Observation mirror for vacuum evaporation equipment
By designing a transparent mounting plate and adjusting lens for the observation lens in the vacuum evaporation equipment, combined with a rotating structure and sealing ring, the problem of blurred vision caused by deposition in the observation window was solved, improving the ease of operation and production stability of the equipment.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- WUXI XINPU SEMICON TECH CO LTD
- Filing Date
- 2025-05-06
- Publication Date
- 2026-04-17
AI Technical Summary
After prolonged use, the observation window of the vacuum evaporation equipment becomes blurred due to material deposition, affecting the operator's vision and judgment of the equipment status, resulting in reduced work efficiency and decreased film quality.
An observation lens for a vacuum evaporation equipment has been designed, comprising a fixed base, lower and upper mounting brackets, a transparent mounting plate, and an adjustable lens. The lens angle can be adjusted by rotating the structure to ensure a clear line of sight, and a vacuum level is maintained by a sealing ring.
This allows for maintaining a clear line of sight without the need for frequent replacement or cleaning of the observation lens, improving operational convenience and safety, ensuring production efficiency and product quality, and extending the continuous operating time of the equipment.
Smart Images
Figure CN224133163U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of auxiliary structures for observation during evaporation, and specifically to an observation mirror for vacuum evaporation equipment. Background Technology
[0002] Vacuum evaporation is a thin film fabrication process performed in a high-vacuum environment. Its core process involves heating a selected material (often called the target material) to evaporate or sublimate it, thereby depositing and precipitating a uniform, dense thin film on a carefully prepared substrate surface. This technology has wide applications, covering multiple fields such as optics, electronics, decoration, and solar energy, because it can precisely control the thickness, composition, and structure of the film, thus giving products specific functions or performance enhancements. To achieve this process, specialized vacuum evaporation equipment is required. This equipment typically consists of key components such as a vacuum chamber, heating system, cooling system, pneumatic control system, substrate clamping device, and observation window. The vacuum chamber provides a low-pressure or even gas-molecule-free environment to reduce the impact of impurities on film quality; the heating system is responsible for heating the target material to the evaporation or sublimation temperature; the cooling system controls the substrate temperature to ensure uniform and firm film deposition; and the gas control system regulates the gas atmosphere within the chamber to meet the specific requirements of thin film fabrication.
[0003] During the operation of vacuum evaporation equipment, to ensure the stability and quality of the thin film deposition process, operators need to continuously monitor the internal operation of the equipment, including key parameters such as the evaporation state of the target source, the temperature distribution of the substrate, and the growth rate of the thin film. For this purpose, the equipment is usually equipped with an observation window, allowing operators to perform real-time monitoring without affecting the vacuum level inside the chamber.
[0004] However, over time, gaseous molecules of the material inevitably come into contact with the observation window surface during the vapor deposition process and gradually deposit there, forming a thin layer of deposit. This deposit gradually thickens as the vapor deposition process continues, eventually causing the observation window to become blurred, severely affecting the operator's vision and clear judgment of the internal status of the equipment. This situation not only reduces work efficiency but may also lead to a decline in film quality or production interruption because equipment malfunctions or process abnormalities cannot be detected and dealt with in a timely manner. Utility Model Content
[0005] The purpose of this invention is to provide an observation mirror for vacuum evaporation equipment, which has the advantages of good observation effect, clear line of sight and convenient operation.
[0006] To achieve the above objectives, this utility model provides the following technical solution: an observation lens for a vacuum evaporation equipment, comprising a fixed base, a lower mounting bracket, and an upper mounting bracket connected and fixed from bottom to top. The lower mounting bracket and the upper mounting bracket each have a lower opening and an upper opening in their center, forming an observation channel. A transparent mounting plate is disposed within the observation channel, and an adjustment assembly passes through the mounting plate. The fixed base has an observation notch facing the observation channel. The adjustment assembly includes an adjustment lens located between the mounting plate and the fixed base, which blocks the mounting plate. The adjustment assembly also includes a rotating structure connected to the center of the adjustment lens, with the observation channel extending from the top of the rotating structure. The rotating structure drives the adjustment lens to rotate, so that different positions of the adjustment lens face the observation notch.
[0007] Preferably, the rotating structure includes a fixed body passing through the center of the mounting plate and a rotating body passing through the center of the fixed body. The fixed body includes a cap section at the top and a bolt section at the bottom. The bolt section has external threads on its outer side, and a nut is locked onto the external threads. The cap section and the nut respectively abut against the top and bottom surfaces of the mounting plate. The bottom of the rotating body passes through the cap section and the bolt section and connects to the adjusting lens. The top of the rotating body extends out of the observation channel. The rotating structure enables stable installation and flexible rotation of the adjusting lens. Specifically, the fixed body, as a key component connecting the mounting plate and the rotating body, securely clamps the mounting plate in the middle with its cap section at the top and the nut locked onto the external threads of the bolt section at the bottom, ensuring the stability of the entire adjusting assembly. Simultaneously, the rotating body, as a supporting component for the adjusting lens, passes through the cap section and the bolt section at the bottom and connects to the adjusting lens, achieving a fixed connection between the adjusting lens and the rotating structure. The design of the observation channel extending from the top of the rotating body allows operators to easily access the rotating body from the outside and adjust the angle and position of the lens by rotating it to achieve the best observation effect.
[0008] Preferably, a first annular sealing groove is formed on the top surface of the lower mounting bracket, and a first sealing ring is fitted inside the first annular sealing groove. The bottom surface of the mounting plate abuts against the first sealing ring. The mounting plate is fixed on the lower mounting bracket, and its bottom surface tightly abuts against the first sealing ring, forming an effective sealing interface. This sealing interface can effectively block interference from the external environment, ensure the cleanliness and vacuum level inside the observation channel, and thus provide a stable and reliable working environment for the vapor deposition process.
[0009] Preferably, a second annular sealing groove is formed on the bottom surface of the upper mounting bracket, and a second sealing ring is fitted inside the second annular sealing groove. The top surface of the mounting plate abuts against the second sealing ring. Similarly, the mounting plate is fixed under the upper mounting bracket, and its top surface tightly abuts against the second sealing ring, forming an effective sealing interface. This sealing interface can effectively block interference from the external environment, ensuring the cleanliness and vacuum level inside the observation channel, thereby providing a stable and reliable working environment for the vapor deposition process.
[0010] Preferably, the bottom surface of the cap segment has a third annular sealing groove, and a third sealing ring is fitted inside the third annular sealing groove. The top surface of the mounting plate abuts against the third sealing ring. When the mounting plate is installed in conjunction with the cap segment, the top surface of the mounting plate will tightly abut against the third sealing ring, thereby improving the sealing effect, ensuring good sealing at the connection between components, and preventing gas or liquid leakage.
[0011] Preferably, an operating head is fixed to the top of the rotating body. The operating head provides the operator with an intuitive and easy-to-operate part, allowing them to easily rotate the rotating body and adjust the angle and position of the lens.
[0012] Preferably, a rotating base is fixed to the top surface of the upper mounting bracket. A toggle arm capable of rotating around the rotating base is mounted on the rotating base. A baffle plate is mounted on the toggle arm. When the toggle arm rotates, the baffle plate can block or open the observation channel. The rotating base fixed to the top surface of the upper mounting bracket, along with the toggle arm and baffle plate capable of rotating around it, constitutes an ingenious blocking mechanism. When it is necessary to temporarily close the observation channel to prevent external impurities or light from entering, the operator can simply rotate the toggle arm to block the observation channel. When observation is needed, simply rotate the toggle arm in the opposite direction to open the observation channel. This design not only provides additional protection but also increases operational flexibility.
[0013] Preferably, a limiting ring is protruding from the bottom edge of the lower mounting bracket, and the inner wall of the limiting ring abuts against the side of the fixed base. The limiting ring, through its tight contact with the side of the fixed base, ensures the accurate positioning of the lower mounting bracket during installation, preventing horizontal movement or offset. This design improves the stability and reliability of the entire observation mirror structure.
[0014] Preferably, the bottom of the lower mounting bracket is connected to the top of the fixed base via a threaded connection structure. This threaded connection structure not only provides strong connection force but also allows for convenient disassembly and reassembly when needed.
[0015] Preferably, both the upper and lower mounting brackets have interconnected screw holes, and threaded connection structures pass through these screw holes to connect them. This design, where interconnected screw holes and threaded connection structures are present on both the upper and lower mounting brackets, allows the two mounting brackets to be tightly fixed together, forming a single integrated structure.
[0016] Compared with the prior art, the beneficial effects of this utility model are:
[0017] 1. This application, by setting up a viewing plate and adjusting lens in the observation channel, as well as an observation notch on the fixed base, can form a route that allows direct observation of the inside of the vacuum evaporation equipment, ensuring real-time monitoring and judgment of the internal status of the equipment.
[0018] 2. When the adjusting lens portion facing the observation notch becomes dirty due to prolonged use or material deposition during the vapor deposition process, the operator does not need to replace the entire observation lens or adjusting lens. Instead, the operator can simply adjust the angle of the adjusting lens by rotating the rotating structure so that the still clean portion of the adjusting lens faces the observation notch. This ensures a clear line of sight without the need for frequent replacement or cleaning of the entire adjusting lens, thus effectively saving material and maintenance costs.
[0019] 3. The design of the adjustment component in this application allows operators to easily adjust the angle and position of the adjustment lens from the outside by rotating the structure, so as to adjust the line of sight without opening the equipment or interrupting the vapor deposition process, which greatly improves the convenience and safety of operation.
[0020] 4. This application enables operators to promptly detect and address equipment malfunctions or process anomalies through a clear field of vision, avoiding production delays or film quality degradation caused by obstructed vision, thereby ensuring stable production efficiency and product quality, and indirectly extending the continuous operating time and maintenance cycle of the equipment. Attached Figure Description
[0021] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. In all the drawings, similar elements or parts are generally identified by similar reference numerals. In the drawings, the elements or parts are not necessarily drawn to scale.
[0022] Figure 1 This is a three-dimensional structural view of the cross-sectional structure of this utility model;
[0023] Figure 2 This is a three-dimensional structural view of the present invention;
[0024] Figure 3 This is a bottom view of the structure of this utility model.
[0025] Figure label:
[0026] 1. Fixed base; 11. Observation notch; 2. Lower mounting bracket; 21. Lower opening; 22. First annular sealing groove; 23. Limiting protrusion ring; 3. Upper mounting bracket; 31. Upper opening; 32. Second annular sealing groove; 33. Screw hole; 4. Mounting through plate; 5. Adjustment assembly; 51. Adjustment lens; 52. Rotating structure; 521. Fixed body; 5211. Cap section; 5212. Bolt section; 5213. Nut; 5214. Third annular sealing groove; 522. Rotating body; 523. Operating head; 6. Rotating seat; 7. Actuating bracket; 71. Baffle plate. Detailed Implementation
[0027] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. The components of the embodiments of this utility model described and shown in the accompanying drawings can typically be arranged and designed in various different configurations.
[0028] Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely to illustrate selected embodiments of the invention. All other embodiments obtained by those skilled in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.
[0029] It should be noted that similar reference numerals and letters in the following figures indicate similar items; therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures. Furthermore, the terms "first," "second," etc., are used only to distinguish descriptions and should not be construed as indicating or implying relative importance.
[0030] like Figures 1 to 3As shown, an observation lens for a vacuum evaporation equipment includes a fixed base 1, a lower mounting bracket 2, and an upper mounting bracket 3 connected and fixed from bottom to top. The lower mounting bracket 2 and the upper mounting bracket 3 are respectively provided with a lower opening 21 and an upper opening 31 in the center, forming an observation channel. A transparent mounting plate 4 is provided in the observation channel, and an adjustment component 5 is provided on the mounting plate 4. The fixed base 1 is provided with an observation notch 11 facing the observation channel. The adjustment component 5 includes an adjustment lens 51 located between the mounting plate 4 and the fixed base 1. The adjustment lens 51 blocks the mounting plate 4. The adjustment component 5 also includes a rotating structure 52 connected to the center of the adjustment lens 51. The top of the rotating structure 52 extends out of the observation channel. The rotating structure 52 is used to drive the adjustment lens 51 to rotate so that different positions of the adjustment lens 51 face the observation notch 11.
[0031] In this embodiment, it should be noted that by installing the viewing plate 4 and the adjusting lens 51 within the observation channel, as well as the observation notch 11 on the fixed base 1, a route can be formed that allows direct observation of the interior of the vacuum evaporation equipment, ensuring real-time monitoring and assessment of the equipment's internal condition. Furthermore, when the portion of the adjusting lens 51 facing the observation notch 11 becomes dirty due to prolonged use or material deposition during the evaporation process, the operator does not need to replace the entire viewing lens or adjusting lens 51. Instead, they can simply adjust the angle of the adjusting lens 51 by rotating the rotating structure 52, ensuring that the still-clean portion of the adjusting lens 51 faces the observation notch 11. This maintains the cleanliness of the viewing lens. The clear field of vision eliminates the need for frequent replacement or cleaning of the entire adjustment lens 51, effectively saving material and maintenance costs. Furthermore, the design of the adjustment component 5 allows operators to easily adjust the angle and position of the adjustment lens 51 from the outside by rotating the structure 52, achieving line-of-sight adjustment without opening the equipment or interrupting the vapor deposition process, greatly improving operational convenience and safety. Moreover, the clear field of vision enables operators to promptly detect and address equipment malfunctions or process anomalies, avoiding production delays or film quality degradation caused by obstructed vision, thereby ensuring stable production efficiency and product quality, and indirectly extending the continuous operating time and maintenance cycle of the equipment.
[0032] In one embodiment, the rotating structure 52 includes a fixing body 521 passing through the center of the mounting plate 4.
[0033] And a rotating body 522 passing through the center of the fixed body 521; wherein, the fixed body 521 includes a cap section 5211 located at the top and a bolt section 5212 located at the bottom. The bolt section 5212 has an external thread on its outer side, and a nut 5213 is locked on the external thread. The cap section 5211 and the nut 5213 respectively abut against the top surface and bottom surface of the mounting plate 4.
[0034] The bottom of the rotating body 522 passes through the cap section 5211 and the bolt section 5212 in sequence and is connected to the adjusting lens 51. The top of the rotating body 522 extends out to form an observation channel.
[0035] In this embodiment, it should be noted that the rotating structure 52 enables the stable installation and flexible rotation of the adjusting lens 51. Specifically, the fixed body 521, as a key component connecting the mounting plate 4 and the rotating body 522, has a cap section 5211 at its top and a nut 5213 at its bottom that locks into the external thread of the bolt section 5212, firmly clamping the mounting plate 4 in the middle and ensuring the stability of the entire adjusting assembly 5. Meanwhile, the rotating body 522 serves as the supporting component for the adjusting lens 51. Its bottom passes through the cap section 5211 and the bolt section 5212 in sequence and connects to the adjusting lens 51, achieving a fixed connection between the adjusting lens 51 and the rotating structure 52. The design of the observation channel extending from the top of the rotating body 522 allows the operator to easily access the rotating body 522 from the outside and adjust the angle and position of the adjusting lens 51 by rotation to achieve the best observation effect.
[0036] In one embodiment, a first annular sealing groove 22 is formed on the top surface of the lower mounting bracket 2, and a first sealing ring is fitted inside the first annular sealing groove 22, with the bottom surface of the mounting plate 4 abutting against the first sealing ring.
[0037] In this embodiment, it should be noted that the mounting plate 4 is fixed on the lower mounting bracket 2, and its bottom surface will tightly abut against the first sealing ring to form an effective sealing interface. This sealing interface can effectively block interference from the external environment, ensure the cleanliness and vacuum inside the observation channel, and thus provide a stable and reliable working environment for the vapor deposition process.
[0038] In one embodiment, a second annular sealing groove 32 is formed on the bottom surface of the upper mounting bracket 3, and a second sealing ring is fitted inside the second annular sealing groove 32, with the top surface of the mounting plate 4 abutting against the second sealing ring.
[0039] In this embodiment, it should be noted that, similarly, the mounting plate 4 is fixed under the upper mounting bracket 3, and its top surface will tightly abut against the second sealing ring to form an effective sealing interface. This sealing interface can effectively block interference from the external environment, ensure the cleanliness and vacuum level inside the observation channel, and thus provide a stable and reliable working environment for the vapor deposition process.
[0040] In one embodiment, a third annular sealing groove 5214 is provided on the bottom surface of the cap section 5211, and a third sealing ring is fitted inside the third annular sealing groove 5214, with the top surface of the mounting plate 4 abutting against the third sealing ring.
[0041] In this embodiment, it should be noted that when the mounting plate 4 and the cap section 5211 are installed together, the top surface of the mounting plate 4 will tightly abut against the third sealing ring, thereby improving the sealing effect, ensuring good sealing at the connection between components, and preventing gas or liquid leakage.
[0042] In one embodiment, an operating head 523 is fixed to the top of the rotating body 522.
[0043] In this embodiment, it should be noted that the operating head 523 provides the operator with an intuitive and easy-to-operate part, enabling them to easily rotate the rotating body 522 and thereby adjust the angle and position of the adjusting lens 51.
[0044] In one embodiment, a rotating seat 6 is fixed on the top surface of the upper mounting frame 3. A toggle frame 7 that can rotate around the rotating seat 6 is provided on the rotating seat 6. A baffle 71 is provided on the toggle frame 7. When the toggle frame 7 rotates, the baffle 71 can block and open the observation channel.
[0045] In this embodiment, it should be noted that the rotating seat 6 fixed to the top surface of the upper mounting bracket 3, along with the rotating toggle bracket 7 and baffle 71, constitute a clever shielding mechanism. When it is necessary to temporarily close the observation channel to prevent external impurities or light from entering, the operator can simply rotate the toggle bracket 7 to make the baffle 71 block the observation channel. When observation is needed, simply rotate the toggle bracket 7 in the opposite direction to open the observation channel. This design not only provides additional protection but also increases operational flexibility.
[0046] In one embodiment, a limiting protrusion ring 23 is provided on the bottom edge of the lower mounting bracket 2, and the inner wall of the limiting protrusion ring 23 abuts against the side of the fixed base 1.
[0047] In this embodiment, it should be noted that the limiting protrusion 23, through its tight contact with the side of the fixed base 1, ensures the accurate position of the lower mounting bracket 2 during installation, preventing its horizontal movement or offset. This design improves the stability and reliability of the entire observation mirror structure.
[0048] In one embodiment, the bottom of the lower mounting bracket 2 is connected to the top of the fixed base 1 by a threaded connection structure.
[0049] In this embodiment, it should be noted that the threaded connection structure not only provides strong connection force, but also allows for convenient disassembly and reassembly when needed.
[0050] In one embodiment, both the upper mounting bracket 3 and the lower mounting bracket 2 are provided with interconnected screw holes 33, and threaded connection structures are connected through the screw holes 33.
[0051] In this embodiment, it should be noted that both the upper mounting bracket 3 and the lower mounting bracket 2 have interconnected screw holes 33 and are connected by a threaded connection structure. This design allows the two mounting brackets to be tightly fixed together, forming an integral structure.
[0052] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and not to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model, and they should all be covered within the scope of the claims and specification of this utility model.
Claims
1. An observation mirror for a vacuum evaporation deposition apparatus, characterized in that, The system includes a fixed base (1), a lower mounting bracket (2), and an upper mounting bracket (3) connected and fixed from bottom to top. The lower mounting bracket (2) and the upper mounting bracket (3) each have a lower opening (21) and an upper opening (31) in their center, respectively. The lower opening (21) and the upper opening (31) form an observation channel. A transparent mounting plate (4) is installed within the observation channel, and an adjustment component (5) passes through the mounting plate (4). The fixed base (1) has an observation notch (11) facing the observation channel; The adjustment assembly (5) includes an adjustment lens (51) located between the mounting plate (4) and the fixed base (1). The adjustment lens (51) blocks the mounting plate (4). The adjustment assembly (5) also includes a rotating structure (52) connected to the center of the adjustment lens (51). The top of the rotating structure (52) extends out of the observation channel. The rotating structure (52) is used to drive the adjustment lens (51) to rotate so that different positions of the adjustment lens (51) are aligned with the observation notch (11).
2. The observation mirror for a vacuum evaporation apparatus according to claim 1, characterized by, The rotating structure (52) includes a fixed body (521) passing through the center of the mounting plate (4) and a rotating body (522) passing through the center of the fixed body (521); wherein, The fixing body (521) includes a cap section (5211) at the top and a bolt section (5212) at the bottom. The bolt section (5212) has an external thread on its outer side, and a nut (5213) is locked on the external thread. The cap section (5211) and the nut (5213) respectively abut against the top and bottom surfaces of the mounting plate (4). The bottom of the rotating body (522) passes through the cap section (5211) and the bolt section (5212) in sequence and is connected to the adjusting lens (51). The observation channel extends from the top of the rotating body (522).
3. The observation mirror for a vacuum evaporation apparatus according to claim 2, characterized by, The lower mounting bracket (2) has a first annular sealing groove (22) on its top surface, and a first sealing ring is fitted inside the first annular sealing groove (22). The bottom surface of the mounting plate (4) abuts against the first sealing ring.
4. The observation mirror for a vacuum evaporation apparatus according to claim 2, characterized by, The bottom surface of the upper mounting bracket (3) has a second annular sealing groove (32), and a second sealing ring is fitted inside the second annular sealing groove (32). The top surface of the mounting plate (4) abuts against the second sealing ring.
5. The observation mirror for a vacuum evaporation apparatus according to claim 2, characterized by, The bottom surface of the cap section (5211) is provided with a third annular sealing groove (5214), and a third sealing ring is fitted inside the third annular sealing groove (5214). The top surface of the mounting plate (4) abuts against the third sealing ring.
6. The observation mirror for a vacuum evaporation apparatus according to claim 2, characterized by, An operating head (523) is fixed to the top of the rotating body (522).
7. The observation mirror for a vacuum evaporation apparatus according to claim 1, characterized by, The top surface of the upper mounting bracket (3) is fixed with a rotating seat (6). The rotating seat (6) is provided with a toggle bracket (7) that can rotate around the rotating seat (6). The toggle bracket (7) is provided with a baffle (71). When the toggle bracket (7) rotates, the baffle (71) can block and open the observation channel.
8. The observation mirror for a vacuum evaporation apparatus according to claim 1, characterized by, The lower mounting bracket (2) has a limiting protrusion ring (23) protruding from the bottom edge, and the inner wall of the limiting protrusion ring (23) abuts against the side of the fixed base (1).
9. The observation mirror for a vacuum evaporation apparatus according to claim 1, characterized by, The bottom of the lower mounting bracket (2) is connected to the top of the fixed base (1) by a threaded connection structure.
10. The observation mirror for a vacuum evaporation apparatus according to claim 1, characterized by, Both the upper mounting bracket (3) and the lower mounting bracket (2) are provided with interconnected screw holes (33), and threaded connection structures are connected inside the screw holes (33).