Rectifying plate

Abstract

The utility model relates to a rectifying plate which comprises a plate body, the plate body is provided with a flower basket positioning structure used for positioning a flower basket, a hollowed-out structure is arranged at the position, corresponding to the flower basket positioning structure, of the plate body, and rectifying holes are formed in the periphery of the flower basket positioning structure and the hollowed-out structure of the plate body. And the through-flow sectional area of the hollow structure is larger than that of the rectifying hole. During application, a flower basket containing a wafer is clamped and matched with the flower basket positioning structure, so that the flower basket is positioned on the rectifying plate, the flower basket is ensured not to displace relative to the rectifying plate due to the action of megasonic energy in the cleaning process, and the effect of protecting the bottom support of the flower basket is achieved; meanwhile, the hollowed-out structure with the through-flow sectional area larger than the through-flow sectional area of the rectifying hole is arranged at the position, corresponding to the flower basket positioning structure, of the rectifying plate, so that energy loss borne by megasonic energy is small when the megasonic energy penetrates through the rectifying plate through the hollowed-out structure, more energy can be reserved for cleaning the silicon carbide wafer, and the better silicon carbide wafer cleaning effect is achieved.

Description

Technical Field

[0001] This utility model relates to the field of wet chemical cleaning technology, and in particular to a rectifier plate. Background Technology

[0002] In almost every process of semiconductor device manufacturing, wafer cleaning is a critical issue, and the quality of wafer cleaning has a significant impact on device performance. The surface of silicon carbide wafers used to fabricate devices must be clean and free of contaminants. Therefore, before use or shipment, silicon carbide wafers undergo a series of cleaning processes. Currently, the most commonly used cleaning method for silicon carbide wafers is the RCA cleaning method, short for Radio Corporation of America cleaning method, a wet chemical cleaning method widely used in semiconductor manufacturing.

[0003] RCA cleaning requires ultrasonic cleaning in the megasonic cleaning tank of the RCA cleaning machine. The basket containing silicon carbide wafers is placed on the rectifier board of the megasonic cleaning tank, and the shock wave generated by the megasonic energy is used to clean the silicon carbide wafers in the basket. Therefore, the rectifier board has an important impact on the particle cleaning yield.

[0004] Currently, such as Figure 1 As shown, the rectifier holes 02 of the rectifier plate 01 are evenly distributed on the rectifier plate 01. This structure causes a large loss of megasonic wave energy when passing through the rectifier plate 01, which cannot fully utilize the megasonic wave energy to clean the wafer. Furthermore, under the action of the megasonic wave energy, the basket holding the silicon carbide wafer will become unstable, shift, and damage the bottom support of the basket. Utility Model Content

[0005] The purpose of this invention is to provide a rectifier board that can reduce mega-sonic energy loss, achieve better silicon carbide wafer cleaning effect, and protect the bottom of the basket.

[0006] To achieve the above objectives, this utility model provides the following technical solution:

[0007] A rectifier plate for a megasonic cleaning tank of an RCA cleaning machine includes a plate body. The plate body is provided with a basket positioning structure for positioning a basket. A hollow structure is provided at a position on the plate body corresponding to the basket positioning structure. A rectifier hole is provided on the plate body around the basket positioning structure and the hollow structure. The flow cross-sectional area of ​​the hollow structure is larger than the flow cross-sectional area of ​​the rectifier hole.

[0008] In one embodiment of this application, the flower basket positioning structure includes a plurality of positioning plates arranged circumferentially at intervals, each positioning plate forming a limiting groove adapted to the bottom shape of the flower basket.

[0009] In one embodiment of this application, the flower basket positioning structure includes four positioning plates, each positioning plate being L-shaped, and the four positioning plates forming the limiting groove.

[0010] In one embodiment of this application, the positioning plate has a mating surface for engaging with the bottom of the flower basket, including a contact surface and a guide surface. The guide surface is connected to the contact surface and is located above the contact surface. The contact surface serves as the wall of the limiting groove and engages with the bottom outer surface of the flower basket. The guide surface is inclined from the end connected to the contact surface toward the outside of the limiting groove.

[0011] In one embodiment of this application, the hollow structure includes a central hollow area and four edge hollow areas. The four edge hollow areas are respectively disposed on the four sides of the central hollow area, and the edge hollow areas extend from the edge of the central hollow area to the space between two adjacent positioning plates.

[0012] In one embodiment of this application, the rectifier plate is a quartz rectifier plate.

[0013] In one embodiment of this application, the four corners of the rectifier plate are provided with chamfered structures.

[0014] In one embodiment of this application, the rectifier plate is provided with a pick-and-place structure for cooperating with a pick-and-place tool, so as to facilitate the pick-and-place of the rectifier plate in the mega-sonic cleaning tank.

[0015] In one embodiment of this application, the pick-and-place structure includes:

[0016] A first pick-and-place plate is erected from the rectifier plate in a direction away from the rectifier plate. The first pick-and-place plate is provided with a first pick-and-place hole, and the plate surface of the first pick-and-place plate is parallel to a first direction.

[0017] The second pick-and-place plate stands upright from the rectifier plate in a direction away from the rectifier plate. The second pick-and-place plate is provided with a second pick-and-place hole. The surface of the second pick-and-place plate is parallel to a second direction, and the first direction intersects with the second direction.

[0018] In one embodiment of this application, the first pick-and-place plate is respectively provided at both ends of the length direction of the rectifier plate, and the second pick-and-place plate is respectively provided at both ends of the width direction of the rectifier plate.

[0019] As can be seen from the above technical solutions, this utility model discloses a rectifier plate for use in the megasonic cleaning tank of an RCA cleaning machine. The rectifier plate includes a plate body, a basket positioning structure for positioning the basket, a hollow structure for the plate body corresponding to the basket positioning structure, and rectifier holes for the plate body around the basket positioning structure and the hollow structure. The flow cross-sectional area of ​​the hollow structure is larger than the flow cross-sectional area of ​​the rectifier holes.

[0020] In application, the basket containing the wafers engages with the basket positioning structure to position the basket on the rectifier board. This ensures that the basket does not shift relative to the rectifier board during the cleaning process due to the megaacoustic energy, thus protecting the basket base. Simultaneously, the rectifier board features a perforated structure at the corresponding position of the basket positioning structure, with a flow cross-sectional area larger than that of the rectifier hole. This minimizes energy loss as the megaacoustic energy passes through the perforated structure, retaining more energy for cleaning the silicon carbide wafers and achieving better cleaning results. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the structure of a rectifier plate in the prior art;

[0023] Figure 2 This is a schematic diagram of the rectifier plate provided in an embodiment of the present utility model;

[0024] Figure 3 A schematic diagram of the matching structure of the rectifier plate and the flower basket provided in an embodiment of this utility model.

[0025] Figure 1 middle:

[0026] 01 is the rectifier plate; 02 is the rectifier aperture;

[0027] Figure 2 and Figure 3 middle:

[0028] 100 is the plate body; 200 is the positioning plate; 210 is the contact surface; 220 is the guide surface; 300 is the rectifier hole; 400 is the hollow structure; 410 is the middle hollow area; 420 is the edge hollow area; 500 is the chamfered structure; 600 is the pick-and-place structure; 610 is the first pick-and-place plate; 611 is the first pick-and-place hole; 620 is the second pick-and-place plate; 621 is the second pick-and-place hole; 700 is the flower basket. Detailed Implementation

[0029] The core of this invention is to provide a rectifier board whose structural design enables it to reduce mega-sonic energy loss, achieve better silicon carbide wafer cleaning effect, and protect the bottom of the basket.

[0030] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0031] The RCA cleaning method was pioneered by RCA Laboratories in the United States, hence its name. RCA cleaning utilizes a cleaning solution combined with megasonic waves to clean wafers. The cleaning process takes place in the megasonic cleaning tank of the RCA cleaner. Before cleaning, the wafers to be cleaned are placed in baskets, and the baskets are then placed on the rectifier board of the megasonic cleaning tank. Currently, the rectifier boards used include... Figure 1 As shown, the rectifier plate 01 is densely covered with rectifier holes 02. When mega-sonic energy passes through the rectifier holes 02 and through the rectifier plate 01, it is easily affected by the rectifier plate 01, resulting in energy loss. Furthermore, the basket... Figure 1 The rectifier plate 01 shown cannot be fixed and is prone to displacement under the influence of megasonic energy, damaging the basket base. Therefore, this application provides a rectifier plate for a megasonic cleaning tank in an RCA cleaning machine. Please refer to [link to relevant documentation]. Figure 2 .

[0032] The rectifier plate includes a plate body 100, which is made of a stable and corrosion-resistant material. In this application, the rectifier plate is a quartz rectifier plate. The plate body 100 is provided with a flower basket positioning structure for positioning the flower basket 700. The flower basket positioning structure is engaged with the bottom of the flower basket 700, that is, the bottom support of the flower basket 700, to position the flower basket 700. A hollow structure 400 is provided at the position corresponding to the flower basket positioning structure on the plate body 100. The plate body 100 is provided with rectifier holes 300 around the flower basket positioning structure and the hollow structure 400. The flow passage cross-sectional area of ​​the hollow structure 400 is larger than the flow passage cross-sectional area of ​​the rectifier holes 300.

[0033] It should be noted that the hollow structure 400 can be composed of multiple mutually isolated hollow areas, or the entire position circled by the basket positioning structure on the rectifier plate can be hollowed out. The overall hollowing out scheme has the least impact on the megason energy. Therefore, in a preferred embodiment of this application, the plate 100 is hollowed out at the corresponding position of the basket positioning structure so that the flow cross-sectional area of ​​the hollow structure 400 is much larger than the flow cross-sectional area of ​​the rectifier hole 300, thereby reducing the loss of megason energy caused by the rectifier plate.

[0034] Compared with the prior art, the rectifier plate provided in this embodiment of the utility model, when applied, such as Figure 3 As shown, the basket 700 containing the wafers engages with the basket positioning structure to position the basket 700 on the rectifier board. This ensures that the basket 700 will not shift relative to the rectifier board during the cleaning process due to the megasonic energy, thus protecting the bottom of the basket 700. Simultaneously, the rectifier board has a perforated structure 400 at the corresponding position of the basket positioning structure, with a flow cross-sectional area larger than that of the rectifier hole 300. This minimizes energy loss when the megasonic energy passes through the perforated structure 400 and through the rectifier board, retaining more energy for cleaning the silicon carbide wafers and achieving a better cleaning effect.

[0035] like Figure 2 As shown, the flower basket positioning structure includes multiple positioning plates 200 arranged circumferentially. Each positioning plate 200 forms a limiting groove that matches the bottom shape of the flower basket 700. The limiting groove formed by the multiple positioning plates 200 arranged circumferentially is discontinuous in the circumferential direction. The plate surface of each positioning plate 200 that forms the inner wall of the limiting groove is the mating surface of the positioning plate 200 for mating with the bottom of the flower basket 700.

[0036] It should be noted that in other embodiments, the flower basket positioning structure includes only an annular positioning plate 200, and the limiting groove formed by the positioning plate 200 is a circumferentially continuous and circumferentially closed limiting groove.

[0037] Specifically, such as Figure 2 As shown in a specific embodiment of this application, the flower basket positioning structure includes four positioning plates 200. The positioning plates 200 are L-shaped and form a limiting groove. The four positioning plates 200 are respectively engaged with the four corners of the bottom of the flower basket 700. Since the positioning plates 200 are L-shaped, each positioning plate 200 can be engaged with the bottom of the flower basket 700 in two directions. Therefore, even with only four positioning plates 200, a good positioning effect can still be achieved, preventing the flower basket 700 from being displaced relative to the rectifier plate due to the effect of megasonite energy during the cleaning process.

[0038] It is understood that the L-shaped positioning plate 200 is only a preferred embodiment provided by this application. In other embodiments, the positioning plate 200 may also be a straight plate, a curved plate, etc., which are not limited here.

[0039] To facilitate the bottom of the flower basket 700 fitting into the limiting groove, such as Figure 2 As shown in one embodiment of this application, the mating surface of the positioning plate 200 for engaging with the bottom of the flower basket 700 includes a contact surface 210 and a guide surface 220. The guide surface 220 is connected to the contact surface 210 and is located above the contact surface 210. The contact surface 210 serves as the groove wall of the limiting groove and engages with the bottom outer surface of the flower basket 700. The guide surface 220 is inclined from the end connected to the contact surface 210 toward the outside of the limiting groove. In this way, the guide surfaces 220 on each positioning plate 200 can together form a flared guide structure in the shape of a trumpet, thereby facilitating the bottom of the flower basket 700 to be inserted into the limiting groove.

[0040] In order to maximize the flow-through cross-sectional area of ​​the hollow structure 400, in one embodiment of this application, such as Figure 2 As shown, the hollow structure 400 includes a central hollow area 410 and four edge hollow areas 420. The four edge hollow areas 420 are respectively arranged on the four sides of the central hollow area 410, and the four edge hollow areas 420 are connected to the central hollow area 410 without obstruction. The edge hollow areas 420 extend from the edge of the central hollow area 410 to the space between two adjacent positioning plates 200. This can maximize the flow cross-sectional area of ​​the hollow structure 400, so that the bottom of the flower basket 700 forms the largest possible hollow area, ensuring that the megason wave energy loss is minimized when passing through the rectifier plate.

[0041] To facilitate the placement and removal of the rectifier board within the megasonic cleaning tank and prevent jamming between the corners of the rectifier board and the interior of the tank during the process, in one embodiment of this application, such as... Figure 2 As shown, the four corners of the rectifier plate are chamfered by 500 to prevent the corners of the rectifier plate from being damaged by impacts during use and to make it easier to enter and exit the mega-sonic cleaning tank.

[0042] It is foreseeable that chemical agents will be used as cleaning solutions during RCA cleaning. These cleaning solutions include SPM (Sulfuric Peroxide Mixture), HF (DHF), APM (Ammonia, Hydrogen-Peroxide Mixing), and HPM (Hydrochloric Acid / Hydrogen Peroxide / DI Water). The cleaning solution is a mixture of hydrogen chloride, hydrogen peroxide, and deionized water. One or more of these cleaning solutions are used sequentially during cleaning. Specifically, SPM cleaning solution is a mixture of H2SO4 and H2O2; HF (DHF) cleaning solution is a mixture of HF, H2O2, and H2O; APM cleaning solution is a mixture of NH4OH, H2O2, and H2O; and HPM cleaning solution is a mixture of HCl, H2O2, and H2O. As can be seen, these cleaning solutions contain corrosive and strong oxidizing substances. Therefore, to facilitate the removal and placement of the rectifier plate immersed in the cleaning solution within the megasonic cleaning tank, as follows... Figure 2 As shown, in one embodiment of this application, the rectifier plate is provided with a pick-and-place structure 600 for cooperating with a pick-and-place tool to facilitate the pick-and-place of the rectifier plate in the mega-sonic cleaning tank. The pick-and-place tool includes, but is not limited to, hooks, tweezers, clamps, robotic arms or other pick-and-place tools specifically designed for the pick-and-place structure 600.

[0043] Specifically, such as Figure 2 As shown, the pick-and-place structure 600 includes a first pick-and-place plate 610 and a second pick-and-place plate 620. The first pick-and-place plate 610 stands upright from the rectifier plate in a direction away from the rectifier plate. The first pick-and-place plate 610 is provided with one or more first pick-and-place holes 611, and the plate surface of the first pick-and-place plate 610 is parallel to a first direction. The second pick-and-place plate 620 stands upright from the rectifier plate in a direction away from the rectifier plate. The second pick-and-place plate 620 is provided with one or more second pick-and-place holes 621, and the plate surface of the second pick-and-place plate 620 is parallel to a second direction. The first direction and the second direction intersect. By providing pick-and-place plates with two different arrangement directions, it is more convenient for users to pick up and place the rectifier plate.

[0044] To further optimize the above technical solution, one or more first pick-and-place plates 610 are respectively provided at both ends of the rectifier plate along its length, and one or more second pick-and-place plates 620 are respectively provided at both ends of the rectifier plate along its width, such as... Figure 2As shown, two first pick-and-place plates 610 are respectively provided at both ends of the length direction of the rectifier plate, and two second pick-and-place plates 620 are respectively provided at both ends of the width direction of the rectifier plate. Of course, the number of pick-and-place plates at both ends of the length direction and the width direction of the rectifier plate is not limited to two, but can also be three, four, five or more, which is not limited here.

[0045] As indicated in this application and claims, unless the context clearly indicates otherwise, the words "a," "an," "a," and / or "the" are not specifically singular and may include the plural. Generally, the terms "comprising" and "including" only indicate the inclusion of expressly identified steps and elements, which do not constitute an exclusive list, and the method or apparatus may also include other steps or elements. An element defined by the phrase "comprising an..." does not exclude the presence of other identical elements in the process, method, product, or apparatus that includes the element.

[0046] In the description of this application, unless otherwise expressly defined, terms such as "setup," "installation," and "connection" should be interpreted broadly, and those skilled in the art can reasonably determine the specific meaning of the above terms in this application in conjunction with the specific content of the technical solution.

[0047] It should be noted that the various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0048] This article uses specific examples to illustrate the principles and implementation methods of this utility model. The descriptions of the above embodiments are only for the purpose of helping to understand the core ideas of this utility model. It should be noted that for those skilled in the art, several improvements and modifications can be made to this utility model without departing from the principles of this utility model, and these improvements and modifications also fall within the protection scope of the claims of this utility model.

Claims

1. A rectifier plate for a megasonic cleaning tank of an RCA cleaning machine, characterized in that, The system includes a plate (100) with a flower basket positioning structure for positioning a flower basket (700). A hollow structure (400) is provided at the position corresponding to the flower basket positioning structure on the plate (100). A flow-rectifying hole (300) is provided on the periphery of the flower basket positioning structure and the hollow structure (400) on the plate (100). The flow-through cross-sectional area of ​​the hollow structure (400) is larger than the flow-through cross-sectional area of ​​the flow-rectifying hole (300).

2. The rectifier plate of claim 1, wherein The flower basket positioning structure includes multiple positioning plates (200) arranged circumferentially, each positioning plate (200) forming a limiting groove that matches the bottom shape of the flower basket (700).

3. The rectifier plate of claim 2, wherein The flower basket positioning structure includes four positioning plates (200), each positioning plate (200) being L-shaped, and the four positioning plates (200) forming the limiting groove.

4. The rectifier plate according to claim 2 or 3, characterized in that The positioning plate (200) has a mating surface for engaging with the bottom of the flower basket (700), including a contact surface (210) and a guide surface (220). The guide surface (220) is connected to the contact surface (210) and is located above the contact surface (210). The contact surface (210) serves as the groove wall of the limiting groove and engages with the bottom outer surface of the flower basket (700). The guide surface (220) is inclined from the end connected to the contact surface (210) toward the outside of the limiting groove.

5. The rectifier plate of claim 3, wherein The hollow structure (400) includes a central hollow area (410) and four edge hollow areas (420). The four edge hollow areas (420) are respectively disposed on the four sides of the central hollow area (410), and the edge hollow areas (420) extend from the edge of the central hollow area (410) to the space between two adjacent positioning plates (200).

6. The rectifier plate of claim 1, wherein The rectifier plate is a quartz rectifier plate.

7. The rectifier plate of claim 1, wherein The rectifier plate has chamfered corners (500) at its four corners.

8. The rectifier plate of claim 1, wherein The rectifier plate is provided with a pick-and-place structure (600) for cooperating with the pick-and-place tool, so as to facilitate the pick-and-place of the rectifier plate in the mega-sonic cleaning tank.

9. The rectifier plate of claim 8, wherein The pick-and-place structure (600) includes: A first pick-and-place plate (610) is erected from the rectifier plate in a direction away from the rectifier plate. The first pick-and-place plate (610) is provided with a first pick-and-place hole (611). The plate surface of the first pick-and-place plate (610) is parallel to a first direction. The second pick-up and drop plate (620) is erected from the rectifier plate in a direction away from the rectifier plate. The second pick-up and drop plate (620) is provided with a second pick-up and drop hole (621). The plate surface of the second pick-up and drop plate (620) is parallel to a second direction, and the first direction intersects with the second direction.

10. The rectifier plate of claim 9, wherein The first pick-and-place plate (610) is provided at both ends of the length direction of the rectifier plate, and the second pick-and-place plate (620) is provided at both ends of the width direction of the rectifier plate.

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