Semiconductor machine equipment mechanical part polishing equipment

Abstract

The utility model relates to the technical field of semiconductor polishing, and discloses semiconductor machine equipment mechanical part polishing equipment which comprises a base, a frame is fixedly connected to the top wall of the base, a liquid supply pipe is fixedly connected to the middle of the rear side of the inner wall of the frame, and a trimmer is rotationally connected to the right side of the inner top wall of the frame. A first rotating shaft is rotatably connected to the left side of the inner top wall of the frame, a polishing head is fixedly connected to the tail end of the first rotating shaft, a disc is fixedly connected to the bottom wall of the polishing head, a fixing block is fixedly connected to the right side of the bottom wall of the disc, and an electric push rod is fixedly connected to the rear side of the outer wall of the fixing block. The electric push rod pushes the U-shaped block and the connecting block, the cylinder of the rotating disc slides in the first sliding groove, the sliding block slides in the second sliding groove to keep stable, the rotating disc is adjusted to enable the clamping blocks to accurately clamp parts, the clamping requirements of different parts are met, it is guaranteed that the parts do not move in the polishing process, and the clamp does not need to be frequently replaced when the different parts are machined.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor polishing technology, and in particular to a polishing device for mechanical parts of semiconductor equipment. Background Technology

[0002] Semiconductors are materials whose dielectric properties lie between those of conductors and insulators. They hold an extremely important position in modern technology and are key materials driving the development of the electronic information industry. They are widely used in many fields such as computers, communications, consumer electronics, automotive electronics, industrial control, and medical equipment, and have had a profound impact on the development and progress of human society.

[0003] With the continuous growth of demand in the semiconductor market, semiconductor manufacturers need to improve production efficiency while ensuring product yield. High-efficiency polishing equipment can realize automated and high-precision polishing processes, reduce errors and uncertainties caused by manual operation, thereby improving production efficiency and product quality consistency, and reducing production costs.

[0004] Semiconductor equipment for polishing mechanical parts can achieve extremely high surface flatness. By precisely controlling the polishing process parameters, the surface roughness of mechanical parts can be reduced to the nanometer level, meeting the stringent requirements for surface flatness in semiconductor manufacturing. However, improper design of the clamping mechanism, such as unreasonable distribution of clamping points and inconsistent wear of clamping elements, can cause uneven clamping force on the parts during polishing, leading to deformation. This is especially problematic for thin-walled parts or parts with high precision requirements, as deformation can severely affect dimensional accuracy and surface quality, causing displacement during polishing and impacting the polishing effect. Existing technologies require careful consideration of the part's size, material, and polishing process requirements during fixture design to ensure a reasonable fixture structure that provides uniform clamping force. However, the design often fails to adequately consider the processing needs of parts with different specifications. The fixture may be overly adaptable to specific parts while lacking versatility for other parts. This necessitates frequent fixture changes when processing different parts, increasing production costs and preparation time. Utility Model Content

[0005] To overcome the above shortcomings, this utility model provides a polishing device for mechanical parts of semiconductor equipment, which aims to improve the problem of poor versatility for other parts in the prior art.

[0006] To achieve the above objectives, this utility model adopts the following technical solution: a polishing device for semiconductor equipment mechanical parts, comprising a base, a frame fixedly connected to the top wall of the base, a liquid supply pipe fixedly connected to the middle of the rear side of the inner wall of the frame, a dresser rotatably connected to the right side of the inner top wall of the frame, a rotating shaft rotatably connected to the left side of the inner top wall of the frame, a polishing head fixedly connected to the end of the rotating shaft, a disc fixedly connected to the bottom wall of the polishing head, a fixing block fixedly connected to the right side of the bottom wall of the disc, an electric push rod fixedly connected to the rear side of the outer wall of the fixing block, a U-shaped block fixedly connected to the output end of the electric push rod, and a connecting block rotatably connected to the outer wall of the U-shaped block. A turntable is rotatably connected to the inner wall of the disc. The connecting block is fixedly connected to the right side of the outer wall of the turntable. Multiple sliding grooves are equidistantly formed on the bottom wall of the turntable. A cylinder is slidably connected to the inner wall of each sliding groove. A slider is fixedly connected to the left side of the outer wall of the cylinder. Multiple sliding grooves are equidistantly formed on the bottom wall of the disc. The slider is slidably connected to each sliding groove. A clamping block is fixedly connected to the bottom wall of the slider. A rotating shaft is rotatably connected to the middle of the top wall of the base. A polishing table is provided on the top of the rotating shaft. A polishing pad is installed on the top wall of the polishing table. Inspection doors are provided on the left and right ends of the front side of the outer wall of the base. A replacement mechanism is provided inside the rotating shaft for quickly replacing the polishing table.

[0007] As a further description of the above technical solution:

[0008] The replacement mechanism includes a fixed column, a movable block slidably connected to the outer wall of the fixed column, a sliding groove three is provided in the middle of the top wall of the rotating shaft two, the sliding groove three is slidably connected to the fixed column, sliding groove four is provided on both the left and right sides of the inner wall of the rotating shaft two, a locking block is slidably connected to the inner wall of the sliding groove four, a spring is installed on the outer wall of the locking block, and limit blocks are installed on both the left and right sides of the inner wall of the sliding groove four. The outer wall of the locking block is slidably connected to the middle of the outer wall of the limit block.

[0009] As a further description of the above technical solution:

[0010] Door panels are installed on both the left and right sides of the outer wall of the frame, and handles are installed on the outer walls of the door panels.

[0011] As a further description of the above technical solution:

[0012] A glass plate is installed on the front side of the outer wall of the frame.

[0013] As a further description of the above technical solution:

[0014] A controller is installed on the upper right side of the outer wall of the frame, and multiple buttons are equidistantly installed on the right side of the outer wall of the controller.

[0015] As a further description of the above technical solution:

[0016] Multiple hinges are equidistantly installed on the left and right ends of the front side of the outer wall of the base. Each hinge is threaded with a bolt. The base is rotatably connected to the access door via the hinges.

[0017] As a further description of the above technical solution:

[0018] A handle is provided on the front side of the outer wall of the inspection door. Two bolts are threaded to the upper and lower ends of the front side of the outer wall of the handle, and the two bolts are bolted to the front side of the outer wall of the inspection door.

[0019] As a further description of the above technical solution:

[0020] An alarm light is installed on the rear right side of the top wall of the frame.

[0021] As a further description of the above technical solution:

[0022] The base is equipped with casters at all four corners of its bottom wall.

[0023] As a further description of the above technical solution:

[0024] The base has support feet fixedly connected to the four corners of its bottom wall, and the bottom walls of the support feet are fixedly connected to anti-slip pads.

[0025] This utility model has the following beneficial effects:

[0026] 1. In this utility model, the electric push rod pushes the U-shaped block and the connecting block to make the turntable rotate inside the disc. The cylinder of the turntable slides in the first slide groove, and the slider slides in the second slide groove to maintain stability. The turntable is adjusted so that the clamping block can accurately clamp the parts, adapt to the clamping requirements of different parts, and ensure that the parts do not shift during the polishing process. It is not necessary to frequently change the clamps when processing different parts.

[0027] 2. In this utility model, by pressing down the polishing table, the movable block on the outer wall of the fixed column presses against the locking block inside the rotating shaft two, so that the locking blocks on both sides move in the slide groove four to lock the movable block. Pulling out the polishing table allows the movable block to slide to the lower limit of the fixed column. The arc of the movable block releases the space of the locking block from locking the fixed column. At this time, the fixed column can slide freely in the slide groove three, which is convenient for subsequent replacement or position adjustment. Attached Figure Description

[0028] Figure 1 This is a perspective view of a semiconductor equipment mechanical parts polishing device proposed in this utility model;

[0029] Figure 2 This is a front view of a semiconductor equipment mechanical parts polishing device proposed in this utility model;

[0030] Figure 3 This is a partial structural schematic diagram of a semiconductor equipment mechanical parts polishing device proposed in this utility model;

[0031] Figure 4 This is a partial structural exploded view of a semiconductor equipment mechanical parts polishing device proposed in this utility model;

[0032] Figure 5 This is a schematic diagram of the replacement mechanism of a semiconductor equipment mechanical parts polishing device proposed in this utility model.

[0033] Legend:

[0034] 1. Base; 2. Changing mechanism; 201. Fixed column; 202. Movable block; 203. Slide three; 204. Slide four; 205. Locking block; 206. Spring; 207. Limiting block; 3. Frame; 4. Liquid supply pipe; 5. Dresser; 6. Rotating shaft one; 7. Polishing head; 8. Disc; 9. Turntable; 10. Connecting block; 11. U-shaped block; 12. Electric push rod; 13. Fixed block; 14. Slide 15. Cylinder; 16. Slider; 17. Slide II; 18. Clamping block; 19. Polishing pad; 20. Rotating shaft II; 21. Polishing table; 22. Door panel; 23. Pull handle; 24. Glass plate; 25. Controller; 26. Button; 27. Inspection door; 28. Hinge; 29. ​​Bolt I; 30. Handle; 31. Bolt II; 32. Warning light; 33. Caster wheel; 34. Support foot; 35. Anti-slip mat. Detailed Implementation

[0035] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0036] Reference Figure 1 , Figure 3 and Figure 4This utility model provides an embodiment of a semiconductor equipment mechanical parts polishing device, including a base 1. A frame 3 is fixedly connected to the top wall of the base 1. A liquid supply pipe 4 is fixedly connected to the middle of the rear side of the inner wall of the frame 3. The liquid supply pipe 4 supplies polishing liquid to the polishing area, providing necessary lubrication, cooling, and chemical action for the polishing process, helping to remove material from the surface of the parts and improve surface quality. A dresser 5 is rotatably connected to the right side of the inner top wall of the frame 3. The dresser 5 dresses the polishing pad 19 of the polishing head 7 to maintain the good condition and polishing effect of the polishing head 7. A rotating shaft 6 is rotatably connected to the left side of the inner top wall of the frame 3. The polishing head 7 is fixedly connected to the end of the rotating shaft 6. The rotating shaft 6 drives... The polishing head 7 rotates, and a disc 8 is fixedly connected to the bottom wall of the polishing head 7. A fixing block 13 is fixedly connected to the right side of the bottom wall of the disc 8. An electric push rod 12 is fixedly connected to the rear side of the outer wall of the fixing block 13. A U-shaped block 11 is fixedly connected to the output end of the electric push rod 12. The output end of the electric push rod 12 pushes the U-shaped block 11. A connecting block 10 is rotatably connected to the outer wall of the U-shaped block 11. The U-shaped block 11 drives the connecting block 10 to move. A turntable 9 is rotatably connected to the inner wall of the disc 8. The connecting block 10 is fixedly connected to the right side of the outer wall of the turntable 9. The connecting block 10 drives the turntable 9 to rotate around its rotational connection point with the disc 8. Multiple sliding grooves 14 are equidistantly opened on the bottom wall of the turntable 9. The inner wall of the sliding grooves 14 is slidably connected to... A cylinder 15 slides within a first groove 14. A slider 16 is fixedly connected to the left side of the outer wall of the cylinder 15. Multiple second grooves 17 are equidistantly spaced on the bottom wall of the disc 8. The slider 16 slides within the second grooves 17. A clamping block 18 is fixedly connected to the bottom wall of the slider 16 to clamp the parts. A rotating shaft 20 is rotatably connected to the center of the top wall of the base 1. The rotating shaft 20 drives the polishing table 21 to rotate. The polishing table 21 is mounted on the top of the rotating shaft 20. A polishing pad 19 is installed on the top wall of the polishing table 21. The polishing pad 19 rubs and polishes the surface of the parts, removing burrs and imperfections to achieve a smooth and flat finish. The outer wall of the base 1... Inspection doors 27 are provided on both the left and right sides of the front. A replacement mechanism 2 is provided inside the rotating shaft 20. The replacement mechanism 2 is used to quickly replace the polishing table 21. Door panels 22 are installed on both the left and right sides of the outer wall of the frame 3. The door panels 22 are used to isolate the polishing equipment inside the frame 3 from the outside world, preventing dust and debris from entering the equipment and affecting the polishing effect. At the same time, it can also prevent personnel from accidentally contacting the operating equipment parts, playing a certain safety protection role. A handle 23 is installed on the outer wall of the door panel 22, which makes it convenient for operators to open and close the door panel 22. A glass plate 24 is installed on the front side of the outer wall of the frame 3, through which the working status and whether the equipment parts are operating normally can be seen directly.

[0037] Specifically, the mechanical parts to be polished are placed in a suitable position on the polishing table 21 below the turntable 9. The liquid supply pipe 4 supplies polishing liquid to the polishing area, providing the necessary lubrication, cooling, and chemical action for the polishing process, helping to remove material from the surface of the parts and improve surface quality. The electric push rod 12 is activated, and the output end of the electric push rod 12 pushes the U-shaped block 11. The U-shaped block 11 drives the connecting block 10 to move. Since the connecting block 10 is fixed on the right side of the outer wall of the turntable 9, and the U-shaped block 11 is rotatably connected to the connecting block 10, the connecting block 10 will drive the turntable 9 to rotate around its rotational connection point with the disc 8. During the rotation of the turntable 9, the cylinder 15 on its bottom wall will slide in the slide groove 14. Meanwhile, slider 16 slides within slide groove 17 to adapt to the rotation of turntable 9 and maintain its stability. The angle and position of turntable 9 are adjusted so that clamping block 18 can accurately clamp parts to meet the clamping requirements of parts of different shapes and sizes, ensuring that parts do not shift during polishing. Door panel 22 is used to isolate the polishing equipment inside frame 3 from the outside world, preventing dust and debris from entering the equipment and affecting the polishing effect. It also prevents personnel from accidentally contacting the operating equipment parts, providing a certain degree of safety protection. Pull handle 23 makes it convenient for operators to open and close door panel 22. The working status and whether the equipment parts are operating normally can be seen intuitively through glass panel 24.

[0038] Reference Figure 1 , Figure 3 and Figure 5 The replacement mechanism 2 includes a fixed column 201, with a movable block 202 slidably connected to the outer wall of the fixed column 201. A sliding groove 203 is provided in the middle of the top wall of the rotating shaft 20, which is slidably connected to the fixed column 201 and used to slide the fixed column 201. Sliding grooves 204 are provided on both the left and right sides of the inner wall of the rotating shaft 20, with locking blocks 205 slidably connected to the inner wall of each groove 204. The locking blocks 205 are used to engage the fixed column 201, and the sliding grooves 204 are used to slide the locking blocks 205. A spring 206 is installed on the outer wall of the locking blocks 205, which is used to rebound the locking blocks 205. Limit blocks 207 are installed on both the left and right sides. The outer wall of the locking block 205 is slidably connected to the middle of the outer wall of the limit block 207. A controller 25 is installed on the upper right side of the outer wall of the frame 3. The controller 25 is used to achieve precise control of the polishing process and ensure that the polishing work is carried out according to the set parameters and process. Multiple buttons 26 are installed at equal intervals on the right side of the outer wall of the controller 25. The buttons 26 make it convenient for the operator to operate the controller 25 to flexibly adjust the operating status of the equipment according to different parts materials, shapes and polishing requirements. An alarm light 32 is installed at the rear right side of the top wall of the frame 3. The alarm light 32 is used to issue a warning signal when the equipment malfunctions.

[0039] Specifically, by pressing down the polishing table 21, the movable block 202 on the outer wall of the fixed column 201 presses against the locking block 205 inside the rotating shaft 20, allowing the locking blocks 205 on both sides to move in the slide groove 204 to lock the movable block 202. Pulling out the polishing table 21 allows the movable block 202 to slide to the lower limit of the fixed column 201. The curvature of the movable block 202 releases the space of the locking block 205 from locking the fixed column 201. At this time, the fixed column 201 can slide freely in the slide groove 203, facilitating subsequent replacement or position adjustment. The controller 25 is used to achieve precise control of the polishing process, ensuring that the polishing work is carried out according to the set parameters and process. The button 26 facilitates the operator to operate the controller 25 to flexibly adjust the operating status of the equipment according to different parts materials, shapes and polishing requirements. The alarm light 32 is used to issue a warning signal when the equipment malfunctions.

[0040] Reference Figure 1 and Figure 2 Multiple hinges 28 are equidistantly installed on the left and right ends of the front side of the outer wall of the base 1. Bolts 29 are threaded onto the outer wall of each hinge 28, securing them firmly to the base 1. The base 1 is rotatably connected to the inspection door 27 via the hinges 28. The hinges 28 connect the base 1 and the inspection door 27, allowing the inspection door 27 to rotate around the axis of the hinges 28. A handle 30 is provided on the front side of the outer wall of the inspection door 27, allowing operators to easily grip and forcefully open or close the inspection door 27. Bolts 31 are threaded onto the upper and lower ends of the front side of the handle 30, connecting them to the inspection door 27. On the front side of the outer wall of the maintenance door 27, bolt 2 31 is used to firmly fix the handle 30 to the maintenance door 27. Universal wheels 33 are installed at the four corners of the bottom wall of the base 1. Universal wheels 33 are used to easily move the equipment to different positions. Support feet 34 are fixedly connected at the four corners of the bottom wall of the base 1. Support feet 34 are used to support the weight of the equipment and evenly transfer the weight of the equipment to the ground, so that the equipment maintains a stable standing position. Anti-slip pads 35 are fixedly connected to the bottom wall of the support feet 34. Anti-slip pads 35 prevent the equipment from sliding or shaking during placement or operation, and improve the stability and safety of the equipment.

[0041] Specifically, hinge 28 is used to connect base 1 and inspection door 27, allowing inspection door 27 to rotate around the axis of hinge 28, thereby opening and closing inspection door 27, facilitating inspection, maintenance and upkeep of components inside base 1 or at the bottom of equipment. Bolt 1 29 is used to firmly fix hinge 28 to base 1. Handle 30 is convenient for operators to grip and forcefully open or close inspection door 27. Bolt 2 31 is used to firmly fix handle 30 to inspection door 27. Casters 33 are used to easily move equipment to different positions. Support feet 34 are used to support the weight of equipment, evenly distributing the weight of equipment to the ground, keeping equipment in a stable standing position. Anti-slip pads 35 prevent equipment from sliding or shaking during placement or operation, improving the stability and safety of equipment.

[0042] Working principle: Place the mechanical parts to be polished on the polishing table 21 below the turntable 9 at a suitable position, start the electric push rod 12, the output end of the electric push rod 12 pushes the U-shaped block 11, the U-shaped block 11 drives the connecting block 10 to move. Since the connecting block 10 is fixed on the right side of the outer wall of the turntable 9, and the U-shaped block 11 is rotatably connected to the connecting block 10, the connecting block 10 will drive the turntable 9 to rotate around its rotational connection point with the disc 8. During the rotation of the turntable 9, the cylinder 15 on its bottom wall will slide in the first slide groove 14, and the slider 16 will slide in the second slide groove 17 to adapt to the rotation of the turntable 9 and maintain its stability. Adjust the angle and position of the turntable 9 so that the clamping block 18 can accurately clamp the parts to adapt to the clamping requirements of parts of different shapes and sizes, and ensure that the parts will not be displaced during the polishing process.

[0043] By pressing down the polishing table 21, the movable block 202 on the outer wall of the fixed column 201 presses against the locking block 205 inside the rotating shaft 20, so that the locking blocks 205 on both sides move in the slide groove 4 204 to lock the movable block 202. Pulling out the polishing table 21 allows the movable block 202 to slide to the lower limit of the fixed column 201. The curvature of the movable block 202 releases the space of the locking block 205 from locking the fixed column 201. At this time, the fixed column 201 can slide freely in the slide groove 3 203, which is convenient for subsequent replacement or position adjustment.

[0044] Finally, it should be noted that the above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Although the present utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A semiconductor machine equipment mechanical part polishing apparatus comprising a base (1), characterized in that: A frame (3) is fixedly connected to the top wall of the base (1). A liquid supply pipe (4) is fixedly connected to the middle of the rear side of the inner wall of the frame (3). A dressing device (5) is rotatably connected to the right side of the inner top wall of the frame (3). A rotating shaft (6) is rotatably connected to the left side of the inner top wall of the frame (3). A polishing head (7) is fixedly connected to the end of the rotating shaft (6). A disc (8) is fixedly connected to the bottom wall of the polishing head (7). A fixing block (13) is fixedly connected to the right side of the bottom wall of the disc (8). An electric push rod (12) is fixedly connected to the rear side of the outer wall of the fixing block (13). A U-shaped block (11) is fixedly connected to the output end of the electric push rod (12). A connecting block (10) is rotatably connected to the outer wall of the U-shaped block (11). A turntable (9) is rotatably connected to the inner wall of the disc (8). The connecting block (10) is fixedly connected to the outer wall of the turntable (9). On the right side, the bottom wall of the turntable (9) is provided with multiple sliding grooves (14) at equal intervals. The inner wall of the sliding groove (14) is slidably connected to a cylinder (15). The outer wall of the cylinder (15) is fixedly connected to a slider (16). The bottom wall of the disc (8) is provided with multiple sliding grooves (17) at equal intervals. The slider (16) is slidably connected to the sliding groove (17). The bottom wall of the slider (16) is fixedly connected to a clamp (18). The top wall of the base (1) is rotatably connected to a rotating shaft (20). The top of the rotating shaft (20) is provided with a polishing table (21). The top wall of the polishing table (21) is equipped with a polishing pad (19). The left and right ends of the front side of the outer wall of the base (1) are provided with inspection doors (27). The inside of the rotating shaft (20) is provided with a replacement mechanism (2). The replacement mechanism (2) is used to quickly replace the polishing table (21).

2. A semiconductor equipment mechanical component polishing apparatus according to claim 1, characterized by: The replacement mechanism (2) includes a fixed column (201), a movable block (202) is slidably connected to the outer wall of the fixed column (201), a sliding groove (203) is provided in the middle of the top wall of the rotating shaft (20), the sliding groove (203) is slidably connected to the fixed column (201), a sliding groove (204) is provided on both the left and right sides of the inner wall of the rotating shaft (20), a locking block (205) is slidably connected to the inner wall of the sliding groove (204), a spring (206) is installed on the outer wall of the locking block (205), a limit block (207) is installed on both the left and right sides of the inner wall of the sliding groove (204), and the outer wall of the locking block (205) is slidably connected to the middle of the outer wall of the limit block (207).

3. The semiconductor equipment mechanical part polishing apparatus of claim 1, wherein: Door panels (22) are installed on both the left and right sides of the outer wall of the frame (3), and handles (23) are installed on the outer wall of the door panels (22).

4. The semiconductor equipment mechanical part polishing apparatus of claim 1, wherein: A glass plate (24) is installed on the front side of the outer wall of the frame (3).

5. The semiconductor equipment mechanical part polishing apparatus of claim 1, wherein: A controller (25) is installed on the upper right side of the outer wall of the frame (3), and multiple buttons (26) are installed at equal intervals on the right side of the outer wall of the controller (25).

6. The semiconductor equipment mechanical component polishing apparatus of claim 1, wherein: Multiple hinges (28) are installed at equal intervals on the left and right sides of the front side of the outer wall of the base (1). Bolts (29) are threadedly connected to the outer wall of the hinges (28). The base (1) is rotatably connected to the inspection door (27) through the hinges (28).

7. The semiconductor equipment mechanical part polishing apparatus of claim 1, wherein: The front side of the outer wall of the inspection door (27) is provided with a handle (30), and the upper and lower ends of the front side of the outer wall of the handle (30) are threaded with bolts (31), which are bolted to the front side of the outer wall of the inspection door (27).

8. The semiconductor equipment mechanical part polishing apparatus of claim 1, wherein: An alarm light (32) is installed on the rear right side of the top wall of the frame (3).

9. The semiconductor equipment mechanical part polishing apparatus of claim 1, wherein: The base (1) is equipped with casters (33) at the four corners of its bottom wall.

10. The semiconductor equipment mechanical part polishing apparatus of claim 1, wherein: The base (1) has four corners of the bottom wall with fixed support feet (34), and the bottom wall of the support feet (34) is fixed with anti-slip pads (35).

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