Gas distribution mechanism

Abstract

The utility model relates to the technical field of epitaxial furnaces, and particularly discloses a gas distribution mechanism which comprises at least two screen assemblies and N separation assemblies. Wherein each screen mesh assembly comprises a screen mesh body, and the screen mesh body is provided with a plurality of mesh holes; each separation assembly comprises a separation plate, the separation plate is arranged between the two adjacent screen bodies, and the two separation plates divide the area between the two screen bodies into N + 1 mutually independent mixing areas in the length direction of the screen bodies; when N is larger than or equal to 2, the partition plates are arranged between every two adjacent screen bodies at intervals. By means of the arrangement, mixed gas in different areas cannot be mixed again before entering different channels of the quartz square tube and finally enters all the areas of the reaction cavity, and normal growth of wafers is facilitated.

Description

Technical Field

[0001] This utility model relates to the field of epitaxial furnace technology, and in particular to a gas distribution mechanism. Background Technology

[0002] The gas inlet and distribution plate of the epitaxial furnace is a cuboid structure, 200mm wide and approximately 30mm high, made of 316L stainless steel. The plate contains a mixing chamber and is equipped with an inlet port connecting the mixing chamber to the outside and multiple outlet ports. Along the length of the plate, there are three zones, with the outlet ports distributed across these zones. The composition of the gas flowing out from each zone differs. During the SiC epitaxial process, the reaction gas enters the mixing chamber through the inlet port, mixes, and then enters the quartz square tube through the outlet ports, ultimately flowing into the reaction chamber.

[0003] Although the above structure can make multiple gases mix evenly, the mixing in the mixing chamber causes the gas to flow out of the vents in the three regions, and the composition ratio of the gas in each region is different from that before entering the mixing chamber. As a result, after entering the reaction chamber, it affects the growth of the wafer.

[0004] Therefore, we will continue to study a gas separation mechanism to solve the above problems. Utility Model Content

[0005] The purpose of this invention is to provide a gas separation mechanism to solve the problem in the prior art where the mixing of gases flowing out from three regions affects the normal growth of the wafer.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] A gas distribution mechanism, used for gas distribution at the epitaxial furnace inlet, includes:

[0008] At least two screen assemblies, each of the screen assemblies including a screen body having a plurality of mesh openings;

[0009] There are N separating components, each of which includes a separating plate. The separating plate is arranged between two adjacent screen bodies. Along the length of the screen body, the two separating plates divide the area between the two screen bodies into N+1 mutually independent mixed areas. When N≥2, a number of the separating plates are arranged at intervals between two adjacent screen bodies.

[0010] As an optional technical solution for the gas distribution mechanism, the screen assembly further includes a fixing frame disposed on the outer periphery of the screen body to support the screen body; and / or,

[0011] The screen body is made of iron wire mesh.

[0012] As an optional technical solution for the gas distribution mechanism, the partition plate is fixed to the fixed frame.

[0013] As an optional technical solution for the gas distribution mechanism, one of the partition plate and the fixed frame is provided with a locking pin and the other is provided with a locking groove, and the locking pin is locked into the locking groove.

[0014] As an optional technical solution for the gas distribution mechanism, the partition plate has at least two locking pins, the fixing frame has at least two locking slots, and the at least two locking pins and the at least two locking slots are locked in a one-to-one correspondence.

[0015] As an optional technical solution for a gas distribution mechanism, the partition plate is arranged parallel to the direction of fluid flow and perpendicular to the length direction of the screen body.

[0016] As an optional technical solution for the gas distribution mechanism, the gas distribution mechanism has three screen assemblies, each of the separation assemblies includes two separation plates, and two separation plates are provided between any two adjacent screen bodies, with the two separation plates in each set of separation assemblies arranged on the same plane.

[0017] As an optional technical solution for the gas distribution mechanism, the separating component further includes an annular frame, which is sleeved on the outer periphery of the three screen components, and the plane of the annular frame is parallel to the separating plate.

[0018] As an optional technical solution for a gas distribution mechanism, the partition plate includes a plate body and a pickup part disposed on one side of the plate body, and the two plate bodies of the two partition plates are located between the two pickup parts.

[0019] As an optional technical solution for the gas distribution mechanism, the gas distribution mechanism further includes a ventilation pipe, and at least two screen bodies are arranged at intervals in the ventilation pipe along the extension direction of the ventilation pipe. The partition plate is located in the ventilation pipe and is parallel to the extension direction of the ventilation pipe. The two partition plates and the side wall of the ventilation pipe form three cylindrical mixing areas.

[0020] This utility model has at least the following beneficial effects:

[0021] This invention provides a gas distribution mechanism, comprising at least two screen assemblies and N partitioning assemblies. Each screen assembly includes a screen body with a plurality of mesh openings. The N partitioning assemblies each include a partition plate, which is arranged between two adjacent screen bodies. Along the length of the screen body, the two partition plates divide the area between the two screen bodies into N+1 independent mixing regions. When N≥2, the partition plates are spaced apart between two adjacent screen bodies. This arrangement allows different gases to enter one mixing region through one screen body, complete mixing, and then flow out through the other screen body. The composition ratio of the gases entering each mixing region is different. Because each mixing region is separated by the partition plate, the mixed gases from different regions will not mix again before entering different channels of the quartz square tube after flowing out from the other screen body, ultimately entering the respective regions of the reaction chamber, which facilitates the normal growth of the wafer. In addition, because there are many mesh holes in the screen body, even if some mesh holes are blocked, it will not have a significant impact on the gas entering the reaction chamber, thereby improving the problem of abnormal thickness in a certain area of ​​the wafer. Attached Figure Description

[0022] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the gas distribution mechanism in an embodiment of the present invention;

[0024] Figure 2 This is a cross-sectional structural diagram of the gas distribution mechanism in an embodiment of this utility model.

[0025] In the picture:

[0026] 100. Screen assembly; 110. Screen body; 120. Fixing frame; 121. Snap-fit ​​groove;

[0027] 200. Separator assembly; 210. Separator plate; 211. Snap-on pin; 212. Plate body; 213. Pick-up unit;

[0028] 310. First left region; 320. First middle region; 330. First right region;

[0029] 340, Second Left Region; 350, Second Middle Region; 360, Second Right Region. Detailed Implementation

[0030] Before explaining any implementation of this application in detail, it should be understood that this application is not limited to its application to the structural details and component arrangements set forth in the following description or shown in the above drawings.

[0031] In this application, the terms "comprising," "including," "having," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element.

[0032] In this application, the term "and / or" describes the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent three cases: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this application generally indicates that the preceding and following related objects have an "and / or" relationship.

[0033] In this application, the terms "connection," "combination," "coupling," and "installation" can refer to direct connection, combination, coupling, or installation, or indirect connection, combination, coupling, or installation. For example, a direct connection refers to two parts or components being connected together without the need for an intermediary, while an indirect connection refers to two parts or components each being connected to at least one intermediary, with the connection achieved through the intermediary. Furthermore, "connection" and "coupling" are not limited to physical or mechanical connections or couplings, but can also include electrical connections or couplings.

[0034] In this application, those skilled in the art will understand that relative terms (e.g., “about,” “approximately,” “basically,” etc.) used in conjunction with quantities or conditions are to include the values ​​and have the meaning indicated by the context. For example, such relative terms include at least the degree of error associated with the measurement of a particular value, tolerances associated with the particular value due to manufacturing, assembly, use, etc. Such terms should also be considered as disclosing a range defined by the absolute values ​​of the two endpoints. Relative terms may refer to a certain percentage (e.g., 1%, 5%, 10% or more) of the indicated value. Numerical values ​​not using relative terms should also be disclosed as specific values ​​with tolerances. Furthermore, “basically” when expressing relative angular relationships (e.g., substantially parallel, substantially perpendicular) may refer to a certain degree (e.g., 1 degree, 5 degrees, 10 degrees or more) added to or subtracted from the indicated angle.

[0035] In this application, those skilled in the art will understand that the function performed by a component can be performed by one component, multiple components, one part, or multiple parts. Similarly, the function performed by a part can also be performed by one part, one component, or a combination of multiple parts.

[0036] In this application, the directional terms "upper," "lower," "left," "right," "front," and "rear" are used to describe the orientation and positional relationships shown in the accompanying drawings and should not be construed as limiting the embodiments of this application. Furthermore, in the context, it should be understood that when an element is mentioned as being connected "upper" or "lower" to another element, it can be directly connected to the other element "upper" or "lower," or indirectly connected through an intermediate element. It should also be understood that directional terms such as upper side, lower side, left side, right side, front side, and rear side not only represent positive orientation but can also be understood as lateral orientation. For example, "below" can include directly below, lower left, lower right, lower front, and lower rear.

[0037] like Figure 1 and Figure 2 As shown, this embodiment provides a gas distribution mechanism for gas distribution at the inlet of an epitaxial furnace. The gas distribution mechanism includes at least two screen assemblies 100 and N partitioning assemblies 200. Each screen assembly 100 includes a screen body 110 with a plurality of mesh openings. Each partitioning assembly 200 includes a partition plate 210, which is arranged between two adjacent screen bodies 110. Along the length of the screen body 110, the two partitioning plates 210 divide the area between the two screen bodies 110 into N+1 independent mixing regions. When N≥2, the partitioning plates 210 are arranged parallel and spaced apart between two adjacent screen bodies 110.

[0038] In use, the gas distribution mechanism needs to be used in conjunction with the quartz square tube in the epitaxial furnace. The quartz square tube has three internal channels, and the gas distribution mechanism is located at the gas inlet end of the quartz square tube. This arrangement allows different gases to enter one mixing zone through one of the screen bodies 110, where they are mixed. After mixing, they flow out through another screen body 110. The composition ratio of the gases entering each mixing zone is different. Because each mixing zone is separated by a partition plate 210, the mixed gases from different zones do not mix again before entering the different channels of the quartz square tube after flowing out from the other screen body 110. Ultimately, they enter the various regions of the reaction chamber, contributing to the normal growth of the wafer. Furthermore, because the screen body 110 has a large number of mesh openings, even if individual mesh openings become blocked, it will not significantly affect the gas entering the reaction chamber, thus improving the problem of abnormal thickness in certain areas of the wafer.

[0039] N can be 2, 3, 4, or even 5. For ease of explanation, we will use N=2 as an example. Two partition plates 210 divide the area between two screen bodies 110 arranged at intervals along the gas flow direction into three independent mixing regions. This allows the gases in multiple mixing regions to mix individually, and when flowing out of the downstream screen body 110, the proportions of other components in the three different mixing regions are the same as the proportions of the gas before entering the mixing regions. Specifically, the three mixing regions include a central region and two side regions, with the two side regions located on either side of the central region. The cross-sectional area of ​​the central region is larger than that of the side regions; the cross-sectional areas of the two side regions are the same. In other embodiments, the cross-sectional areas of the different side regions can also be different. For example, the proportions of the gas entering the side regions are different from those entering the central region, so that the proportions of the gas flowing out of the side regions are different from those flowing out of the central region, and they do not interfere with each other. The different proportions of gas components can be understood as either a mixture of gases containing different types of gases, or a mixture of gases containing the same types of gases but in different amounts.

[0040] To improve the gas mixing effect, in some embodiments, the gas separation mechanism has three screen assemblies 100, each separating assembly 200 including two separating plates 210, with two separating plates 210 provided between any two adjacent screen bodies 110, and the two separating plates 210 in each group of separating assemblies 200 arranged coplanarly. This arrangement allows the partition plate 210 to divide the area between any two adjacent screen bodies 110 into three mixed areas. For ease of description, the three screen bodies 110 are defined as the first screen, the second screen, and the third screen. Along the gas flow direction, the first screen, the second screen, and the third screen are arranged at intervals. Two partition plates 210 are provided between the first screen and the second screen, dividing the area between the first screen and the second screen into a first left area 310, a first middle area 320, and a first right area 330. Two partition plates 210 are provided between the second screen and the third screen, dividing the area between the second screen and the third screen into a second left area 340, a second middle area 350, and a second right area 360. Along the gas flow direction, the first left area 310 and the second left area 340 are connected through the second screen, the first middle area 320 and the second middle area 350 are connected through the second screen, and the first right area 330 and the second right area 360 are connected through the second screen. That is, the gas flowing out of the first left region 310 re-enters the second left region 340 for secondary mixing, the gas flowing out of the first middle region 320 re-enters the second middle region 350 for secondary mixing, and the gas flowing out of the first right region 330 re-enters the second right region 360 for secondary mixing.

[0041] In some embodiments, the screen body 110 is a wire mesh. The mesh size of the wire mesh is between 200 and 500 mesh. In other embodiments, the mesh size is 600 mesh or even 2000 mesh. Because the diameter of the wires constituting the wire mesh is small, to ensure the wire mesh maintains a fixed shape, in some embodiments, the screen assembly 100 further includes a fixing frame 120, which is disposed on the outer periphery of the screen body 110 to support it. The fixing frame 120 has a ring-shaped structure. Further, the wire mesh can be welded to the periphery of the fixing frame 120. In this embodiment, the wire mesh is welded to the inner sidewall of the fixing frame 120. In other embodiments, the wire mesh is bound to the periphery of the fixing frame 120 by cable ties or wire.

[0042] In this embodiment, the partition plate 210 is fixed to the fixing frame 120, thereby fixing the position of the partition plate 210 and preventing displacement due to airflow interference. In some embodiments, one of the partition plate 210 and the fixing frame 120 is provided with a snap-fit ​​pin 211 and the other with a snap-fit ​​groove 121, and the snap-fit ​​pin 211 snaps into the snap-fit ​​groove 121. The snap-fit ​​connection is firm and easy to assemble. Specifically, the partition plate 210 has at least two snap-fit ​​pins 211, and the fixing frame 120 has at least two snap-fit ​​grooves 121, with at least two snap-fit ​​pins 211 and at least two snap-fit ​​grooves 121 snapping into each other one-to-one. The above arrangement provides multiple connections between the partition plate 210 and the fixing frame 120, improving the connection stability between them.

[0043] In other embodiments, the partition plate 210 is welded or plugged into the fixing frame 120.

[0044] In this embodiment, to ensure smooth gas flow, the partition plate 210 is perpendicular to the screen body 110. The partition plate 210 is arranged parallel to the direction of fluid flow. In some embodiments, the partition plate 210 is perpendicular to the length direction of the screen body 110.

[0045] To connect the separator 210 and the screen assembly 100, in other embodiments, the separator assembly 200 further includes an annular frame, which is fitted around the outer periphery of at least two screen assemblies 100, and the plane of the annular frame is parallel to the separator 210. The annular frame is made of an elastic material. In other embodiments, the annular frame is formed by the butt joint of a first U-shaped frame and a second U-shaped frame, which are screwed together.

[0046] To facilitate the overall movement of the gas distribution mechanism, in some embodiments, the partition plate 210 includes a plate body 212 and a pickup part 213 disposed on one side of the plate body 212, with the two plate bodies 212 of the two partition plates 210 located between the two pickup parts 213. The pickup part 213 is a hook disposed on the plate body 212. In this embodiment, the gas distribution mechanism can be picked up and transferred by hand or by clamping the pickup part 213 with a tool, thus facilitating cleaning.

[0047] Furthermore, the gas distribution mechanism also includes a ventilation pipe. Along the extension direction of the ventilation pipe, at least two screen bodies 110 are spaced apart in the ventilation pipe. A partition plate 210 is located in the ventilation pipe and parallel to the extension direction of the ventilation pipe. The two partition plates 210 and the side wall of the ventilation pipe enclose three cylindrical mixing areas. This arrangement allows the gas distribution mechanism to be directly connected in series between the air inlet pipe and the quartz square tube, improving ease of use.

[0048] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make various obvious changes, readjustments, and substitutions without departing from the protection scope of this utility model. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A gas distribution mechanism for distributing gas at the inlet of an epitaxial furnace, characterized in that: include: At least two screen assemblies (100), each of the screen assemblies (100) including a screen body (110) having a plurality of mesh openings; N separating components (200), each of the separating components (200) includes a separating plate (210), the separating plate (210) is arranged between two adjacent screen bodies (110), and along the length direction of the screen body (110), the two separating plates (210) divide the area between the two screen bodies (110) into N+1 mutually independent mixing areas; wherein, when N≥2, a plurality of the separating plates (210) are arranged at intervals between two adjacent screen bodies (110).

2. The gas distribution mechanism according to claim 1, characterized in that, The screen assembly (100) further includes a fixing frame (120) disposed on the outer periphery of the screen body (110) to support the screen body (110); and / or, The screen body (110) is made of wire mesh.

3. The gas distribution mechanism according to claim 2, characterized in that, The partition plate (210) is fixed to the fixed frame (120).

4. The gas distribution mechanism according to claim 3, characterized in that, Of the partition plate (210) and the fixing frame (120), one is provided with a locking pin (211) and the other is provided with a locking groove (121), and the locking pin (211) is locked in the locking groove (121).

5. The gas distribution mechanism according to claim 4, characterized in that, The partition plate (210) has at least two snap-fit ​​pins (211), and the fixing frame (120) has at least two snap-fit ​​slots (121). The at least two snap-fit ​​pins (211) are snapped into the at least two snap-fit ​​slots (121) in a one-to-one correspondence.

6. The gas distribution mechanism according to claim 1, characterized in that, The partition plate (210) is arranged parallel to the direction of fluid flow and perpendicular to the length direction of the screen body (110).

7. The gas distribution mechanism according to any one of claims 1-6, characterized in that, The gas distribution mechanism has three screen assemblies (100), each of the separation assemblies (200) includes two separation plates (210), and two separation plates (210) are provided between any two adjacent screen bodies (110), and the two separation plates (210) in each set of separation assemblies (200) are arranged on the same plane.

8. The gas distribution mechanism according to claim 7, characterized in that, The separating component (200) also includes an annular frame, which is fitted around the outer periphery of the three screen components (100), and the plane of the annular frame is parallel to the separating plate (210).

9. The gas distribution mechanism according to any one of claims 1-6, characterized in that, The partition (210) includes a plate body (212) and a pickup part (213) disposed on one side of the plate body (212), and the two plate bodies (212) of the two partitions (210) are located between the two pickup parts (213).

10. The gas distribution mechanism according to any one of claims 1-6, characterized in that, The gas distribution mechanism also includes a ventilation pipe. Along the extension direction of the ventilation pipe, at least two screen bodies (110) are spaced apart in the ventilation pipe. The partition plate (210) is located in the ventilation pipe and is parallel to the extension direction of the ventilation pipe. The two partition plates (210) and the side wall of the ventilation pipe form three cylindrical mixing areas.

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