Spectral response test equipment for CMOS (Complementary Metal Oxide Semiconductor) image sensor

Abstract

The utility model belongs to the technical field of CMOS (Complementary Metal Oxide Semiconductor) device testing, and particularly relates to spectral response testing equipment for a CMOS image sensor. Comprising a light source box which is internally provided with an integrating sphere light source and a filtering wheel; a light outlet of the integrating sphere light source is communicated with a light inlet of the test box, and the filtering wheel is arranged between the light outlet and the light inlet; an inner cavity of the test box comprises a test cavity and a heating cavity which are independently divided; the test cavity is used for placing a CMOS device to be tested, and the heating cavity is used for providing different environment temperatures for the test cavity. According to the utility model, different simulated temperature environments can be provided for the CMOS imaging device to be tested, the spectral response of the CMOS imaging device can be obtained by combining monochromatic light with multiple spectral bands and different wavelengths, and the characteristic parameters of the spectral response can be comprehensively evaluated.

Description

Technical Field

[0001] This invention belongs to the field of CMOS device testing technology, and specifically relates to a CMOS image sensor spectral response testing device. Background Technology

[0002] CMOS image sensors are image sensing elements manufactured using photoelectric technology. They possess advantages such as low power consumption, stable performance, fast response speed, and high sensitivity, and are widely used in digital photography, medical testing, aerospace, astronomical exploration, and spectrum telescopes. Existing testing equipment for CMOS imaging devices mostly uses monochromatic light of a single wavelength band for spectral response testing. Monochromatic light testing of a single wavelength band can only obtain the spectral response at a specific wavelength, and it is difficult to simulate the impact of different test ambient temperatures on the spectral response characteristics of CMOS imaging devices. Therefore, it is impossible to comprehensively evaluate the overall performance of CMOS imaging devices at different wavelengths and temperatures. Utility Model Content

[0003] The purpose of this invention is to provide a CMOS image sensor spectral response testing device, which can provide simulated different temperature environments for the CMOS imaging device under test. By combining the use of monochromatic light of different wavelengths in multiple spectral bands to obtain the spectral response of the CMOS imaging device, the spectral response characteristic parameters can be evaluated more comprehensively.

[0004] To address the aforementioned technical problems, this utility model provides a CMOS image sensor spectral response testing device, comprising:

[0005] A light source box, wherein an integrating sphere light source and a filter wheel are installed inside the light source box; the light outlet of the integrating sphere light source is connected to the light inlet of the test box, and the filter wheel is arranged between the light outlet and the light inlet;

[0006] The test chamber includes an independently divided test chamber and a heating chamber; the test chamber is used to place the CMOS device under test, and the heating chamber is used to provide different ambient temperatures for the test chamber.

[0007] Preferably, both the integrating sphere light source and the filter wheel are fixedly installed using an adjustable height bracket.

[0008] Preferably, the filter wheel includes: a housing, a switching disk, filters, and a switching motor; the switching motor is installed on the outside of the housing, the switching disk is provided at the output end of the switching motor, the switching disk is located inside the housing, and a plurality of filters of different wavelengths are circumferentially installed on the switching disk.

[0009] Preferably, the housing also includes a light-transmitting hole for the light emitted from the integrating sphere light source to enter the test chamber after being filtered by the filter.

[0010] Preferably, the bottom of the test cavity is provided with a tooling plate for mounting the tooling fixture of the CMOS device under test.

[0011] Preferably, the bottom of the heating chamber is provided with an electric heating tube, and the top of the heating chamber also includes an installed circulating fan. The air inlet of the circulating fan is connected to the heating chamber, and the air outlet is connected to the test chamber. At the same time, the bottom of the partition plate between the heating chamber and the test chamber also includes an air return mesh.

[0012] Preferably, it also includes an industrial control cabinet for controlling and connecting to the light source box and the test box.

[0013] Compared with the prior art, this utility model has the following advantages:

[0014] This invention uses a filter wheel to circumferentially switch different filters to produce monochromatic light of different wavelengths, allowing these different wavelengths of monochromatic light to illuminate the photosensitive surface of a CMOS imaging device. Based on the acquired image information, the spectral response of the CMOS device is obtained, enabling a comprehensive evaluation of the spectral response characteristics of the CMOS imaging device at different wavelengths across multiple spectral bands. Simultaneously, a heating cavity is used to provide different ambient temperatures for the test cavity, simulating the impact of different ambient temperatures on the test performance of the CMOS device during spectral response testing. Attached Figure Description

[0015] Figure 1 This is a front view of the structure of a CMOS image sensor spectral response testing device according to this utility model.

[0016] Figure 2 This is an internal structural diagram of the light source box in this utility model.

[0017] Figure 3 This is a structural diagram of the filter wheel in this utility model.

[0018] Figure 4 This is a structural diagram of the filter in this utility model.

[0019] Figure 5 This is an internal structural diagram of the test box without its door in this utility model.

[0020] Figure 6 This is an internal structural diagram of the test chamber and heating chamber in this utility model.

[0021] In the diagram: 1-Light source box, 2-Integrating sphere light source, 3-Filter wheel, 31-Housing, 32-Switching turntable, 33-Filter, 34-Switching motor, 35-Light transmission hole, 4-Test box, 5-Test chamber, 51-Tooling plate, 6-Heating chamber, 61-Electric heating tube, 62-Circulating fan, 63-Return air mesh, 7-Adjustable height bracket. Detailed Implementation

[0022] The present invention will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will become clearer from the following description. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of the present invention.

[0023] like Figures 1-6 As shown, this embodiment of the present invention provides a CMOS image sensor spectral response testing device, comprising:

[0024] The light source box 1 contains an integrating sphere light source 2 and a filter wheel 3. The light outlet of the integrating sphere light source 2 is connected to the light inlet of the test box 4, and the filter wheel 3 is arranged between the light outlet and the light inlet. The integrating sphere light source 2 is used to provide stable uniform light. The uniform light is circumferentially switched by different filters 33 through the filter wheel 3 to become monochromatic light of different wavelengths, so that the monochromatic light of different wavelengths illuminates the photosensitive surface of the CMOS imaging device. The spectral response of the CMOS device is obtained based on the acquired image information.

[0025] Test chamber 4 has an internal cavity that includes an independently divided test cavity 5 and a heating cavity 6. Test cavity 5 is used to place the CMOS device under test, and heating cavity 6 is used to provide different ambient temperatures to test cavity 5 to simulate the effect of different ambient temperatures on the test performance of the CMOS device during spectral response testing.

[0026] Both the integrating sphere light source 2 and the filter wheel 3 are fixedly installed using an adjustable height bracket 7.

[0027] The filter wheel 3 includes a housing 31, a switching disk 32, filters 33, and a switching motor 34. The switching motor 34 is mounted on the outside of the housing 31, and the switching disk 32 is located at the output end of the switching motor 34. The switching disk 32 is located inside the housing 31, and several filters 33 of different wavelengths are circumferentially mounted on the switching disk 32. By controlling the operation of the switching motor 34, the switching disk 32 is driven to rotate, thereby switching between filters 33 of different wavelengths. This allows for a comprehensive evaluation of the spectral response characteristics of CMOS imaging devices at different wavelengths in multiple spectral bands.

[0028] The housing 31 also includes a light-transmitting hole 35, through which the light emitted from the integrating sphere light source 2 is filtered by the filter 33 before entering the test chamber 4.

[0029] The bottom of the test cavity 5 is provided with a fixture plate 51 for mounting the fixture of the CMOS device under test, so that monochromatic light can be irradiated onto the photosensitive surface of the CMOS imaging device.

[0030] The bottom of the heating chamber 6 is equipped with an electric heating tube 61, and the top of the heating chamber 6 also includes a circulating fan 62. The air inlet of the circulating fan 62 is connected to the heating chamber 6, and the air outlet is connected to the test chamber 5. At the same time, the bottom of the partition plate between the heating chamber 6 and the test chamber 5 also includes a return air mesh 63. The operation of the circulating fan 62 ensures the circulation of hot air, providing a uniform temperature distribution environment within the heating chamber 6. In order to ensure constant temperature rise, thermocouples can be installed inside the heating chamber 6 for real-time temperature sensing and detection.

[0031] It also includes an industrial control cabinet, which is used to control and connect to the light source box 1 and the test box 4. The industrial control cabinet analyzes the acquired image information to obtain the spectral response of the CMOS device.

[0032] The above description is only a description of the preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the claims.

Claims

1. A CMOS image sensor spectral response testing device, characterized in that, include: A light source box (1) is provided, in which an integrating sphere light source (2) and a filter wheel (3) are installed; the light outlet of the integrating sphere light source (2) is connected to the light inlet of the test box (4), and the filter wheel (3) is arranged between the light outlet and the light inlet; The test chamber (4) has an inner cavity comprising an independently divided test chamber (5) and a heating chamber (6); the test chamber (5) is used to place the CMOS device under test, and the heating chamber (6) is used to provide different ambient temperatures for the test chamber (5).

2. The CMOS image sensor spectral response testing device as described in claim 1, characterized in that, Both the integrating sphere light source (2) and the filter wheel (3) are fixedly installed by an adjustable height bracket (7).

3. The CMOS image sensor spectral response testing device as described in claim 1, characterized in that, The filter wheel (3) includes: a housing (31), a switching turntable (32), a filter (33), and a switching motor (34); the switching motor (34) is installed on the outside of the housing (31), the output end of the switching motor (34) is provided with the switching turntable (32), the switching turntable (32) is located inside the housing (31), and a number of filters (33) of different wavelengths are installed circumferentially on the switching turntable (32).

4. The CMOS image sensor spectral response testing device as described in claim 3, characterized in that, The housing (31) also includes a light-transmitting hole (35) for the light emitted from the integrating sphere light source (2) to enter the test chamber (4) after being filtered by the filter (33).

5. The CMOS image sensor spectral response testing device as described in claim 1, characterized in that, The bottom of the test cavity (5) is provided with a tooling plate (51) for mounting the CMOS device under test.

6. The CMOS image sensor spectral response testing device as described in claim 1, characterized in that, The bottom of the heating chamber (6) is provided with an electric heating tube (61), and the top of the heating chamber (6) is also provided with a circulating fan (62). The air inlet of the circulating fan (62) is connected to the heating chamber (6), and the air outlet is connected to the test chamber (5). At the same time, the bottom of the partition plate between the heating chamber (6) and the test chamber (5) is also provided with a return air mesh (63).

7. A CMOS image sensor spectral response testing device as described in any one of claims 1 to 6, characterized in that, It also includes an industrial control cabinet for control connection with the light source box (1) and the test box (4).

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