Temperature measuring device for tantalum carbide CVD coating equipment

Abstract

The utility model provides a temperature measuring device for tantalum carbide CVD coating equipment, and belongs to the field of carbon-based material production equipment. The problem that an existing temperature measuring device for tantalum carbide CVD coating equipment is difficult to meet the high-precision temperature control requirement is solved. According to the technical scheme, the device comprises a plurality of fixing screw rods, each fixing screw rod is provided with a first adjusting device and a second adjusting device, an adjusting piece is arranged between the first adjusting device and the second adjusting device on each fixing screw rod in a sleeving mode, and one end of each fixing screw rod is arranged on coating equipment through a furnace body flange. A pyrometer mounting bracket is arranged at the other end of the fixing screw rod, the pyrometer mounting bracket is arranged between the first adjusting device and the adjusting piece, a first through hole is formed in the pyrometer mounting bracket, and the first through hole and a furnace body pyrometer observation hole formed in the furnace body flange are coaxially formed; the utility model is applied to tantalum carbide CVD (Chemical Vapor Deposition) coating equipment.

Description

Technical Field

[0001] This utility model provides a temperature measuring device for tantalum carbide CVD coating equipment, belonging to the technical field of carbon-based material production equipment. Background Technology

[0002] TaC is a high-performance material with a melting point as high as 3880℃ and a Mohs hardness of 9-10. It also possesses high thermal conductivity, high strength, low thermal expansion, and corrosion resistance. TaC exhibits excellent chemical and mechanical compatibility with graphite. A TaC coating on graphite parts provides better chemical corrosion resistance than a standard graphite coating, allowing for long-term stable operation at 2600℃. Under high-temperature conditions, it can protect the reaction components of SiC crystal growth furnaces and epitaxial furnaces from the effects of hot ammonia, hydrogen, and silicon vapors, and effectively inhibit crystal growth and impurity migration during epitaxial processes. It is an indispensable material for preparing high-quality SiC wafers and epitaxial sheets. In the tantalum carbide CVD coating preparation process, precisely controlling the deposition temperature within the specified range is a key factor in ensuring the formation of a qualified TaC coating.

[0003] Existing temperature measuring devices for TaC coating equipment typically employ non-contact pyrometers, installed outside the reaction chamber via a flange interface. Their structure includes a pyrometer mounting bracket, a pyrometer movable base, a support rod, and a base plate assembly. The pyrometer mounting bracket adjusts the pyrometer height using two locking nuts. Lateral displacement of the pyrometer mounting bracket is achieved through the interplay of a transverse elongated hole on the bracket and an adjusting bolt fixed to the support rod. Longitudinal displacement of the pyrometer mounting bracket is achieved through the interplay of a longitudinal elongated hole on the pyrometer movable base and an adjusting bolt fixed to the base plate. The base plate assembly secures the temperature measuring device for the coating equipment to the flange interface.

[0004] However, the above structure has the following drawbacks in practical applications:

[0005] 1. Insufficient positioning accuracy: The adjustment method of the oblong hole and the bolt has a certain clearance tolerance. During the tightening of the fixing bolt, the mechanical stress can easily cause the calibrated high temperature meter position to shift, which will cause the temperature measuring point to deviate from the actual highest temperature area, resulting in temperature detection deviation. This leads to poor quality of the prepared tantalum carbide coating, thus affecting the inherent properties of tantalum carbide.

[0006] Second, the operation is inefficient. Due to the difference in bolt preload, it is necessary to repeatedly and alternately adjust the lateral and longitudinal positions of the pyrometer mounting bracket, which makes the operation process complicated and time-consuming. Utility Model Content

[0007] To address the technical problem that existing temperature measuring devices for tantalum carbide CVD coating equipment cannot meet the high-precision temperature control requirements for TaC coating preparation, this invention proposes a temperature measuring device for tantalum carbide CVD coating equipment that is accurate in positioning, easy to operate, and highly stable.

[0008] To solve the above-mentioned technical problems, the technical solution adopted by this utility model is as follows: a temperature measuring device for tantalum carbide CVD coating equipment, including multiple fixed screws, each of the fixed screws is provided with a first adjusting device and a second adjusting device, and an adjusting element is sleeved between the first adjusting device and the second adjusting device on the fixed screw, the first adjusting device, the second adjusting device and the adjusting element cooperate with each other;

[0009] One end of the fixing screw is mounted on the coating equipment via the furnace flange, and the other end of the fixing screw is equipped with a high-temperature meter mounting bracket, which is located between the first adjusting device and the adjusting component.

[0010] The pyrometer mounting bracket has a first through hole, which is coaxially arranged with the temperature measuring point of the pyrometer on the pyrometer mounting bracket. The first through hole is also coaxially arranged with the furnace body pyrometer observation hole on the furnace body flange. The furnace body pyrometer observation hole corresponds to the temperature to be measured area in the coating equipment.

[0011] Furthermore, a flange hole is provided on the furnace body flange, one end of the fixing screw is threadedly connected to the flange hole, and the other end of the fixing screw is movably connected to the pyrometer mounting bracket.

[0012] Furthermore, the pyrometer mounting bracket has multiple second through holes, and the end of the fixing screw away from the flange hole is clearance-fitted with the second through hole, with each fixing screw corresponding to a second through hole.

[0013] Furthermore, one end of the adjusting member abuts against the pyrometer mounting bracket, and the other end of the adjusting member abuts against the second adjusting device.

[0014] Furthermore, the adjusting component is a compression spring, and both the first adjusting device and the second adjusting device are nuts, which are threadedly connected to the fixing screw.

[0015] Furthermore, the pyrometer mounting bracket is an equilateral triangular plate structure.

[0016] Furthermore, the two fixing screws are parallel to each other.

[0017] Furthermore, the pyrometer mounting bracket is parallel to the furnace flange.

[0018] The advantages of this utility model over the prior art are as follows:

[0019] 1. This utility model, through the cooperation of the first adjustment device, the second adjustment device, and the adjustment component, can adjust the height and angle between the high-temperature mounting bracket and the furnace flange, ensuring that the temperature measuring point on the pyrometer can be aligned with the temperature to be measured area in the coating equipment. This reduces the difficulty of adjustment, significantly reduces the requirements for the installation accuracy of the furnace flange, and improves the temperature measurement accuracy of the temperature to be measured area in the coating equipment, thereby improving the quality of TaC coated products.

[0020] 2. The structure of this utility model is simple, easy to install and adjust, simplifies the operation process, and shortens the assembly time. Attached Figure Description

[0021] The present invention will be further described below with reference to the accompanying drawings:

[0022] Figure 1 This is a schematic diagram of the structure of this utility model;

[0023] Figure 2 This is the front view of the present invention;

[0024] Figure 3 This is a side view of the present invention;

[0025] Figure 4 This is a top view of the present invention;

[0026] In the diagram: 1 is the fixing screw, 2 is the first adjusting device, 3 is the second adjusting device, 4 is the adjusting component, 5 is the furnace body flange, 6 is the pyrometer mounting bracket, 7 is the first through hole, 8 is the furnace body pyrometer observation hole, 9 is the flange hole, and 10 is the second through hole. Detailed Implementation

[0027] In this utility model, unless otherwise stated, directional terms such as "upper," "lower," "top," and "bottom" are generally used in relation to the direction shown in the accompanying drawings, or in relation to the vertical, perpendicular, or gravitational direction of the component itself; similarly, for ease of understanding and description, "inner" and "outer" refer to the inner and outer contours of each component itself, but the above directional terms are not used to limit this utility model.

[0028] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0029] like Figures 1 to 4 As shown, this utility model provides a temperature measuring device for tantalum carbide CVD coating equipment, including multiple fixing screws 1. In this embodiment, three fixing screws 1 are provided, and the fixing screws 1 are parallel to each other. Each fixing screw 1 can be adjusted and connected to a first adjusting device 2 and a second adjusting device 3. An adjusting member 4 is sleeved between the first adjusting device 2 and the second adjusting device 3 on the fixing screw 1. The first adjusting device 2, the second adjusting device 3 and the adjusting member 4 cooperate with each other.

[0030] One end of the fixing screw 1 is fixedly connected to the furnace flange 5. Specifically, the furnace flange 5 has a flange hole 9, and one end of the fixing screw 1 is threaded into the flange hole 9. The furnace flange 5 is fixedly connected to the coating equipment. The other end of the fixing screw 1 is movably connected to the pyrometer mounting bracket 6. Specifically, the pyrometer mounting bracket 6 has multiple second through holes. In this embodiment, the pyrometer mounting bracket 6 has three second through holes. The other end of the fixing screw 1 is clearance-fitted with the second through holes. The fixing screw 1 and the second through holes cooperate with each other, allowing the pyrometer mounting bracket 6 to move up and down along the fixing screw 1. The fixing screw 1 and the second through holes correspond one-to-one.

[0031] Furthermore, one end of the adjusting member 4 abuts against the pyrometer mounting bracket 6, and the other end of the adjusting member 4 abuts against the second adjusting device 3. In this embodiment, the adjusting member 4 is a compression spring, and both the first adjusting device 2 and the second adjusting device 3 are nuts, which are threadedly connected to the fixing screw 1.

[0032] The pyrometer mounting bracket 6 is arranged parallel to the furnace flange 5. The pyrometer mounting bracket 6 is fixedly connected between the first adjusting device 2 and the adjusting component 4. The relative position between the pyrometer mounting bracket 6 and the fixing screw 1 can be adjusted by simultaneously adjusting the relative positions of all the first adjusting devices 2 and / or all the second adjusting devices 3 on the fixing screw 1. That is, the distance between the pyrometer mounting bracket 6 and the furnace flange 5 can be adjusted by simultaneously adjusting the relative positions of all the first adjusting devices 2 and / or all the second adjusting devices 3 on the fixing screw 1. The angle between the pyrometer mounting bracket 6 and the furnace flange 5 can be adjusted by adjusting the position of the first adjusting device 2 on one or both fixing screws 1. This ensures that even if there is an installation error between the furnace flange 5 and the temperature to be measured area in the coating equipment, the pyrometer on the pyrometer mounting bracket 6 can be aligned with the temperature to be measured area by adjusting the angle between the pyrometer mounting bracket 6 and the furnace flange 5, thereby greatly reducing the installation accuracy requirements of the furnace flange 5 during operation.

[0033] A first through hole 7 is provided on the pyrometer mounting bracket 6. The first through hole 7 is coaxially arranged with the temperature measuring point of the pyrometer fixedly connected to the pyrometer mounting bracket 6, and the first through hole 7 is coaxially arranged with the furnace body pyrometer observation hole 8 provided on the furnace body flange 5. The furnace body pyrometer observation hole 8 corresponds to the temperature to be measured area in the coating equipment. This structure ensures that the temperature measuring point of the pyrometer, the midpoint of the first through hole 7, and the temperature to be measured area in the coating equipment are on the same straight line. Specifically, the pyrometer mounting bracket 6 is an equilateral triangular plate structure, and three fixing screws 1 are threadedly connected to the three vertices of the pyrometer mounting bracket 6.

[0034] The working principle of this utility model:

[0035] In use, the pyrometer is installed on the pyrometer mounting bracket 6, so that the first through hole 7 on the pyrometer mounting bracket 6 is coaxial with the furnace body pyrometer observation hole 8 on the furnace body flange 5. The height and angle between the pyrometer mounting bracket and the furnace body flange 5 are adjusted by adjusting the relative position of one or more first adjustment devices 2 on the fixing screw 1, so as to ensure that the temperature measuring point on the pyrometer can be aligned with the temperature to be measured area in the coating equipment, thus reducing the difficulty of adjustment.

[0036] Regarding the specific structure of this utility model, it should be noted that the connection relationships between the various component modules adopted in this utility model are definite and achievable. Except as specifically described in the embodiments, their specific connection relationships can bring about corresponding technical effects and solve the technical problems proposed by this utility model without relying on the execution of corresponding software programs. The models of the components, modules, and specific components appearing in this utility model, the connection methods between them, and the conventional usage methods and expected technical effects brought about by the above-mentioned technical features, unless specifically described, are all publicly disclosed content in patents, journal articles, technical manuals, technical dictionaries, and textbooks that can be obtained by those skilled in the art before the application date, or belong to conventional technology, common knowledge, and other existing technologies in this field. There is no need to elaborate, which makes the technical solution provided in this case clear, complete, and achievable, and can reproduce or obtain corresponding physical products based on this technical means.

[0037] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. A temperature measuring device for a tantalum carbide CVD coating apparatus, characterized by: It includes multiple fixing screws (1), each fixing screw (1) is provided with a first adjusting device (2) and a second adjusting device (3), and an adjusting member (4) is sleeved between the first adjusting device (2) and the second adjusting device (3) on the fixing screw (1). The first adjusting device (2), the second adjusting device (3) and the adjusting member (4) cooperate with each other. One end of the fixing screw (1) is mounted on the coating equipment through the furnace flange (5), and the other end of the fixing screw (1) is provided with a high temperature meter mounting bracket (6). The high temperature meter mounting bracket (6) is located between the first adjusting device (2) and the adjusting component (4). A first through hole (7) is provided on the high temperature meter mounting bracket (6). The first through hole (7) is coaxially arranged with the temperature measuring point of the high temperature meter set on the high temperature meter mounting bracket (6). The first through hole (7) is coaxially arranged with the furnace body high temperature meter observation hole (8) opened on the furnace body flange (5). The furnace body high temperature meter observation hole (8) corresponds to the temperature to be measured area in the coating equipment.

2. The temperature measuring device for a tantalum carbide CVD coating equipment according to claim 1, characterized in that: The furnace body flange (5) has a flange hole (9), one end of the fixing screw (1) is threaded to the flange hole (9), and the other end of the fixing screw (1) is movably connected to the pyrometer mounting bracket (6).

3. The temperature measuring device for a CVD coating apparatus of claim 2, wherein: The pyrometer mounting bracket (6) has multiple second through holes. The end of the fixing screw (1) away from the flange hole (9) is fitted with the second through hole with a clearance. The fixing screw (1) corresponds to the second through hole one by one.

4. The temperature measuring device for a tantalum carbide CVD coating equipment according to claim 1, characterized in that: One end of the adjusting member (4) abuts against the pyrometer mounting bracket (6), and the other end of the adjusting member (4) abuts against the second adjusting device (3).

5. The temperature measuring device for a tantalum carbide CVD coating equipment according to claim 1, characterized in that: The adjusting component (4) is a compression spring, and the first adjusting device (2) and the second adjusting device (3) are both nuts, which are threadedly connected to the fixing screw (1).

6. The temperature measuring device for a tantalum carbide CVD coating equipment according to claim 1, characterized in that: The pyrometer mounting bracket (6) is an equilateral triangular plate structure.

7. The temperature measuring device for a tantalum carbide CVD coating equipment according to claim 1, characterized in that: The two fixed screws (1) are parallel to each other.

8. The temperature measuring device for tantalum carbide CVD coating equipment according to claim 1, characterized in that: The pyrometer mounting bracket (6) is parallel to the furnace flange (5).

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