, characterized in that: The adjustment mechanism (2) includes an adjustment base (201), a rotating bracket (202) is symmetrically installed on one side of the top of the adjustment base (201), a rotating knob (203) is rotatably connected to the outside of the rotating bracket (202), a rotating worm gear (204) is fixedly installed on one side of the rotating knob (203), and the rotating worm gear (204) is rotatably connected to the rotating bracket (202).

6. The metallurgical microscope stage support fixture according to claim 5, characterized in that: The rotating worm (204) is meshed with a rotating worm wheel (205) on one side. The rotating worm wheel (205) is rotatably connected to the adjusting base (201). The adjusting plate (206) is fixedly installed on the top of the rotating worm wheel (205). The adjusting plate (206) has an adjusting groove (207) inside.

7. A metallurgical microscope stage support fixture according to claim 6, characterized in that: An adjusting sliding rod (208) is fixedly installed inside the adjusting slide groove (207). An adjusting sliding sleeve (209) is slidably connected to the outside of the adjusting sliding rod (208). The adjusting sliding sleeve (209) is fixedly installed at the bottom of the fixed support (101). The fixed support (101) is slidably connected to the adjusting plate (206).

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