Ultraviolet light and carbon dioxide composite cleaning equipment

Abstract

The utility model discloses ultraviolet light and carbon dioxide composite cleaning equipment, which comprises a clamping device, an ultraviolet light irradiation device and a carbon dioxide particle spraying device, a clamping mechanism is arranged on the clamping device, the ultraviolet light irradiation device comprises an ultraviolet light generation assembly, the ultraviolet light generation assembly can emit ultraviolet light, and the carbon dioxide particle spraying device can spray carbon dioxide particles to the clamping mechanism. The carbon dioxide particle spraying device comprises a carbon dioxide particle spraying head which can spray out carbon dioxide particles. Ultraviolet rays generated by the ultraviolet light generating assembly are irradiated to the workpiece, and the surface of the pollutant and the adhesion boundary of the pollutant and the workpiece can be preliminarily decomposed; and then carbon dioxide particles are sprayed to the workpiece through a carbon dioxide particle spray head, and pollutants are separated through the carbon dioxide particles. According to the utility model, ultraviolet light and carbon dioxide particles are used for carrying out composite cleaning on the workpiece, pollutants on the workpiece can be well removed, the cleaning efficiency is high, the surface of the workpiece is not damaged or is less damaged, and the workpiece is clean and environment-friendly.

Description

Technical Field

[0001] This utility model relates to the field of cleaning technology, and in particular to a composite cleaning device using ultraviolet light and carbon dioxide. Background Technology

[0002] Cleaning technology is widely needed and applied in many fields, such as mold cleaning in precision optics. Mold processing leaves behind cutting fluid and lubricating oil, and during injection molding, plastic melt and release agent adhere to the mold surface. The precision and surface quality of the mold directly determine the optical performance, dimensional accuracy, and surface quality of optical components, thus affecting the performance of the entire optical system. Another example is cleaning in the fields of wafers, glass substrates, and electronic component packaging, which requires cleaning to remove residual adhesive, surface dust, oil, and fingerprints.

[0003] While there are many existing cleaning methods, they all have some drawbacks. Chemical cleaning methods cause environmental pollution, corrosion, and cleaning residue. Furthermore, most chemical cleaning solutions are corrosive, irritating, or toxic, posing a risk of skin burns and respiratory irritation if operators do not take precautions. Mechanical cleaning methods are ineffective for molds with complex shapes, small holes, or deep grooves, as mechanical cleaning tools cannot reach these areas and cannot thoroughly remove dirt, affecting cleaning results. Methods such as grinding and sandblasting may cause scratches and wear on the mold surface due to improper operation, compromising the mold's precision and surface roughness, thus affecting product molding quality. Manual mechanical cleaning is slow, and its efficiency is low for cleaning large or batch molds, making it difficult to meet the needs of large-scale production. Ultrasonic cleaning has limited cleaning capabilities. It may not completely remove some sticky, dried dirt, especially thick deposits, requiring the use of other cleaning methods. Moreover, large molds may require high-power ultrasonic equipment, which is costly, and the size and capacity of the equipment also limit the cleaning of large molds. Plasma cleaning and laser cleaning technologies are also used in industrial cleaning, but their technical complexity and application limitations are significant. Plasma and laser cleaning pose a risk of damage to the surfaces of sensitive materials. Reactive oxygen ions in the plasma may react with metals such as aluminum and magnesium in an oxidation reaction, while the thermal effect of lasers may accelerate the thickness of the oxide layer on metal surfaces. Both technologies can lead to the formation of a hard oxide layer on the surface, affecting precision. Therefore, those skilled in the art desire a new cleaning device that can effectively remove contaminants with minimal surface damage. Utility Model Content

[0004] The main purpose of this invention is to provide a composite cleaning device using ultraviolet light and carbon dioxide, which can effectively clean contaminants on objects with minimal damage to the object's surface.

[0005] To achieve the above objectives, this utility model proposes a combined ultraviolet light and carbon dioxide cleaning device, including a clamping device, an ultraviolet light irradiation device, and a carbon dioxide particle spraying device. The clamping device is equipped with a clamping mechanism for clamping and positioning the workpiece to be cleaned. The ultraviolet light irradiation device and the carbon dioxide particle spraying device are both located above the clamping device. The ultraviolet light irradiation device includes an ultraviolet light generating component that emits ultraviolet light and directs it toward the workpiece in the clamping mechanism. The carbon dioxide particle spraying device includes a carbon dioxide particle nozzle that sprays carbon dioxide particles toward the workpiece in the clamping mechanism. The ultraviolet light irradiation device and the carbon dioxide particle spraying device can sequentially irradiate the workpiece in the clamping mechanism with ultraviolet light and spray carbon dioxide particles.

[0006] The workpiece to be cleaned is clamped and positioned on the clamping mechanism. Then, ultraviolet light is generated by an ultraviolet light generator and irradiated onto the workpiece. Since ultraviolet light has a decomposing effect on organic pollutants, the surface of the pollutants and the adhesion boundary between the pollutants and the workpiece will initially decompose, creating gaps at the adhesion boundary. Next, carbon dioxide particles are sprayed onto the workpiece using a carbon dioxide particle nozzle. The carbon dioxide particles separate the pollutants, and the gaps at the adhesion boundary between the pollutants and the workpiece created by ultraviolet light irradiation also facilitate the separation of pollutants by the carbon dioxide particles, thus accelerating the cleaning efficiency. This invention utilizes a combination of ultraviolet light and carbon dioxide particles for cleaning the workpiece, which can effectively remove pollutants from the workpiece with high cleaning efficiency. In addition, ultraviolet light and carbon dioxide particles cause little or no damage to the workpiece surface and are environmentally friendly.

[0007] Preferably, the clamping device further includes a clamping rotation drive assembly, which is connected to the clamping mechanism in a transmission manner. The clamping rotation drive assembly can drive the clamping mechanism to rotate so as to drive the workpiece to rotate.

[0008] During cleaning, the clamping rotation drive assembly can drive the workpiece to rotate, allowing the ultraviolet light generating assembly and carbon dioxide particle nozzle to irradiate and spray onto different angles and positions of the workpiece, thereby improving the cleaning effect.

[0009] Preferably, the clamping device further includes a clamping movement drive assembly, which is connected to the clamping mechanism in a transmission manner. The clamping movement drive assembly can drive the clamping mechanism to move between the lower sides of the ultraviolet irradiation device and the carbon dioxide particle injection device.

[0010] The clamping and moving drive assembly can move the workpiece from the underside of the ultraviolet irradiation device to the underside of the carbon dioxide particle spraying device. After the workpiece is irradiated by ultraviolet light, it moves to receive the carbon dioxide particle spraying, making the layout of the ultraviolet irradiation device and the carbon dioxide particle spraying device more reasonable and simplifying their structure. In addition, it can be set up so that the ultraviolet irradiation device and the carbon dioxide particle spraying device can clean two workpieces simultaneously, improving cleaning efficiency.

[0011] Preferably, the ultraviolet light irradiation device further includes a first lifting drive component, which is connected to the ultraviolet light generating component in a transmission manner, and the first lifting drive component can drive the ultraviolet light generating component to move in the up and down direction.

[0012] The first lifting drive component can drive the ultraviolet light generating component to move up and down to adjust the distance between the ultraviolet light generating component and the workpiece. This allows the ultraviolet light generating component to be adjusted to a more optimal irradiation distance, improving the decomposition efficiency of pollutants. In addition, it can also be adjusted to accommodate workpieces of different heights, thus increasing the applicability of the cleaning equipment.

[0013] Preferably, the ultraviolet light irradiation device further includes a first angle adjustment component, which is connected to the ultraviolet light generating component in a driving manner, and the first angle adjustment component is capable of adjusting the irradiation angle of the ultraviolet light generating component relative to the horizontal direction.

[0014] The first angle adjustment component can adjust the irradiation angle of the ultraviolet light generating component, so that the irradiation angle can be adjusted to a better value according to the shape of the workpiece, thereby improving the decomposition effect of pollutants.

[0015] Preferably, there are two first lifting drive components, which are arranged laterally at intervals. The ultraviolet light generating component is connected to the lower side of the two first lifting drive components. The first angle adjustment component includes two first lifting drive components. The two first lifting drive components can operate synchronously to drive the ultraviolet light generating component to move in the vertical direction. The two first lifting drive components can operate separately to adjust the irradiation angle of the ultraviolet light generating component.

[0016] Preferably, the ultraviolet light generating component is capable of emitting ultraviolet light with a wavelength of 172nm. Ultraviolet light with a wavelength of 172nm has a strong decomposition effect on organic pollutants, which can improve the cleaning effect.

[0017] Preferably, the carbon dioxide particle injection device further includes a second lifting drive assembly, which is connected to the carbon dioxide particle nozzle and can drive the carbon dioxide particle nozzle to move in the up and down direction.

[0018] The second lifting drive assembly can move the carbon dioxide particle nozzle up and down to adjust the distance between the carbon dioxide particle nozzle and the workpiece. This allows for adjustment of the carbon dioxide particle nozzle to a more optimal spray distance, improving the separation effect of pollutants. In addition, it can also be adjusted to accommodate workpieces of different heights, thus increasing the applicability of the cleaning equipment.

[0019] Preferably, the carbon dioxide particle injection device further includes a second angle adjustment component, which is disposed on the moving end of the second lifting drive component, and the carbon dioxide particle nozzle is disposed on the adjustment end of the second angle adjustment component. The second angle adjustment component can adjust the injection angle of the carbon dioxide particle nozzle relative to the horizontal direction.

[0020] The second angle adjustment component can adjust the spray angle of the carbon dioxide particle nozzle, so that the optimal spray angle can be adjusted according to the shape and different positions of the workpiece, thereby improving the separation effect of pollutants.

[0021] Preferably, the ultraviolet light and carbon dioxide composite cleaning equipment further includes a cleaning chamber, in which the clamping device, the ultraviolet light irradiation device, and the carbon dioxide particle injection device are all located. The cleaning chamber is provided with an air inlet and an air outlet. The air inlet is used to supply air into the cleaning chamber, and the air outlet is used to discharge the gas generated in the cleaning chamber during cleaning.

[0022] The cleaning of the workpieces is carried out in the cleaning chamber. Air is supplied to the cleaning chamber through the air inlet, which can carry away the waste gas and pollutant particles generated during the cleaning process and discharge them from the exhaust vent, so as to prevent them from remaining on the workpieces and in the cleaning chamber, thus maintaining the cleanliness of the cleaning chamber environment. Attached Figure Description

[0023] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0024] Figure 1 This is a schematic diagram of the structure of the workpiece being cleaned under the ultraviolet light irradiation device in this utility model;

[0025] Figure 2 This is a schematic diagram of the structure of the ultraviolet light generating component when adjusting the irradiation angle in this utility model;

[0026] Figure 3This is a schematic diagram of the structure of the workpiece being cleaned under the carbon dioxide particle spraying device in this utility model.

[0027] In the attached figures: 1-Clamping device, 11-Clamping mechanism, 12-Clamping rotation drive assembly, 13-Clamping movement drive assembly, 2-Ultraviolet irradiation device, 21-Ultraviolet light generating assembly, 22-First lifting drive assembly, 3-Carbon dioxide particle injection device, 31-Carbon dioxide particle nozzle, 32-Second lifting drive assembly, 33-Second angle adjustment assembly, 4-Cleaning chamber, 42-Air inlet, 43-Exhaust outlet, 5-Workpiece.

[0028] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0029] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0030] It should be noted that if the embodiments of this utility model involve directional indicators, such as up, down, left, right, front, back, etc., the directional indicators are only used to explain the relative positional relationship and movement of the components in a specific posture. If the specific posture changes, the directional indicators will also change accordingly.

[0031] Furthermore, if the embodiments of this utility model involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this utility model.

[0032] like Figures 1 to 3 As shown, a UV and carbon dioxide composite cleaning device includes a clamping device 1, a UV irradiation device 2, and a carbon dioxide particle spraying device 3, with the UV irradiation device 2 and the carbon dioxide particle spraying device 3 both located above the clamping device 1.

[0033] The clamping device 1 is equipped with a clamping mechanism 11 for clamping and positioning the workpiece 5 to be cleaned. The clamping mechanism 11 can clamp and position the workpiece 5 using either manual or automatic clamping. Manual clamping can be achieved by using manual clamps to hold the workpiece 5, while automatic clamping can be achieved by using a cylinder-driven mechanism. Those skilled in the art can design a suitable clamping mechanism 11 based on the shape of the workpiece 5. The materials of the workpiece 5 that can be cleaned using this solution include non-organic materials such as metal, glass, and ceramics.

[0034] The ultraviolet light irradiation device 2 includes an ultraviolet light generating component 21, which emits ultraviolet light and directs it toward the workpiece 5 in the clamping mechanism 11. Specifically, the ultraviolet light generating component 21 may include a lamp box and an ultraviolet light source disposed within the lamp box. The ultraviolet light source emits ultraviolet light with high energy. When ultraviolet photons act on the surface of the workpiece 5 being cleaned, most hydrocarbons have a strong absorption capacity for ultraviolet light and decompose into ions, excited molecules of free atoms, and neutrons after absorbing the energy of the ultraviolet light. In addition, oxygen molecules in the air also produce ozone and atomic oxygen after absorbing ultraviolet light. Ozone decomposes into atomic oxygen and oxygen. Atomic oxygen is extremely reactive. Under the action of atomic oxygen, the decomposition products of carbon and hydrocarbons on the surface of the workpiece 5 can be synthesized into volatile gases such as carbon dioxide and water vapor, which escape from the surface, thereby removing carbon and organic pollutants adhering to the surface of the workpiece 5.

[0035] The carbon dioxide particle injection device 3 includes a carbon dioxide particle nozzle 31, which can spray carbon dioxide particles onto the workpiece 5 in the clamping mechanism 11. The ultraviolet light irradiation device 2 and the carbon dioxide particle injection device 3 can sequentially irradiate the workpiece 5 in the clamping mechanism 11 with ultraviolet light and spray carbon dioxide particles. The carbon dioxide particles are generated by cooling carbon dioxide gas into solid particles, which become tiny dry ice particles or carbon dioxide snow particles. The high-pressure airflow mixed with carbon dioxide particles is emitted by the carbon dioxide particle generating equipment, conducted through a hose to the carbon dioxide particle nozzle 31, and then sprayed out. The principle and equipment structure for generating carbon dioxide particles can refer to existing dry ice cleaning equipment. Preferably, controlling the temperature parameters and other parameters for generating carbon dioxide particles can reduce damage to the surface of the workpiece 5. The cleaning mechanism of carbon dioxide particles on pollutants includes impact, freeze-thaw brittleness, sublimation explosion, and dissolution. Impact refers to the impact of particles and high-pressure air jets on pollutants. Freeze-thaw brittleness is the cooling and shrinkage of pollutants caused by low-temperature carbon dioxide. Sublimation explosion is the instantaneous sublimation of carbon dioxide particles into gas after impact, which expands and removes pollutants. Dissolution is the ability to dissolve pollutants with a high solubility coefficient.

[0036] The workpiece 5 to be cleaned is clamped and positioned on the clamping mechanism 11; then, ultraviolet light is generated by the ultraviolet light generator 21 and irradiated onto the workpiece 5, as per reference. Figure 1 and Figure 2 Because ultraviolet light decomposes organic pollutants, the surface of the pollutants and the adhesion boundary between the pollutants and workpiece 5 will initially decompose, creating gaps at the adhesion boundary. Then, carbon dioxide particles are sprayed onto workpiece 5 using carbon dioxide particle nozzle 31, referring to... Figure 3 Carbon dioxide particles separate contaminants, and the gaps at the adhesion boundary between contaminants and workpiece 5 caused by ultraviolet light irradiation also facilitate the separation of contaminants by carbon dioxide particles, thus accelerating the cleaning efficiency. This utility model utilizes a combination of ultraviolet light and carbon dioxide particles for cleaning workpiece 5, which can effectively remove contaminants from workpiece 5 with high cleaning efficiency. In addition, ultraviolet light and carbon dioxide particles do not cause damage or cause minimal damage to the surface of workpiece 5, and are clean and environmentally friendly.

[0037] In some specific embodiments, the clamping device 1 further includes a clamping rotation drive assembly 12, which is connected to the clamping mechanism 11 in a transmission manner. The clamping rotation drive assembly 12 can drive the clamping mechanism 11 to rotate so as to drive the workpiece 5 to rotate.

[0038] During cleaning, the clamping rotary drive assembly 12 can drive the workpiece 5 to rotate, allowing the ultraviolet light generating assembly 21 and the carbon dioxide particle nozzle 31 to irradiate and spray onto different angle positions of the workpiece 5, thereby improving the cleaning effect. The clamping rotary drive assembly 12 can be a motor.

[0039] In some specific embodiments, the clamping device 1 further includes a clamping movement drive assembly 13, which is connected to the clamping mechanism 11 in a transmission manner. The clamping movement drive assembly 13 can drive the clamping mechanism 11 to move between the lower sides of the ultraviolet irradiation device 2 and the carbon dioxide particle injection device 3.

[0040] The clamping and moving drive assembly 13 can move the workpiece 5 from the underside of the ultraviolet irradiation device 2 to the underside of the carbon dioxide particle spraying device 3. After being irradiated by ultraviolet light, the workpiece 5 moves to receive the carbon dioxide particle spraying, making the layout of the ultraviolet irradiation device 2 and the carbon dioxide particle spraying device 3 more reasonable and simplifying their structure. In addition, it can be set up so that the ultraviolet irradiation device 2 and the carbon dioxide particle spraying device 3 can clean two workpieces 5 simultaneously, improving cleaning efficiency. The clamping and moving drive assembly 13 can adopt motion modules such as lead screw and nut, gear and rack, or synchronous pulley and synchronous belt; or it can adopt a conveyor belt with multiple clamping mechanisms 11. The rotation of the conveyor belt sequentially drives the clamping mechanisms 11 past the underside of the ultraviolet irradiation device 2 and the carbon dioxide particle spraying device 3.

[0041] In some specific embodiments, reference is made to Figure 1 and Figure 2 The ultraviolet light irradiation device 2 also includes a first lifting drive component 22, which is connected to the ultraviolet light generating component 21 in a transmission manner. The first lifting drive component 22 can drive the ultraviolet light generating component 21 to move in the up and down direction.

[0042] The first lifting drive assembly 22 can drive the ultraviolet light generating assembly 21 to move up and down, thereby adjusting the distance between the ultraviolet light generating assembly 21 and the workpiece 5. This allows for adjustment of the ultraviolet light generating assembly 21 to a more optimal irradiation distance, improving the decomposition efficiency of pollutants. Additionally, it can be adjusted to accommodate workpieces 5 at different heights, expanding the applicability of the cleaning equipment. The first lifting drive assembly 22 can be an electric telescopic rod, with the ultraviolet light generating assembly 21 connected to its lower end; alternatively, the first lifting drive assembly 22 can be a motion module such as a lead screw and nut, gear and rack, or synchronous pulley and synchronous belt.

[0043] Furthermore, the ultraviolet irradiation device 2 also includes a first angle adjustment component, which is connected to the ultraviolet light generating component 21 via a transmission connection. The first angle adjustment component is capable of adjusting the irradiation angle of the ultraviolet light generating component 21 relative to the horizontal direction.

[0044] The first angle adjustment component can adjust the irradiation angle of the ultraviolet light generating component 21, so that the irradiation angle can be adjusted to a better value according to the shape of the workpiece 5, thereby improving the decomposition effect of pollutants.

[0045] Furthermore, there are two first lifting drive components 22, arranged laterally at intervals. The ultraviolet light generating component 21 is connected to the lower side of the two first lifting drive components 22. The first angle adjustment component includes two first lifting drive components 22. The two first lifting drive components 22 can move synchronously to drive the ultraviolet light generating component 21 to move in the vertical direction. The two first lifting drive components 22 can also move independently to adjust the irradiation angle of the ultraviolet light generating component 21. That is, there is a height difference between the moving ends of the two first lifting drive components 22, which allows the ultraviolet light generating component 21 to be tilted. A rotatable transition link can be connected between the first lifting drive components 22 and the ultraviolet light generating component 21, so that the two first lifting drive components 22 and the ultraviolet light generating component 21 can rotate normally.

[0046] In some specific embodiments, the ultraviolet light generating component 21 can emit ultraviolet light with a wavelength of 172 nm. Ultraviolet light with a wavelength of 172 nm has a strong decomposition effect on organic pollutants and can improve the cleaning effect.

[0047] In some specific embodiments, reference is made to Figure 3The carbon dioxide particle injection device 3 also includes a second lifting drive assembly 32, which is connected to the carbon dioxide particle nozzle 31 in a transmission manner. The second lifting drive assembly 32 can drive the carbon dioxide particle nozzle 31 to move in the up and down direction.

[0048] The second lifting drive assembly 32 can drive the carbon dioxide particle nozzle 31 to move up and down, thereby adjusting the distance between the carbon dioxide particle nozzle 31 and the workpiece 5. This allows for adjustment of the carbon dioxide particle nozzle 31 to an optimal spray distance, improving the separation effect of pollutants. Additionally, it can be adjusted to accommodate workpieces 5 at different heights, expanding the applicability of the cleaning equipment. The second lifting drive assembly 32 can be an electric telescopic rod, with the carbon dioxide particle nozzle 31 connected to its lower end; alternatively, it can be a screw and nut, gear and rack, or synchronous pulley and synchronous belt motion module; or it can be a multi-axis manipulator, making the movement of the carbon dioxide particle nozzle 31 more flexible.

[0049] Furthermore, the carbon dioxide particle injection device 3 also includes a second angle adjustment component 33, which is located on the moving end of the second lifting drive component 32. The carbon dioxide particle nozzle 31 is located on the adjustment end of the second angle adjustment component 33, and the second angle adjustment component 33 can adjust the injection angle of the carbon dioxide particle nozzle 31 relative to the horizontal direction.

[0050] The second angle adjustment component 33 can adjust the spray angle of the carbon dioxide particle nozzle 31, thus allowing for optimal spray angle adjustment based on the shape and position of the workpiece 5, thereby improving the separation effect of pollutants. The second angle adjustment component 33 can be electrically adjusted by a motor to adjust the angle of the carbon dioxide particle nozzle 31, or it can be manually adjusted and locked to adjust the angle of the carbon dioxide particle nozzle 31.

[0051] In some specific embodiments, the ultraviolet light and carbon dioxide composite cleaning equipment also includes a cleaning chamber 4. The clamping device 1, the ultraviolet light irradiation device 2 and the carbon dioxide particle spraying device 3 are all located in the cleaning chamber 4. The cleaning chamber 4 is provided with an air inlet 42 and an air outlet 43. The air inlet 42 is used to supply air into the cleaning chamber 4, and the air outlet 43 is used to discharge the gas generated in the cleaning chamber 4 during cleaning.

[0052] The cleaning of workpiece 5 is carried out in cleaning chamber 4. Air is supplied to cleaning chamber 4 through air inlet 42 to carry away the waste gas and pollutant particles generated during the cleaning process and discharge them through exhaust outlet 43, so as not to remain on workpiece 5 or in cleaning chamber 4, thus maintaining the cleanliness of the environment inside cleaning chamber 4. Preferably, nitrogen gas is introduced into cleaning chamber 4. In a nitrogen environment, ultraviolet light has good penetrating ability and reaches the surface of workpiece 5 to photodecompose organic pollutants.

[0053] The above description is only a preferred embodiment of the present utility model and does not limit the patent scope of the present utility model. All equivalent structural transformations made under the inventive concept of the present utility model using the contents of the present utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the patent protection scope of the present utility model.

Claims

1. A combined ultraviolet light and carbon dioxide cleaning device, characterized in that, The device includes a clamping device (1), an ultraviolet light irradiation device (2), and a carbon dioxide particle spraying device (3). The clamping device (1) is equipped with a clamping mechanism (11) for clamping and positioning the workpiece (5) to be cleaned. The ultraviolet light irradiation device (2) and the carbon dioxide particle spraying device (3) are both located above the clamping device (1). The ultraviolet light irradiation device (2) includes an ultraviolet light generating component (21), which can emit ultraviolet light and direct it toward the workpiece (5) in the clamping mechanism (11). The carbon dioxide particle spraying device (3) includes a carbon dioxide particle nozzle (31), which can spray carbon dioxide particles and spray them toward the workpiece (5) in the clamping mechanism (11). The ultraviolet light irradiation device (2) and the carbon dioxide particle spraying device (3) can irradiate the workpiece (5) in the clamping mechanism (11) with ultraviolet light and spray carbon dioxide particles in turn.

2. The ultraviolet light and carbon dioxide composite cleaning equipment as described in claim 1, characterized in that, The clamping device (1) further includes a clamping rotation drive assembly (12), which is connected to the clamping mechanism (11) in a transmission manner. The clamping rotation drive assembly (12) can drive the clamping mechanism (11) to rotate so as to drive the workpiece (5) to rotate.

3. The ultraviolet light and carbon dioxide composite cleaning equipment as described in claim 1, characterized in that, The clamping device (1) further includes a clamping movement drive assembly (13), which is connected to the clamping mechanism (11) in a transmission manner. The clamping movement drive assembly (13) can drive the clamping mechanism (11) to move between the lower sides of the ultraviolet irradiation device (2) and the carbon dioxide particle injection device (3).

4. The ultraviolet light and carbon dioxide composite cleaning equipment as described in claim 1, characterized in that, The ultraviolet irradiation device (2) further includes a first lifting drive component (22), which is connected to the ultraviolet light generating component (21) in a transmission manner. The first lifting drive component (22) can drive the ultraviolet light generating component (21) to move in the up and down direction.

5. The ultraviolet light and carbon dioxide composite cleaning equipment as described in claim 4, characterized in that, The ultraviolet irradiation device (2) further includes a first angle adjustment component, which is connected to the ultraviolet light generating component (21) in a transmission manner. The first angle adjustment component can adjust the irradiation angle of the ultraviolet light generating component (21) relative to the horizontal direction.

6. The ultraviolet light and carbon dioxide composite cleaning equipment as described in claim 5, characterized in that, The number of the first lifting drive components (22) is two, and the two first lifting drive components (22) are arranged horizontally at intervals. The ultraviolet light generating component (21) is connected to the lower side of the two first lifting drive components (22). The first angle adjustment component includes two first lifting drive components (22). The two first lifting drive components (22) can move synchronously to drive the ultraviolet light generating component (21) to move in the up and down direction. The two first lifting drive components (22) can move separately to adjust the irradiation angle of the ultraviolet light generating component (21).

7. The ultraviolet light and carbon dioxide composite cleaning equipment as described in claim 1, characterized in that, The ultraviolet light generating component (21) is capable of emitting ultraviolet light with a wavelength of 172nm.

8. The ultraviolet light and carbon dioxide composite cleaning equipment as described in claim 1, characterized in that, The carbon dioxide particle injection device (3) further includes a second lifting drive assembly (32), which is connected to the carbon dioxide particle nozzle (31) in a transmission manner. The second lifting drive assembly (32) can drive the carbon dioxide particle nozzle (31) to move in the up and down direction.

9. The ultraviolet light and carbon dioxide composite cleaning equipment as described in claim 8, characterized in that, The carbon dioxide particle injection device (3) further includes a second angle adjustment component (33), which is located on the moving end of the second lifting drive component (32). The carbon dioxide particle nozzle (31) is located on the adjusting end of the second angle adjustment component (33). The second angle adjustment component (33) can adjust the injection angle of the carbon dioxide particle nozzle (31) relative to the horizontal direction.

10. The ultraviolet light and carbon dioxide composite cleaning equipment as described in claim 1, characterized in that, The ultraviolet light and carbon dioxide composite cleaning equipment also includes a cleaning chamber (4). The clamping device (1), the ultraviolet light irradiation device (2) and the carbon dioxide particle injection device (3) are all located in the cleaning chamber (4). The cleaning chamber (4) is provided with an air inlet (42) and an air outlet (43). The air inlet (42) is used to supply air into the cleaning chamber (4), and the air outlet (43) is used to discharge the gas generated in the cleaning chamber (4) during cleaning.

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