Polishing device for brittle materials

Abstract

The utility model discloses a brittle material polishing device which comprises a mechanical arm, a polishing module and a clamping mechanism, the clamping mechanism is installed at the movable end of the mechanical arm, and the clamping mechanism comprises a vacuum adsorption module and a plurality of flexible manipulators. The multiple flexible mechanical arms are evenly arranged on the outer side of the circumference with the vacuum adsorption module as the axis, the multiple flexible mechanical arms do opening and closing actions in a claw shape, and polishing solution spray head fixing devices are designed on the outer edges of the flexible mechanical arms. The periphery of a polishing sample is mechanically fixed through the flexible manipulator, the top end of the sample is mechanically fixed through the vacuum adsorption module, the position of the sample is kept fixed when the sample is violently impacted in the grinding process through the combined design, the situation that the polishing effect is affected due to the fact that the sample deviates is avoided, and meanwhile in the polishing operation process, the polishing efficiency is greatly improved. The polishing solution nozzle can uniformly spray the polishing solution around the sample in a short distance, so that the use efficiency of the polishing solution is improved, and the economic cost is reduced.

Description

Technical Field

[0001] This utility model relates to the field of polishing equipment technology, specifically a polishing device for brittle materials. Background Technology

[0002] Polishing technology for brittle materials has a wide range of applications, including optical component manufacturing, semiconductor manufacturing, and ultrafast laser micro-nano processing. In particular, for ultrafast laser glass welding, the high-precision grinding and polishing process after cutting the welded sample is crucial for observing the microscopic morphology of the cross-section of the welded area, thereby analyzing processing performance and optimizing processing parameters.

[0003] Because brittle materials, such as glass and silicon wafers, are characterized by high hardness and brittleness, they are prone to cracking and breakage during polishing, affecting the polishing effect. Therefore, the design of polishing equipment for brittle materials places high demands on its quality. Existing polishing fixtures for brittle materials often employ flexible mechanical claws to grip the sample and prevent breakage during polishing. These claws are typically either wrapping or clamping types. However, these claws focus solely on gripping, and during grinding and polishing, the sample inevitably experiences wear and collisions with the grinding disc and other equipment. Some polishing fixtures use vacuum suction cups to fix the sample. However, this method only applies an adhesive force along the sample's axis. Once polishing begins, the polishing disc contacts the sample and applies a shear force perpendicular to the axis. Because the fixing force and the applied force are perpendicular, the sample is prone to shaking during polishing, affecting the polishing effect.

[0004] Therefore, addressing the two major problems encountered in existing polishing processes for brittle materials—namely, the issue of fixation and the collision between the mechanical gripper and the grinding disc—there is an urgent need to find a new polishing fixture design method to fix the polishing sample and achieve excellent polishing results. To address these problems, this invention develops a polishing device for brittle materials. Utility Model Content

[0005] The purpose of this invention is to provide a polishing device for brittle materials, thereby solving the problems mentioned in the background art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a polishing device for brittle materials, comprising a robotic arm, a polishing module, and a gripping mechanism. The gripping mechanism is installed at the movable end of the robotic arm and includes a vacuum adsorption module and several flexible robotic arms. The several flexible robotic arms are evenly arranged on the outer side of a circle with the vacuum adsorption module as the axis. The several flexible robotic arms open and close in a claw-like manner. The device also includes an automatic polishing liquid spraying module, which is installed on the side end of the flexible robotic arms.

[0007] Preferably, the clamping mechanism is further provided with a lifting module, the bottom of which is connected to the vacuum adsorption module.

[0008] Preferably, the polishing module is a high-speed rotating polishing disc, and the clamping mechanism is arranged vertically above and below the polishing module.

[0009] Preferably, the vacuum adsorption module is a vacuum suction cup.

[0010] Preferably, the robotic arm is a three-axis robotic arm.

[0011] Preferably, a polishing liquid automatic spraying module is installed on the side end of some flexible mechanical claws.

[0012] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0013] This invention combines a flexible robotic arm and a vacuum adsorption module. First, the vacuum adsorption module fixes the sample. Then, the lifting module is adjusted according to the sample's size. Subsequently, several flexible robotic arms clamp and polish the sample. A portion of the sample is reserved on the outside of the flexible robotic arms for material removal during polishing, preventing the robotic arms from colliding with the polishing disc and affecting the polishing effect. The flexible robotic arms mechanically fix the periphery of the polishing sample, while the vacuum adsorption module mechanically fixes the top of the sample, ensuring that the sample is fixed by force in both the vertical and parallel axes. This combined design allows the sample to maintain its position even under severe impact during grinding, preventing displacement that could affect the polishing effect. During polishing, a polishing liquid spray pipe fixed to the outer edge of the flexible robotic claws sprays the polishing liquid evenly and at close range around the sample, improving the efficiency of polishing liquid use and reducing economic costs. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of this utility model;

[0015] Figure 2 This is a partial structural diagram of the present invention. Figure 1 ;

[0016] Figure 3 This is a partial structural diagram of the present invention. Figure 2 .

[0017] The reference numerals and names in the figure are as follows:

[0018] 1. Robotic arm; 2. Polishing module; 3. Vacuum adsorption module; 4. Flexible robotic arm; 5. Lifting module; 6. Automatic polishing liquid spraying module; 7. Control system. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0020] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "lateral," "upper," "lower," "front," "rear," "left," "right," "horizontal," "vertical," "top," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0021] Please see Figures 1 to 3 This utility model provides an embodiment of a polishing device for brittle materials, comprising a robotic arm 1, a polishing module 2, and a clamping mechanism. The clamping mechanism is installed at the movable end of the robotic arm 1, and the robotic arm 1 drives the clamping mechanism to perform multi-directional transmission. The clamping mechanism includes a vacuum adsorption module 3 and several flexible robotic arms 4, which are evenly arranged on the outer circumference of the vacuum adsorption module 3. The flexible robotic arms 4 are claw-shaped and perform opening and closing movements. The outer edge of some of the flexible robotic arms 4 is designed with a polishing liquid nozzle fixing structure 6. During operation, the vacuum adsorption module 3 first adsorbs and fixes the sample, and the lifting module 5 is adjusted to a suitable position according to the sample size. Then, the flexible robotic arms 4 clamp and polish the sample. A portion of the sample is reserved on the outer bottom end of the flexible robotic arms 4 for polishing and material removal, preventing the robotic arm 1 from colliding with the polishing module 2 during the polishing process and affecting the polishing effect. The flexible robotic arm 4 mechanically fixes the periphery of the polishing sample, while the vacuum adsorption module mechanically fixes the top of the sample. This combination design ensures that the sample remains in a fixed position when subjected to severe impact during the grinding process, preventing displacement that could affect the polishing effect.

[0022] Among them, the flexible manipulator 4 can be: a soft hand with an elephant trunk and octopus tentacles and pneumatic muscles developed in collaboration between Festo (Germany) and Beijing University of Aeronautics and Astronautics; a soft hand designed and manufactured by the Whiteside research group at Harvard University using elastic silicone as material and combined with 3D printing technology, with a pneumatic network as the actuator, characterized by low pressure resistance, large deformation, flexible movement, and compatibility with the environment; a soft hand produced by a new 4D printing technology proposed by Ge et al., which has controllable shape memory behavior; the Toshiba dexterous hand designed by Toshiba Corporation of Japan, which can perform actions such as grasping, moving objects, and tightening screws, and has good compliance; a soft gripper developed by Wen Li's research group at Beijing University of Aeronautics and Astronautics, which can adjust its effective length according to the size and shape of the object being grasped; and two soft hands for sampling marine organisms designed by Galloway et al., based on a multi-cavity structure and a fiber-reinforced structure, which can flexibly sample various shapes of marine organisms. The flexible manipulator 4 can be one of the above, but is not limited to other structural shapes.

[0023] Furthermore, the clamping mechanism is also equipped with a lifting module 5, the bottom of which is connected to the vacuum adsorption module 3. The vacuum adsorption module 3 can be driven to lift and lower through the lifting module 5, which facilitates height adjustment according to the size of the polished sample and improves the versatility of the clamping mechanism.

[0024] In this embodiment, the lifting module 5 is a cylinder.

[0025] In this embodiment, the polishing module 2 is a high-speed rotating polishing disc, and the clamping mechanism is arranged vertically with the polishing module 2. The above is only one example of an embodiment and does not limit the structural shape of the polishing module 2, nor does it limit the positional relationship between the clamping mechanism and the polishing module 2.

[0026] An automatic polishing liquid spraying module 6 is also provided, which is arranged vertically with the polishing module 2. In this embodiment, a control system 7 is provided to control the start or stop of the robotic arm 1, the polishing module 2, the gripping mechanism and the automatic polishing liquid spraying module 6.

[0027] The automatic polishing slurry spraying module 6 is installed on the side of part of the flexible robotic arm 4. The opening of the automatic polishing slurry spraying module 6 is controlled by the opening of the polishing disc module 2. The gripping mechanism is fixed on the robotic arm 1. The program is imported into the robotic arm 1 so that the robotic arm 1 drives the gripping mechanism to move and cooperate to automatically grab the polishing sample. Then the sample is placed on the polishing disc for grinding. The automatic polishing slurry spraying module 6 is controlled by a single-chip microcomputer control system 7. When the polishing sample is placed on the polishing disc and the polishing disc is opened, the automatic polishing slurry spraying module 6 is opened. After the polishing disc is started, the automatic polishing slurry spraying module 6 sprays polishing slurry for 10 seconds every 5 minutes. This process is repeated until the polishing disc is closed and the automatic polishing slurry spraying module 6 is closed.

[0028] In this embodiment, the vacuum adsorption module 3 is a vacuum suction cup; the above is only an example of one embodiment and does not limit the vacuum adsorption module 3 to other structural shapes.

[0029] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A polishing apparatus for brittle material, characterized by: It includes a robotic arm (1), a polishing module (2), and a gripping mechanism. The gripping mechanism is installed on the movable end of the robotic arm (1). The gripping mechanism includes a vacuum adsorption module (3) and several flexible robotic arms (4). The several flexible robotic arms (4) are evenly arranged on the outer side of the circumference with the vacuum adsorption module (3) as the axis. The several flexible robotic arms (4) open and close in a claw shape. It also includes an automatic polishing liquid spraying module (6), which is installed on the side of the flexible robotic arms (4).

2. The brittle material polishing apparatus according to claim 1, wherein: The clamping mechanism is also provided with a lifting module (5), the bottom of which is connected to the vacuum adsorption module (3).

3. The brittle material polishing apparatus according to claim 1, wherein: The polishing module (2) is a high-speed rotating polishing disc, and the clamping mechanism is arranged vertically with the polishing module (2). The automatic polishing liquid spraying module (6) is arranged vertically with the polishing module (2).

4. The brittle material polishing apparatus of claim 1, wherein: The vacuum adsorption module (3) is a vacuum suction cup.

5. The brittle material polishing apparatus according to claim 1, wherein: The robotic arm (1) is a three-axis robotic arm.

Images