Double-sealing mechanism of combined type single-shaft driving semiconductor pressure control valve

Abstract

The utility model discloses a double-sealing mechanism of a combined type single-shaft driving semiconductor pressure control valve, which relates to the technical field of pressure control valves and comprises a valve body, and a valve hole is arranged in the middle of the valve body. Two symmetrically-distributed mounting holes are formed in the valve body, the two mounting holes are symmetrically distributed in the two sides of the valve hole, valve plate driving shafts are installed in the mounting holes, and the ends of the two valve plate driving shafts are fixedly connected with a suspension arm and a sealing pressing rod respectively. According to the double-sealing mechanism of the combined type single-shaft driving semiconductor pressure control valve, a single valve plate driving shaft is matched with a suspension arm and a sealing pressing rod which are symmetrically distributed, traditional double-shaft driving is simplified into a single-shaft linkage system, and active thrust of the suspension arm and reverse restraining force of the sealing pressing rod form a self-balancing couple; and the forced sealing valve plate accurately translates along the central axis of the valve hole, so that the problem that the valve plate is inclined due to asynchronism of double shafts is avoided, and the circumferential stress uniformity of the sealing ring is ensured.

Description

Technical Field

[0001] This utility model relates to the field of pressure control valve technology, specifically a composite single-axis driven semiconductor pressure control valve with dual sealing mechanism. Background Technology

[0002] Mushroom valves are key sealing components for controlling the flow of process gases in dry etching and deposition equipment used in semiconductor and solar energy manufacturing. They meet the requirements of high cleanliness, high vacuum, corrosion resistance, and rapid response.

[0003] To achieve the above functions, a prior art Chinese patent (publication number: CN219866334U) discloses a mushroom-shaped lifting valve, including a valve body. Inside the valve body are a first lifting cylinder and a second lifting cylinder, which drive a first mushroom-shaped sealing plate and a second mushroom-shaped sealing plate to move up and down. This mushroom-shaped lifting valve replaces the traditional flat sealing plate with a mushroom-shaped sealing plate. The mushroom-shaped protrusion structure of the sealing plate better prevents leakage. Under high temperatures, it is less prone to deformation than a flat valve plate, resulting in a longer service life. A stable base and a limiting sleeve fitted onto the bottom and middle of the lifting cylinder limit the cylinder's position, preventing displacement during lifting. Furthermore, the limiting slide formed between the limiting plates slides and moves up and down on the limiting slide rod, limiting the position of the limiting plates and thus the sealing plate, preventing displacement between the lifting cylinder and the sealing plate and enhancing the stability of the lifting valve.

[0004] While existing technologies can overcome the shortcomings mentioned above, other problems still exist in their operation: the structure of the pressure-controlled mushroom valve is to control the axial movement of the valve plate by synchronously lifting and lowering two drive shafts. Due to machining and parts assembly errors, the two shafts of the existing pressure-controlled mushroom valve cannot completely and synchronously contact the bottom plane of the valve body, resulting in uneven force on the sealing ring and inability to ensure good airtightness of the cavity in the fully closed state. Utility Model Content

[0005] The purpose of this invention is to provide a composite single-axis driven semiconductor pressure-controlled valve with dual sealing mechanism to solve the problem in the above-mentioned background technology that the two axes of the pressure-controlled mushroom valve cannot fully and synchronously contact the bottom plane of the valve body, resulting in uneven force on the sealing ring and failure to ensure good airtightness of the cavity in the fully closed state.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a composite single-axis driven semiconductor pressure-controlled valve double sealing mechanism, comprising a valve body, wherein a valve hole is provided in the middle of the valve body;

[0007] The valve body has two symmetrically distributed mounting holes on both sides of the valve hole. A valve plate drive shaft is installed inside the mounting hole, and a suspension arm and a sealing pressure rod are fixedly connected to the ends of the two valve plate drive shafts, respectively.

[0008] Preferably, the suspension arm and the sealing rod are respectively perpendicular to the valve plate drive shaft to which they are connected. The end of the suspension arm away from the valve plate drive shaft is fixedly connected to the sealing valve plate, and the connection between the suspension arm and the sealing valve plate is located in the middle of the sealing valve plate. The end of the sealing rod away from the valve plate drive shaft abuts against the surface of the sealing valve plate.

[0009] Preferably, an axially telescopic vacuum bellows is fitted onto the surface of the valve plate drive shaft, and the two ends of the vacuum bellows are respectively fixedly connected between the end face of the valve body and the flange end of the valve plate drive shaft, and the valve body and the vacuum bellows enclose a dynamic pressure isolation cavity.

[0010] Preferably, the valve body is provided with a flow-blocking sealing ring located outside the valve hole. The flow-blocking sealing ring is configured to correspond to the contour of the sealing valve plate, and the movement trajectory of the sealing valve plate coincides with the central axis of the valve hole.

[0011] Preferably, the sealing valve plate has a wedge-shaped sealing groove on the edge away from the suspension arm, and the flow-blocking sealing ring is embedded in the wedge-shaped sealing groove to form a radial sealing structure.

[0012] Preferably, the inclined surface of the wedge-shaped sealing groove adopts a tapered cone design.

[0013] Preferably, one end face of the valve body is provided with an annular groove, and a mating sealing ring is embedded in the annular groove. A flange is fixedly connected to the end face of the valve body away from the mating sealing ring.

[0014] Compared with the prior art, the beneficial effects of this utility model are:

[0015] This composite single-axis driven semiconductor pressure-controlled valve dual-sealing mechanism simplifies the traditional dual-axis drive into a single-axis linkage system by using a single valve plate drive shaft in conjunction with a symmetrically distributed suspension arm and sealing pressure rod structure. The active thrust of the suspension arm and the reverse constraint force of the sealing pressure rod form a self-balancing couple, which forces the sealing valve plate to move precisely along the central axis of the valve hole, avoiding the valve plate tilting problem caused by the asynchronous operation of the two axes and ensuring the uniformity of circumferential force on the sealing ring.

[0016] The suspension arm transmits axial thrust through the fixed connection point in the middle of the valve plate to drive the valve plate to move, while the end face of the sealing rod continuously applies a reverse constraint force, which at the same time restricts the six degrees of freedom displacement of the valve plate. Combined with the radial self-compensation characteristics of the tapered wedge sealing groove, pressure-assisted sealing is achieved through the radial expansion of the intercepting sealing ring when the medium pressure increases. The dual action ensures airtight reliability under extreme working conditions. Attached Figure Description

[0017] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0018] Figure 2 This is a schematic diagram of the flange structure of this utility model;

[0019] Figure 3 This is a schematic diagram of the valve plate drive shaft structure of this utility model;

[0020] Figure 4 This is a schematic diagram of the vacuum bellows structure of this utility model;

[0021] Figure 5 This is a schematic diagram of the opening structure of the sealing valve plate of this utility model;

[0022] Figure 6 This is a schematic diagram of the closed structure of the sealing valve plate of this utility model.

[0023] In the diagram: 1. Valve body; 2. Valve hole; 3. Mounting hole; 4. Valve plate drive shaft; 5. Vacuum bellows; 6. Suspension arm; 7. Sealing valve plate; 8. Sealing rod; 9. Flow-stopping sealing ring; 10. Butt sealing ring; 11. Flange; 12. Wedge-shaped sealing groove. Detailed Implementation

[0024] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0025] Example 1: Please refer to Figure 1 - Figure 6This utility model provides the following technical solution: a composite single-axis driven semiconductor pressure-controlled valve double sealing mechanism, including a valve body 1, with a valve hole 2 in the middle of the valve body 1; two symmetrically distributed mounting holes 3 are provided inside the valve body 1, and the two mounting holes 3 are symmetrically distributed on both sides of the valve hole 2. A valve plate drive shaft 4 is installed inside the mounting hole 3, and a suspension arm 6 and a sealing pressure rod 8 are respectively fixedly connected to the ends of the two valve plate drive shafts 4; the suspension arm 6 and the sealing pressure rod 8 are respectively perpendicular to their respective connected valve plate drive shafts 4, and a sealing valve plate 7 is fixedly connected to the end of the suspension arm 6 away from the valve plate drive shaft 4, and the connection between the suspension arm 6 and the sealing valve plate 7 is located in the middle position of the sealing valve plate 7; the end of the sealing pressure rod 8 away from the valve plate drive shaft 4 abuts against the surface of the sealing valve plate 7; an axial extension is fitted on the surface of the valve plate drive shaft 4. A retractable vacuum bellows 5 is provided, with both ends of the vacuum bellows 5 fixedly connected between the end face of the valve body 1 and the flange end of the valve plate drive shaft 4, respectively. The valve body 1 and the vacuum bellows 5 enclose a dynamic pressure isolation chamber. A flow-blocking sealing ring 9 is provided inside the valve body 1, located outside the valve hole 2. The flow-blocking sealing ring 9 is set in accordance with the contour of the sealing valve plate 7, and the movement trajectory of the sealing valve plate 7 coincides with the central axis of the valve hole 2. A wedge-shaped sealing groove 12 is provided on the edge of the sealing valve plate 7 away from the suspension arm 6. The flow-blocking sealing ring 9 is embedded in the wedge-shaped sealing groove 12 to form a radial sealing structure. The inclined surface of the wedge-shaped sealing groove 12 adopts a tapered cone design. An annular groove is provided on one end face of the valve body 1, and a mating sealing ring 10 is embedded in the annular groove. A flange 11 is fixedly connected to the end face of the valve body 1 away from the mating sealing ring 10.

[0026] The valve plate drive shaft 4 serves as the power input, and its horizontal reciprocating stroke is controlled by an external linear actuator. Two valve plate drive shafts 4 are symmetrically distributed on both sides of the valve orifice 2. An axially telescopic vacuum bellows 5 is fitted onto the surface of the valve plate drive shaft 4, with one end fixed to the end face of the valve body 1 and the other end connected to the flange end of the drive shaft 4, forming a dynamic pressure isolation chamber. When the valve plate drive shaft 4 moves horizontally, the vacuum bellows 5 only undergoes axial elastic expansion and contraction, without radial twisting or circumferential rotation throughout the entire process, ensuring both freedom of movement and preventing the risk of media leakage.

[0027] The suspension arm 6 is rigidly vertically connected to the valve plate drive shaft 4. When the drive shaft 4 moves horizontally to the right, the suspension arm 6 moves as a whole, generating thrust through its fixed connection point with the middle of the sealing valve plate 7, forcing the sealing valve plate 7 to move linearly along the central axis of the valve hole 2. The sealing pressure rod 8 on the other side is also vertically fixed to the corresponding valve plate drive shaft 4, and its end plane always maintains surface contact with the surface of the sealing valve plate 7. When the drive shaft 4 moves, the sealing pressure rod 8 moves horizontally, applying a reverse constraint force to the sealing valve plate 7 through the contact surface, forming a force opposite to that of the suspension arm 6, and fixing both sides of the sealing valve plate 7 to prevent it from shifting.

[0028] When the sealing valve plate 7 is in the closed position, the wedge-shaped sealing groove 12 on its edge forms an axial and radial composite compression seal with the flow-stopping sealing ring 9 inside the valve body 1. The tapered cone design of the wedge-shaped sealing groove 12 causes the flow-stopping sealing ring 9 to expand radially under pressure. The axial compression component acts directly on the top of the sealing ring, and the radial expansion component is forced to fit tightly against the outer wall of the valve body 1 through the inclined plane decomposition. The dual compression effect causes the flow-stopping sealing ring 9 to fill the axial assembly gap and the radial fit gap at the same time. The butt sealing ring 10 in the annular groove on the end face of the valve body 1 serves as a static sealing layer. When the flange 11 is fastened to the external pipeline, it undergoes pure axial compression deformation, filling the end face of the valve body 1 and forming an end face seal with the flange 11.

[0029] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "connected" or "linked" should be interpreted broadly. For example, it can refer to a fixed connection, a detachable connection, or an integral connection; it can refer to a mechanical connection or an electrical connection; it can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0030] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A composite single-axis driven semiconductor pressure-controlled valve double sealing mechanism, comprising a valve body (1), wherein a valve hole (2) is provided in the middle of the valve body (1); Its features are: The valve body (1) has two symmetrically distributed mounting holes (3) inside, and the two mounting holes (3) are symmetrically distributed on both sides of the valve hole (2). A valve plate drive shaft (4) is installed inside the mounting hole (3), and a suspension arm (6) and a sealing pressure rod (8) are fixedly connected to the ends of the two valve plate drive shafts (4).

2. The composite single-axis driven semiconductor pressure-controlled valve double-sealing mechanism according to claim 1, characterized in that: The suspension arm (6) and the sealing rod (8) are respectively perpendicular to the valve plate drive shaft (4) to which they are connected. The end of the suspension arm (6) away from the valve plate drive shaft (4) is fixedly connected to the sealing valve plate (7), and the connection between the suspension arm (6) and the sealing valve plate (7) is located in the middle position of the sealing valve plate (7). The end of the sealing rod (8) away from the valve plate drive shaft (4) abuts against the surface of the sealing valve plate (7).

3. The composite single-axis driven semiconductor pressure-controlled valve double-sealing mechanism according to claim 2, characterized in that: The valve plate drive shaft (4) is fitted with an axial telescopic vacuum bellows (5), and the two ends of the vacuum bellows (5) are respectively fixedly connected between the end face of the valve body (1) and the flange end of the valve plate drive shaft (4). The valve body (1) and the vacuum bellows (5) enclose a dynamic pressure isolation cavity.

4. The composite single-axis driven semiconductor pressure-controlled valve double-sealing mechanism according to claim 3, characterized in that: The valve body (1) is provided with a flow-blocking sealing ring (9) located outside the valve hole (2). The flow-blocking sealing ring (9) is set in accordance with the outline of the sealing valve plate (7), and the movement trajectory of the sealing valve plate (7) coincides with the central axis of the valve hole (2).

5. The composite single-axis driven semiconductor pressure-controlled valve double-sealing mechanism according to claim 4, characterized in that: The sealing valve plate (7) is provided with a wedge-shaped sealing groove (12) on the side edge away from the suspension arm (6), and the flow-blocking sealing ring (9) is embedded in the wedge-shaped sealing groove (12) to form a radial sealing structure.

6. The composite single-axis driven semiconductor pressure-controlled valve double-sealing mechanism according to claim 5, characterized in that: The inclined surface of the wedge-shaped sealing groove (12) adopts a tapered cone design.

7. The composite single-axis driven semiconductor pressure-controlled valve double-sealing mechanism according to claim 6, characterized in that: The valve body (1) has an annular groove on one side end face, and a mating sealing ring (10) is embedded in the annular groove. A flange (11) is fixedly connected to the side end face of the valve body (1) away from the mating sealing ring (10).

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