Device for efficiently assembling chemical mechanical grinding head retainer

Abstract

The utility model discloses a device for efficiently assembling a chemical mechanical grinding head retainer, which belongs to the technical field of work fixtures, and comprises a base, an electric telescopic rod, a fixed seat, a rotating disk, a hoop and a retainer mounting platform, the top of the base is fixedly connected with the electric telescopic rod, and the movable end of the electric telescopic rod is connected with the fixed seat; the top of the fixed seat is connected with the bottom of the rotating disc, the top of the rotating disc is connected with the retainer mounting platform, the hoop wraps the periphery of the top of the rotating disc and the periphery of the bottom of the retainer mounting platform, and the retainer mounting platform and the retainer are connected together through screws by the locking tool. The retainer can be efficiently, accurately and horizontally installed, inclination or dislocation is avoided, operation is easy, and assembling efficiency is improved.

Description

Technical Field

[0001] This utility model relates to the field of tooling and fixture technology, and in particular to a device for efficiently assembling the protective ring of a chemical mechanical grinding head. Background Technology

[0002] In chemical mechanical polishing (CMP) technology, the polishing head is one of the core components. Its main function is to achieve surface planarization of the wafer through precise mechanical pressure and rotational motion. The performance of the polishing head directly affects the flatness and processing accuracy of the wafer; therefore, its structural design and assembly quality are of paramount importance.

[0003] The retaining ring is a crucial component of the grinding head, its main function being to secure the grinding head components, provide mechanical support, and protect critical parts from damage. However, in actual assembly, the installation quality of the retaining ring is often difficult to guarantee. The following problems exist: First, traditional assembly methods typically employ simple clamps, which cannot effectively ensure the retaining ring is installed horizontally. The retaining ring is prone to tilting or misalignment during assembly, leading to uneven grinding pressure distribution and affecting the grinding effect. Second, the operational complexity of traditional assembly methods also limits assembly efficiency. The need for repeated adjustments to the retaining ring's position results in a lengthy assembly process, increasing production costs.

[0004] Therefore, those skilled in the art urgently need to develop a device for efficiently assembling the protective ring of a chemical mechanical grinding head, which can efficiently and accurately install the protective ring horizontally, avoid tilting or misalignment, be easy to operate, and improve assembly efficiency. Utility Model Content

[0005] The purpose of this invention is to provide a device for efficiently assembling the protective ring of a chemical mechanical grinding head, which can efficiently and accurately install the protective ring horizontally, avoid tilting or misalignment, is simple to operate, and improves assembly efficiency.

[0006] To achieve the above objectives, this utility model provides a device for efficiently assembling a protective ring for a chemical mechanical grinding head, comprising a base, an electric telescopic rod, a fixed seat, a rotating disk, a clamp, and a protective ring mounting platform. The electric telescopic rod is fixedly connected to the top of the base, and the movable end of the electric telescopic rod is connected to the fixed seat. The top of the fixed seat is connected to the bottom of the rotating disk, and the top of the rotating disk is connected to the protective ring mounting platform. The clamp wraps around the outer periphery of the top of the rotating disk and the outer periphery of the bottom of the protective ring mounting platform. A locking tool connects the protective ring mounting platform and the protective ring together with screws.

[0007] Preferably, the rotating disk is internally provided with ball bearings, and the rotating disk is rotatably connected to the fixed base through the ball bearings.

[0008] Preferably, the top of the rotating disk is provided with a fixing pin one and a pin hole two, and the bottom of the protective ring mounting platform is provided with a pin hole one and a fixing pin two. The protective ring mounting platform is placed on the rotating disk, and the fixing pin one is inserted into the pin hole one, and the fixing pin two is inserted into the pin hole two.

[0009] Preferably, the outer periphery of the rotating disk is provided with numerical markings indicating the screw fixing sequence.

[0010] Preferably, the base has threaded holes evenly distributed on it, and the threaded holes are arranged in a circular pattern.

[0011] Preferably, two handles are fixedly connected to the base, and the two handles are located on both sides of the electric telescopic rod, and the two handles are arranged symmetrically.

[0012] Preferably, the clamp includes two semi-rings, one end of which is hinged together. The two semi-rings wrap around the outer periphery of the top of the rotating disk and the outer periphery of the bottom of the protective ring mounting platform. A bolt is provided at the other end of one of the semi-rings, and the bolt passes through the other end of the other semi-ring and the two semi-rings are connected together with a nut.

[0013] The advantages and positive effects of the device for efficiently assembling the protective ring of a chemical mechanical grinding head described in this utility model are:

[0014] 1. The multiple fixing designs of clamps and fixing pins enhance the stability of the protective ring installation platform, ensuring that the protective ring remains level during assembly and improving assembly accuracy.

[0015] 2. The diagonal number markings on the rotating disc make it easy for people to install screws at the bottom of the protective ring mounting platform in a diagonal manner.

[0016] 3. The handrails on both sides of the base facilitate the movement and handling of the equipment, adapting to the needs of different work scenarios.

[0017] The technical solution of this utility model will be further described in detail below with reference to the accompanying drawings and embodiments. Attached Figure Description

[0018] Figure 1 This is a three-dimensional structural diagram of a device for efficiently assembling a protective ring for a chemical mechanical grinding head according to the present invention;

[0019] Figure 2 This is a side view of a device for efficiently assembling a protective ring for a chemical mechanical grinding head according to the present invention;

[0020] Figure 3 This is a structural diagram of the clamp position of this utility model;

[0021] Figure 4This is a schematic diagram of the fixed base structure of this utility model.

[0022] Figure Labels

[0023] 1. Base; 2. Electric telescopic rod; 3. Fixed seat; 4. Rotary disc; 5. Clamp; 6. Fixing pin one; 7. Pin hole two; 8. Locking tool; 9. Handle; 10. Threaded hole; 11. Protective ring mounting platform. Detailed Implementation

[0024] In the description of this utility model, it should be noted that the terms "upper," "lower," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship commonly used when the utility model product is in use. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In the description of this utility model, it should also be noted that, unless otherwise explicitly specified and limited, the terms "set," "install," and "connect" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0025] In this application, unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains. In case of any inconsistency, the meaning set forth in this specification or derived from the content described herein shall prevail. Furthermore, the terminology used herein is for the purpose of describing embodiments of this application only and is not intended to limit the scope of this application.

[0026] The embodiments of this utility model will now be described in detail with reference to the accompanying drawings.

[0027] like Figure 1-4 As shown, an efficient assembly device for a chemical mechanical grinding head retainer ring includes a base 1, an electric telescopic rod 2, a fixed base 3, a rotating disk 4, a clamp 5, and a retainer ring mounting platform 11. The electric telescopic rod 2 is fixedly connected to the top of the base 1. The movable end of the electric telescopic rod 2 is connected to the fixed base 3. The top of the fixed base 3 is connected to the bottom of the rotating disk 4. The top of the rotating disk 4 is connected to the retainer ring mounting platform 11. The clamp 5 wraps around the outer periphery of the top of the rotating disk 4 and the outer periphery of the bottom of the retainer ring mounting platform 11. A locking tool 8 connects the retainer ring mounting platform 11 to the retainer ring using screws.

[0028] Specifically, the movable end of the electric telescopic pole 2 is fixedly connected to the fixed base 3 by screws.

[0029] Specifically, the locking tool 8 is used to tighten the screws, which is the existing structure.

[0030] Specifically, the electric telescopic rod 2 uses the lifting and fixing base 3 and above to precisely adjust the protective ring to the required position. The clamp 5 securely connects the rotating disc 4 and the protective ring mounting platform 11 together.

[0031] The rotating disk 4 is equipped with ball bearings inside, and the rotating disk 4 is rotatably connected to the fixed base through the ball bearings.

[0032] Specifically, the ball bearing allows the rotating disk 4 to rotate on the fixed seat 3, and the rotating disk 4 drives the retaining ring mounting platform 11 to rotate, so that the retaining ring mounting platform 11 and the retaining ring can be located in different directions.

[0033] The top of the rotating disk 4 is provided with a fixing pin 6 and a pin hole 7. The bottom of the retaining ring mounting platform 11 is provided with a pin hole 1 and a fixing pin 2. The retaining ring mounting platform 11 is placed on the rotating disk 4. The fixing pin 6 is inserted into the pin hole 1. The fixing pin 2 is inserted into the pin hole 7. Specifically, by inserting the fixing pins into the pin holes, the retaining ring mounting platform 11 and the rotating disk 4 are securely connected, ensuring that the retaining ring mounting platform 11 remains horizontal during assembly.

[0034] The outer periphery of the rotating disk 4 is marked with numerical markings to indicate the screw fixing sequence. Specifically, during installation, the protective ring can be fixed to the protective ring mounting platform 11 first in a diagonal manner according to these markings, then the protective ring is fixed in a cross shape, and then the protective ring is fixed again in a diagonal manner between the cross shapes. This diagonal symmetrical fixing method improves the stability of the protective ring installation and ensures a firm connection between the protective ring mounting platform 11 and the protective ring.

[0035] The base 1 has evenly spaced threaded holes 10. The threaded holes 10 are arranged in a circular pattern. Specifically, the base 1 can be securely connected to other equipment through the threaded holes 10.

[0036] Two handles 9 are fixedly connected to the base 1. The two handles 9 are located on both sides of the electric telescopic rod 2. The two handles 9 are symmetrically arranged. Specifically, the two handles 9 facilitate the movement of the base 1 and the structures on the base 1.

[0037] The clamp 5 includes two semi-rings, one end of which is hinged together. The two semi-rings wrap around the top periphery of the rotating disk 4 and the bottom periphery of the protective ring mounting platform 11. One of the semi-rings has a bolt at the other end, which passes through the other end of the other semi-ring and is then connected to the two semi-rings with a nut.

[0038] The usage process of this utility model is as follows:

[0039] First, install the bottom of the electric telescopic pole 2 on the base 1. Then, install the fixed seat 3 on the movable end of the electric telescopic pole 2. Finally, install the rotating disk 4 on the top of the fixed seat 3.

[0040] Secondly, the protective ring mounting platform 11 is placed on the rotating disk 4, and the protective ring mounting platform 11 and the rotating disk 4 are securely connected by inserting the first fixing pin 6 into the first pin hole and the second fixing pin into the second pin hole 7.

[0041] Then, the bottom periphery of the protective ring mounting platform 11 and the top periphery of the rotating disk 4 are connected together using clamps 5.

[0042] Finally, based on the numerical markings on the rotating disc 4, the retaining ring mounting platform 11 and the retaining ring are connected together by screws using the locking tool 8.

[0043] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and not to limit it. Although the utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can still be made to the technical solution of this utility model, and these modifications or equivalent substitutions cannot cause the modified technical solution to deviate from the spirit and scope of the technical solution of this utility model.

Claims

1. A device for efficiently assembling a protective ring for a chemical mechanical grinding head, characterized in that: The device includes a base, an electric telescopic rod, a fixed base, a rotating disk, clamps, and a protective ring mounting platform. The electric telescopic rod is fixedly connected to the top of the base, and the movable end of the electric telescopic rod is connected to the fixed base. The top of the fixed base is connected to the bottom of the rotating disk, and the top of the rotating disk is connected to the protective ring mounting platform. The clamps wrap around the outer periphery of the top of the rotating disk and the outer periphery of the bottom of the protective ring mounting platform. A locking tool connects the protective ring mounting platform and the protective ring together with screws.

2. The apparatus for efficiently assembling a retaining ring for a chemical mechanical polishing head according to claim 1, wherein: The rotating disk is equipped with ball bearings inside, and the rotating disk is rotatably connected to the fixed base through the ball bearings.

3. The apparatus for efficiently assembling a retaining ring for a chemical mechanical polishing head of claim 2, wherein: The top of the rotating disk is provided with a fixing pin one and a pin hole two, and the bottom of the protective ring mounting platform is provided with a pin hole one and a fixing pin two. The protective ring mounting platform is placed on the rotating disk, and the fixing pin one is inserted into the pin hole one, and the fixing pin two is inserted into the pin hole two.

4. The apparatus for efficiently assembling a retaining ring for a chemical mechanical polishing head of claim 3, wherein: The outer periphery of the rotating disk is marked with numerical markings to indicate the screw fixing order.

5. The apparatus for efficiently assembling a chemical mechanical grinding head retainer according to claim 1, characterized in that: The base is provided with threaded holes evenly spaced in a circular arrangement.

6. The apparatus for efficiently assembling a retaining ring for a chemical mechanical polishing head of claim 5, wherein: Two handles are fixedly connected to the base, and the two handles are located on both sides of the electric telescopic rod, and the two handles are arranged symmetrically.

7. The apparatus for efficiently assembling a retaining ring for a chemical mechanical polishing head of claim 1, wherein: The clamp includes two semi-rings, one end of which is hinged together. The two semi-rings wrap around the outer periphery of the top of the rotating disk and the outer periphery of the bottom of the protective ring mounting platform. A bolt is provided at the other end of one of the semi-rings. After the bolt passes through the other end of the other semi-ring, the two semi-rings are connected together with a nut.

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