Ion beam polishing device

Abstract

The utility model belongs to the technical field of ion beam polishing, and particularly relates to an ion beam polishing device which comprises a vacuum box, an ion source is installed at the top end in the vacuum box, a movable turnover mechanism is installed in the vacuum box and comprises a gear and a movable sleeve, supporting plates are fixed to the two sides in the vacuum box, and the movable sleeve is sleeved with the gear. By arranging the moving and overturning structure, the clamping ring can be driven to horizontally move to the box door of the vacuum box, the lens can be conveniently taken and placed, the clamping ring and the lens are driven to overturn through meshing transmission between a gear and teeth, and therefore the lens can be automatically overturned in the vacuum box, and the lens can be conveniently taken and placed. According to the lens polishing device, ion beam polishing treatment can be conveniently conducted on the two faces of a lens, in addition, through the arrangement of an adjusting mechanism, a stabilizing rod and a spring, the lens can be stably clamped through two clamping rings, and lenses with different diameters can be stably clamped and installed.

Description

Technical Field

[0001] This solution belongs to the field of ion beam polishing, specifically involving an ion beam polishing device. Background Technology

[0002] Polishing is a crucial process in lens manufacturing, significantly improving surface accuracy, overall quality, and optical performance. Ion beam polishing is an advanced non-contact polishing technology. Its working principle involves bombarding the surface of an optical lens with a high-energy ion beam emitted from an ion source in a vacuum environment, achieving atomic-level material removal through physical sputtering. This technology is renowned for its high precision, high certainty, excellent surface quality, and wide range of applications. During ion source polishing, both sides of the lens need to be polished.

[0003] A search revealed that an invention patent application with publication number CN119238225A discloses an ion beam polishing device, which includes a vacuum chamber, a first polishing mechanism, a second polishing mechanism, and a clamping mechanism. The vacuum chamber has an installation space, and the second polishing mechanism and the first polishing mechanism are symmetrically arranged in the installation space. The clamping mechanism includes a clamping component and a fixing component. The fixing component is located on the inner bottom surface of the vacuum chamber. The clamping component includes two lifting sleeves, two telescopic rods, and two clamps. The lifting sleeves are slidably connected to the fixing component to allow the lifting sleeves to be adjusted up and down. The telescopic rods connect the lifting sleeves and the clamps, and the clamps are used to fix lenses.

[0004] In existing technologies, polishing both sides of a lens requires disassembling the lens, manually flipping it, and then reinstalling it. This is laborious and time-consuming, resulting in a slow polishing speed. It also fails to automatically flip the lens inside the vacuum chamber. Furthermore, when installing and clamping lenses of different diameters, it is inconvenient to use elastic snap-fit ​​placement before tightening the connection, and it is not easy to adjust and move the installation structure to stably clamp and install lenses of different diameters. Utility Model Content

[0005] The purpose of this solution is to provide an ion beam polishing device to solve the problem that in the existing technology, lenses need to be manually disassembled, flipped, and reinstalled, which is time-consuming. At the same time, it also solves the problem that it is not convenient to adjust the lens mounting structure to stably clamp lenses of different diameters.

[0006] To achieve the above objectives, this solution provides an ion beam polishing device, including a vacuum chamber. An ion source is installed at the top of the interior of the vacuum chamber. A moving and flipping mechanism is installed inside the vacuum chamber, comprising a gear and a moving sleeve. Support plates are fixed on both sides of the interior of the vacuum chamber. A support rod is fixed at the bottom of the support plate. Teeth are evenly fixed at the top of the support plate. The gear meshes with the top of the teeth. A rotating column is fixed in the middle of the outer side of the gear. Limit grooves are opened on both sides of the vacuum chamber. The outer end of the rotating column slides into the limit groove. The moving sleeve slides onto the surface of the rotating column. An electric push rod fixed to the side wall of the vacuum chamber is connected to one side of the moving sleeve. A mounting plate is fixed to the inner side of the gear. A snap-fit ​​ring is installed on one side of the mounting plate. An adjustment mechanism is connected between the snap-fit ​​ring and the mounting plate.

[0007] The principle of this solution is as follows: During use, the vacuum chamber is opened, and the electric push rod extends and retracts, causing the moving sleeve to move along the limiting groove. This drives the rotating column and gear to move, and the gear meshes with the teeth at the top of the support plate, thus causing the mounting plate 5, adjusting plate 9, and locking ring 4 to move horizontally to the opening of the vacuum chamber during rotation. The two locking rings are pulled outwards, compressing the spring. Simultaneously, the adjusting plate moves along the insertion groove, placing the lens between the two locking rings. After releasing the locking rings, the spring extends and springs the connecting block, causing the two locking rings to clamp the lens on both sides, clamping and installing the lens in the middle of the locking groove inside the two locking rings. Finally, the first nut is tightened to secure the connecting column and adjusting plate. The lens is securely connected to the mounting plate. After installation, the electric push rod retracts and resets, causing the retaining ring and lens to rotate horizontally to be directly below the ion source, keeping them horizontally upward. Then, the lens is polished by the ion source using an ion beam. After one side of the lens is polished, the electric push rod extends and retracts, causing the gear on the support plate to rotate half a revolution, thereby flipping the mounting plate, adjusting plate, retaining the retaining ring, and lens, keeping the other unpolished side of the lens facing upward. The ion source moves to be directly above the lens via a moving guide rail for ion beam polishing. In this way, the lens can be automatically flipped inside the vacuum chamber, allowing for ion beam polishing of both sides of the lens, which is quite convenient and efficient.

[0008] The technical advantages of this solution are as follows: By incorporating a movable flipping structure, the locking ring can be moved horizontally to the door of the vacuum chamber for easy lens loading and unloading. Furthermore, the meshing transmission between gears drives the locking ring and lens to flip, allowing for automatic lens flipping inside the vacuum chamber. This facilitates ion beam polishing of both sides of the lens. Additionally, the inclusion of an adjustment mechanism, stabilizing rod, and spring allows for stable lens clamping via two locking rings, enabling stable clamping and installation of lenses of different diameters.

[0009] Furthermore, the adjustment mechanism includes an adjustment plate, which is fixed to the outside of the snap-fit ​​ring, and its other end is securely connected to the mounting plate. The snap-fit ​​ring has a semi-circular structure and is horizontally positioned. The adjustment plate is used to adjust the position of the snap-fit ​​ring.

[0010] Furthermore, the mounting plate has an internal insertion slot, and the outer end of the adjusting plate slides into the insertion slot. Both the mounting plate and the adjusting plate are rectangular plate structures and are horizontally positioned. The insertion slot is used to adjust the mounting plate.

[0011] Furthermore, a guide groove is formed at the top of the insertion slot, and a connecting post is fixed in the middle of the top of the adjusting plate. The connecting post slides through the guide groove, and the length of the guide groove is less than the length of the insertion slot. The connecting post is used to securely install the adjusting plate and the retaining ring.

[0012] Furthermore, the connecting post is a threaded post structure and is vertically arranged. A first nut is connected to its surface at the top of the guide groove. The connecting post is a threaded post structure and is vertically arranged. The first nut is used to securely install the connecting post.

[0013] Furthermore, the inner side of the snap-fit ​​ring has a snap-fit ​​groove, and connecting blocks are fixed at both ends of the snap-fit ​​ring. An insertion hole is formed in the middle of each connecting block. The snap-fit ​​groove is provided for stable snap-fit ​​mounting of the lens.

[0014] Furthermore, a stabilizing rod slides through the interior of the insertion hole. Second nuts are connected to both ends of the stabilizing rod's surface. A spring is slidably sleeved on the surface of the stabilizing rod between the second nuts and the outer side of the connecting block. The stabilizing rod has a threaded rod structure and is horizontally positioned on both sides of the two opposing snap-fit ​​rings. The stabilizing rod and spring provide a stable connection between the two snap-fit ​​rings. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of an embodiment of the present utility model.

[0016] Figure 2 This is an embodiment of the present utility model. Figure 1 A schematic diagram of the moving and flipping mechanism inside the vacuum chamber;

[0017] Figure 3 This is an embodiment of the present utility model. Figure 1 A schematic diagram of the gear and support plate structure;

[0018] Figure 4 This is an embodiment of the present utility model. Figure 1A schematic diagram of the snap-fit ​​ring structure;

[0019] Figure 5 This is an embodiment of the present utility model. Figure 1 A schematic diagram of the stabilizer bar and spring components.

[0020] The following detailed explanation illustrates the specific implementation methods:

[0021] The reference numerals in the accompanying drawings include: vacuum box 1, ion source 2, stabilizing rod 3, snap ring 4, mounting plate 5, support plate 6, support rod 7, gear 8, adjusting plate 9, teeth 10, limiting groove 11, moving sleeve 12, electric push rod 13, insertion groove 14, guide groove 15, rotating column 16, insertion hole 17, connecting block 18, snap groove 19, connecting column 20, first nut 21, spring 22, and second nut 23. Detailed Implementation

[0022] The basic implementation examples are as follows: Figures 1-5 As shown: An ion beam polishing device includes a vacuum chamber 1. An ion source 2 is installed at the top of the vacuum chamber 1 for ion beam polishing of a lens. A moving and flipping mechanism is installed inside the vacuum chamber 1 for flipping a retaining ring 4 and a lens. The moving and flipping mechanism includes a gear 8 and a moving sleeve 12. Support plates 6 are fixed on both sides of the vacuum chamber 1 for supporting the retaining ring 4 and the lens. A support rod 7 is fixed to the bottom of the support plate 6 and is fixed to the inner wall of the vacuum chamber 1 for supporting the support plate 6. Teeth 10 are evenly fixed to the top of the support plate 6 for meshing and driving the gear 8. The gear 8 is meshed with and connected to... A rotating column 16 is fixed to the top of the tooth 10 and the middle of the outer side of the gear 8. The rotating column 16 is used to push the gear 8, the mounting plate 5, the snap ring 4 and the lens to move. Limiting grooves 11 are opened on both sides of the vacuum box 1. The outer end of the rotating column 16 is slidably inserted into the limiting groove 11. The sliding sleeve 12 is slidably sleeved on the surface of the rotating column 16. An electric push rod 13 fixed to the side wall of the vacuum box 1 is connected to one side of the sliding sleeve 12. The electric push rod 13 is used to push the snap ring 4 and the lens to move and flip. A mounting plate 5 is fixed to the inner side of the gear 8. The mounting plate 5 is used to install the snap ring 4. A snap ring 4 is installed on one side of the mounting plate 5. The snap ring 4 is used to clamp and install the lens. An adjustment mechanism is connected between the snap ring 4 and the mounting plate 5.

[0023] like Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5As shown, the adjustment mechanism includes an adjustment plate 9, which is fixed to the outside of the snap ring 4. Its other end is securely connected to the mounting plate 5. The snap ring 4 is a semi-circular ring structure and is horizontally positioned. The adjustment plate 9 is used to adjust the position of the snap ring 4. The mounting plate 5 has an insertion groove 14 inside, and the outer end of the adjustment plate 9 slides into the insertion groove 14. Both the mounting plate 5 and the adjustment plate 9 are rectangular plate structures and are horizontally positioned. The insertion groove 14 is used to adjust the mounting adjustment plate 9. A guide groove 15 is provided at the top of the insertion groove 14. A connecting post 20 is fixed in the middle of the top of the adjustment plate 9. The connecting post 20 slides through the guide groove 15. The length of the guide groove 15 is less than the length of the insertion groove 14. The connecting post 20 is used to securely mount the adjustment plate 9 and the snap ring 4. The connecting post 20 is a threaded post structure and is vertically... A first nut 21 is connected to the top of the guide groove 15. The connecting post 20 is a threaded post structure and is vertically set. The first nut 21 is used to fasten the connecting post 20. The inner side of the snap ring 4 has a snap groove 19. The two ends of the snap ring 4 are fixed with connecting blocks 18. The middle of the connecting block 18 has a plug hole 17. The snap groove 19 is used to stably snap the lens. The inside of the plug hole 17 slides through the stabilizing rod 3. The two ends of the surface of the stabilizing rod 3 are connected with second nuts 23. The surface of the stabilizing rod 3 and the outer side of the connecting block 18 are slidably sleeved with spring 22. The stabilizing rod 3 is a threaded rod structure and is horizontally set on both sides of the two opposing snap rings 4. The stabilizing rod 3 and spring 22 are used to stably connect the two snap rings 4.

[0024] The specific implementation process of this utility model is as follows: In use, the vacuum chamber 1 is opened, and the electric push rod 13 extends and retracts to drive the moving sleeve 12 to move along the limiting groove 11, thereby pushing the rotating column 16 and gear 8 to move. The gear 8 is meshed with the teeth 10 at the top of the support plate 6, thereby driving the mounting plate 5, adjusting plate 9 and snap ring 4 to move horizontally to the opening of the vacuum chamber 1 during rotation, pulling the two snap rings 4 outward and compressing the spring 22. At the same time, the adjusting plate 9 moves along the insertion groove 14, placing the lens between the two snap rings 4. After releasing the snap rings 4, the spring 22 extends and springs the connecting block 18, driving the two snap rings 4 to clamp the lens on both sides, clamping and installing the lens in the middle of the snap groove 19 on the inner side of the two snap rings 4, and then turning the first nut 2. 1. Securely connect the connecting column 20 and the adjusting plate 9 to the mounting plate 5. After the lens is installed, the electric push rod 13 retracts and resets, causing the retaining ring 4 and the lens to move horizontally to directly below the ion source 2 during rotation, keeping them horizontal and facing upwards. Then, the lens is polished by the ion source 2 with an ion beam. After one side of the lens is polished, the electric push rod 13 extends and retracts, causing the gear 8 to rotate half a turn on the support plate 6, thereby flipping the mounting plate 5, adjusting plate 9, retaining the retaining ring 4 and the lens, keeping the other unpolished side of the lens facing upwards. The ion source 2 moves to directly above the lens via the moving guide rail to perform ion beam polishing. In this way, the lens can be automatically flipped inside the vacuum chamber 1, thereby performing ion beam polishing on both sides of the lens, which is quite convenient and efficient.

[0025] This design incorporates a movable flipping structure, which allows the locking ring 4 to be moved horizontally to the door of the vacuum chamber 1 for easy lens loading and unloading. The meshing transmission between gear 8 and teeth 10 drives the locking ring 4 and the lens to flip, enabling automatic lens flipping inside the vacuum chamber 1. This facilitates ion beam polishing of both sides of the lens. Furthermore, the inclusion of an adjustment mechanism, a stabilizing rod 3, and a spring 22 allows for stable lens clamping via the two locking rings 4, enabling stable clamping and installation of lenses of different diameters.

[0026] The above are merely embodiments of this utility model. Commonly known structures and characteristics are not described in detail here. It should be noted that those skilled in the art can make various modifications and improvements without departing from the structure of this utility model, and these should also be considered within the scope of protection of this utility model. These modifications will not affect the effectiveness of the implementation of this utility model or the practicality of the patent. The scope of protection claimed in this application shall be determined by the content of its claims, and the specific embodiments described in the specification can be used to interpret the content of the claims.

Claims

1. An ion beam polishing apparatus comprising a vacuum tank, characterized by: An ion source is installed at the top of the vacuum chamber. A moving and flipping mechanism is installed inside the vacuum chamber, which includes a gear and a moving sleeve. Support plates are fixed on both sides of the vacuum chamber. A support rod is fixed at the bottom of the support plate. Teeth are evenly fixed at the top of the support plate. The gear meshes with the top of the teeth. A rotating column is fixed in the middle of the outer side of the gear. Limit grooves are opened on both sides of the vacuum chamber. The outer end of the rotating column slides into the limit groove. The moving sleeve slides onto the surface of the rotating column. An electric push rod fixed to the side wall of the vacuum chamber is connected to one side of the moving sleeve. A mounting plate is fixed to the inner side of the gear. A snap ring is installed on one side of the mounting plate. An adjustment mechanism is connected between the snap ring and the mounting plate.

2. The ion beam polisher of claim 1, wherein: The adjustment mechanism includes an adjustment plate, which is fixed to the outside of the snap ring, and its other end is fastened to the mounting plate. The snap ring is a semi-circular ring structure and is horizontally arranged.

3. The ion beam polisher of claim 2, wherein: The mounting plate has an insertion slot inside, and the outer end of the adjustment plate slides into the insertion slot. Both the mounting plate and the adjustment plate are rectangular plate structures and are horizontally arranged.

4. The ion beam polisher of claim 3, wherein: The top of the insertion slot has a guide groove, and the top center of the adjusting plate has a connecting post fixed thereto. The connecting post slides through the guide groove, and the length of the guide groove is less than the length of the insertion slot.

5. The ion beam polisher of claim 4, wherein: The connecting post is a threaded post structure and is vertically arranged. A first nut is connected to its surface at the top of the guide groove. The connecting post is a threaded post structure and is vertically arranged.

6. The ion beam polisher of claim 1, wherein: The inner side of the snap ring has a snap groove, and the two ends of the snap ring are fixed with connecting blocks. The middle of the connecting block has a plug hole.

7. The ion beam polisher of claim 6, wherein: A stabilizing rod slides through the inside of the insertion hole. A second nut is connected to both ends of the surface of the stabilizing rod. A spring is slidably sleeved on the surface of the stabilizing rod between the second nut and the outside of the connecting block. The stabilizing rod has a threaded rod structure and is horizontally arranged on both sides of the two opposing snap rings.

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