Ultrasonic bubbling device and semiconductor process equipment

Abstract

The utility model relates to an ultrasonic bubbling device and semiconductor process equipment. The ultrasonic bubbling device comprises a cylinder part, an air inlet pipe, an air outlet pipe, at least one first ultrasonic part, at least one second ultrasonic part and at least one third ultrasonic part. The device has the advantages that the first ultrasonic part, the second ultrasonic part and the third ultrasonic part are arranged on the barrel part, on one hand, introduction of ultrasonic has no ultrasonic effect, the diameter of bubbles can be reduced, and the rising speed of the bubbles can be reduced; on the other hand, compared with a single-frequency ultrasonic field, the multi-frequency ultrasonic field has the advantages that the larger the sum of the combined ultrasonic frequencies is, the smaller the bubble diameter is, and the smaller the bubble speed is.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor epitaxial equipment technology, and in particular to an ultrasonic bubbling device and semiconductor process equipment. Background Technology

[0002] The bubbling method typically involves introducing precisely metered process gas or inert gas as a carrier gas into a liquid source, forming bubbles containing liquid source vapor, which are then output to the process equipment. Because the output of the liquid source is affected by the flow rate and carrying efficiency of the carrier gas, the linearity between the carrier gas flow rate and the liquid source's carrying capacity—that is, the carrying efficiency—determines the quality of the product.

[0003] Chinese utility model patent (202322575959.5) discloses a bubbling cleaning device, including a main body, a mounting frame fixedly connected to the top of one end of the main body, a cleaning chamber opened on the upper surface of the main body, a baffle movably connected to the inner cavity of the cleaning chamber, an auxiliary feeding device fixedly connected to the bottom of the mounting frame, a PLC controller on one side of the main body, an ultrasonic generator on each side of the inner cavity of the cleaning chamber, two cylinders fixedly connected to one end of the inner cavity of the cleaning chamber, the top of the cylinders fixedly connected to the bottom of the baffle, a number of conveying rollers movably connected to the bottom of the inner cavity of the cleaning chamber, and a fan on each side of the main body. By incorporating the auxiliary feeding device, this device can prevent fruits and vegetables from sticking to the discharge port after getting wet, allowing the fruits and vegetables to be discharged normally, reducing the intensity of manual labor, and preventing blockage of the discharge port.

[0004] However, the above technical solutions currently have the following drawbacks / deficiencies:

[0005] 1. Using single-frequency ultrasound results in less intense movement of the bubble wall compared to multi-frequency combined ultrasound, thus causing less mechanical disturbance.

[0006] 2. For structures with a screen-like structure, excessive bubble buildup in a short period of time can reduce the efficiency of the bubbling tank.

[0007] 3. The principle of bubble breaking relies on the screen structure and does not fully utilize the interaction force between gas and liquid.

[0008] 4. The bubble size distribution depends on the screen size, and the bubble diameter distribution is relatively uniform.

[0009] Currently, no effective solutions have been proposed for the problems of lower intensity of bubble wall movement and low bubbling efficiency in related technologies. Utility Model Content

[0010] The purpose of this invention is to address the shortcomings of existing technologies by providing an ultrasonic bubbling device and semiconductor processing equipment to solve problems such as lower intensity of bubble wall movement and low bubbling efficiency in related technologies.

[0011] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0012] In a first aspect, this utility model provides an ultrasonic bubbling device, comprising:

[0013] A cylindrical component having a sealed cavity;

[0014] An air intake pipe extends into the cavity from the bottom of the cylindrical body and is connected to an air source for supplying gas inflow.

[0015] An exhaust pipe extends from the top of the cylindrical component into the cavity and is connected to a downstream process device for supplying gas outflow.

[0016] At least one first ultrasonic component is disposed on the cylindrical component;

[0017] At least one second ultrasonic element is disposed on the cylindrical component and located above the first ultrasonic element;

[0018] At least one third ultrasonic component is disposed on the cylindrical component and located above the second ultrasonic component;

[0019] The combined action of the first, second, and third ultrasonic components creates an ultrasonic reverberation field inside the cavity, thereby reducing the bubble diameter and decreasing the bubble's rising speed.

[0020] In some embodiments, the frequency of the first ultrasonic element is 1~30 kHz, the frequency of the second ultrasonic element is 40~70 kHz, and the frequency of the third ultrasonic element is 80~100 kHz.

[0021] In some embodiments, the first ultrasonic element, the second ultrasonic element, and the third ultrasonic element are spaced apart from bottom to top along the cylindrical component.

[0022] In some embodiments, there are two of the first, second, and third ultrasonic components, and the first, second, and third ultrasonic components are arranged alternately from bottom to top.

[0023] In some of these embodiments, it also includes:

[0024] A sliding groove is formed on the outer side wall of the cylinder and is arranged along the length direction of the cylinder.

[0025] At least one first slider component, the first slider component being connected to the first ultrasonic component and slidably connected to the slide groove component, for slidingly connecting the first ultrasonic component to the cylindrical component;

[0026] At least one second slider component, the second slider component being connected to the second ultrasonic component and slidably connected to the slide groove component, for slidingly connecting the second ultrasonic component to the cylindrical component;

[0027] At least one third sliding member is provided, which is connected to the third ultrasonic component and slidably connected to the sliding groove component, for slidingly connecting the third ultrasonic component to the cylindrical component.

[0028] In some of these embodiments, it also includes:

[0029] At least one first fixing member is threadedly connected to the first slider member and is used to fix the position of the first slider member on the slide groove member;

[0030] At least one second fixing member is threadedly connected to the second slider member and is used to fix the position of the second slider member on the slide rail member;

[0031] At least one third fixing member is threadedly connected to the third slider member and is used to fix the position of the third slider member on the slide groove member.

[0032] In some of these embodiments, it also includes:

[0033] A plurality of blocking members are respectively connected to the bottom and top of the slide rail to prevent the first slider, the second slider, and the third slider from disengaging from the slide rail.

[0034] In some of these embodiments, it also includes:

[0035] A control unit is connected to the first ultrasonic component, the second ultrasonic component, and the third ultrasonic component respectively, and is used to perform stepless adjustment of the first ultrasonic component, the second ultrasonic component, and the third ultrasonic component.

[0036] In some of these embodiments, it also includes:

[0037] At least one temperature regulating element is disposed inside the cylindrical component and is used to regulate the temperature of the liquid source inside the cylindrical component.

[0038] Secondly, this utility model also provides a semiconductor process apparatus, comprising:

[0039] Gas supply equipment;

[0040] The ultrasonic bubbling device as described in the first aspect is connected to the gas supply device;

[0041] Downstream process equipment, which is connected to the ultrasonic bubbling device.

[0042] The present invention adopts the above technical solution and has the following technical effects compared with the prior art:

[0043] This invention relates to an ultrasonic bubbling device and semiconductor processing equipment. By incorporating a first, second, and third ultrasonic element on a cylindrical component, the introduction of ultrasound reduces the bubble diameter and its rising velocity compared to the absence of ultrasound. Furthermore, the advantage of a multi-frequency ultrasonic field over a single-frequency ultrasonic field lies in the fact that as the sum of the combined ultrasonic frequencies increases, the bubble diameter decreases, and the bubble velocity also decreases. This is because the effect of ultrasound on the bubble's rising velocity is primarily due to the change in sound pressure gradient during radial propagation, which applies a radial Bjerknes force to the moving bubble, prolonging its residence time in the liquid phase and thus slowing its rising velocity. In a multi-frequency ultrasonic field, the uniform sound intensity distribution amplifies this effect, leading to a higher breakup rate and suppressed fusion effect compared to a single-frequency ultrasonic field, resulting in a reduced bubble rising velocity. Attached Figure Description

[0044] Figure 1 This is a schematic diagram (a) of an ultrasonic bubbling device according to an embodiment of the present invention;

[0045] Figure 2 This is a schematic diagram (II) of an ultrasonic bubbling device according to an embodiment of the present invention.

[0046] The reference numerals in the attached drawings are as follows: 1. Cylinder body; 2. Inlet pipe; 3. Outlet pipe; 4. First ultrasonic component; 5. Second ultrasonic component; 6. Third ultrasonic component; 7. Temperature regulating component. Detailed Implementation

[0047] To make the objectives, technical solutions, and advantages of this application clearer, the application is described and illustrated below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative and not intended to limit the scope of this application. All other embodiments obtained by those skilled in the art based on the embodiments provided in this application without inventive effort are within the scope of protection of this application.

[0048] Obviously, the accompanying drawings described below are merely some examples or embodiments of this application. Those skilled in the art can apply this application to other similar scenarios based on these drawings without any inventive effort. Furthermore, it is understood that although the efforts made in this development process may be complex and lengthy, for those skilled in the art related to the content disclosed in this application, any changes to design, manufacturing, or production based on the technical content disclosed in this application are merely conventional technical means and should not be construed as insufficient disclosure of the content of this application.

[0049] In this application, the reference to "embodiment" means that a specific feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places in the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment that is mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described in this application may be combined with other embodiments without conflict.

[0050] Example 1

[0051] This embodiment relates to the ultrasonic bubbling device of this utility model.

[0052] An illustrative embodiment of this utility model, such as Figure 1 As shown, an ultrasonic bubbling device includes a cylindrical component 1, an inlet pipe 2, an outlet pipe 3, at least one first ultrasonic element 4, at least one second ultrasonic element 5, and at least one third ultrasonic element 6. The cylindrical component 1 has a sealed cavity; the inlet pipe 2 extends into the cavity from the bottom of the cylindrical component 1 and is connected to a gas source for gas inflow; the outlet pipe 3 extends into the cavity from the top of the cylindrical component 1 and is connected to a downstream process device for gas outflow; the first ultrasonic element 4 is disposed on the cylindrical component 1; the second ultrasonic element 5 is disposed on the cylindrical component 1 and located above the first ultrasonic element 4; the third ultrasonic element 6 is disposed on the cylindrical component 1 and located above the second ultrasonic element 5; the combined action of the first ultrasonic element 4, the second ultrasonic element 5, and the third ultrasonic element 6 forms an ultrasonic reverberation field inside the cavity, thereby reducing the bubble diameter and decreasing the bubble rising velocity.

[0053] Specifically, the cylindrical component 1 is arranged in a cuboid structure, and the interior of the cylindrical component 1 is a sealed rectangular cavity that can store liquid sources.

[0054] In some of these embodiments, the cylindrical component 1 includes, but is not limited to, a bubbling tank.

[0055] More specifically, the bottom and top of the cylindrical component 1 are respectively provided with an air inlet and an air outlet. The air inlet is located at the bottom of the cylindrical component 1 and at the center of the cylindrical component 1; the air outlet is located at the top of the cylindrical component 1 and at the center of the cylindrical component 1.

[0056] It should be noted that, for the diameter of the cylindrical component 1, in order to form a uniform and effective ultrasonic field inside the cylindrical component 1, the designed diameter should be an integer multiple of one-quarter of the length of the ultrasonic wave generated by the first ultrasonic component 4, so as to form a standing wave field.

[0057] Specifically, the first end of the air intake pipe 2 passes through the air inlet of the cylinder 1, and the second end of the air intake pipe 2 is connected to the air source.

[0058] In some of these embodiments, the intake manifold 2 includes, but is not limited to, a stainless steel pipe.

[0059] It should be noted that the first end and the second end of the intake pipe 2 are the two ends of its length direction, respectively.

[0060] Specifically, the first end of the vent pipe 3 passes through the vent of the cylinder 1, and the second end of the vent pipe 3 is connected to the downstream process unit.

[0061] In some of these embodiments, the vent fitting 3 includes, but is not limited to, a stainless steel pipe.

[0062] It should be noted that the first end and the second end of the air outlet pipe 3 are the two ends of its length direction, respectively.

[0063] Specifically, there are two first ultrasonic components 4. The two first ultrasonic components 4 are installed on the outer wall of the cylinder component 1 by means of welding, riveting or bolting, and the two first ultrasonic components 4 are arranged in a staggered manner on the cylinder component 1.

[0064] In some of these embodiments, the first ultrasonic element 4 includes, but is not limited to, an ultrasonic transducer.

[0065] In some embodiments, the number of first ultrasonic components 4 may also be 4, 6, etc., that is, the number of first ultrasonic components 4 can be set according to actual needs, and no further restrictions are imposed here.

[0066] It should be noted that the frequency of the first ultrasonic element 4 is 1~30 kHz; preferably, the frequency of the first ultrasonic element 4 is 20 kHz.

[0067] Specifically, there are two second ultrasonic components 5. The two second ultrasonic components 5 are installed on the outer wall of the cylinder component 1 by means of welding, riveting or bolting, and the two second ultrasonic components 5 are arranged in a staggered manner on the cylinder component 1.

[0068] In some of these embodiments, the second ultrasonic element 5 includes, but is not limited to, an ultrasonic transducer.

[0069] In some embodiments, the number of second ultrasonic components 5 may also be 4, 6, etc., that is, the number of second ultrasonic components 5 can be set according to actual needs, and no further restrictions are imposed here.

[0070] It should be noted that the frequency of the second ultrasonic element 5 is 40~70 kHz; preferably, the frequency of the second ultrasonic element 5 is 50 kHz.

[0071] Specifically, there are two third ultrasonic components 6. The two third ultrasonic components 6 are installed on the outer wall of the cylinder component 1 by means of welding, riveting or bolting, and the two third ultrasonic components 6 are arranged in a staggered manner on the cylinder component 1.

[0072] In some of these embodiments, the third ultrasonic element 6 includes, but is not limited to, an ultrasonic transducer.

[0073] In some embodiments, the number of third ultrasonic components 6 may also be 4, 6, etc., that is, the number of third ultrasonic components 6 can be set according to actual needs, and no further restrictions are imposed here.

[0074] It should be noted that the frequency of the third ultrasonic component 6 is 80~100 kHz; preferably, the frequency of the third ultrasonic component 6 is 100 kHz.

[0075] It should be noted that the first ultrasonic component 4, the second ultrasonic component 5, and the third ultrasonic component 6 are arranged at intervals from bottom to top along the cylindrical component 1; it should be noted that there are two of the first ultrasonic component 4, the second ultrasonic component 5, and the third ultrasonic component 6 are arranged alternately from bottom to top.

[0076] It should be noted that the distance between each pair of the first ultrasonic component 4, the second ultrasonic component 5, and the third ultrasonic component 6 is 40mm to 60mm; preferably, the distance between each pair of the first ultrasonic component 4, the second ultrasonic component 5, and the third ultrasonic component 6 is 50mm.

[0077] The usage method of this embodiment is as follows:

[0078] Gas enters the interior of cylinder 1 through inlet pipe 2, forming bubbles that move randomly upwards under the action of buoyancy. At the same time, the first ultrasonic component 4, the second ultrasonic component 5, and the third ultrasonic component 6 are activated, using their special energy forms to produce cavitation, turbulence, and energy-concentrating effects on the liquid, affecting the diameter and number of bubbles.

[0079] The advantages of this embodiment are that by setting the first, second, and third ultrasonic components on the cylindrical component, on the one hand, the introduction of ultrasound, compared to no ultrasound, can reduce the bubble diameter and decrease the bubble rising speed; on the other hand, the advantage of a multi-frequency ultrasonic field over a single-frequency ultrasonic field is that as the sum of the combined ultrasonic frequencies increases, the bubble diameter decreases and the bubble speed decreases. This is because the effect of ultrasound on the bubble rising speed is mainly due to the change in sound pressure gradient during the radial propagation of ultrasound waves, which applies a radial Bjerknes force to the moving bubble, prolonging the bubble's residence time in the liquid phase and thus slowing down the bubble's rising speed. In a multi-frequency ultrasonic field, the uniform sound intensity distribution of the ultrasonic field makes this effect more significant, resulting in a higher breakup rate and suppressed fusion effect compared to a single-frequency ultrasonic field, thus reducing the bubble rising speed.

[0080] Example 2

[0081] This embodiment is a modified embodiment of embodiment 1.

[0082] The ultrasonic bubbling device further includes a sliding groove, at least one first sliding block, at least one second sliding block, and at least one third sliding block. The sliding groove is formed on the outer wall of the cylindrical body and is arranged along the length of the cylindrical body 1. The first sliding block is connected to the first ultrasonic component 4 and is slidably connected to the sliding groove, for slidingly connecting the first ultrasonic component 4 to the cylindrical body 1. The second sliding block is connected to the second ultrasonic component 5 and is slidably connected to the sliding groove, for slidingly connecting the second ultrasonic component 5 to the cylindrical body 1. The third sliding block is connected to the third ultrasonic component 6 and is slidably connected to the sliding groove, for slidingly connecting the third ultrasonic component 6 to the cylindrical body 1.

[0083] Specifically, the cross-section of the slide rail is T-shaped, and the length direction of the slide rail is the same as the length direction of the cylindrical part 1, that is, the first slider, the second slider, and the third slider are respectively slidably connected to the slide rail.

[0084] It should be noted that there are two sliding grooves, and the two sliding grooves are respectively opened on the opposite side walls of the cylindrical part 1.

[0085] Specifically, the first slider has a T-shaped cross-section and is connected to the first ultrasonic component 4 by welding, riveting or bolting. The first slider is also slidably connected to the groove component.

[0086] In some embodiments, the first slider includes, but is not limited to, a perforated plate.

[0087] It should be noted that there are two first slider components, and the two first slider components are respectively connected to the corresponding first ultrasonic component 4 and respectively embedded in the two sliding groove components.

[0088] In some embodiments, the number of first sliders is matched with the number of first ultrasonic elements 4; it should be understood that the number of first sliders is the same as the number of first ultrasonic elements 4.

[0089] Specifically, the cross-section of the second slider is T-shaped, and the second slider is connected to the second ultrasonic component 5 by welding, riveting or bolting, and the second slider is slidably connected to the slide groove component.

[0090] In some embodiments, the second slider includes, but is not limited to, a perforated plate.

[0091] It should be noted that there are two second slider components, and the two second slider components are respectively connected to the corresponding second ultrasonic component 5 and respectively embedded in the two sliding groove components.

[0092] In some embodiments, the number of second sliders is adapted to the number of second ultrasonic elements 5; it should be understood that the number of second sliders is the same as the number of second ultrasonic elements 5.

[0093] Specifically, the cross-section of the third slider component is T-shaped. The third slider component is connected to the third ultrasonic component 6 by means of welding, riveting or bolting, and the third slider component is slidably connected to the sliding groove component.

[0094] In some embodiments, the third slider includes, but is not limited to, a perforated plate.

[0095] It should be noted that there are two third slider components, and the two third slider components are respectively connected to the corresponding third ultrasonic component 6 and respectively embedded in the two sliding groove components.

[0096] In some embodiments, the number of third sliders is adapted to the number of third ultrasonic elements 6; it should be understood that the number of third sliders is the same as the number of third ultrasonic elements 6.

[0097] The ultrasonic bubbling device further includes at least one first fixing member, at least one second fixing member, and at least one third fixing member. The first fixing member is threadedly connected to the first sliding member to fix its position on the sliding groove member; the second fixing member is threadedly connected to the second sliding member to fix its position on the sliding groove member; and the third fixing member is threadedly connected to the third sliding member to fix its position on the sliding groove member.

[0098] Specifically, the first fixing member is threadedly connected to the first sliding member, that is, the first fixing member can extend and retract on the first sliding member under the action of rotation, and the end of the first fixing member can abut against the bottom wall of the sliding groove, thereby realizing the fixing of the first ultrasonic member 4.

[0099] In some of these embodiments, the first fastener includes, but is not limited to, a threaded post.

[0100] It should be noted that there are two first fixing parts, and the two first fixing parts are respectively installed on the corresponding first sliding parts.

[0101] In some embodiments, the number of first fasteners is matched with the number of first ultrasonic components 4; it should be understood that the number of first fasteners is the same as the number of first ultrasonic components 4.

[0102] Specifically, the second fixing member is threadedly connected to the second sliding member, meaning that the second fixing member can extend and retract on the second sliding member under the action of rotation, and the end of the second fixing member can abut against the bottom wall of the sliding groove, thereby realizing the fixation of the second ultrasonic member 5.

[0103] In some of these embodiments, the second fastener includes, but is not limited to, a threaded post.

[0104] It should be noted that there are two second fasteners, and the two second fasteners are respectively installed on the corresponding second sliders.

[0105] In some embodiments, the number of second fasteners is adapted to the number of second ultrasonic components 5; it should be understood that the number of second fasteners is the same as the number of second ultrasonic components 5.

[0106] Specifically, the third fixing member is threadedly connected to the third sliding member, meaning that the third fixing member can extend and retract on the third sliding member under the action of rotation, and the end of the third fixing member can abut against the bottom wall of the sliding groove member, thereby realizing the fixation of the third ultrasonic member 6.

[0107] In some of these embodiments, the third fastener includes, but is not limited to, a threaded post.

[0108] It should be noted that there are two third fasteners, and the two third fasteners are respectively installed on the corresponding third slider.

[0109] In some embodiments, the number of third fasteners is adapted to the number of third ultrasonic components 6; it should be understood that the number of third fasteners is the same as the number of third ultrasonic components 6.

[0110] Furthermore, the ultrasonic bubbling device also includes several blocking components. These blocking components are respectively connected to the bottom and top of the sliding groove component to prevent the first sliding component, the second sliding component, and the third sliding component from disengaging from the sliding groove component.

[0111] Specifically, the blocking components are installed on the slide rail by means of welding, riveting or bolting, and there are two blocking components on a slide rail, with the two blocking components installed at the top and bottom of the slide rail respectively.

[0112] In some embodiments, the blocking element includes, but is not limited to, a square plate.

[0113] It should be noted that there are 4 blocking components, and the 4 blocking components are installed at the top and bottom of the corresponding slide components respectively.

[0114] In some embodiments, the number of blocking elements is matched with the number of chute elements; it should be understood that the number of blocking elements is twice the number of chute elements.

[0115] The usage method of this embodiment is as follows:

[0116] The operator can adjust the position of the first ultrasonic component 4, the second ultrasonic component 5, and the third ultrasonic component 6 on the cylinder component 1 by moving the first slider, the second slider, and the third slider, thereby adjusting the uniformity of the sound intensity distribution of the ultrasonic field.

[0117] The advantage of this embodiment is that by sliding the first ultrasonic component, the second ultrasonic component, and the third ultrasonic component onto the cylindrical component via the first slider component, the second slider component, and the third slider component, respectively, the positions of the first ultrasonic component, the second ultrasonic component, and the third ultrasonic component on the cylindrical component can be adjusted, thereby improving the applicability of the overall device.

[0118] Example 3

[0119] This embodiment is a modified embodiment of Embodiments 1-2.

[0120] The ultrasonic bubbling device also includes a control component. The control component is connected to the first ultrasonic component 4, the second ultrasonic component 5, and the third ultrasonic component 6, respectively, and is used to perform stepless adjustment of the first ultrasonic component 4, the second ultrasonic component 5, and the third ultrasonic component 6.

[0121] Specifically, the control unit is connected to the first ultrasonic component 4, the second ultrasonic component 5, and the third ultrasonic component 6 via wired or wireless connection, thereby enabling the control unit to adjust the first ultrasonic component 4, the second ultrasonic component 5, and the third ultrasonic component 6, achieving stepless adjustment of the first ultrasonic component 4, the second ultrasonic component 5, and the third ultrasonic component 6 from 0 to 100W.

[0122] In some of these embodiments, the controller includes, but is not limited to, an MCU, a Raspberry Pi, or a microcontroller.

[0123] It should be noted that the control unit can control the first ultrasonic component 4, the second ultrasonic component 5, and the third ultrasonic component 6 to work individually, or it can activate any number of them. This allows the first ultrasonic component 4, the second ultrasonic component 5, and the third ultrasonic component 6 to be not limited to a specific frequency, but to have more possible frequency combinations.

[0124] Furthermore, the ultrasonic bubbling device also includes at least one temperature regulating element 7. The temperature regulating element 7 is disposed inside the cylindrical component 1 and is used to regulate the temperature of the liquid source inside the cylindrical component 1.

[0125] Specifically, the temperature regulating component 7 is installed inside the cylinder component 1 by means of welding, riveting or threaded connection, and the temperature regulating component 7 can maintain the temperature of the liquid source inside the cylinder component 1.

[0126] In some of these embodiments, the temperature regulator 7 includes, but is not limited to, a thermostat.

[0127] It should be noted that the introduction of ultrasound will cause a certain temperature rise in the liquid medium in the cylinder 1. The addition of temperature regulating component 7 will enable it to maintain the required temperature and reduce the impact of temperature rise on bubbling efficiency.

[0128] The usage method and advantages of this embodiment are the same as those of Embodiment 1, and will not be repeated here.

[0129] Example 4

[0130] This embodiment relates to semiconductor process equipment of this utility model.

[0131] A semiconductor process apparatus includes a gas supply device, an ultrasonic bubbling device as described in Examples 1 to 3, and a downstream process apparatus. The ultrasonic bubbling device is connected to the gas supply device; the downstream process apparatus is connected to the ultrasonic bubbling device.

[0132] It should be noted that the gas supply device is connected to the air inlet pipe 2 of the ultrasonic bubbling device; the downstream process device is connected to the air outlet pipe 3 of the ultrasonic bubbling device.

[0133] The usage method and advantages of this embodiment are the same as those of Embodiment 1, and will not be repeated here.

[0134] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0135] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. An ultrasonic bubbling device, characterized in that, include: A cylindrical component having a sealed cavity; An air intake pipe extends into the cavity from the bottom of the cylindrical body and is connected to an air source for supplying gas inflow. An exhaust pipe extends from the top of the cylindrical component into the cavity and is connected to a downstream process device for supplying gas outflow. At least one first ultrasonic component is disposed on the cylindrical component; At least one second ultrasonic element is disposed on the cylindrical component and located above the first ultrasonic element; At least one third ultrasonic component is disposed on the cylindrical component and located above the second ultrasonic component; The combined action of the first, second, and third ultrasonic components creates an ultrasonic reverberation field inside the cavity, thereby reducing the bubble diameter and decreasing the bubble's rising speed.

2. The ultrasonic bubbling device according to claim 1, characterized in that, The frequency of the first ultrasonic component is 1 to 30 kHz, the frequency of the second ultrasonic component is 40 to 70 kHz, and the frequency of the third ultrasonic component is 80 to 100 kHz.

3. The ultrasonic bubbling device according to claim 1, characterized in that, The first ultrasonic component, the second ultrasonic component, and the third ultrasonic component are arranged at intervals from bottom to top along the cylindrical component.

4. The ultrasonic bubbling device according to claim 1, characterized in that, The number of the first ultrasonic component, the second ultrasonic component, and the third ultrasonic component is two, and the first ultrasonic component, the second ultrasonic component, and the third ultrasonic component are arranged alternately from bottom to top.

5. The ultrasonic bubbling device according to claim 1, characterized in that, Also includes: A sliding groove is formed on the outer side wall of the cylinder and is arranged along the length direction of the cylinder. At least one first slider component, the first slider component being connected to the first ultrasonic component and slidably connected to the slide groove component, for slidingly connecting the first ultrasonic component to the cylindrical component; At least one second slider component, the second slider component being connected to the second ultrasonic component and slidably connected to the slide groove component, for slidingly connecting the second ultrasonic component to the cylindrical component; At least one third sliding member is provided, which is connected to the third ultrasonic component and slidably connected to the sliding groove component, for slidingly connecting the third ultrasonic component to the cylindrical component.

6. The ultrasonic bubbling device according to claim 5, characterized in that, Also includes: At least one first fixing member is threadedly connected to the first slider member and is used to fix the position of the first slider member on the slide groove member; At least one second fixing member is threadedly connected to the second slider member and is used to fix the position of the second slider member on the slide rail member; At least one third fixing member is threadedly connected to the third slider member and is used to fix the position of the third slider member on the slide groove member.

7. The ultrasonic bubbling device according to claim 5, characterized in that, Also includes: A plurality of blocking members are respectively connected to the bottom and top of the slide rail to prevent the first slider, the second slider, and the third slider from disengaging from the slide rail.

8. The ultrasonic bubbling device according to claim 1, characterized in that, Also includes: A control unit is connected to the first ultrasonic component, the second ultrasonic component, and the third ultrasonic component respectively, and is used to perform stepless adjustment of the first ultrasonic component, the second ultrasonic component, and the third ultrasonic component.

9. The ultrasonic bubbling device according to claim 1, characterized in that, Also includes: At least one temperature regulating element is disposed inside the cylindrical component and is used to regulate the temperature of the liquid source inside the cylindrical component.

10. A semiconductor process apparatus, characterized in that, include: Gas supply equipment; The ultrasonic bubbling device according to any one of claims 1 to 9, wherein the ultrasonic bubbling device is connected to the gas supply device; Downstream process equipment, which is connected to the ultrasonic bubbling device.

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