Punching tool for TGV glass production
By introducing a centralized air supply and heat dissipation structure into TGV glass production, the problem of poor cooling effect caused by dispersed exhaust from vents has been solved, achieving more efficient heat dissipation and improved safety, and ensuring the stability and quality of the glass drilling process.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SUZHOU JIELINGSAI SEMICONDUCTOR TECHNOLOGY CO LTD
- Filing Date
- 2025-05-06
- Publication Date
- 2026-04-24
AI Technical Summary
In the existing TGV glass production process, the gas discharged from the pores on the surface of the placement rack is relatively dispersed, resulting in poor cooling effect during the drilling process.
A centralized air supply and heat dissipation structure was designed, which includes an exhaust hood, a front baffle, a branch pipe, a fan, and an air supply pipe. The exhaust hood is moved along with the laser drill by an electric slide, and the air is concentrated on the drilling area to enhance the heat dissipation effect. The fan delivers airflow to accelerate heat dissipation.
It effectively accelerates the airflow in the TGV glass drilling area, enhances heat dissipation, prevents the glass from overheating and breaking, improves production quality, and shields the glass from flying debris, reducing safety hazards.
Smart Images

Figure CN224158643U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of TGV glass production technology, specifically to a drilling tool for TGV glass production. Background Technology
[0002] TGV glass is a material used in advanced 3D integrated circuit technology, where TGV stands for Vertical Electrical Interconnect through a Glass Substrate. In contrast to TSV, it uses high-quality borosilicate glass or quartz glass as the substrate and fabricates microvias through seed layer sputtering, electroplating, chemical mechanical planarization, RDL redistribution, and bumping processes. These microvias typically have diameters ranging from 10μm to 100μm. Due to its low cost, ease of obtaining large-size ultra-thin glass substrates, and excellent high-frequency electrical performance, TGV technology is considered a key technology for next-generation 3D integration. In the production process of TGV glass, a drilling machine is needed to drill holes in a specific glass plate to allow circuitry materials to pass through and assemble with the glass plate, thus forming TGV glass. A search revealed existing technology (publication number: CN202420492357.5) for a drilling fixture used in TGV glass production. The document describes that "this utility model, through the arrangement of a suction cup, connecting tube, suction machine, exhaust pipe, one-way air inlet valve pipe, and air hole, places the glass plate..." On the suction cup, the suction machine draws air from inside the suction cup through the connecting pipe, creating a vacuum inside the suction cup. This uses atmospheric pressure to stably fix the glass plate above the placement frame, preventing the glass plate from shifting during drilling and improving drilling stability. At the same time, while the suction machine is drawing air from inside the suction cup, outside air also enters the connecting pipe through the one-way air inlet valve and is discharged to the inside of the placement frame through the exhaust pipe. It is then dispersed through the air holes to cool the glass plate and prevent it from overheating and breaking during drilling. However, in the existing technology, the gas discharged from the air holes on the surface of the placement frame is relatively dispersed, resulting in poor cooling effect during drilling. Utility Model Content
[0003] To overcome the shortcomings of existing technologies, a drilling fixture for TGV glass production is provided to solve the problem that the gas discharged from the pores on the surface of the holder is relatively dispersed, resulting in poor cooling effect during the drilling process.
[0004] To achieve the above objectives, a drilling fixture for TGV glass production is provided, comprising: a glass drilling machine body, wherein a fixing frame is welded to the upper end face of the glass drilling machine body.
[0005] An adjusting screw is installed on the upper end of the glass drilling machine body. An electric slide is connected to the surface of the adjusting screw via a drive block. A laser drill is slidably connected to the lower end of the electric slide. Exhaust hoods are screwed onto the left and right sides of the electric slide. A front baffle is hinged to the front end of the exhaust hood. An exhaust mesh is provided on the inner inclined surface of the lower end of the exhaust hood. Branch pipes are connected to the left and right sides of the exhaust hood. A fan is connected to the branch pipes via air supply pipes. The lower end surfaces of the exhaust hood and the front baffle are in close contact with the drilling table. An air outlet is provided on the rear side panel of the drilling table.
[0006] Furthermore, a stepper motor is fixed to the right side of the fixing frame, an adjusting screw is connected to the left side of the stepper motor shaft, and a drilling table is fixed to the upper surface of the glass drilling machine body.
[0007] Furthermore, a perforated chip removal plate is embedded and fixed in the middle of the drilling table, and a chip removal groove is provided at the lower end of the perforated chip removal plate. A chip storage mesh frame is inserted into the lower opening of the chip removal groove.
[0008] Furthermore, receivers are fixedly installed on the left and right sides of the laser drill, a fan is installed on the left side of the fixing frame, and clamps are symmetrically contacted on the upper surface of the drilling platform.
[0009] Furthermore, an elastic rubber pad is adhered to one side of the clamping plate, the other side of the clamping plate is connected to the fixing frame via an electric push rod, and a positioner is fixed on the upper surface of the clamping plate.
[0010] Furthermore, a fan is connected to the rear side of the drilling platform via a connecting pipe; and the connecting pipe is connected to the air outlet.
[0011] Furthermore, a fixing ring is bonded to the front surface of the exhaust hood, a buckle is connected to the surface of the front baffle, and the laser drill is located inside the exhaust hood.
[0012] The beneficial effects of this utility model are as follows: the drilling fixture for TGV glass production utilizes an exhaust hood, a front baffle, a branch pipe, a fan, and an air supply pipe to form a centralized air supply and heat dissipation structure. An electric sliding table drives the hollow rectangular exhaust hood to move along with the laser drill, concentrating the airflow from the fan towards the drilling area through the exhaust mesh at the lower sloping surface of the exhaust hood. This accelerates the airflow velocity in the TGV glass drilling area, speeds up the dissipation of heat generated during drilling on the TGV glass surface, and allows the concentrated exhaust airflow to carry away more heat generated during drilling, enhancing the heat dissipation effect of the TGV glass drilling fixture. Simultaneously, it effectively shields the area from flying debris during drilling, reducing safety hazards and effectively preventing the TGV glass from overheating and breaking due to the heat generated during laser drilling, thus improving the production quality of the TGV glass drilling fixture. Attached Figure Description
[0013] Figure 1This is a front view structural diagram of a drilling fixture used in TGV glass production according to an embodiment of the present invention.
[0014] Figure 2 This is a front view cross-sectional structural diagram of a drilling tool for TGV glass production according to an embodiment of the present invention.
[0015] Figure 3 This is a partial cross-sectional view of the laser drill and exhaust hood according to an embodiment of the present invention.
[0016] Figure 4 This is a side view sectional structural diagram of the punching station according to an embodiment of the present utility model.
[0017] Figure 5 This is a three-dimensional structural diagram of the exhaust hood according to an embodiment of the present utility model.
[0018] In the diagram: 1. Glass drilling machine body; 11. Fixing frame; 12. Stepper motor; 13. Adjusting screw; 14. Chip removal groove; 2. Laser drill; 21. Drive block; 22. Electric slide; 23. Receiver; 3. Drilling table; 31. Air outlet; 32. Fan; 33. Connecting pipe; 34. Perforated chip removal plate; 4. Debris storage frame; 5. Exhaust hood; 51. Front baffle; 52. Ring buckle; 53. Branch pipe; 54. Fan; 55. Air supply pipe; 56. Exhaust outlet; 57. Fixing ring; 6. Clamping plate; 61. Positioner; 62. Electric push rod; 63. Elastic rubber pad. Detailed Implementation
[0019] Reference Figures 1 to 5 As shown, this utility model provides a drilling fixture for TGV glass production, including: a glass drilling machine body 1, with a fixing frame 11 welded to the upper end face of the glass drilling machine body 1.
[0020] An adjusting screw 13 is installed on the upper end of the glass drilling machine body 1. An electric slide table 22 is connected to the surface of the adjusting screw 13 via a drive block 21. A laser drill 2 is slidably connected to the lower end of the electric slide table 22. An exhaust hood 5 is screwed to the left and right sides of the electric slide table 22. A front baffle 51 is hinged to the front end of the exhaust hood 5. An exhaust mesh 56 is provided on the inner slope of the lower end of the exhaust hood 5. Branch pipes 53 are connected to the left and right sides of the exhaust hood 5. A fan 54 is connected to the branch pipes 53 via an air supply pipe 55. The lower end surfaces of the exhaust hood 5 and the front baffle 51 are in close contact with the drilling table 3. An air outlet 31 is opened on the rear side plate of the drilling table 3.
[0021] First, flip the front baffle 51 of the exhaust hood 5 and place the TGV glass on the drilling table 3 of the glass drilling machine body 1, so that the rear end of the TGV glass is resisted by the rear side panel of the drilling table 3. After the clamping plate 6 clamps the rear side panel of the drilling table 3, lower the front baffle 51. Control the rotation of the adjusting screw 13 and the operation of the electric slide 22 through the external CNC panel. Adjust the horizontal and vertical movement of the laser drill 2 by rotating the adjusting screw 13 and operating the electric slide 22 to determine the drilling position. When the laser drill 2 moves, the exhaust hood 5 moves along with it. When the laser drill 2 is drilling, the fan 54 starts, so that the exhaust vent 56 of the exhaust hood 5 concentrates the exhaust air to the drilling position of the TGV glass on the drilling table 3, accelerates the air flow speed on the surface of the TGV glass, and makes the heat generated by drilling dissipate quickly. At the same time, the exhaust vent 31 of the drilling table 3 blows air to remove more heat generated by laser drilling and enhance the heat dissipation effect of the TGV glass drilling fixture.
[0022] In this embodiment, a stepper motor 12 is fixed to the right side of the fixing frame 11, and an adjusting screw 13 is connected to the left side of the stepper motor 12. A drilling platform 3 is fixed to the upper surface of the glass drilling machine body 1. A perforated chip removal plate 34 is embedded and fixed in the middle of the drilling platform 3. A chip removal groove 14 is provided at the lower end of the perforated chip removal plate 34, and a chip storage mesh frame 4 is inserted into the lower groove opening of the chip removal groove 14.
[0023] In a preferred embodiment, the stepper motor 12 controls the adjusting screw 13 to rotate in both directions, causing the drive block 21 to convert the rotational motion of the adjusting screw 13 into linear motion, thereby driving the laser drill 2 to move laterally. The porous chip removal plate 34 facilitates the discharge of the waste chips generated during drilling through the chip removal groove 14 into the chip storage mesh frame 4, making it convenient to collect and process the waste chips generated during drilling.
[0024] In this embodiment, receivers 23 are fixedly installed on the left and right sides of the laser drill 2, a fan 54 is installed on the left side of the mounting bracket 11, and clamping plates 6 are symmetrically contacted on the upper surface of the drilling table 3. An elastic rubber pad 63 is glued to one side of the clamping plate 6, and the other side of the clamping plate 6 is connected to the mounting bracket 11 through an electric push rod 62. A locator 61 is fixed on the upper surface of the clamping plate 6.
[0025] In a preferred embodiment, receiver 23 facilitates receiving positioning signals from locator 61 to determine the lateral drilling area of laser drill 2. Clamping plate 6 is pushed and held at the side of TGV glass by electric push rod 61 to prevent displacement during drilling. Furthermore, pressure sensors are embedded in the side of clamping plate 6 to prevent excessive clamping force from damaging the TGV glass.
[0026] In this embodiment, a fan 32 is connected to the rear side of the punching station 3 via a connecting pipe 33; and the connecting pipe 33 is connected to the air outlet 31.
[0027] As a preferred implementation, the fan 32 facilitates airflow to the air outlet 31, causing the air outlet 31 to blow the air delivered by the fan 32 toward the upper surface of the TGV glass, thereby accelerating the circulation of hot air and accelerating the dissipation of heat from the perforation.
[0028] In this embodiment, a fixing ring 57 is bonded to the front surface of the exhaust hood 5, a buckle 52 is connected to the surface of the front baffle 51, and the laser drill 2 is attached to the inside of the exhaust hood 5.
[0029] In a preferred embodiment, the fixing ring 57 is used to engage with the buckle 52, allowing the front baffle 51 to flip upwards, facilitating the placement of TGV glass on or removal from the drilling table 3. The laser drill 2 operates within the exhaust hood 5, ensuring that during drilling, the exhaust vents 56 of the exhaust hood 5 provide concentrated exhaust to the drilling location of the TGV glass on the drilling table 3. This accelerates the airflow in the drilling area, speeds up heat dissipation from the TGV glass surface, and allows the concentrated exhaust airflow to carry away more heat generated during drilling, enhancing the heat dissipation of the TGV glass drilling fixture. Simultaneously, it effectively blocks debris flying everywhere during drilling, reducing safety hazards associated with the drilling fixture.
[0030] This utility model provides a drilling fixture for TGV glass production that effectively solves the problem of poor cooling during drilling caused by the dispersed gas exhaust from the vents on the surface of the mounting rack in existing technologies. It accelerates the airflow in the drilling area of the TGV glass, speeds up the dissipation of heat generated during drilling, and facilitates the concentrated exhaust airflow to carry away more heat generated during drilling, thus enhancing the heat dissipation effect of the TGV glass drilling fixture. Simultaneously, it effectively shields the TGV glass from flying debris during drilling, reducing safety hazards and preventing overheating and breakage of the TGV glass due to heat generated during laser drilling. This improves the production quality of the TGV glass drilling fixture and makes it suitable for TGV glass production.
Claims
1. A drilling fixture for TGV glass production, comprising: A glass drilling machine body (1), wherein a fixing frame (11) is welded to the upper end face of the glass drilling machine body (1), characterized in that: The upper end of the glass drilling machine body (1) is equipped with an adjusting screw (13). The surface of the adjusting screw (13) is connected to an electric slide (22) via a drive block (21). The lower end of the electric slide (22) is slidably connected to a laser drill (2). The left and right sides of the electric slide (22) are screwed with exhaust hoods (5). The front end face of the exhaust hood (5) is hinged with a front baffle (51). An exhaust mesh (56) is provided on the inner slope of the lower end of the exhaust hood (5). The left and right sides of the exhaust hood (5) are connected with branch pipes (53). The branch pipes (53) are connected to a fan (54) via an air supply pipe (55). The lower end faces of the exhaust hood (5) and the front baffle (51) are in close contact with a drilling table (3). An air outlet (31) is opened on the rear side of the drilling table (3).
2. The drilling fixture for TGV glass production according to claim 1, characterized in that, A stepper motor (12) is fixed on the right side of the fixed frame (11), and an adjusting screw (13) is connected to the left side of the stepper motor (12). A drilling table (3) is fixed on the upper surface of the glass drilling machine body (1).
3. The drilling fixture for TGV glass production according to claim 1, characterized in that, A perforated chip removal plate (34) is embedded and fixed in the middle of the drilling platform (3). A chip removal groove (14) is provided at the lower end of the perforated chip removal plate (34). A chip storage mesh frame (4) is inserted into the lower groove of the chip removal groove (14).
4. The drilling fixture for TGV glass production according to claim 1, characterized in that, The laser drill (2) has receivers (23) fixedly installed on its left and right sides, the fixed frame (11) has a fan (54) installed on its left side, and the upper surface of the drilling table (3) has clamps (6) symmetrically in contact with it.
5. A drilling fixture for TGV glass production according to claim 4, characterized in that, One side of the clamp (6) is bonded with an elastic rubber pad (63), and the other side of the clamp (6) is connected to the fixing frame (11) via an electric push rod (62). A locator (61) is fixed on the upper surface of the clamp (6).
6. A drilling fixture for TGV glass production according to claim 1, characterized in that, The punching station (3) is connected to a fan (32) via a connecting pipe (33) on its rear side; and the connecting pipe (33) is connected to the air outlet (31).
7. A drilling fixture for TGV glass production according to claim 1, characterized in that, A fixing ring (57) is bonded to the front surface of the exhaust hood (5), a buckle (52) is connected to the surface of the front baffle (51), and the laser punch (2) is located inside the exhaust hood (5).
Citation Information
Patent Citations
Punching tool for TGV glass production
CN222113888U