Locking device of probe seat and wafer testing equipment

Abstract

The utility model provides a locking device of a probe seat and wafer testing equipment, and relates to the technical field of wafer testing. The first guide rods penetrate through the probe seat, the PCB and the base, one end of each first guide rod is connected with the probe seat, and each first guide rod is provided with a clamping hook located in the base. The bottom, close to the side wall, of the pressing plate is provided with at least one inclined face, and when the pressing plate is inserted into the inserting groove from the side face of the base, the inclined face moves along the clamping hook and drives the first guide rod to move in the vertical direction, so that the probe base is driven to be in press fit with the PCB and locked with the base. According to the technical scheme, the pressing plate is inserted into the inserting groove from the side face of the base, the probe base can be driven to move in the vertical direction, locking of the probe base and the base is achieved, and the situation that due to the fact that the operation space above the probe base is insufficient, the probe base is difficult to lock and release through screws can be avoided. In addition, locking and releasing of the probe seat can be completed by inserting or pulling out the pressing plate from the side face of the base, and operation is simple.

Description

Technical Field

[0001] This utility model relates to the field of wafer testing technology, and in particular to a probe holder locking device and wafer testing equipment. Background Technology

[0002] In existing technologies, wafer testing equipment is generally used to test the functionality of wafers. During testing, the two ends of the test probes of the probe holder need to be in contact with the PCB board of the wafer test fixture and the PCB board of the wafer test equipment, respectively, in order to obtain the signals of the wafer inside the wafer test fixture.

[0003] Typically, the PCB board of a wafer testing device is mounted on a base. The probe mount needs to be mounted onto the PCB board and locked to the base. Usually, screws are used to lock the probe mount to the PCB board from above. However, screws are cumbersome to install and remove. When there is insufficient space above the probe mount, the screws are extremely difficult to remove and tighten, making it inconvenient to replace and maintain the probe mount. Utility Model Content

[0004] One objective of this invention is to provide a locking device for a probe holder, which solves the technical problem that the existing method of locking the probe holder with screws is cumbersome and occupies the upper space of the probe holder during installation or disassembly.

[0005] A further objective of this invention is to enable a smoother fit between the pressure plate and the hook.

[0006] Another objective of this invention is to provide a wafer testing device having the aforementioned locking device.

[0007] Specifically, a locking device for a probe holder is provided for locking the probe holder to a base and a PCB board, the PCB board being located between the base and the probe holder. The base has a horizontally extending insertion slot inside, the opening of which is located on the side of the base. The locking device includes:

[0008] At least one set of guide components, each set of guide components includes a first guide rod, the first guide rod is vertically inserted through the probe base, the PCB board and the base, and one end is connected to the probe base, and the end of the first guide rod facing the base is provided with a hook;

[0009] A pressure plate assembly includes a pressure plate, wherein the pressure plate has at least one inclined surface near the bottom of its side wall. When the pressure plate is inserted into the insertion slot from the side of the base, the inclined surface moves along the hook to drive the first guide rod to move vertically, thereby driving the probe seat to press against the PCB board and lock with the base.

[0010] Optionally, the hook has a hook portion, and at least one side of the hook portion is provided with a guide surface that cooperates with the inclined surface. When the pressure plate is inserted into the insertion slot, the inclined surface moves along the guide surface.

[0011] Optionally, there are multiple guide components and multiple inclined surfaces, and a clearance groove is provided between two adjacent inclined surfaces of the pressure plate;

[0012] When the pressure plate is pulled out of the insertion slot and the hook disengages from the inclined surface, one of the first guide rods can be accommodated in the clearance slot, thereby being able to move out vertically along the clearance slot.

[0013] Optionally, the probe holder is provided with at least one first through hole arranged along the vertical direction, each first through hole corresponding to a set of guide components, and each set of guide components further includes:

[0014] A pressure rod is installed in the first through hole and connected to the first guide rod;

[0015] A guide sleeve is fitted around the outer periphery of the pressure rod and is engaged in the first through hole;

[0016] The first elastic element is sleeved on the outer periphery of the pressure rod, with one end connected to the pressure plate and the other end abutting against the guide sleeve;

[0017] As the first guide rod moves along the vertical direction, the pressure rod moves along the first guide rod to compress the first elastic element.

[0018] Optionally, the pressure plate assembly further includes:

[0019] A guide member is installed in the insertion slot and has at least one second guide rod extending along the horizontal direction;

[0020] The pressure plate is provided with at least one guide groove, and each guide groove corresponds to a second guide rod. When the pressure plate is inserted into the insertion groove, the second guide rod can be inserted into the corresponding guide groove.

[0021] Optionally, the guide member is provided with at least one first limiting groove, the pressure plate is provided with at least one second limiting groove, and the pressure plate assembly further includes:

[0022] At least one second elastic element, each second elastic element is installed in a second limiting groove and partially protrudes from the second limiting groove, and when the pressure plate is inserted into the insertion groove, one end of the second elastic element is inserted into the corresponding first limiting groove.

[0023] Optionally, the number of guide grooves and the number of second limiting grooves are both two, with the two second limiting grooves disposed between the two guide grooves.

[0024] Optionally, the base is provided with a mounting groove, the mounting groove being located at the bottom of the insertion slot near the opening of the insertion slot, and the pressure plate assembly further includes:

[0025] An insert is installed in the mounting slot and connected to the base;

[0026] A fixing block is connected to the end of the pressure plate and is arranged opposite to the insert. During the process of tightening the fixing block and the insert through the connector, the fixing block drives the pressure plate to move in the insertion slot, so that the inclined surface moves along the hook.

[0027] Specifically, a wafer testing device includes:

[0028] The base has an internal insertion slot extending in a horizontal direction, and the opening of the insertion slot is located on the side of the base.

[0029] The PCB board is mounted on the base.

[0030] The probe holder is mounted on the PCB board;

[0031] Multiple locking devices, as described above, are arranged along the extension direction of the probe holder for locking the probe holder to the base and the PCB board.

[0032] Optionally, the base is provided with a guide post extending vertically, the PCB board has a first limiting hole, the probe holder is provided with a second limiting hole, and the guide post passes through the first limiting hole and the second limiting hole to guide the probe holder when it moves vertically.

[0033] In this invention, a first guide rod passes through the probe holder, PCB board, and base, with one end connected to the probe holder. A hook is provided at the end of the first guide rod facing the base. The pressure plate has at least one inclined surface near its bottom sidewall. When the pressure plate is inserted into the insertion slot from the side of the base, the inclined surface moves along the hook, causing the first guide rod to move vertically, thereby pressing the probe holder against the PCB board and locking it to the base. This technical solution eliminates the prior art method of locking the probe holder with screws from above. By inserting the pressure plate into the insertion slot from the side of the base, the probe holder can move vertically, achieving locking between the probe holder and the base. This avoids the situation where insufficient operating space above the probe holder makes it difficult to lock and release the probe holder with screws. Furthermore, the probe holder can be locked and released simply by inserting or removing the pressure plate from the side of the base, making the operation relatively simple.

[0034] Furthermore, in this invention, the hook has a hook portion, and at least one side of the hook portion is provided with a guide surface that mates with the inclined surface. When the pressure plate is inserted into the insertion slot, the inclined surface moves along the guide surface. The above technical solution, by providing a guide surface on the hook, allows the pressure plate to engage more smoothly with the hook.

[0035] The above and other objects, advantages and features of this utility model will become more apparent to those skilled in the art from the following detailed description of specific embodiments of this utility model in conjunction with the accompanying drawings. Attached Figure Description

[0036] The following sections will describe some specific embodiments of the present invention in a detailed manner by way of example and not limitation, with reference to the accompanying drawings. The same reference numerals in the drawings denote the same or similar parts or components. Those skilled in the art should understand that these drawings are not necessarily drawn to scale. In the drawings:

[0037] Figure 1 This is a schematic structural diagram of a wafer testing device according to an embodiment of the present invention;

[0038] Figure 2 This is a schematic structural diagram of a pressure plate assembly according to an embodiment of the present utility model;

[0039] Figure 3 This is a schematic structural diagram of a first guide rod according to an embodiment of the present utility model;

[0040] Figure 4 This is a schematic diagram showing the alignment of a guide assembly and a pressure plate assembly according to an embodiment of the present invention.

[0041] Figure 5 This is a schematic cross-sectional view of a guide assembly and a pressure plate assembly according to an embodiment of the present invention;

[0042] Figure 6 yes Figure 5 A schematic enlarged view of part A in the middle;

[0043] Figure 7 This is a schematic cross-sectional view of a pressure plate assembly according to an embodiment of the present invention;

[0044] Figure 8 This is a schematic cross-sectional view of a probe holder, PCB board, and base according to one embodiment of the present invention.

[0045] Figure label:

[0046] 1000-Wafer testing equipment, 100-Locking device, 200-Base, 300-PCB board, 400-Probe holder, 10-Guide assembly, 20-Pressure plate assembly, 11-First guide rod, 12-Pressure rod, 13-First elastic element, 14-Guide sleeve, 111-Hook, 112-Guide surface, 210-Intercepting slot, 220-Guide post, 230-Third limiting hole, 240-Positioning hole, 21-Pressure plate, 22-Fixing block, 23-Insertion block, 24-Guide element, 25-Second elastic element, 211-Inclined surface, 212-Allowing groove, 213-Guide groove, 241-Positioning post, 242-Second guide rod, 214-Second limiting groove, 243-First limiting groove, 310-Second through hole, 410-Spring probe, 420-First through hole, 430-Second limiting hole. Detailed Implementation

[0047] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0048] In the description of this utility model, it should be understood that the terms "upper" and "lower" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0049] The terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature, that is, include one or more of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified. When a feature "includes or contains" one or more of the features it encompasses, unless otherwise specifically described, this indicates that other features are not excluded and may be further included.

[0050] Unless otherwise expressly specified and limited, the terms "connection," "installation," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art should be able to understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0051] Unless otherwise specified, all terms (including technical and scientific terms) used in the description of this embodiment have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.

[0052] Figure 1 This is a schematic structural diagram of a wafer testing device 1000 according to an embodiment of the present invention. Figure 2 This is a schematic structural diagram of a pressure plate assembly 20 according to an embodiment of the present invention. Figure 3 This is a schematic structural diagram of the first guide rod 11 according to an embodiment of the present invention. Figure 4 This is a schematic diagram showing the engagement of the guide assembly 10 and the pressure plate assembly 20 according to an embodiment of the present invention. Figure 5 This is a schematic cross-sectional view of the guide assembly 10 and the pressure plate assembly 20 according to an embodiment of the present invention. Figure 6 yes Figure 5 A schematic enlarged view of part A. (See diagram below.) Figures 1 to 6As shown, in a specific embodiment, the locking device 100 of the probe holder 400 is used to lock the probe holder 400 onto the base 200 and the PCB board 300. The PCB board 300 is located between the base 200 and the probe holder 400. The base 200 has a horizontally extending insertion groove 210 inside, and the opening of the insertion groove 210 is located on the side of the base 200. The locking device 100 includes at least one set of guide components 10 and pressure plate components 20. Each set of guide components 10 includes a first guide rod 11, which passes vertically through the probe holder 400, the PCB board 300, and the base 200, and one end is connected to the probe holder 400. The end of the first guide rod 11 facing the base 200 has a hook 111. The pressure plate assembly 20 includes a pressure plate 21. The pressure plate 21 has at least one inclined surface 211 near its bottom sidewall. When the pressure plate 21 is inserted into the insertion slot 210 from the side of the base 200, the sidewall of the pressure plate 21 engages with the hook 111, causing its inclined surface 211 to move along the hook 111, thereby driving the first guide rod 11 to move vertically. This allows the probe holder 400 to be pressed against the PCB board 300 and locked to the base 200. Here, multiple spring probes 410 are inserted into the probe holder 400 and protrude from it. When the probe holder 400 is installed on the PCB board 300, the spring probes 410 contact the pads on the PCB board 300, resulting in a 2mm gap between the probe holder 400 and the PCB board 300. Therefore, the probe holder 400 needs to be moved downwards to eliminate this gap and achieve the pressing of the probe holder 400 against the PCB board 300.

[0053] When the pressure plate 21 is inserted into the insertion slot 210 from the side of the base 200, the end of the inclined surface 211 first contacts the hook 111. The starting point of the inclined surface 211 is where the thickness of the pressure plate 21 is the smallest. As the inclined surface 211 continues to move horizontally, the thickness of the pressure plate 21 increases, thereby driving the first guide rod 11 to move downward. Finally, it moves to the bottom plane of the pressure plate 21 and abuts against the hook 111, at which point the first guide rod 11 stops moving downward. When the pressure plate 21 is pulled out of the insertion slot 210, the hook 111 will drive the probe seat 400 to return to its original position. It can be understood that this embodiment uses the height difference between the starting and ending points of the inclined surface 211 to force the first guide rod 11 to move downward, converting the horizontal force into a vertical force.

[0054] This embodiment eliminates the prior art method of locking the probe holder 400 with screws from above. Instead, by inserting the pressure plate 21 into the insertion slot 210 from the side of the base 200, the probe holder 400 can be moved vertically, locking it to the base 200. This avoids situations where insufficient operating space above the probe holder 400 makes it difficult to lock and release it with screws. Furthermore, locking and releasing the probe holder 400 can be accomplished simply by inserting or removing the pressure plate 21 from the side of the base 200, making the operation relatively simple.

[0055] In some embodiments, the hook 111 has a hook portion, and at least one side of the hook portion is provided with a guide surface 112 that mates with the inclined surface 211. When the pressure plate 21 is inserted into the insertion slot 210, the inclined surface 211 moves along the guide surface 112. See [reference needed] Figure 3 .

[0056] This embodiment allows the pressure plate 21 to engage more smoothly with the hook 111 by providing a guide surface 112 on the hook 111.

[0057] In some embodiments, guide surfaces 112 are provided on both sides of the hook, and a plane is formed between the two guide surfaces 112. When the inclined surface 211 moves to the end point of the guide surface 112, the plane between the two guide surfaces 112 abuts against the plane at the bottom of the pressure plate 21, thereby locking the probe seat 400 and the base 200.

[0058] In some embodiments, the thickness of the notch of the hook 111 is greater than the thickness of the pressure plate 21, thereby facilitating the pressure plate 21 to enter the notch of the hook 111 and engage with the hook 111.

[0059] In some embodiments, there are multiple guide components 10 and inclined surfaces 211. A clearance groove 212 is provided between two adjacent inclined surfaces 211 of the pressure plate 21. When the pressure plate 21 is pulled out of the insertion slot 210 and the hook 111 disengages from the inclined surface 211, one of the first guide rods 11 can be accommodated in the clearance groove 212, thereby being able to move vertically out along the clearance groove 212. In this embodiment, there are two guide components 10 and two inclined surfaces 211, with the two guide components 10 arranged at intervals along a second direction. When the pressure plate 21 is pulled out of the insertion slot 210, the first guide rod 11 near the opening of the insertion slot 210 moves out of the clearance groove 212, and the other first guide rod 11 moves out from the end of the pressure plate 21.

[0060] See Figure 4 and Figure 6In some embodiments, the probe holder 400 is provided with at least one first through hole 420 arranged vertically. Each first through hole 420 corresponds to a set of guide components 10. Each set of guide components 10 further includes a pressure rod 12, a guide sleeve 14, and a first elastic element 13. The pressure rod 12 is installed in the first through hole 420 and connected to the first guide rod 11. The guide sleeve 14 is sleeved on the outer periphery of the pressure rod 12 and is engaged in the first through hole 420. The first elastic element 13 is sleeved on the outer periphery of the pressure rod 12, with one end connected to the pressure plate 21 and the other end abutting against the guide sleeve 14. When the first guide rod 11 moves vertically, the pressure rod 12 moves with the first guide rod 11 to compress the first elastic element 13, thereby driving the probe holder 400 to move downward. Since the first elastic element 13 is compressed, there is an upward elastic restoring force, which allows the first guide rod 11 to lock with the pressure plate 21, thereby locking the probe holder 400 onto the base 200. When the pressure plate 21 is pulled out of the insertion slot 210, the first elastic element 13 resets, thereby driving the probe seat 400 to reset.

[0061] In some embodiments, the PCB board 300 is provided with at least one second through hole 310 arranged vertically, and the base 200 is provided with at least one third limiting hole 230 arranged vertically. Each third limiting hole 230 corresponds to a first through hole 420 and a second through hole 310. The guide component 10 passes through the first through hole 420, the second through hole 310 and the third limiting hole 230 in sequence. A portion of the third limiting hole 230 overlaps with the insertion slot 210, so that when the first guide rod 11 is inserted into the third limiting hole 230, the hook 111 is located in the insertion slot 210, so that when the pressure plate 21 is inserted into the insertion slot 210, the hook 111 can engage with the first guide rod 11.

[0062] Figure 7 This is a schematic cross-sectional view of a pressure plate assembly 20 according to an embodiment of the present invention, as shown below. Figure 7 As shown, in some embodiments, the pressure plate assembly 20 further includes a guide member 24, which is installed within the insertion slot 210 and has at least one second guide rod 242 extending horizontally. The pressure plate 21 has at least one guide groove 213, each guide groove 213 corresponding to one second guide rod 242. When the pressure plate 21 is inserted into the insertion slot 210, the second guide rod 242 can be inserted into the corresponding guide groove 213. This embodiment guides the pressure plate 21 through the arrangement of the second guide rod 242 and the guide groove 213.

[0063] In some embodiments, the number of second guide rods 242 and the number of guide grooves 213 are both two. In other embodiments, the number of second guide rods 242 and guide grooves 213 can be determined according to specific design requirements.

[0064] In some embodiments, the guide member 24 further includes at least one positioning post 241, which is inserted into the positioning hole 240 of the base 200 to achieve positioning of the guide member 24. Here, there are two positioning posts 241, and the base 200 has two positioning holes 240, with one positioning post 241 inserted into each positioning hole 240. In other embodiments, the number of positioning posts 241 can be determined according to specific design requirements.

[0065] In some embodiments, the guide member 24 is connected to the base 200 by bolts. In other embodiments, the guide member 24 may also be connected to the base 200 by other means.

[0066] In some embodiments, the guide member 24 is provided with at least one first limiting groove 243, the pressure plate 21 is provided with at least one second limiting groove 214, and the pressure plate assembly 20 further includes at least one second elastic member 25. Each second elastic member 25 is installed in a second limiting groove 214 and partially protrudes from the second limiting groove 214. When the pressure plate 21 is inserted into the insertion groove 210, one end of the second elastic member 25 is inserted into the corresponding first limiting groove 243. Here, when the pressure plate 21 is inserted into the insertion groove 210, the second elastic member 25 is in a compressed state. When the pressure plate 21 is pulled out of the insertion groove 210, the elasticity of the second elastic member 25 drives the pressure plate 21 to move outward from the insertion groove 210.

[0067] In some embodiments, the number of guide grooves 213 and the number of second limiting grooves 214 are both two, with the two second limiting grooves 214 disposed between the two guide grooves 213. This can be understood as the number of second elastic elements 25 and second guide rods 242 being two each. In other embodiments, the number of second limiting grooves 214, guide grooves 213, second guide rods 242, and second elastic elements 25 can be designed according to specific design requirements, for example, based on the dimensions of the pressure plate 21.

[0068] In some embodiments, the base 200 is provided with a mounting groove located at the bottom of the insertion groove 210 near the opening of the insertion groove 210. The pressure plate assembly 20 further includes an insert 23 and a fixing block 22. The insert 23 is installed in the mounting groove and connected to the base 200. The fixing block 22 is connected to the end of the pressure plate 21 and is arranged opposite to the insert 23. During the process of tightening the fixing block 22 and the insert 23 by means of a connector, the fixing block 22 drives the pressure plate 21 to move within the insertion groove 210, causing the inclined surface 211 to move along the hook 111. Here, the connector is a bolt. It can be understood that the fixing block 22 and the pressure plate 21 are first fixedly connected by bolts, and then the pressure plate 21 is inserted into the insertion groove 210. At this time, there is a gap between the fixing block 22 and the insert 23. Then, the fixing block 22 and the insert block 23 are tightened with bolts, gradually reducing the gap between the fixing block 22 and the insert block 23 until they contact each other. During the tightening process, the pressure plate 21 moves within the insertion slot 210, causing the inclined surface 211 to move along the hook 111, thereby driving the first guide rod 11 to move the probe seat 400 downward. When the bolts connecting the fixing block 22 and the insert block 23 are loosened, the compressed second elastic element 25 will reset, thereby driving the pressure plate 21 to pop out towards the opening of the insertion slot 210. Here, the insert block 23 is made of metal because the base 200 is made of plastic. If the fixing block 22 is directly connected to the base 200, frequent disassembly of the fixing block 22 will affect the service life of the base 200. Therefore, the metal insert block 23 is installed on the base 200, and the connection between the insert block 23 and the fixing block 22 can avoid frequent disassembly of the base 200 and the fixing block 22.

[0069] This embodiment also provides a wafer testing apparatus 1000, which includes a base 200, a PCB board 300, a probe holder 400, and a plurality of locking devices 100 as described in any of the above embodiments. The base 200 has a horizontally extending insertion slot 210 inside, the opening of which is located on the side of the base 200. The PCB board 300 is mounted on the base 200. The probe holder 400 is mounted on the PCB board 300. The plurality of locking devices 100 are used to lock the probe holder 400 to the base 200 and the PCB board 300. The locking devices 100 are not described in detail here.

[0070] In some embodiments, the probe holder 400 is provided with at least one first through hole 420 arranged vertically, the PCB board 300 is provided with at least one second through hole 310 arranged vertically, and the base 200 is provided with at least one third limiting hole 230 arranged vertically. Each third limiting hole 230 corresponds to one first through hole 420 and one second through hole 310. The guide component 10 passes through the first through hole 420, the second through hole 310 and the third limiting hole 230 in sequence.

[0071] In some embodiments, multiple locking devices 100 are arranged along the extending direction of the probe holder 400. This embodiment uses multiple locking devices 100 to lock the probe holder 400 onto the base 200, which improves the stability of the probe holder 400 locking. In this embodiment, each probe holder 400 is provided with three pressure plates 21 and six guide assemblies 10. Each pressure plate 21 simultaneously drives the first guide rods 11 of two guide assemblies 10 to press down or lift up, reducing the number of screws used and improving the efficiency of probe holder 400 replacement and maintenance.

[0072] Figure 8 This is a schematic cross-sectional view of a probe holder 400, a PCB board 300, and a base 200 according to an embodiment of the present invention. Figure 8 As shown, in some embodiments, the base 200 is provided with a guide post 220 extending vertically, the PCB board 300 has a first limiting hole, the probe seat 400 is provided with a second limiting hole 430, and the guide post 220 passes through the first limiting hole and the second limiting hole 430 to guide the probe seat 400 when it moves vertically.

[0073] Therefore, those skilled in the art should recognize that although many exemplary embodiments of the present invention have been shown and described in detail herein, many other variations or modifications conforming to the principles of the present invention can be directly determined or derived from the disclosure of the present invention without departing from the spirit and scope of the present invention. Therefore, the scope of the present invention should be understood and recognized as covering all such other variations or modifications.

Claims

1. A locking device for a probe holder, characterized in that, For locking the probe holder to the base and the PCB board, the PCB board being located between the base and the probe holder, the base having an internally extending horizontal insertion slot, the opening of the insertion slot being located on the side of the base, the locking device comprising: At least one set of guide components, each set of guide components includes a first guide rod, the first guide rod is vertically inserted through the probe base, the PCB board and the base, and one end is connected to the probe base, and the end of the first guide rod facing the base is provided with a hook; A pressure plate assembly includes a pressure plate, wherein the pressure plate has at least one inclined surface near the bottom of its side wall. When the pressure plate is inserted into the insertion slot from the side of the base, the inclined surface moves along the hook to drive the first guide rod to move vertically, thereby driving the probe seat to press against the PCB board and lock with the base.

2. The locking device according to claim 1, characterized in that, The hook has a hook portion, and at least one side of the hook portion is provided with a guide surface that cooperates with the inclined surface. When the pressure plate is inserted into the insertion slot, the inclined surface moves along the guide surface.

3. The locking device according to claim 2, characterized in that, The number of the guide components and the inclined surfaces are both multiple, and a clearance groove is provided between two adjacent inclined surfaces of the pressure plate; When the pressure plate is pulled out of the insertion slot and the hook disengages from the inclined surface, one of the first guide rods can be accommodated in the clearance slot, thereby being able to move out vertically along the clearance slot.

4. The locking device according to any one of claims 1-3, characterized in that, The probe holder is provided with at least one first through hole arranged along the vertical direction, each first through hole corresponding to a set of guide components, and each set of guide components further includes: A pressure rod is installed in the first through hole and connected to the first guide rod; A guide sleeve is fitted around the outer periphery of the pressure rod and is engaged in the first through hole; The first elastic element is sleeved on the outer periphery of the pressure rod, with one end connected to the pressure plate and the other end abutting against the guide sleeve; As the first guide rod moves along the vertical direction, the pressure rod moves along the first guide rod to compress the first elastic element.

5. The locking device according to any one of claims 1-3, characterized in that, The pressure plate assembly also includes: A guide member is installed in the insertion slot and has at least one second guide rod extending along the horizontal direction; The pressure plate is provided with at least one guide groove, and each guide groove corresponds to a second guide rod. When the pressure plate is inserted into the insertion groove, the second guide rod can be inserted into the corresponding guide groove.

6. The locking device according to claim 5, characterized in that, The guide member is provided with at least one first limiting groove, the pressure plate is provided with at least one second limiting groove, and the pressure plate assembly further includes: At least one second elastic element, each second elastic element is installed in a second limiting groove and partially protrudes from the second limiting groove, and when the pressure plate is inserted into the insertion groove, one end of the second elastic element is inserted into the corresponding first limiting groove.

7. The locking device according to claim 6, characterized in that, The number of guide grooves and the number of second limiting grooves are both two, with the two second limiting grooves disposed between the two guide grooves.

8. The locking device according to any one of claims 1-3, characterized in that, The base is provided with a mounting groove, which is located at the bottom of the insertion slot near the opening of the insertion slot. The pressure plate assembly further includes: An insert is installed in the mounting slot and connected to the base; A fixing block is connected to the end of the pressure plate and is arranged opposite to the insert. During the process of tightening the fixing block and the insert through the connector, the fixing block drives the pressure plate to move in the insertion slot, so that the inclined surface moves along the hook.

9. A wafer testing device, characterized in that, include: The base has an internal insertion slot extending in a horizontal direction, and the opening of the insertion slot is located on the side of the base. The PCB board is mounted on the base. The probe holder is mounted on the PCB board; Multiple locking devices as described in any one of claims 1-8 are arranged along the extension direction of the probe holder for locking the probe holder to the base and the PCB board.

10. The wafer testing equipment according to claim 9, characterized in that, The base is provided with a guide post extending vertically, the PCB board has a first limiting hole, the probe holder is provided with a second limiting hole, and the guide post passes through the first limiting hole and the second limiting hole to guide the probe holder when it moves vertically.

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