Centering mechanism and semiconductor equipment

Abstract

The utility model relates to the technical field of semiconductor equipment, and particularly provides a centering mechanism and semiconductor equipment. A stage; the two differential thread assemblies are connected with the to-be-adjusted component and the carrying table, one differential thread assembly extends in the first direction, a movable gap is formed between the differential thread assembly and the to-be-adjusted component in the second direction, and the other differential thread assembly extends in the second direction and a movable gap is formed between the differential thread assembly and the to-be-adjusted component in the first direction; the first direction is perpendicular to the second direction. High-precision adjustment of the to-be-adjusted component is achieved through the thread differential principle, the repeated positioning precision of controllable thread rotation operation is high, and time consumed for single-time adjustment is short; a traditional mechanical tool is omitted, and the problems of space adaptability of mechanical tool constraint and serious thermal deformation errors generated under the high-temperature process condition are solved.

Description

Technical Field

[0001] This application relates to the field of semiconductor equipment technology, and specifically to a centering mechanism and a semiconductor device. Background Technology

[0002] Semiconductor equipment refers to the collective term for various equipment and tools used in the manufacturing process of semiconductor devices. The positioning accuracy of several core components in semiconductor equipment directly affects the uniformity of the process. Taking chemical vapor deposition (CVD) equipment as an example, the centering accuracy of the hot stage directly affects the deposition area, and thus the yield. In plasma etching equipment, if the concentricity error of the electrostatic chucks (ESC) exceeds 100μm, it will cause abnormal edge etching rates. The installation position deviation of the spray head is directly related to the uniformity of the reaction gas distribution. It is evident that the positional accuracy of these components affects the process effect; therefore, good positioning accuracy is a key factor directly affecting the efficiency of semiconductor equipment during the design process.

[0003] The visual adjustment method currently widely used in the industry has significant drawbacks. Operators manually align the equipment using microscopes or CCD (Charge-Coupled Device) imaging systems. The accuracy of this adjustment is limited by the human eye's resolving power and the operator's experience, resulting in poor repeatability and a generally lengthy adjustment time. While mechanical tooling constraints can significantly improve accuracy, they face space adaptability issues: mechanical tooling occupies a large portion of the equipment cavity. In modern equipment that strives for compact design, this space occupation not only affects the layout of other functional modules but also increases the pumping load on the vacuum system. More seriously, the rigid structure of traditional mechanical tooling cannot accommodate dimensional changes caused by thermal expansion, leading to severe thermal deformation errors under high-temperature processing conditions. Utility Model Content

[0004] The purpose of this application is to provide an adjustment mechanism that solves the problems of poor repeatability of traditional manual adjustment, long adjustment time, spatial adaptability issues of mechanical tooling constraints, and serious thermal deformation errors under high-temperature process conditions.

[0005] To address the aforementioned technical problems, this application provides a mediation mechanism, comprising:

[0006] Components to be adjusted;

[0007] Platform;

[0008] Two differential threaded assemblies connect the component to be adjusted and the platform. One differential threaded assembly extends along a first direction and has a movable clearance with the component to be adjusted along a second direction. The other differential threaded assembly extends along the second direction and has a movable clearance with the component to be adjusted along the first direction. The first direction and the second direction are perpendicular to each other.

[0009] In traditional single-thread adjusting mechanisms, each rotation advances one pitch, and the common pitch is mostly around 1mm. This means the single-rotation displacement of a traditional single-thread adjusting mechanism is on the order of 1mm, which is insufficient for the required accuracy. The adjusting mechanism proposed in this application uses a differential thread assembly. The single-rotation displacement of the differential thread assembly is the difference in pitch between the two thread pairs. Thus, the single-rotation displacement of the differential thread assembly can be reduced to the order of 0.1mm, improving the adjusting accuracy by an order of magnitude compared to traditional single-thread adjusting mechanisms, resulting in higher adjustment precision.

[0010] Simultaneously, one differential threaded assembly extends along a first direction and has a movable clearance with the component to be adjusted along a second direction; the other differential threaded assembly extends along the second direction and has a movable clearance with the component to be adjusted along the first direction; the first and second directions are perpendicular to each other. In other words, one differential threaded assembly and the component to be adjusted are limitedly connected along the first direction and movable along the second direction; the other differential threaded assembly and the component to be adjusted are limitedly connected along the second direction and movable along the first direction. Define the differential thread assembly extending along the first direction as adjustment component A, and the adjustment component extending along the second direction as adjustment component B. As configured above, the clearance between adjustment component B and the component to be adjusted along the first direction provides the component to be adjusted with space for movement along the first direction, preventing adjustment component B from interfering with the adjustment of adjustment component A along the first direction; the clearance between adjustment component A and the component to be adjusted along the second direction provides the component to be adjusted with space for movement along the second direction, preventing adjustment component A from interfering with the adjustment of adjustment component B along the second direction. In this way, both differential thread assemblies can normally and without obstruction perform their adjustment function on the component to be adjusted. Furthermore, since the two differential thread assemblies are orthogonally arranged, under the coupling effect of the two differential thread assemblies, the component to be adjusted can move to any position in its plane, realizing high-precision adjustment of the component to be adjusted at any position.

[0011] At the operational level, the centering mechanism in this application transforms complex manual visual calibration into a controllable thread rotation operation of the differential thread assembly, greatly shortening the time required for a single adjustment, improving repeatability, and significantly reducing reliance on human visual discrimination and operator experience.

[0012] Furthermore, since the centering mechanism of this application can achieve high-precision adjustment of the component to be adjusted at any position, there is no need to constrain the position of the component to be adjusted by traditional mechanical tooling. This saves the space occupied by traditional mechanical tooling inside the equipment cavity. Reducing the volume of mechanical tooling means reducing obstacles inside the equipment cavity, thereby reducing the pumping load of the vacuum system and improving the efficiency of the vacuum system. At the same time, reducing mechanical tooling also eliminates the problem of serious thermal deformation error caused by the constraint of traditional mechanical tooling under high-temperature process conditions.

[0013] In summary, the centering mechanism of this application achieves precise displacement control of the component to be adjusted through the differential thread principle, achieves high-precision adjustment of the component to be adjusted at any position through the orthogonal setting of two differential thread components, solves the problems of poor repeatability and long time consumption of traditional manual adjustment through controllable thread rotation operation, solves the problems of poor repeatability and long time consumption of traditional manual adjustment, solves the problems of spatial adaptability of traditional mechanical tooling constraints and serious thermal deformation error under high temperature process conditions by eliminating the constraints of traditional mechanical tooling.

[0014] Optionally, the platform is provided with two threaded connection holes, and the differential thread assembly includes:

[0015] The first adjusting part has an external thread and an internal thread, the external thread and the internal thread have the same direction of rotation, the pitch has a preset difference, and the external thread is threadedly connected to the corresponding threaded connection hole.

[0016] The second adjusting part is circumferentially limited and connected to the platform, and is axially movable. One axial end of the second adjusting part is threadedly connected to the internal thread, and the other axial end of the second adjusting part is connected to the component to be adjusted. In the differential thread assembly extending along the first direction, the second adjusting part and the component to be adjusted have a movable gap along the second direction.

[0017] Optionally, the adjustment range of the component to be adjusted along the first direction is △1, and in the differential thread assembly extending along the second direction, the movable gap between the second adjusting part and the component to be adjusted along the first direction is △2, where △2≥△1;

[0018] Alternatively, the adjustment range of the component to be adjusted along the second direction is △3, and in the differential thread assembly extending along the first direction, the movable gap between the second adjustment part and the component to be adjusted along the second direction is △4, where △4 ≥ △3.

[0019] Optionally, the differential thread assembly further includes one of a limiting part and a limiting groove, one of the limiting part and the limiting groove being disposed on the peripheral wall of the second adjusting part, and the platform including the other of the two limiting parts and the limiting groove;

[0020] One of the limiting grooves extends along the first direction, and the other limiting groove extends along the second direction. The limiting part is at least partially located inside the corresponding limiting groove and is capable of sliding along the extending direction of the limiting groove.

[0021] Optionally, the other axial end of the second adjustment part has a concave section, and the component to be adjusted is provided with two connecting grooves. The upper end of the connecting groove is an open end, and the connecting groove passes through the wall of the corresponding differential thread assembly.

[0022] The centering mechanism further includes a connecting component, which has a slot with an opening at the lower end. At least a portion of the connecting component is inserted into the connecting slot along the axial direction corresponding to the differential thread assembly. The connecting component is movable along the width direction of the connecting slot, and the concave section is fixedly inserted into the slot.

[0023] The width direction of the connecting groove is perpendicular to the axial direction of the corresponding differential thread assembly.

[0024] Optionally, the adjustable component includes a main body and a base, the main body is connected to the upper end of the base, a stepped wall facing upwards is formed between the main body and the base, the connecting groove is disposed on the base, and the opening end of the connecting groove is formed in the stepped wall.

[0025] Optionally, the platform is an annular structure, and the component to be adjusted is located in the middle of the platform; the platform is provided with two mounting holes, which penetrate the inner and outer peripheral walls of the platform, and the mounting holes are used to connect the differential thread assembly.

[0026] Optionally, the mounting hole includes a large-diameter section and a small-diameter section, the large-diameter section penetrating the outer peripheral wall of the platform, the small-diameter section penetrating the inner peripheral wall of the platform, the large-diameter section including the threaded connection hole, and the second adjusting part passing through the interior of the small-diameter section.

[0027] Optionally, the differential thread assembly includes a limiting portion disposed on the peripheral wall of the second adjusting portion;

[0028] A stepped portion is formed between the large-diameter section and the small-diameter section. An axially extending limiting groove is provided on the inner wall of the small-diameter section, and the limiting groove penetrates the stepped portion.

[0029] This application also provides a semiconductor device including the aforementioned centering mechanism.

[0030] The semiconductor device of this application includes the aforementioned centering mechanism, and therefore has the same technical effect as the aforementioned centering mechanism, which will not be repeated here. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the structure of the platform when it is cut in the height direction in a specific embodiment of the centering mechanism provided in this application;

[0032] Figure 2 for Figure 1 Top view;

[0033] Figure 3 for Figure 1 Layout diagram of the centering mechanism;

[0034] Figure 4 for Figure 1 Schematic diagram of the structure of the adjustment component;

[0035] Figure 5 for Figure 4 A split diagram;

[0036] Figure 6 for Figure 5 A cross-sectional view along the AA direction;

[0037] in, Figures 1-6 The accompanying figure labels are as follows:

[0038] 1-Component to be adjusted; 1a-Connecting groove; 11-Main body; 12-Base; 1A-Step wall;

[0039] 2-Platform; 2a-Mounting hole; 2a1-Large diameter section;

[0040] 3-Differential thread assembly; 31-First adjusting part; 31a-External thread; 31b-Internal thread; 32-Second adjusting part; 32a-Connecting thread; 321-Concave section; 322-Limiting wall; 33-Limiting part;

[0041] 4-Connecting component; 4a-Slot. Detailed Implementation

[0042] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0043] The terms "first," "second," etc., used in the specification and claims of this application are used to distinguish similar objects and not to describe a specific order or sequence. It should be understood that such use of data can be interchanged where appropriate so that embodiments of this application can be implemented in orders other than those illustrated or described herein, and the objects distinguished by "first," "second," etc., are generally of the same class and the number of objects is not limited; for example, a first object can be one or more. Furthermore, in the specification and claims, "and / or" indicates at least one of the connected objects, and the character " / " generally indicates that the preceding and following objects are in an "or" relationship.

[0044] It should be understood that the phrase "some embodiments" throughout the specification means that a specific feature, structure, or characteristic related to an embodiment is included in at least one embodiment of this application. Therefore, "some embodiments" appearing throughout the specification does not necessarily refer to the same embodiment. Furthermore, these specific features, structures, or characteristics can be combined in any suitable manner in one or more embodiments.

[0045] In this description, unless otherwise expressly specified and limited, the terms "connected," "linked," and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art will understand the specific meaning of these terms in this document based on the specific circumstances.

[0046] Please refer to Figures 1-3 , Figure 1 This is a schematic diagram of the structure of the platform when it is cut in the height direction in a specific embodiment of the centering mechanism provided in this application; Figure 2 for Figure 1 Top view; Figure 3 for Figure 1 A breakdown diagram of the centering mechanism.

[0047] This application provides a centering mechanism, including:

[0048] Component 1 to be adjusted;

[0049] Platform 2;

[0050] Two differential threaded assemblies 3 connect the component to be adjusted 1 and the platform 2. One differential threaded assembly 3 extends along a first direction and has a movable clearance with the component to be adjusted 1 along a second direction. The other differential threaded assembly 3 extends along the second direction and has a movable clearance with the component to be adjusted 1 along the first direction. The first and second directions are perpendicular to each other.

[0051] In traditional single-thread adjustment mechanisms, the adjustment mechanism advances one pitch with each rotation. Since most common pitches are around 1mm, the single-rotation displacement of a traditional single-thread adjustment mechanism is on the order of 1mm, which does not meet the required accuracy. However, the centering mechanism proposed in this application uses a differential thread assembly 3. The single-rotation displacement of the differential thread assembly 3 is the difference in pitch between the two thread pairs. Thus, the single-rotation displacement of the differential thread assembly 3 can be reduced to the order of 0.1mm, improving the adjustment accuracy by an order of magnitude compared to traditional single-thread adjustment mechanisms, resulting in higher adjustment precision.

[0052] Simultaneously, one differential threaded assembly 3 extends along a first direction and has a movable clearance with the adjustable component 1 along a second direction; the other differential threaded assembly 3 extends along the second direction and has a movable clearance with the adjustable component 1 along the first direction; the first and second directions are perpendicular to each other. In other words, one differential threaded assembly 3 is limitedly connected to the adjustable component 1 along the first direction and is movable along the second direction; the other differential threaded assembly 3 is limitedly connected to the adjustable component 1 along the second direction and is movable along the first direction. The differential thread assembly 3 extending along the first direction is defined as adjustment component A, and the differential thread assembly 3 extending along the second direction is defined as adjustment component B. As configured above, the movement gap between adjustment component B and the component to be adjusted 1 along the first direction provides movement space for the component to be adjusted 1 along the first direction, avoiding interference of adjustment component B with the adjustment of adjustment component A along the first direction; the movement gap between adjustment component A and the component to be adjusted 1 along the second direction provides movement space for the component to be adjusted 1 along the second direction, avoiding interference of adjustment component A with the adjustment of adjustment component B along the second direction. In this way, both differential thread assemblies 3 can normally and without obstruction perform their adjustment function on the component to be adjusted 1; and since the two differential thread assemblies 3 are orthogonally arranged, under the coupling effect of the two differential thread assemblies 3, the component to be adjusted 1 can move to any position in its plane, realizing high-precision adjustment of the component to be adjusted 1 at any position.

[0053] At the operational level, the centering mechanism in this application embodiment transforms the complex manual visual calibration into a controllable thread rotation operation of the differential thread assembly 3, which greatly shortens the time required for a single adjustment, improves the repeatability of positioning accuracy, and significantly reduces the dependence on human visual discrimination ability and operator experience level.

[0054] Since the centering mechanism of this application embodiment can achieve high-precision adjustment of the component 1 to be adjusted at any position, there is no need to constrain the position of the component 1 to be adjusted by traditional mechanical tooling. This saves the space occupied by traditional mechanical tooling inside the equipment cavity. Reducing the volume of mechanical tooling means reducing obstacles inside the equipment cavity, thereby reducing the pumping load of the vacuum system and improving the efficiency of the vacuum system. At the same time, reducing mechanical tooling also eliminates the problem of serious thermal deformation error caused by the constraint of traditional mechanical tooling under high-temperature process conditions.

[0055] Furthermore, the double-threaded contact greatly increases the contact area, providing a certain degree of anti-loosening effect.

[0056] In summary, the centering mechanism of this application embodiment achieves precise displacement control of the component 1 to be adjusted through the differential thread principle, achieves high-precision adjustment of the component 1 to be adjusted at any position through the orthogonal arrangement of two differential thread components 3, solves the problems of poor repeatability and long time consumption of traditional manual adjustment through controllable thread rotation operation, solves the problems of spatial adaptability of traditional mechanical tooling constraints and serious thermal deformation error under high temperature process conditions by eliminating the constraints of traditional mechanical tooling.

[0057] Please refer to Figures 1-6 , Figure 4 for Figure 1 Schematic diagram of the structure of the adjustment component; Figure 5 for Figure 4 A split diagram; Figure 6 for Figure 5 A cross-sectional view along the AA direction.

[0058] In some embodiments of this application, the platform 2 is provided with two threaded connection holes, and the differential thread assembly 3 includes:

[0059] The first adjustment part 31 has an external thread 31a and an internal thread 31b. The external thread 31a and the internal thread 31b have the same direction of rotation and a preset pitch difference. The external thread 31a is threadedly connected to the corresponding threaded connection hole.

[0060] The second adjustment part 32 is circumferentially limited and connected to the platform 2, and is axially movable. One axial end of the second adjustment part 32 is threadedly connected to the internal thread 31b, and the other axial end of the second adjustment part 32 is connected to the component 1 to be adjusted. In the differential thread assembly 3 extending in the first direction, the second adjustment part 32 and the component 1 to be adjusted have a movable gap in the second direction. In the differential thread assembly 3 extending in the second direction, the second adjustment part 32 and the component 1 to be adjusted have a movable gap in the first direction.

[0061] As configured above, the differential thread assembly 3 includes a first adjusting part 31 and a second adjusting part 32. The first adjusting part 31 has an external thread 31a and an internal thread 31b. The external thread 31a and the internal thread 31b have the same direction of rotation and a preset difference in pitch, for example, the pitch of the external thread 31a is A and the pitch of the internal thread 31b is B. The external thread 31a of the first adjusting part 31 is threadedly connected to the threaded connection hole. Therefore, when the first adjusting part 31 of the differential thread assembly 3 rotates one revolution, the axial displacement of the first adjusting part 31 is A. At the same time, the second adjusting part 32 is circumferentially limited to the platform 2 and is axially movable. The external thread 31a and the internal thread 31b have the same direction of rotation. Therefore, when the first adjusting part 31 rotates one revolution, the second adjusting part 32 will move in the opposite direction axially, that is, the axial displacement of the second adjusting part 32 is -B. The other axial end of the second adjusting part 32 is connected to the component 1 to be adjusted. Then, the axial displacement of the component 1 to be adjusted along the differential thread assembly 3 is AB.

[0062] Assuming A=1.3mm and B=1.2mm, the differential thread assembly 3 reduces the single rotational displacement to the order of 0.1mm through the differential action of the thread pair, which is an order of magnitude higher than the adjustment accuracy of the traditional single thread adjustment mechanism, resulting in higher adjustment accuracy.

[0063] Wherein, A can be greater than B or less than B. If A is greater than B, the moving direction of the component to be adjusted 1 along the axial direction of the differential thread assembly 3 is consistent with the moving direction of the first adjusting part 31. If A is less than B, the moving direction of the component to be adjusted 1 along the axial direction of the differential thread assembly 3 and the moving direction of the second adjusting part 32 are consistent. For example, if A=1.3mm and B=1.2mm, when the first adjusting part 31 rotates one revolution, the first adjusting part 31 moves forward by a distance of 1.3mm, the second adjusting part 21 moves backward by a distance of 1.2mm, and the part to be adjusted 1 moves forward by 0.1mm. That is, the direction of movement of the part to be adjusted 1 along the axial direction of the differential thread assembly 3 is consistent with the direction of movement of the first adjusting part 31. If A=1.2mm and B=1.3mm, when the first adjusting part 31 rotates one revolution, the first adjusting part 31 moves forward by a distance of 1.2mm, the second adjusting part 21 moves backward by a distance of 1.3mm, and the part to be adjusted 1 moves backward by 0.1mm. That is, the direction of movement of the part to be adjusted 1 along the axial direction of the differential thread assembly 3 is consistent with the direction of movement of the second adjusting part 32.

[0064] Specifically, one axial end of the second adjusting part 32 is threadedly connected to the internal thread 31b. In particular, one axial end of the second adjusting part 32 has a connecting thread 32a that matches the internal thread 31b, and the connecting thread 32a and the internal thread 31b are threadedly connected.

[0065] The pitch of the external thread 31a and the internal thread 31b has a preset difference. This preset difference can be set according to the adjustment accuracy requirements of the component 1 to be adjusted. If the adjustment accuracy requirement of the component 1 to be adjusted is on the order of 0.1mm, the preset difference can be 0.1mm. If the adjustment accuracy requirement of the component 1 to be adjusted is on the order of 0.01mm, the preset difference can be 0.01mm.

[0066] As previously described, one differential threaded assembly 3 extends along a first direction, and the other differential threaded assembly 3 extends along a second direction. Therefore, of the two threaded connection holes provided on the stage 2, one extends along the first direction and the other extends along the second direction.

[0067] Please continue to refer to this. Figure 2 The adjustment range of the component to be adjusted 1 along the first direction is defined as △1. In the differential thread assembly 3 extending along the second direction, the movable gap between the second adjustment part 32 and the component to be adjusted 1 along the first direction is △2, where △2≥△1.

[0068] In this way, the second adjustment part 32 in the differential thread assembly 3 extending in the second direction will not interfere with the position adjustment of the component to be adjusted 1 within the adjustment range of the component to be adjusted 1 in the first direction, thus ensuring that the component to be adjusted 1 can be moved to any position in the first direction.

[0069] Furthermore, the adjustment range of the component to be adjusted 1 along the second direction is defined as △3, and in the differential thread assembly 3 extending along the first direction, the movable gap between the second adjustment part 32 and the component to be adjusted 1 along the second direction is △4, where △4≥△3.

[0070] In this way, it is ensured that within the adjustment range of the component to be adjusted 1 along the second direction, the second adjustment part 32 in the differential thread assembly 3 extending along the first direction will not interfere with the position adjustment of the component to be adjusted 1, and the component to be adjusted 1 can be moved to any position along the second direction.

[0071] Among them, when △1 and △3 are equal, △2 and △4 can also be equal.

[0072] In some embodiments, △1 = △2. Thus, when the component to be adjusted 1 is adjusted to its limit position along the first direction, the second adjustment part 32 in the differential thread assembly 3 extending along the second direction will play a limiting role for the component to be adjusted 1, preventing the position of the component to be adjusted 1 along the first direction from exceeding the required position range, avoiding affecting the normal operation of the component to be adjusted 1, and avoiding affecting the process effect.

[0073] In some embodiments, △3 = △4. Thus, when the component to be adjusted 1 is adjusted to its limit position along the second direction, the second adjustment part 32 in the differential thread assembly 3 extending along the first direction will play a limiting role for the component to be adjusted 1, preventing the position of the component to be adjusted 1 along the second direction from exceeding the required position range, avoiding affecting the normal operation of the component to be adjusted 1, and avoiding affecting the process effect.

[0074] Please continue to refer to this. Figures 1-6 In some embodiments of this application, the differential thread assembly 3 further includes a limiting part 33, which is connected to the peripheral wall of the second adjusting part 32, and the platform 2 includes two limiting grooves (not shown in the figure).

[0075] One of the limiting grooves extends along a first direction, and the other limiting groove extends along a second direction. The limiting part 33 is at least partially located inside the corresponding limiting groove and can slide along the extending direction of the limiting groove.

[0076] As set above, in this embodiment of the application, the circumferential limiting connection of the platform 2 and the second adjustment part 32 is achieved through the sliding cooperation of the limiting part 33 and the limiting groove, and the axial movement is ensured so that the differential thread assembly 3 can perform the aforementioned differential adjustment function normally.

[0077] In some other embodiments of this application, the peripheral wall of the second adjustment part 32 is provided with a limiting groove. The limiting groove extends along the axial direction of the second adjustment part 32, that is, one limiting groove extends along the first direction and the other limiting groove extends along the second direction. The platform 2 includes two limiting parts, and the limiting parts are at least partially located inside the corresponding limiting grooves and can slide along the extension direction of the limiting grooves.

[0078] As set up above, the circumferential limiting connection of the platform 2 and the second adjustment part 32 can also be achieved through the sliding cooperation of the limiting part and the limiting groove, while the axial movement is ensured, so that the differential thread assembly 3 can perform the aforementioned differential adjustment function normally.

[0079] In summary, the arrangement of the limiting part 33 and the limiting groove in the above embodiments can be summarized as follows:

[0080] The differential thread assembly 3 also includes one of a limiting part 33 and a limiting groove, one of which is disposed on the peripheral wall of the second adjusting part 32. The platform 2 includes two limiting parts 33 and the other of the limiting groove.

[0081] One of the limiting grooves extends along a first direction, and the other limiting groove extends along a second direction. The limiting part 33 is at least partially located inside the corresponding limiting groove and can slide along the extending direction of the limiting groove.

[0082] Please continue to refer to this. Figure 1 , Figure 3 and Figure 4The second adjustment part 32 has a concave section 321 at the other end of its axial direction. The part to be adjusted 1 is provided with two connecting grooves 1a. The upper end of the connecting groove 1a is an open end. The connecting groove 1a passes through the wall facing the corresponding differential thread assembly 3.

[0083] The centering mechanism also includes a connecting component 4, which has a slot 4a with an opening at the lower end. At least a portion of the connecting component 4 is inserted into the connecting slot 1a along the axial direction of the corresponding differential thread assembly 3. The connecting component 4 is movable along the width direction of the connecting slot 1a, and the concave section 321 is fixedly inserted into the slot 4a.

[0084] The width direction of the connecting groove 1a is perpendicular to the axial direction of the corresponding differential thread assembly 3.

[0085] As configured above, the other axial end of the second adjusting part 32 has a concave section 321. The connecting groove 1a penetrates the wall facing the corresponding differential thread assembly 3 to form an opening. During connection, the concave section 321 can be inserted into the interior of the corresponding connecting groove 1a through the opening. Simultaneously, the upper end of the connecting groove 1a is an open end, and the connecting member 4 has a slot 4a with an open lower end. During connection, at least a portion of the connecting member 4 can be inserted into the connecting groove 1a from top to bottom from the open end. The connecting member 4 is axially limited and inserted into the connecting groove 1a along the corresponding differential thread assembly 3, and the concave section 321 is fixedly inserted into the slot 4a. Thus, the connecting member 4 can achieve axial limiting connection between the corresponding differential thread assembly 3 and the member 1 to be adjusted, ensuring that the member 1 to be adjusted can move precisely under the action of the differential thread assembly 3. Simultaneously, the connecting member 4 is movable along the width direction of the connecting groove 1a, and the width direction of the connecting groove 1a is perpendicular to the axial direction of the corresponding differential thread assembly 3. Figure 2 As shown, the width of the connecting component 4 is W2, and the width of the connecting groove 1a is W1, where W2 < W1. Thus, the connecting component 4 corresponding to the differential thread assembly 3 extending along the first direction can move along the second direction inside the corresponding connecting groove 1a, and the connecting component 4 corresponding to the differential thread assembly 3 extending along the second direction can move along the first direction inside the corresponding connecting groove 1a. This ensures that both differential thread assemblies 3 can normally and without obstruction perform their adjustment function on the component 1 to be adjusted, thereby achieving high-precision adjustment of the component 1 to be adjusted at any position.

[0086] Among them, such as Figure 4 As shown, the second adjustment part 32 has a concave section 321 at the other axial end. The second adjustment part 32 forms opposing limiting walls 322 at both axial ends of the concave section 321. In the connected state, the connecting part 4 is located between the two limiting walls 322, thus realizing the axial limiting connection between the connecting part 4 and the differential thread assembly 3.

[0087] Please continue to refer to this. Figures 1-3In some embodiments of this application, the adjustable component 1 includes a main body 11 and a base 12. The main body 11 is connected to the upper end of the base 12. A stepped wall 1A facing upward is formed between the main body 11 and the base 12. A connecting groove 1a is disposed on the base 12, and the open end of the connecting groove 1a is formed in the stepped wall 1A.

[0088] As configured above, the base 12 serves as a transfer structure between the main body 11 and the differential thread assembly 3, supporting the main body 11. In a chemical vapor deposition device, the main body 11 can be a hot stage; in a plasma etching device, the main body 11 can be an electrostatic chuck or a spray head. In other words, the main body 11 can be any component with high precision requirements. As long as the main body 11 is fixed to the base 12, the centering mechanism of this application embodiment can achieve high-precision displacement control of the main body 11 without processing the main body 11, thus avoiding affecting the normal operation of the main body 11. A stepped wall 1A facing upwards is formed between the main body 11 and the base 12. A connecting groove 1a is provided on the base 12, and the open end of the connecting groove 1a is formed on the stepped wall 1A, which facilitates the installation of the connecting component 4 and improves assembly convenience.

[0089] Please continue to refer to this. Figures 1-3 In some embodiments of this application, the platform 2 is an annular structure, and the component to be adjusted 1 is located in the middle of the platform 2; the platform 2 is provided with two mounting holes 2a, which penetrate the inner and outer peripheral walls of the platform 2, and the mounting holes 2a are used to connect the differential thread assembly 3.

[0090] As set up above, the platform 2 is a ring structure, and the component to be adjusted 1 is located in the middle of the platform 2. The platform 2 can limit the adjustment range of the component to be adjusted 1, so as to avoid the position of the component to be adjusted 1 from exceeding the required position range as much as possible, and to avoid affecting the normal operation of the component to be adjusted 1 as much as possible. The platform 2 is provided with two mounting holes 2a, which are used to connect the corresponding differential thread assembly 3. The mounting holes 2a penetrate through the inner and outer peripheral walls of the platform 2, which facilitates the connection between the differential thread assembly 3 and the platform 2, and between the differential thread assembly 3 and the component to be adjusted 1, thereby improving the convenience of operation.

[0091] Of course, the platform 2 is not limited to the aforementioned ring structure. In some other embodiments, the platform 2 can also be a flat plate structure, with the component to be adjusted 1 supported on the top wall of the platform 2. It is understood that the shape of the platform 2 does not affect its function; therefore, the outer contour of the platform 2 includes, but is not limited to, circles, polygons, irregular shapes, etc.

[0092] like Figure 1 and Figure 2As shown, in some embodiments of this application, the mounting hole 2a includes a large diameter section 2a1 and a small diameter section. The large diameter section 2a1 penetrates the outer peripheral wall of the platform 2, and the small diameter section penetrates the inner peripheral wall of the platform 2. The large diameter section 2a1 includes a threaded connection hole, and the second adjustment part 32 passes through the inside of the small diameter section.

[0093] As set up above, during assembly, the differential thread assembly 3 can be inserted into the interior of the mounting hole 2a from the outside to the inside. The external thread 31a and the threaded connection hole form a thread pair, ensuring that the differential thread assembly 3 can perform the aforementioned differential adjustment function normally. The small diameter section is used for the second adjustment part 32 to pass through, realizing the connection with the part to be adjusted 1. The inner diameter of the small diameter section and the outer diameter of the second adjustment part 32 can be approximately equal. In this way, the small diameter section can play a supporting and guiding role for the second adjustment part 32, improving the positional accuracy of the second adjustment part 32.

[0094] Furthermore, in some embodiments, the differential thread assembly 3 includes a limiting part 33, which is disposed on the peripheral wall of the second adjusting part 32;

[0095] A stepped section is formed between the large-diameter section 2a1 and the small-diameter section. An axially extending limiting groove is provided on the inner wall of the small-diameter section, and the limiting groove penetrates the stepped section.

[0096] As set up above, during assembly, the limiting part 33 and the limiting groove can be aligned first, and then the differential thread assembly 3 can be inserted into the interior of the mounting hole 2a from the outside to the inside, so that the limiting part 33 enters the interior of the limiting groove. In this way, the second adjustment part 32 and the platform 2 are circumferentially limited and connected, and the axial movement is possible, ensuring that the differential thread assembly 3 can perform the aforementioned differential adjustment function normally.

[0097] This application also provides a semiconductor device including the aforementioned centering mechanism.

[0098] The semiconductor device of this application embodiment includes the aforementioned centering mechanism, and therefore has the same technical effects as the aforementioned centering mechanism, which will not be repeated here.

[0099] When the centering mechanism is applied to semiconductor equipment, the stage 2 in the centering mechanism remains fixed.

[0100] The working environment of the adjustment mechanism in this application can be adjusted according to the actual equipment working conditions. It can be used in both atmospheric and vacuum environments, and the material of the differential thread assembly 3 can be adjusted to meet the needs of various extreme working conditions.

[0101] The above are merely preferred embodiments of this application. It should be noted that those skilled in the art can make several improvements and modifications without departing from the principles of this application, and these improvements and modifications should also be considered within the scope of protection of this application.

Claims

1. A centering mechanism, characterized in that, include: Component to be adjusted (1); Platform (2); Two differential thread assemblies (3) connect the component to be adjusted (1) and the platform (2). One of the differential thread assemblies (3) extends along a first direction and has a movable clearance with the component to be adjusted (1) along a second direction. The other differential thread assembly (3) extends along the second direction and has a movable clearance with the component to be adjusted (1) along the first direction. The first direction and the second direction are perpendicular to each other.

2. The pitch adjusting mechanism according to claim 1, characterized in that The platform (2) is provided with two threaded connection holes, and the differential thread assembly (3) includes: The first adjustment part (31) has an external thread (31a) and an internal thread (31b). The external thread (31a) and the internal thread (31b) have the same direction of rotation and a preset pitch difference. The external thread (31a) is threadedly connected to the corresponding threaded connection hole. The second adjustment part (32) and the platform (2) are circumferentially limited and connected, and are axially movable. One axial end of the second adjustment part (32) is threadedly connected to the internal thread (31b), and the other axial end of the second adjustment part (32) is connected to the component to be adjusted (1). In the differential thread assembly (3) extending in the first direction, the second adjustment part (32) and the component to be adjusted (1) have a movable gap in the second direction. In the differential thread assembly (3) extending in the second direction, the second adjustment part (32) and the component to be adjusted (1) have a movable gap in the first direction.

3. The pitch adjusting mechanism according to claim 2, characterized in that The adjustment range of the component to be adjusted (1) along the first direction is △1, and in the differential thread assembly (3) extending along the second direction, the movable gap between the second adjustment part (32) and the component to be adjusted (1) along the first direction is △2, △2≥△1; Alternatively, the adjustment range of the component to be adjusted (1) along the second direction is △3, and in the differential thread assembly (3) extending along the first direction, the movable gap between the second adjustment part (32) and the component to be adjusted (1) along the second direction is △4, where △4≥△3.

4. The pitch adjusting mechanism according to claim 2, wherein The differential thread assembly (3) further includes one of a limiting part (33) and a limiting groove, wherein the limiting part (33) and the limiting groove are disposed on the peripheral wall of the second adjusting part (32), and the platform (2) includes two of the limiting parts (33) and the other of the limiting groove; One of the limiting grooves extends along the first direction, and the other limiting groove extends along the second direction. The limiting part (33) is at least partially located inside the corresponding limiting groove and is capable of sliding along the extension direction of the limiting groove.

5. The pitch adjusting mechanism according to any one of claims 2 to 4, characterized in that The second adjustment part (32) has a concave section (321) at the other end of its axial direction. The component to be adjusted (1) is provided with two connecting grooves (1a). The upper end of the connecting groove (1a) is an open end. The connecting groove (1a) passes through the wall facing the differential thread assembly (3). The centering mechanism further includes a connecting component (4), which has a slot (4a) with an opening at the lower end. At least a portion of the connecting component (4) is inserted into the connecting slot (1a) along the axial direction corresponding to the differential thread assembly (3). The connecting component (4) is movable along the width direction of the connecting slot (1a), and the concave section (321) is fixedly inserted into the slot (4a). The width direction of the connecting groove (1a) is perpendicular to the axial direction of the corresponding differential thread assembly (3).

6. The pitch adjusting mechanism of claim 5, wherein The adjustable component (1) includes a main body (11) and a base (12). The main body (11) is connected to the upper end of the base (12). A stepped wall (1A) facing upward is formed between the main body (11) and the base (12). A connecting groove (1a) is provided on the base (12), and the opening end of the connecting groove (1a) is formed on the stepped wall (1A).

7. The pitch adjusting mechanism according to any one of claims 2 to 4, wherein The platform (2) is a ring structure, and the component to be adjusted (1) is located in the middle of the platform (2). The platform (2) is provided with two mounting holes (2a), which penetrate the inner and outer peripheral walls of the platform (2). The mounting holes (2a) are used to connect the differential thread assembly (3).

8. The pitch adjusting mechanism of claim 7, wherein The mounting hole (2a) includes a large diameter section (2a1) and a small diameter section. The large diameter section (2a1) penetrates the outer peripheral wall of the platform (2), and the small diameter section penetrates the inner peripheral wall of the platform (2). The large diameter section (2a1) includes the threaded connection hole, and the second adjustment part (32) passes through the interior of the small diameter section.

9. The pitch adjusting mechanism of claim 8, wherein, The differential thread assembly (3) includes a limiting part (33), which is disposed on the peripheral wall of the second adjusting part (32); A stepped portion is formed between the large-diameter section (2a1) and the small-diameter section. An axially extending limiting groove is provided on the inner wall of the small-diameter section, and the limiting groove penetrates the stepped portion.

10. A semiconductor device, characterized by comprising: Includes the centering mechanism as described in any one of claims 1-9.

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