Carrier plate returning device and inflating mechanism thereof

Abstract

The utility model belongs to the technical field of solar photovoltaic cell coating equipment, and particularly relates to a carrier plate returning device and an inflating mechanism thereof, the carrier plate returning device comprises a sealing chamber formed by combining a plurality of sealing plates; the air inflation mechanism is communicated with the sealing cavity through an air delivery pipe; wherein the inflation mechanism is configured to convey gas to the sealed chamber, so that the interior of the sealed chamber is in a micro-positive pressure state, and the pressure difference between the micro-positive pressure state and the outside is 5-30 Pa. According to the carrier plate returning device, the inflation mechanism and the sealing cavity are arranged, the inflation mechanism conveys gas into the sealing cavity, the interior of the sealing cavity is in a micro-positive pressure state, therefore, external impurities or gas are prevented from entering the interior of the sealing cavity, and the carrier plate is prevented from being polluted by the external impurities in the returning process.

Description

Technical Field

[0001] This utility model belongs to the technical field of solar photovoltaic cell coating equipment, and particularly relates to a carrier plate return device and its inflation mechanism. Background Technology

[0002] With the increasing global demand for renewable energy, the solar photovoltaic industry has developed rapidly. In the manufacturing process of solar cells, silicon wafers need to undergo processes such as cleaning, diffusion, annealing, coating, and screen printing. PECVD (Plasma Enhanced Chemical Vapor Deposition) is one of the commonly used coating methods in solar cell production, consisting of a loading chamber, a preheating chamber, a process chamber, a discharge chamber, and a carrier plate return device.

[0003] For example, Chinese patent document CN219025080U discloses a cleaning device, a carrier plate return line, and a coating equipment. In order to prevent the carrier plate from being contaminated during the return process, a sealing protection treatment is carried out during the return process. However, the carrier plate return device is in the atmospheric environment, so many impurities (tiny impurities, gases, etc.) will still enter the return device and contaminate the carrier plate.

[0004] Therefore, how to prevent the carrier board from being contaminated during the return process is a technical problem that urgently needs to be solved by those skilled in the art.

[0005] It should be noted that the information disclosed in this background section is only for understanding the background technology of the present application concept, and therefore, the above description is not considered to constitute prior art information. Utility Model Content

[0006] This disclosure provides at least one carrier plate return device and its inflation mechanism.

[0007] In a first aspect, embodiments of this disclosure provide a carrier board return device, comprising:

[0008] The return device includes a sealed chamber formed by a combination of several sealing plates;

[0009] The inflation mechanism is connected to the sealed chamber via an air supply pipe;

[0010] The inflation mechanism is configured to supply gas to the sealed chamber so that the interior of the sealed chamber is in a slightly positive pressure state, and the pressure difference between the sealed chamber and the outside is maintained between 5-30 Pa.

[0011] In one optional embodiment, the pressure difference between the sealed chamber under slight positive pressure and the external environment is maintained between 5-30 Pa.

[0012] In one optional embodiment, the inflation mechanism includes:

[0013] A fixed plate is installed on which an ozone exhaust gas destroyer is mounted;

[0014] The condenser is connected to the ozone exhaust gas destroyer via a conduit;

[0015] The ozone exhaust gas destroyer is connected to the inlet pipe, the condenser is connected to the outlet pipe, and the outlet pipe is connected to the gas supply pipe of the sealed chamber.

[0016] In one optional embodiment, the condenser is equipped with a pressure regulating valve, and pressure sensors are installed at both the outlet end and the sealed chamber of the condenser. Both the pressure sensors and the pressure regulating valve are electrically connected to a control module; and...

[0017] The control module is configured to dynamically adjust the pressure regulating valve based on the pressure data of the sealed chamber and the condenser outlet, so that the pressure inside the sealed chamber is higher than the external pressure.

[0018] In one optional embodiment, the sealed chamber is provided with multiple air inlets, all of which are connected to branch air supply pipes.

[0019] In one optional embodiment, the air inlets are evenly distributed on both sides of the sealed chamber, and the branch air supply pipes communicating with the air inlets are connected in parallel through the main air supply pipe, which is connected to the air outlet pipe.

[0020] In one alternative implementation, the diameter of the main gas pipeline is larger than the diameter of the branch gas pipeline.

[0021] In one optional embodiment, each of the sealing plates is provided with an observation window.

[0022] Secondly, this disclosure also provides an inflation mechanism, which is connected to the carrier plate return device via an air supply pipe.

[0023] The inflation mechanism includes:

[0024] A fixed plate is installed on which an ozone exhaust gas destroyer is mounted;

[0025] The condenser is connected to the ozone exhaust gas destroyer via a conduit;

[0026] The ozone exhaust gas destroyer is connected to the inlet pipe, the condenser is connected to the outlet pipe, and the outlet pipe is connected to the gas supply pipe of the return device.

[0027] In one optional embodiment, the condenser is equipped with a pressure regulating valve, and a pressure sensor is installed at the outlet end of the condenser. Both the pressure sensor and the pressure regulating valve are electrically connected to a control module; and...

[0028] The control module is configured to adjust the opening and closing degree of the pressure regulating valve according to the pressure at the outlet end of the condenser, so as to maintain the pressure difference between the carrier plate return device and the outside world between 5-30 Pa.

[0029] The beneficial effect of this utility model is that, by setting up an inflation mechanism and a sealed chamber, the inflation mechanism delivers gas into the sealed chamber, so that the inside of the sealed chamber is in a slightly positive pressure state, thereby preventing external impurities or gas from entering the sealed chamber and avoiding contamination of the carrier plate by external impurities during the return process.

[0030] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objectives and other advantages of this invention are realized and obtained through the structures particularly pointed out in the description and drawings.

[0031] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, preferred embodiments are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0032] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0033] Figure 1 A perspective view of a carrier plate return device and its inflation mechanism provided in an embodiment of this disclosure;

[0034] Figure 2 A bottom view of a carrier plate return device and its inflation mechanism provided in an embodiment of this disclosure;

[0035] Figure 3 This is a schematic block diagram of a carrier plate return device and its inflation mechanism control module provided in an embodiment of the present disclosure.

[0036] In the picture:

[0037] 100. Return device; 110. Sealing plate; 111. Observation window; 120. Sealed chamber; 130. Air inlet; 200. Gas supply pipe; 210. Main gas supply pipe; 220. Branch gas supply pipe; 300. Gas filling mechanism; 310. Ozone tail gas destroyer; 311. Conduit; 320. Condenser; 321. Pressure regulating valve; 330. Air inlet pipe; 340. Air outlet pipe; 350. Fixing plate. Detailed Implementation

[0038] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0039] In this document, when it is mentioned that a first component is located on a second component, this can mean that the first component can be directly formed on the second component, or that a third component can be inserted between the first and second components. Furthermore, in the accompanying drawings, the thickness of components may be exaggerated or reduced for the purpose of effectively describing the technical content.

[0040] In this document, when an element or layer is referred to as “located,” “joined to,” “connected to,” “attached to,” or “coupled to” another element or layer, it may be directly located, joined, connected, attached to, or coupled to the other element or layer, or there may be intermediate elements or layers present. Conversely, when an element is referred to as “directly on another element or layer,” “directly joined to,” “directly connected to,” “directly attached to,” or “directly coupled to” another element or layer, there may be no intermediate elements or layers present. Other terms used to describe relationships between elements should be interpreted in a similar manner (e.g., “between” versus “directly between,” “adjacent” versus “directly adjacent,” etc.). As used herein, the term “and / or” includes any and all combinations of one or more of the related listed items.

[0041] In this document, exemplary embodiments of the present disclosure will be described in more detail with reference to the accompanying drawings. As used herein, expressions such as “at least one of…” modify the entire list of elements when following a list of elements, rather than individual elements in the list. For example, the expression “at least one of a, b, and c” should be understood to include only a, only b, only c, both a and b, both a and c, both b and c, or all of a, b, and c.

[0042] The terminology used herein is for the purpose of describing specific exemplary configurations only and is not intended to be limiting. As used herein, the singular articles “a,” “an,” and “the” may also be intended to include plural forms unless otherwise clearly stated herein. The terms “comprising,” “including,” and “having” are inclusive and thus specify the presence of features, steps, operations, elements, and / or components, but do not preclude the presence or addition of one or more other features, steps, operations, elements, components, and / or combinations thereof. The method steps, processes, and operations described herein should not be construed as requiring them to be performed in the specific order discussed or shown, unless specifically identified as such. Additional or alternative steps may be employed.

[0043] As used herein, the phrases “in one embodiment,” “according to one embodiment,” “in some embodiments,” etc., generally refer to the fact that a particular feature, structure, or characteristic following the phrase can be included in at least one embodiment of this disclosure. Therefore, a particular feature, structure, or characteristic can be included in more than one embodiment of this disclosure, such that these phrases do not necessarily refer to the same embodiment. As used herein, the terms “example,” “exemplary,” etc., are used to “serve as an example, instance, or illustration.” Any implementation, aspect, or design described herein as “example” or “exemplary” is not necessarily to be construed as preferred or superior to other implementations, aspects, or designs. Rather, the use of the terms “example,” “exemplary,” etc., is intended to present concepts in a specific manner.

[0044] Research has revealed the shortcomings of the existing technology: Application No. CN219025080U discloses a cleaning device, a carrier plate return line, and a coating equipment. In order to prevent the carrier plate from being contaminated during the return process, a sealing protection treatment is carried out during the return process. However, the carrier plate return device is in an atmospheric environment, so many impurities (tiny impurities, gases, etc.) will still enter the return device and contaminate the carrier plate.

[0045] Based on the above research, this disclosure provides a carrier plate return device. By setting a sealed chamber in the return device and filling the sealed chamber with air to keep it in a slightly positive pressure state to prevent external gas from entering the sealed chamber, the above problems are solved.

[0046] The shortcomings of the above solutions are the result of the inventor's practical experience and careful research. Therefore, the discovery process of the above problems and the solutions proposed in this disclosure should be considered as the inventor's contribution to this disclosure.

[0047] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0048] The following detailed description, with reference to the accompanying drawings, describes some embodiments of the present invention. Unless otherwise specified, the following embodiments and features can be combined with each other.

[0049] See Figure 1This disclosure provides a carrier plate return device 100, including: the return device 100, including a sealed chamber 120 formed by a plurality of sealing plates 110, the sealed chamber 120 being connected to an inflation mechanism 300 via a gas supply pipe 200; wherein, the inflation mechanism 300 is configured to supply gas to the sealed chamber 120 to make the interior of the sealed chamber 120 a slightly positive pressure state, thereby preventing external impurities or gas from entering the interior of the sealed chamber 120 and avoiding contamination of the carrier plate by external impurities during the return process.

[0050] Specifically, the pressure difference between the sealed chamber 120 under a slightly positive pressure state and the outside is 5-30 Pa, preferably 5 Pa, 20 Pa or 30 Pa.

[0051] See also Figure 1 In some embodiments, the inflation mechanism 300 includes: a fixed plate 350 on which an ozone exhaust gas destroyer 310 is disposed; the ozone exhaust gas destroyer 310 is connected to an air inlet pipe 330, and outside air enters the ozone exhaust gas destroyer 310 through the air inlet pipe 330. The ozone exhaust gas destroyer 310 is adapted to remove ozone from the air in the air inlet pipe 330, preventing ozone from reacting with the coating residue on the carrier plate and contaminating the carrier plate. The ozone exhaust gas destroyer 310 is connected to a condenser 320 through a conduit 311, the condenser 320 is connected to an exhaust pipe 340, and the exhaust pipe 340 is connected to the gas supply pipe 200 of the sealed chamber 120. The condenser 320 is adapted to absorb the heat generated by the ozone exhaust gas destroyer 310 during operation, avoiding thermal deformation that could lead to seal failure.

[0052] See also Figure 1 In some embodiments, a pressure regulating valve 321 is provided on the condenser 320, and pressure sensors are provided at both the outlet end of the condenser 320 and inside the sealed chamber 120. Both the pressure sensors and the pressure regulating valve 321 are electrically connected to a control module. The pressure sensors are suitable for real-time detection of the pressure at the outlet end of the condenser 320. The control module is configured to dynamically adjust the pressure regulating valve 321 based on the pressure data from the sealed chamber 120 and the outlet end of the condenser 320, so that the pressure inside the sealed chamber 120 is higher than the external pressure. The pressure regulating valve 321 is a proportional valve, and the control module dynamically adjusts its opening degree using a PID algorithm.

[0053] refer to Figure 2 In some embodiments, the sealed chamber 120 is provided with a plurality of air inlets 130, all of which are connected to the branch air supply pipe 210.

[0054] Furthermore, air inlets 130 are evenly distributed on both sides of the sealed chamber 120. Branch air supply pipes 210 connected to the air inlets 130 are connected in parallel with a main air supply pipe 210, which is connected to the outlet pipe 340. The inflation mechanism 300 can evenly deliver gas into the sealed chamber 120 through the main air supply pipe 210 and the branch air supply pipes 210, thereby ensuring the uniformity of the gas field within the sealed chamber 120 and helping to prevent contamination of the carrier plate.

[0055] See also Figure 2 In some embodiments, the diameter of the main gas supply pipe 210 is larger than the diameter of the branch gas supply pipe 210. This arrangement reduces pressure drop and flow resistance, which helps maintain pressure stability in the sealed chamber 120.

[0056] See Figure 1 Each sealing plate 110 is equipped with an observation window 111, which facilitates observation of the internal carrier plate transmission status and helps to identify problems inside the carrier plate return device 100, so as to facilitate timely detection and maintenance.

[0057] In some embodiments, an inflation mechanism 300 is also provided, which is connected to the carrier plate return device 100 via an air supply pipe 200. The inflation mechanism 300 includes: a fixed plate 350 on which an ozone exhaust gas destroyer 310 is disposed; and a condenser 320 connected to the ozone exhaust gas destroyer 310 via a conduit 311. The ozone exhaust gas destroyer 310 is connected to an air inlet pipe 330, the condenser 320 is connected to an air outlet pipe 340, and the air outlet pipe 340 is connected to the air supply pipe 200 of the return device 100.

[0058] In some embodiments, a pressure regulating valve 321 is provided on the condenser 320, and a pressure sensor is provided at the outlet end of the condenser 320. Both the pressure sensor and the pressure regulating valve 321 are electrically connected to a control module; and,

[0059] The control module is configured to adjust the opening and closing degree of the pressure regulating valve 321 according to the pressure at the outlet end of the condenser 320, so as to maintain the pressure difference between the carrier plate return device 100 and the outside world between 5-30 Pa.

[0060] In some embodiments, the pressure sensor may be, but is not limited to, Honeywell FP2000, the control module may be Siemens S7-1200, and the pressure regulating valve may be a zzyp-16b self-operated pressure regulating valve.

[0061] In this embodiment, the control module involved is electrically connected to the pressure sensor and is configured to dynamically adjust the pressure regulating valve 321 based on the pressure data of the sealed chamber 120 and the outlet of the condenser 320. These control methods or programs are all existing technologies or conventional technical means. This utility model does not make any substantial improvement to the above control methods and programs themselves. The above expression can be considered as an electrical connection relationship.

[0062] In summary, the carrier plate return device 100, by setting up an inflation mechanism 300 and a sealed chamber 120, supplies gas to the sealed chamber 120, so that the inside of the sealed chamber 120 is in a slightly positive pressure state, thereby preventing external impurities or gas from entering the sealed chamber 120 and avoiding contamination of the carrier plate by external impurities during the return process.

[0063] In the description of the embodiments of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0064] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, terms such as "first," "second," and other numerical terms used herein do not imply order or sequence unless expressly indicated herein. Therefore, without departing from the teachings of the exemplary embodiments, the first element, component, region, layer, or segment discussed above may be referred to as the second element, component, region, layer, or segment.

[0065] Spatially relative terms, such as “inside,” “outside,” “below,” “below,” “down,” “above,” “up,” etc., may be used herein to describe the relationship between one element or feature illustrated in the figures and another element or feature. In addition to the orientations depicted in the figures, spatially relative terms may be intended to cover different orientations of the device in use or operation. For example, if the device in the figure is flipped, an element described as “below” or “below” other elements or features would be oriented as “above” other elements or features. Thus, the example term “below” can cover both above and below orientations. The device may be oriented in other ways (rotated 90 degrees or in other orientations), and the spatially relative descriptors used herein are interpreted accordingly.

[0066] In the above discussion, unless otherwise stated, when used to describe numerical values, the terms “about,” “approximately,” “basically,” etc., indicate a change of + / - 10% in that value.

[0067] Based on the above-described preferred embodiments of this utility model, and through the foregoing description, those skilled in the art can make various changes and modifications without departing from the technical concept of this utility model. The technical scope of this utility model is not limited to the contents of the specification, but must be determined according to the scope of the claims.

Claims

1. A carrier backhaul apparatus, characterized by, include: The return device (100) includes a sealed chamber (120) formed by a combination of several sealing plates (110); The inflation mechanism (300) is connected to the sealed chamber (120) via an air supply pipe (200); The inflation mechanism (300) is configured to supply gas to the sealed chamber (120) so that the interior of the sealed chamber (120) is in a slightly positive pressure state.

2. The carrier plate return device as described in claim 1, characterized in that, The pressure difference between the sealed chamber (120) under slight positive pressure and the outside is maintained between 5-30 Pa.

3. The carrier plate return device as described in claim 1, characterized in that, The inflation mechanism (300) includes: A fixed plate (350) is provided with an ozone exhaust gas destroyer (310). The condenser (320) is connected to the ozone exhaust gas destroyer (310) via a conduit (311); The ozone exhaust gas destroyer (310) is connected to the inlet pipe (330), the condenser (320) is connected to the outlet pipe (340), and the outlet pipe (340) is connected to the gas supply pipe (200) of the sealed chamber (120).

4. The carrier plate return device as described in claim 3, characterized in that, The condenser (320) is equipped with a pressure regulating valve (321), and pressure sensors are installed at both the outlet end of the condenser (320) and in the sealed chamber (120). Both the pressure sensors and the pressure regulating valve (321) are electrically connected to a control module. The control module is configured as follows: Based on the pressure data at the outlet of the sealed chamber (120) and the condenser (320), the pressure regulating valve (321) is dynamically adjusted so that the pressure inside the sealed chamber (120) is higher than the external pressure.

5. The carrier plate return device as described in claim 1, characterized in that, The sealed chamber (120) is provided with multiple air inlets (130), all of which are connected to the branch air supply pipe (220).

6. The carrier plate return device as described in claim 5, characterized in that, The air inlet (130) is evenly distributed on both sides of the sealed chamber (120). The branch air supply pipe (220) connected to the air inlet (130) is connected in parallel through the main air supply pipe (210). The main air supply pipe (210) is connected to the air outlet pipe (340).

7. The carrier plate return device as described in claim 6, characterized in that, The diameter of the main gas pipeline (210) is larger than the diameter of the branch gas pipeline (220).

8. The carrier plate return device as described in claim 1, characterized in that, Each of the sealing plates (110) is provided with an observation window (111).

9. An inflator mechanism characterized by, It is connected to the carrier plate return device (100) via an air supply pipe (200). The inflation mechanism includes: A fixed plate (350) is provided with an ozone exhaust gas destroyer (310). The condenser (320) is connected to the ozone exhaust gas destroyer (310) via a conduit (311); The ozone exhaust gas destroyer (310) is connected to the air inlet pipe (330), the condenser (320) is connected to the air outlet pipe (340), and the air outlet pipe (340) is connected to the gas transmission pipe (200) of the return transmission device (100).

10. The inflation mechanism as described in claim 9, characterized in that, The condenser (320) is equipped with a pressure regulating valve (321), and a pressure sensor is installed at the outlet end of the condenser (320). Both the pressure sensor and the pressure regulating valve (321) are electrically connected to a control module; and, The control module is configured to adjust the opening and closing degree of the pressure regulating valve (321) according to the pressure at the outlet end of the condenser (320) so that the pressure difference between the carrier plate return device (100) and the outside is maintained between 5-30 Pa.

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