Acid-alkali wastewater recycling system in semiconductor industry

Abstract

The utility model provides an acid-alkali wastewater recycling system in the semiconductor industry, and relates to the field of acid-alkali wastewater recycling. Comprising a transition box, and the top of the transition box is communicated with a wastewater inlet pipe. Through cooperation of the transition box and the wastewater inlet pipe, acid-base wastewater in the semiconductor industry can be guided into the transition box, then the acid-base property of the wastewater is detected through the first pH value detector, and acid wastewater and alkaline wastewater are guided into the acid treatment box and the alkaline treatment box respectively through the first electromagnetic valve and the second electromagnetic valve; then, a second pH value detector is used for monitoring the pH value in real time, a metering pump is matched with a neutralizing liquid storage box to precisely add a neutralizing agent, a stirring motor drives a stirring shaft and a mixing blade to ensure uniform reaction, automatic neutralization is achieved, manual intervention is reduced, and the production efficiency is improved. And finally, the neutralized wastewater is uniformly discharged into a collecting box, so that subsequent deep treatment or recycling is facilitated, and the waste of water resources is reduced.

Description

Technical Field

[0001] This utility model relates to the field of acid and alkali wastewater recycling, and in particular to an acid and alkali wastewater recycling system for the semiconductor industry. Background Technology

[0002] In the semiconductor industry, key processes such as photolithography, etching, and cleaning generate large amounts of industrial wastewater containing strong acids and alkalis. This type of acidic and alkaline wastewater is not only highly corrosive and complex in composition, but also contains pollutants such as heavy metal ions and organic matter. Direct discharge of such wastewater would cause serious damage to the ecological environment and waste water and acid / alkali resources.

[0003] Currently, the semiconductor industry primarily uses neutralization to treat acidic and alkaline wastewater. This involves adding alkaline or acidic substances to the wastewater to adjust its pH to neutral before discharge. However, this traditional method has several drawbacks: Firstly, it fails to effectively classify and treat acidic and alkaline wastewater, resulting in the mixing of acids and alkalis of different concentrations and properties, making it difficult to precisely control the amount of neutralizing agent used and significantly increasing treatment costs. Secondly, the neutralized wastewater is often discharged directly, failing to achieve the recycling and reuse of water resources and acidic / alkaline substances, leading to a significant waste of resources. Furthermore, traditional treatment equipment lacks real-time monitoring and precise adjustment capabilities for wastewater pH, failing to meet the high standards and stringent requirements of the semiconductor industry for wastewater treatment.

[0004] Therefore, it is necessary to provide a system for recycling acid and alkali wastewater in the semiconductor industry to solve the above-mentioned technical problems. Utility Model Content

[0005] To solve the above-mentioned technical problems, this utility model provides a system for recycling acid and alkali wastewater in the semiconductor industry.

[0006] This utility model provides a semiconductor industry acid and alkali wastewater recycling system, comprising: a transition tank, the top of which is connected to a wastewater inlet pipe; a first pH meter fixedly connected to the inner wall of the transition tank; a first solenoid valve and a second solenoid valve symmetrically connected to the bottom of the transition tank; the output ends of the first and second solenoid valves respectively connected to an acid treatment tank and an alkaline treatment tank via connecting pipes; a second pH meter fixedly connected to the inner walls of both the acid and alkaline treatment tanks; a stirring motor fixedly connected to the top of both the acid and alkaline treatment tanks; a stirring shaft fixedly connected to the output shaft of the stirring motor; a mixing blade fixedly connected to the bottom of the stirring shaft; a metering pump fixedly connected to the top of both the acid and alkaline treatment tanks; a neutralization liquid storage box fixedly connected to the top of the metering pump; and a common collection tank connected to one side of the bottom of both the acid and alkaline treatment tanks via a drain valve.

[0007] Preferably, a geared motor is fixedly connected to the top of the transition box, a rotating shaft is fixedly connected to the output end of the geared motor, a plurality of uniformly arranged stirring blades are fixedly connected to the surface of the rotating shaft, and a plurality of uniformly arranged stirring strips are fixedly connected to the surface of the rotating shaft symmetrically about the stirring blades.

[0008] Preferably, the surface of the stirring blade has several vertically and evenly arranged through holes, and the bottom of the rotating shaft is fixedly connected to a spiral blade.

[0009] Preferably, both the acid treatment box and the alkaline treatment box have exhaust gas pipes at their tops that connect to external exhaust gas treatment equipment.

[0010] Preferably, a control panel is fixedly connected to the front of the transition box, and control keys are provided on the front of the control panel.

[0011] Preferably, the transition box, acid treatment box, alkaline treatment box and collection box all include an insulated inner liner and an insulated shell, with an insulated layer forming between the insulated inner liner and the insulated shell.

[0012] Compared with related technologies, the acid and alkali wastewater recycling system for the semiconductor industry provided by this utility model has the following beneficial effects:

[0013] 1. This utility model, through the cooperation of a transition tank and a wastewater inlet pipe, can introduce acidic and alkaline wastewater from the semiconductor industry into the transition tank. Then, the acidity or alkalinity of the wastewater is detected by a first pH meter. The acidic wastewater and alkaline wastewater are respectively introduced into an acid treatment tank and an alkaline treatment tank using a first solenoid valve and a second solenoid valve, realizing the separate treatment of acidic and alkaline wastewater, improving treatment efficiency and targeting. Then, the pH value is monitored in real time using a second pH meter. The neutralizing agent is precisely added by a metering pump in conjunction with a neutralizing liquid storage box. The stirring motor drives the stirring shaft and mixing blades to ensure uniform reaction, realizing automated neutralization and reducing manual intervention. Finally, the neutralized wastewater is uniformly discharged into a collection tank for subsequent deep treatment or reuse, reducing water waste.

[0014] 2. This utility model uses a geared motor to drive a rotating shaft, which in turn drives the stirring blades and stirring strips to stir the wastewater in the transition tank, making the wastewater evenly mixed. This avoids data distortion caused by local deviations in the detection position of the first pH meter. At the same time, the through holes reduce the resistance of the stirring blades during rotation, reduce energy consumption, and allow liquid to pass through, enhancing the convection mixing of the upper and lower layers of wastewater, enhancing the turbulence effect during stirring, preventing local sedimentation of wastewater, and improving the uniformity of pretreatment. The spiral blades are located at the bottom of the rotating shaft, which can push the impurities settled at the bottom of the transition tank upwards, preventing sedimentation and blockage, and improving the continuity and reliability of pretreatment. Attached Figure Description

[0015] Figure 1A schematic diagram of a preferred embodiment of this utility model;

[0016] Figure 2 This is a partial cross-sectional perspective view of a preferred embodiment of the present invention.

[0017] Figure 3 A three-dimensional schematic diagram of a preferred embodiment of the present invention, showing the geared motor, rotating shaft and stirring blade used in combination;

[0018] Figure 4 This is a partial cross-sectional perspective view of an acid treatment box according to a preferred embodiment of the present invention.

[0019] The following are labeled in the diagram: 1. Transition tank; 2. Wastewater inlet pipe; 3. First pH meter; 4. First solenoid valve; 5. Second solenoid valve; 6. Acid treatment tank; 7. Alkaline treatment tank; 8. Second pH meter; 9. Stirring motor; 10. Stirring shaft; 11. Mixing blade; 12. Metering pump; 13. Neutralization liquid storage box; 14. Collection tank; 15. Gear motor; 16. Rotating shaft; 17. Stirring blade; 18. Stirring bar; 19. Through hole; 20. Spiral blade; 21. Exhaust gas pipe; 22. Control panel; 23. Insulated inner liner; 24. Insulation shell. Detailed Implementation

[0020] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0021] Please refer to the following: Figures 1 to 4 A semiconductor industry acid and alkali wastewater recycling system includes: a transition tank 1.

[0022] In the embodiments of this utility model, please refer to Figure 1 and Figure 2 The top of the transition tank 1 is connected to a wastewater inlet pipe 2. The inner wall of the transition tank 1 is fixedly connected to a first pH meter 3. The bottom of the transition tank 1 is symmetrically connected to a first solenoid valve 4 and a second solenoid valve 5. The output ends of the first solenoid valve 4 and the second solenoid valve 5 are respectively connected to an acid treatment tank 6 and an alkaline treatment tank 7 through connecting pipes. The inner walls of both the acid treatment tank 6 and the alkaline treatment tank 7 are fixedly connected to a second pH meter 8. The top of both the acid treatment tank 6 and the alkaline treatment tank 7 are fixedly connected to a stirring motor 9. The output shaft of the stirring motor 9 is fixedly connected to a stirring shaft 10. The bottom of the stirring shaft 10 is fixedly connected to a mixing blade 11. The top of both the acid treatment tank 6 and the alkaline treatment tank 7 are fixedly connected to a metering pump 12. The top of the metering pump 12 is fixedly connected to a neutralization liquid storage box 13. One side of the bottom of the acid treatment tank 6 and the alkaline treatment tank 7 is connected to the same collection box 14 through a drain valve.

[0023] In the specific implementation process, by using the transition tank 1 and the wastewater inlet pipe 2, the acid and alkaline wastewater from the semiconductor industry can be introduced into the transition tank 1. Then, the acidity or alkalinity of the wastewater is detected by the first pH meter 3. The acidic wastewater and the alkaline wastewater are introduced into the acid treatment tank 6 and the alkaline treatment tank 7 respectively by the first solenoid valve 4 and the second solenoid valve 5, so as to realize the separate treatment of acid and alkaline wastewater, improve the treatment efficiency and targeting. Then, the pH value is monitored in real time by the second pH meter 8. The metering pump 12 and the neutralization liquid storage box 13 accurately add the neutralizing agent. The stirring motor 9 drives the stirring shaft 10 and the mixing blade 11 to ensure uniform reaction, realize automated neutralization, reduce manual intervention, and finally discharge the neutralized wastewater into the collection tank 14 for subsequent deep treatment or reuse, reducing water waste.

[0024] It should be noted that: the neutralization liquid storage box 13 of the acid treatment tank 6 can be filled with alkaline solutions (such as sodium hydroxide, potassium hydroxide, sodium carbonate solution). The principle is to reduce the acidity of the wastewater through acid-base neutralization reaction and adjust the pH to neutral or weakly alkaline. On the other hand, the neutralization liquid storage box 13 of the alkaline treatment tank 7 can be filled with acidic solutions (such as sulfuric acid, hydrochloric acid, phosphoric acid solution). The principle is to reduce the alkalinity of the wastewater through acid-base neutralization reaction and adjust the pH to neutral or weakly acidic.

[0025] refer to Figure 2 and Figure 3 As shown, a geared motor 15 is fixedly connected to the top of the transition box 1, a rotating shaft 16 is fixedly connected to the output end of the geared motor 15, a plurality of uniformly arranged stirring blades 17 are fixedly connected to the surface of the rotating shaft 16, a plurality of uniformly arranged stirring strips 18 are symmetrically fixedly connected to the surface of the rotating shaft 16 about the stirring blades 17, a plurality of vertically uniformly arranged through holes 19 are opened on the surface of the stirring blades 17, and a spiral blade 20 is fixedly connected to the bottom of the rotating shaft 16.

[0026] It should be noted that: the geared motor 15 drives the rotating shaft 16 to drive the stirring blades 17 and stirring strips 18 to stir the wastewater in the transition tank 1, so that the wastewater is mixed evenly. This can avoid data distortion caused by local deviation of the detection position of the first pH meter 3. The through hole 19 reduces the resistance of the stirring blades 17 during rotation, reduces energy consumption, and allows liquid to pass through, enhances the convection mixing of the upper and lower wastewater, enhances the turbulence effect during stirring, avoids local sedimentation of wastewater, and improves the uniformity of pretreatment. The spiral blades 20 are located at the bottom of the rotating shaft 16, which can push the impurities settled at the bottom of the transition tank 1 upward to avoid sedimentation and blockage, and improve the continuity and reliability of pretreatment.

[0027] refer to Figure 3 As shown, the top of both the acid treatment box 6 and the alkaline treatment box 7 is provided with exhaust gas pipes 21 that are connected to external exhaust gas treatment equipment.

[0028] It should be noted that acid-base neutralization reactions may produce harmful gases such as acidic gases. The exhaust gas pipeline 21 is connected to an external exhaust gas treatment device, which can collect and treat the exhaust gas released during the reaction in a timely manner, prevent environmental pollution and operator exposure to harmful gases, and comply with industrial safety standards.

[0029] refer to Figure 1 As shown, a control panel 22 is fixedly connected to the front of the transition box 1, and control keys are provided on the front of the control panel 22.

[0030] It should be noted that the control panel 22 centrally controls various components (such as solenoid valves, stirring motors 9, metering pumps 12, etc.), and can monitor the system's operating status (such as pH value, flow rate, etc.) in real time. It supports parameter adjustment and fault alarms, improving the ease of operation and the level of system automation.

[0031] refer to Figure 1 , Figure 2 and Figure 4 As shown, the transition box 1, acid treatment box 6, alkaline treatment box 7 and collection box 14 all include an insulated inner liner 23 and an insulated shell 24, with an insulated layer forming between the insulated inner liner 23 and the insulated shell 24.

[0032] It should be noted that the insulation layer composed of the heat-insulating inner liner 23 and the heat-insulating shell 24 can reduce the impact of external temperature on the wastewater treatment process inside the chamber, maintain the optimal temperature conditions for the neutralization reaction, ensure the stability and efficiency of the treatment effect, and reduce heat loss or external heat transfer, thereby reducing the energy consumption required by the system to maintain the temperature. It is especially suitable for temperature-sensitive acid-base neutralization processes.

[0033] The working principle of the semiconductor industry acid and alkali wastewater recycling system provided by this utility model is as follows: First, check the sealing performance of containers such as the transition tank 1, acid treatment tank 6, and alkali treatment tank 7 to prevent wastewater leakage, and check the firmness of each pipe connection. Then, add the corresponding neutralizing solution to the neutralizing solution storage box 13 on the acid treatment tank 6 and alkali treatment tank 7. Next, connect the system to an external power supply. Then, integrate all sensor data (pH value, liquid level, etc.) and equipment status through the control panel 22 to realize one-button start / stop and parameter adjustment. Then, in the semiconductor production process... Acidic and alkaline wastewater flows into transition tank 1 through wastewater inlet pipe 2. Then, reduction motor 15 drives rotating shaft 16, which in turn drives stirring blades 17 and stirring strips 18 to stir the wastewater. Through hole 19 and spiral blade 20 enhance the mixing effect and eliminate local concentration differences, preparing for accurate pH detection. Next, the first pH meter 3 monitors the pH value of the wastewater in transition tank 1 in real time. If the wastewater is detected to be acidic (pH < 7), control panel 22 instructs the first solenoid valve 4 to open, and the wastewater flows into acid treatment tank 6 through connecting pipe. At this time, the second pH meter 8 monitors the pH value in the tank in real time and measures the pH value. Pump 12 draws alkaline neutralizing liquid from alkaline neutralizing liquid storage box 13 for neutralization treatment. At this time, stirring motor 9 drives stirring shaft 10 and mixing blades 11 to accelerate the neutralization reaction until the pH reaches the target. At this time, the CO2 and other gases produced by the reaction are discharged to external treatment equipment through exhaust pipe 21 for treatment. If the wastewater is detected to be acidic (pH>7), control panel 22 instructs second solenoid valve 5 to open, and wastewater flows into alkaline treatment tank 7 through connecting pipe. At this time, second pH detector 8 monitors the pH value in the tank in real time, and metering pump 12 draws acidic neutralizing liquid from acidic neutralizing liquid storage box 13 for neutralization treatment. The stirring motor 9 drives the stirring shaft 10 and mixing blades 11 to accelerate the neutralization reaction until the pH reaches the standard. At this time, the volatile gases generated by the reaction are discharged to the external treatment equipment through the exhaust pipe 21 for treatment. The neutralization liquid dosage of the metering pump 12 is dynamically adjusted by the real-time feedback of the second pH detector 8 to form an automated closed-loop control. When the pH value of the wastewater in the acid treatment tank 6 and the alkaline treatment tank 7 reaches the set range (such as 6.5-8.5), the drain valve is opened, and the neutralized wastewater is discharged into the collection tank 14 for subsequent deep treatment or reuse, reducing water waste.

[0034] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the description and drawings of this utility model, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A system for recycling acid and alkali wastewater in the semiconductor industry, characterized in that, include: The transition tank (1) is characterized in that: a wastewater inlet pipe (2) is connected to the top of the transition tank (1); a first pH meter (3) is fixedly connected to the inner wall of the transition tank (1); a first solenoid valve (4) and a second solenoid valve (5) are symmetrically connected to the bottom of the transition tank (1); the output ends of the first solenoid valve (4) and the second solenoid valve (5) are respectively connected to an acid treatment tank (6) and an alkaline treatment tank (7) through connecting pipes; and a second pH meter (8) is fixedly connected to the inner walls of both the acid treatment tank (6) and the alkaline treatment tank (7). A stirring motor (9) is fixedly connected to the top of both the acidic treatment tank (6) and the alkaline treatment tank (7). The output shaft of the stirring motor (9) is fixedly connected to a stirring shaft (10). A mixing blade (11) is fixedly connected to the bottom of the stirring shaft (10). A metering pump (12) is fixedly connected to the top of both the acidic treatment tank (6) and the alkaline treatment tank (7). A neutralizing liquid storage box (13) is fixedly connected to the top of the metering pump (12). The bottom of both the acidic treatment tank (6) and the alkaline treatment tank (7) is connected to the same collection box (14) through a drain valve.

2. The semiconductor industry acid and alkali wastewater recycling system according to claim 1, characterized in that: A geared motor (15) is fixedly connected to the top of the transition box (1). A rotating shaft (16) is fixedly connected to the output end of the geared motor (15). A plurality of uniformly arranged stirring blades (17) are fixedly connected to the surface of the rotating shaft (16). A plurality of uniformly arranged stirring strips (18) are fixedly connected to the surface of the rotating shaft (16) symmetrically about the stirring blades (17).

3. The semiconductor industry acid and alkali wastewater recycling system according to claim 2, characterized in that: The surface of the stirring blade (17) is provided with several vertically and evenly arranged through holes (19), and the bottom of the rotating shaft (16) is fixedly connected with a spiral blade (20).

4. The semiconductor industry acid and alkali wastewater recycling system according to claim 1, characterized in that: Both the acid treatment box (6) and the alkaline treatment box (7) have exhaust gas pipes (21) on their tops that are connected to external exhaust gas treatment equipment.

5. The semiconductor industry acid and alkali wastewater recycling system according to claim 1, characterized in that: The front of the transition box (1) is fixedly connected to a control panel (22), and the front of the control panel (22) is provided with control keys.

6. The semiconductor industry acid and alkali wastewater recycling system according to claim 1, characterized in that: The transition box (1), acid treatment box (6), alkaline treatment box (7) and collection box (14) all include an insulated inner liner (23) and an insulated shell (24), with an insulated layer formed between the insulated inner liner (23) and the insulated shell (24).

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