Probe card inspection apparatus
By designing a probe card detection device, the problems of accuracy and efficiency in probe card airtightness detection are solved, realizing rapid and accurate airtightness detection and solving the problem of insufficient detection accuracy in existing technologies.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- CHIPMORE TECH CORP LTD
- Filing Date
- 2025-04-28
- Publication Date
- 2026-05-26
Smart Images
Figure CN224286271U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the technical field of probe card detection, and in particular to a probe card detection device. Background Technology
[0002] Probe cards are key equipment in semiconductor wafer testing, used to perform electrical performance tests on each die on a wafer before chip packaging, screening out qualified and unqualified chips. They serve as a bridge between automated test equipment (ATE) and the wafer, directly impacting testing efficiency, accuracy, and cost.
[0003] The hermeticity of probe cards directly affects the accuracy, repeatability, and reliability of semiconductor testing, especially in advanced processes (such as below 7nm) and high-frequency testing, where even micron-level leaks can lead to significant defects. Regular hermeticity testing is an essential quality control measure in the semiconductor testing process.
[0004] Currently, the airtightness testing of probe cards typically involves visual inspection using light or liquid to check for light transmission or leakage. However, this testing method has low accuracy and is not sensitive to minute light transmission or leakage, while advanced manufacturing processes have extremely high airtightness requirements, and even a tiny leak can cause the test to fail. Utility Model Content
[0005] The purpose of this invention is to provide a probe card detection device to overcome the shortcomings of related technologies and to quickly and accurately detect the airtightness of probe cards.
[0006] To achieve one of the above objectives, this utility model provides a probe card detection device, comprising:
[0007] The test stand is equipped with an air chamber and an opening and an air inlet pipe communicating with the air chamber;
[0008] A fixing structure is provided at the opening of the test bench, and the fixing structure is used to fix the probe card;
[0009] A sealing cover is detachably installed on the fixed structure. A detection chamber is provided inside the sealing cover. The air chamber is located on one side of the probe card, and the detection chamber is located on the other side of the probe card. The sealing cover is equipped with a pressure gauge for detecting changes in the air pressure of the detection chamber.
[0010] In one embodiment of this application, the fixing structure includes a support ring fixed to the test bench, a limiting ring detachably connected to the support ring, and a fixing member for fixing the support ring and the limiting member, wherein a receiving gap for clamping the probe card is formed between the limiting ring and the support ring.
[0011] In one embodiment of this application, the fastener is a locking bolt.
[0012] In one embodiment of this application, a buffer sheet is provided on the opposite side of the bearing ring and the limiting ring, and the buffer sheet is located inside the position where the bearing ring and the limiting ring clamp the probe card.
[0013] In one embodiment of this application, the fixing structure further includes a limiting block disposed between the bearing ring and the limiting ring;
[0014] And / or, both the bearing ring and the limiting ring are provided with positioning grooves.
[0015] The limiting block and the positioning groove are located outside the position where the bearing ring and the limiting ring clamp the probe card.
[0016] In one embodiment of this application, the limiting ring is provided with a locking groove for cooperating with the sealing cover.
[0017] In one embodiment of this application, the sealing cover is configured as a transparent cover or an opaque cover.
[0018] In one embodiment of this application, an air intake switch is provided on the air intake pipe.
[0019] In one embodiment of this application, the test bench is further provided with a pressure relief valve connected to the air chamber.
[0020] In one embodiment of this application, the test bench is also equipped with a pressure gauge for detecting changes in the air pressure of the air chamber.
[0021] Compared with related technologies, this utility model uses a fixed structure to fix the probe card. During testing, a relatively sealed air chamber is formed on the lower side of the probe card, and a relatively sealed detection chamber is formed on the upper side. Air is introduced into the air chamber through the air inlet pipe, and the pressure change of the pressure gauge can be observed to quickly determine whether there is a leak in the probe card. Therefore, the entire process of clamping, testing, and unloading can be completed quickly, significantly improving testing efficiency. Furthermore, the use of a digital pressure gauge during the testing process can display the pressure curve inside the detection chamber in real time, ensuring the accuracy of the test results. Attached Figure Description
[0022] Figure 1This is an isometric view of a probe card detection device provided by this utility model;
[0023] Figure 2 This is an isometric view of a portion of the structure of a probe card detection device provided by this utility model;
[0024] Figure 3 This is a front view of a probe card detection device provided by this utility model;
[0025] Figure 4 yes Figure 3 Enlarged structural diagram of section A;
[0026] Figure 5 yes Figure 3 A three-dimensional cross-sectional view along the B-B direction;
[0027] Figure 6 This is a three-dimensional cross-sectional view of the limiting ring in a probe card detection device provided by this utility model;
[0028] Figure 7 yes Figure 6 A magnified schematic diagram of the structure of section C.
[0029] Figure label:
[0030] 10. Test stand; 11. Air chamber; 12. Opening; 13. Air inlet pipe; 14. Pressure relief valve; 15. Air inlet switch; 16. Second pressure gauge; 20. Fixing structure; 21. Bearing ring; 211. Positioning groove; 22. Limiting ring; 221. Engaging groove; 23. Fixing component; 24. Buffer plate; 25. Limiting block; 30. Sealing cover; 31. First pressure gauge; 32. Handle; 33. Detection chamber. Detailed Implementation
[0031] The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.
[0032] The terms used in this embodiment, such as "above," "over," "below," and "below," which indicate spatial relative position, are for ease of explanation to describe the relationship of one unit or feature relative to another unit or feature as shown in the accompanying drawings. The terms "spatial relative position" may be intended to include different orientations of the device during use or operation, other than those shown in the figures.
[0033] It should be noted that, unless otherwise explicitly specified and limited, the term "connection" should be interpreted broadly. For example, a connection can be a direct connection or an indirect connection through an intermediate medium; it can be a fixed connection, a movable connection, a detachable connection, or an integral connection. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.
[0034] To enable those skilled in the art to better understand the technical solutions of this utility model, the appendices in the embodiments of this utility model will be described below. Figure 1 -7. The technical solutions in the embodiments of this utility model are clearly and completely described.
[0035] One embodiment of this utility model provides a probe card testing device, mainly used to test the airtightness of probe cards. This airtightness testing method quickly determines whether the probe card is qualified, improving testing efficiency and reducing human error. (See reference...) Figure 1 The probe card detection device includes a test stand 10, a fixed structure 20, and a sealing cover 30.
[0036] Reference Figure 2 The test stand 10 is the main structure of the probe card detection device. An air chamber 11 is provided inside the test stand 10. The bottom of the test stand 10 is closed, and the top of the test stand 10 is an open opening 12, which is connected to the air chamber 11.
[0037] When testing the airtightness of the probe card, the probe card is fixed at the opening 12 on the top of the test stage 10. The probe card is used to close the opening 12, so that the test stage 10 and the probe card form a sealed air chamber 11. The air chamber 11 is used to store the test gas (such as air or inert gas).
[0038] The test bench 10 is also equipped with an air inlet pipe 13, one end of which is connected to the air chamber 11. An air inlet switch 15 is provided on the air inlet pipe 13, which may be, for example, an electromagnetic switch.
[0039] The other end of the air inlet pipe 13 is connected to an external air pump or compressed air source. During the test, the air inlet switch 15 is turned on, and the test gas is introduced into the air chamber 11 through the air inlet pipe 13.
[0040] The fixing structure 20 is located at the opening 12 on the top of the test bench 10 to fix the probe card to the top of the test bench 10 and to close the opening 12 during testing.
[0041] Reference Figure 3 and Figure 5The sealing cover 30 is detachably mounted on the fixed structure 20. When the probe card is fixed to the upper side of the test bench 10 through the fixed structure 20, the sealing cover 30 is mounted on the fixed structure 20. A detection chamber 33 is provided inside the sealing cover 30. The sealing cover 30 is provided with a first pressure gauge 31 for detecting changes in air pressure inside the detection chamber 33. The first pressure gauge 31 can be, for example, a digital pressure gauge.
[0042] During testing, the probe card is first positioned on the upper side of the test bench 10, and the sealing cover 30 is installed on the fixed structure 20. At this time, the air chamber 11 is located on one side of the probe card, and the detection chamber 33 is located on the other side. Then, the air inlet switch 15 is turned on, and air is injected into the air chamber 11 through the air inlet pipe 13. The change in the value of the first pressure gauge 31 is observed. If the air pressure in the detection chamber 33 is stable, the probe card is well sealed; if the air pressure in the detection chamber 33 increases, it indicates that there is an air leak in the probe card.
[0043] Traditional probe card airtightness testing relies heavily on manual visual inspection or water testing, which is not only time-consuming (typically 5-10 minutes per test) but also susceptible to subjective judgment errors. However, the testing device in this invention can complete the entire process of clamping, testing, and unloading within one minute, improving testing efficiency by 5-10 times. Furthermore, the testing process utilizes a digital pressure gauge to display the pressure curve within the testing chamber 33 in real time, supporting 0.1 kPa level accuracy testing, which is 20 times more sensitive than traditional methods. Both testing efficiency and accuracy are significantly improved.
[0044] To make the airtightness test of the probe card more accurate, the test bench 10 is also equipped with a second pressure gauge 16 for detecting the air pressure change in the air chamber 11. During the test, the second pressure gauge 16 can display the pressure curve in the air chamber 11 in real time. If the air pressure in the air chamber 11 is stable, the probe card is well sealed; if the air pressure in the air chamber 11 drops, it indicates that there is an air leak in the probe card.
[0045] The system uses two pressure gauges, first (31) and second (16), to simultaneously perform the test. By comparing the pressure curves of the detection chamber 33 and the air chamber 11 in real time, misjudgments caused by external environmental factors (such as temperature fluctuations and mechanical vibrations) can be eliminated, achieving a detection sensitivity of ±0.05 kPa. This significantly improves the accuracy of the probe card's airtightness test and avoids errors in the test results.
[0046] The test bench 10 is also equipped with a pressure relief valve 14 connected to the air chamber 11. After the test is completed, the pressure relief valve 14 can be opened manually or electrically to relieve the pressure in the air chamber 11. It can also automatically relieve pressure when the air pressure in the air chamber 11 is too high to avoid damaging the probe card.
[0047] Reference Figure 2 and Figure 3The fixed structure 20 includes a bearing ring 21, a limiting ring 22, and a fastener 23.
[0048] A support ring 21 is fixed to the top of the test bench 10, and a limiting ring 22 is detachably connected to the support ring 21, forming a receiving gap between the limiting ring 22 and the support ring 21 for holding the probe card. Both the support ring 21 and the limiting ring 22 are circular plate-like structures, and their shapes and sizes are identical. The inner ring size of the support ring 21 and the limiting ring 22 is the same as the diameter of the test bench 10, and the support ring 21 and the limiting ring 22 extend outward from the test bench 10.
[0049] The upper end face of the support ring 21 is used to support the probe card, and the lower end face of the limiting ring 22 is used to press the probe card. During testing, the support ring 21 and the limiting ring 22 work together to fix the probe card in the testing position, avoiding problems such as inability to test or inaccurate testing caused by probe card displacement.
[0050] In some embodiments, the fixing member 23 is configured as a locking bolt, which includes a threaded portion and a nut portion. Both the bearing ring 21 and the limiting ring 22 have threaded holes that mate with the threaded portion. The probe clip is placed on the bearing ring 21, and then the limiting ring 22 is installed on the upper side of the bearing ring 21. The threaded holes on the limiting ring 22 and the bearing ring 21 correspond, allowing the locking bolt to be sequentially connected to the limiting ring 22 and the bearing ring 21 through the threaded holes. This causes the limiting ring 22 to exert a downward limiting force on the probe clip, thus fixing the probe clip within the receiving gap between the bearing ring 21 and the limiting ring 22. This probe clip fixing method is simple to implement and has low cost.
[0051] It should be noted that the connection and fixing position of the fastener 23 is set at the position of the bearing ring 21 and the limiting ring 22 near the outer edge, so that the fastener 23 avoids being located on the probe card.
[0052] Several fasteners 23 can be arranged radially around the limiting ring 22, for example, four can be evenly distributed. Multiple fasteners 23 can play a better role in fixing and limiting.
[0053] In some embodiments, the fixing member 23 may also be configured as other fixing structures 20, such as a rotary locking handle, a toggle clamp, or an electromagnetic locking structure. This embodiment does not impose specific limitations.
[0054] To facilitate the installation and fixing of the limiting ring 22 relative to the supporting ring 21, both the supporting ring 21 and the limiting ring 22 are provided with positioning grooves 211. The positioning grooves 211 are located near the outer edges of the supporting ring 21 and the limiting ring 22, that is, the positioning grooves 211 are located outside the position where the limiting ring 22 and the supporting ring 21 clamp the probe card, and are open to the outside of the supporting ring 21 and the limiting ring 22. When installing the limiting ring 22, the installation position of the limiting ring 22 can be achieved by aligning the positioning grooves 211 on the limiting ring 22 with those on the supporting ring 21.
[0055] Reference Figure 3 and Figure 4 To ensure reliable fixation of the probe card and avoid damage to it, a buffer plate 24 can be provided on the opposite side of the bearing ring 21 and the limiting ring 22. The buffer plate 24 is located inside the position where the limiting ring 22 and the bearing ring 21 clamp the probe card, that is, the buffer plate 24 is located near the inner edge of the bearing ring 21 and the limiting ring 22. When fixing the probe card, the two buffer plates 24 are in contact with the bottom and top surfaces of the probe card, respectively.
[0056] The buffer sheet 24 can be made of flexible and deformable materials such as sponge, rubber or silicone. When pressing and fixing the probe card, it can not only achieve the sealing between the two sides of the probe card and the fixing structure 20, but also achieve the flexible connection between the probe card and the fixing structure 20, avoiding scratches and damage to the probe card.
[0057] Furthermore, the fixing structure 20 also includes a limiting block 25 disposed between the bearing ring 21 and the limiting ring 22. The limiting block 25 is located outside the position where the limiting ring 22 and the bearing ring 21 clamp the probe card, that is, the limiting block 25 is located near the outer edge of the bearing ring 21 and the limiting ring 22. During the process of pressing and fixing the probe card, the limiting block 25 plays a limiting role on the limiting ring 22, avoiding the limiting ring 22 from applying too large a pressing force to the probe card, thereby protecting the probe card from damage.
[0058] Two limiting blocks 25 can be provided symmetrically along the diameter of the bearing ring 21 to reliably limit the positioning of the limiting ring 22. The limiting blocks 25 can be detachably fixed to the bearing ring 21, and the size of the limiting blocks 25 can be changed for different specifications and models of probe cards.
[0059] Reference Figure 6 and Figure 7 The limiting ring 22 is provided with a locking groove 221 for cooperating with the sealing cover 30. The locking groove 221 is a stepped groove, and the shape and size of the locking groove 221 are the same as the shape and size of the bottom of the sealing cover 30. The sealing cover 30 and the limiting ring 22 are engaged and connected through the locking groove 221, which facilitates the installation and removal of the sealing cover 30.
[0060] In some embodiments, the sealing cover 30 is configured as a transparent cover, that is, the sealing cover 30 is made of a transparent material (such as acrylic or tempered glass) to facilitate observation of the internal probe card.
[0061] In some embodiments, the sealing cover 30 can be configured as an opaque cover. For example, the sealing cover 30 is made of an opaque material (such as PET or stainless steel). The manufacturing process can employ relatively mature processes such as injection molding or bending to reduce the difficulty of manufacturing the sealing cover 30.
[0062] In some embodiments, the sealing cover 30 may also consist of two parts: an opaque part and a transparent part. For example, the main body of the sealing cover 30 may be opaque, while a transparent window may be provided at the top of the sealing cover 30. This reduces the difficulty of manufacturing the sealing cover 30 and facilitates observation of the internal probe card.
[0063] The sealing cover 30 may be equipped with a handle 32 for easy loading and unloading by operators. In addition, a sealing ring may be added to the edge of the sealing cover 30. The sealing ring is used to seal with the locking groove 221 to improve the sealing performance of the detection chamber 33.
[0064] In this invention, the probe card airtightness testing device first positions the probe card on the upper side of the test bench 10 and installs the sealing cover 30 on the fixed structure 20. Then, the air inlet switch 15 is turned on, and air is injected into the air chamber 11 through the air inlet pipe 13. The changes in the values of the first pressure gauge 31 and the second pressure gauge 16 are observed. If the air pressure in the detection chamber 33 and the air chamber 11 is stable, the probe card is well sealed; if the air pressure in the detection chamber 33 increases and the air pressure in the air chamber 11 decreases, it indicates that the probe card is leaking.
[0065] The detection device in this invention can quickly complete the entire process of clamping, detection, and unloading, significantly improving detection efficiency. Furthermore, the use of a digital pressure gauge during the detection process allows for real-time display of the pressure curve within the detection chamber 33, ensuring the accuracy of the detection results.
[0066] When the probe card is leaking, you can spray bubble water on the surface of the probe card and continue to circulate air into the air chamber 11. This can quickly and accurately locate the specific leak location of the probe card, making the airtightness detection of the probe card more accurate and reliable.
[0067] The above description, based on the embodiments shown in the drawings, details the structure, features, and effects of this utility model. The above description is only a preferred embodiment of this utility model, but the scope of implementation of this utility model is not limited to what is shown in the drawings. Any changes made in accordance with the concept of this utility model, or modifications to equivalent embodiments, that do not exceed the spirit covered by the specification and drawings, shall be within the protection scope of this utility model.
Claims
1. A probe card inspection apparatus characterized by comprising: include: The test stand (10) is provided with an air chamber (11) and an opening (12) communicating with the air chamber (11) and an air inlet pipe (13); A fixing structure (20) is provided at the opening (12) of the test bench (10), and the fixing structure (20) is used to fix the probe card; A sealing cover (30) is detachably installed on the fixed structure (20). A detection chamber (33) is provided inside the sealing cover (30). The air chamber (11) is located on one side of the probe card, and the detection chamber (33) is located on the other side of the probe card. The sealing cover (30) is provided with a pressure gauge (31) for detecting the air pressure change of the detection chamber (33).
2. The probe card testing apparatus of claim 1, wherein The fixing structure (20) includes a support ring (21) fixed to the test stage (10), a limiting ring (22) detachably connected to the support ring (21), and a fixing member (23) fixing the support ring (21) and the limiting member. A receiving gap for clamping the probe card is formed between the limiting ring (22) and the support ring (21).
3. The probe card testing apparatus of claim 2, wherein The fastener (23) is a locking bolt.
4. The probe card testing apparatus of claim 2, wherein A buffer plate (24) is provided on the opposite side of the bearing ring (21) and the limiting ring (22), and the buffer plate (24) is located inside the position where the bearing ring (21) and the limiting ring (22) hold the probe card.
5. The probe card testing apparatus of claim 2, wherein The fixing structure (20) further includes a limiting block (25) disposed between the bearing ring (21) and the limiting ring (22); And / or, both the bearing ring (21) and the limiting ring (22) are provided with positioning grooves (211); The limiting block (25) and the positioning groove (211) are located outside the position where the bearing ring (21) and the limiting ring (22) hold the probe card.
6. The probe card testing apparatus of claim 2, wherein The limiting ring (22) is provided with a locking groove (221) for cooperating with the sealing cover (30).
7. The probe card testing apparatus of claim 1, wherein The sealing cover (30) is configured as a transparent cover or an opaque cover.
8. The probe card detection device according to claim 1, characterized in that, An air intake switch (15) is provided on the air intake pipe (13).
9. The probe card testing apparatus of claim 1, wherein The test bench (10) is also equipped with a pressure relief valve (14) that is connected to the air chamber (11).
10. The probe card testing apparatus of claim 1, wherein The test bench (10) is also equipped with a pressure gauge (16) for detecting changes in air pressure in the air chamber (11).