Supporting structure for cleaning quartz boat

Abstract

The utility model relates to the technical field of semiconductor cleaning equipment, in particular to a supporting structure for cleaning a quartz boat. The utility model provides a supporting structure for cleaning a quartz boat, which can enable the limiting assembly to selectively lock the rotation angle of the supporting assembly by arranging the mounting plate assembly, the lifting rod, the rectangular frame, the supporting assembly, the limiting assembly and the driving assembly, so as to switch the bucket-shaped state or the arch-shaped state of the supporting assembly. The supporting assembly can meet the supporting requirements of the two different types of quartz workpieces including the circular tube quartz workpiece and the semicircular tube quartz workpiece, the horizontal cleaning advantage of the circular tube quartz workpiece is reserved, meanwhile, the horizontal cleaning requirement of the semicircular tube quartz workpiece is met by switching the arch state of the supporting assembly, and the cleaning efficiency of the circular tube quartz workpiece is improved. And the semicircular tube quartz workpiece is soaked and cleaned in an inverted buckling mode, the draining difficulty of the semicircular tube quartz workpiece is low, the possibility of cleaning dead corners and dirt accumulation is reduced, automatic operation is facilitated, and efficiency is improved.

Description

A support structure for cleaning quartz boats Technical Field

[0001] This utility model relates to the field of semiconductor cleaning equipment technology, and in particular to a support structure for cleaning quartz boats. Background Technology

[0002] Silicon wafer diffusion is a core technology that uses high temperatures to allow impurity atoms to penetrate the silicon wafer, altering its electrical properties. The process involves placing the silicon wafer onto a quartz boat, then placing the boat and wafer together into a quartz tube and then into a high-temperature diffusion furnace. A certain amount of gas containing a diffusion source is then introduced into the furnace tube. Under high-temperature conditions, the diffusion source gas reacts chemically with the silicon wafer, completing the diffusion process. Since a certain amount of diffused particles remain on the surface of the quartz boat after each diffusion process, and the quartz boat is in direct contact with the silicon wafer, the cleanliness of the quartz boat surface directly affects the quality of the entire diffusion process.

[0003] Existing quartz boat cleaning methods mostly involve immersing the quartz boat in a cleaning tank. The main structure includes the cleaning tank, a robotic arm for moving the quartz boat, a control system, and other auxiliary systems. However, this structure results in static immersion and poor cleaning efficiency. Therefore, rollers are installed at the bottom of the cleaning tank. The rollers rotate the quartz boat relative to them, improving cleaning efficiency. However, the shape of the quartz boat is not limited to a round tube; it also includes a semi-circular tube. Existing round tube quartz boats are mostly cleaned horizontally to reduce the cleaning and support difficulties of vertical cleaning. Horizontal cleaning also takes up less space and has higher cleaning efficiency. Semi-circular tube quartz boats, on the other hand, are mostly cleaned vertically, which improves cleaning efficiency, reduces drainage difficulty, and effectively avoids the water accumulation problem associated with horizontal cleaning. Therefore, different cleaning equipment is often used for each type of cleaning.

[0004] For example, Chinese invention patent CN113560265B, published on November 1, 2022, discloses a horizontal quartz boat cleaning device. The device includes a cleaning tank, a drive unit, and an electrical control unit. The electrical control unit is fixed to the side of the cleaning tank, and the drive unit is fixed to the top. The bottom of the cleaning tank's inner cavity has a water washing tank installation chamber and an acid pickling tank installation chamber arranged side-by-side. A water washing tank is installed in the water washing tank installation chamber, and an acid pickling tank is installed in the acid pickling tank installation chamber. A robotic arm carrier capable of switching between the water washing tank and the acid pickling tank is installed inside both the cleaning tank and the drive unit. Both the water washing tank and the acid pickling tank are open slots with their openings located on the upper side. Two rows of support seats are symmetrically fixed to the inner side of the bottom plate of the open slot. Each row of support seats rotatably supports a support shaft, and support rollers for providing rolling support to the quartz boat workpiece placed inside are fixed on the shaft.

[0005] The horizontal quartz boat cleaning equipment in this invention patent has the following general structural principle: After the quartz boat workpiece is hung on the lifting assembly, the movable gantry moves along the X-axis to the top of the corresponding tank, causing the Y-axis A side to move downward, thus tilting the quartz boat workpiece; the Y-axis moves downward on both sides, stopping at the position reached by the A side, while the B side continues to move, repeating until both sides reach the designated position, at which point the quartz boat workpiece is completely immersed in the solution; the rotary motor is turned on to drive the support rollers to rotate, allowing the quartz boat workpiece to roll in the corresponding tank, and the liquid circulation system is activated to ensure full contact between the quartz boat workpiece and the solution; after cleaning, the Y-axis B side moves upward a certain distance, tilting the quartz boat workpiece; both sides of the Y-axis move upward slowly at the same time, stopping at the position reached by the B side, while the A side continues to move, repeating until the designated suspended position is reached, at which point the quartz boat workpiece is completely exposed.

[0006] However, in actual use, the horizontal quartz boat cleaning equipment still has at least the following shortcomings, which are the technical problems that this utility model aims to solve.

[0007] The lower end of its lifting assembly contacts the outer wall of the quartz workpiece. When the quartz boat has a semi-circular tube structure, it is necessary to avoid the support rollers from contacting its bottom and causing collisions. At the same time, when the semi-circular tube quartz boat is placed with its opening facing upwards, impurities are easily accumulated on the inner wall, increasing the difficulty of draining water and affecting the cleaning effect.

[0008] Therefore, in summary, there is an urgent need for a new type of support structure for cleaning quartz boats that is suitable for round or semi-circular quartz workpieces and effectively reduces the adverse effects of horizontal cleaning of semi-circular quartz workpieces. Summary of the Invention

[0009] This utility model provides a support structure for cleaning quartz boats. It comprises an installation plate assembly, a lifting rod, a rectangular frame, a support assembly, a limiting assembly, and a driving assembly. The limiting assembly selectively locks the rotation angle of the support assembly, switching between a bucket-shaped or arched state. This allows the support assembly to meet the support requirements of both round and semi-circular quartz workpieces. It retains the advantages of horizontal cleaning for round quartz workpieces while also meeting the horizontal cleaning needs of semi-circular quartz workpieces by switching the arched state of the support assembly. Furthermore, the inverted immersion cleaning method for semi-circular quartz workpieces reduces the difficulty of draining water, minimizes cleaning dead zones and dirt accumulation, facilitates automated operation, and improves efficiency.

[0010] The technical solution adopted by this utility model to solve the above problems is: a support structure for cleaning quartz boats, including a mounting plate assembly, a lifting rod inserted into the mounting plate assembly and extending into the cleaning tank, a rectangular frame disposed at the lower end of the lifting rod for accommodating quartz workpieces, a plurality of support components rotatably disposed on the rectangular frame and spaced apart for supporting the bottom of the quartz workpieces, a limiting component disposed on the rectangular frame for locking the rotation angle of the support components, and a driving component disposed on the mounting plate assembly for driving the lifting rod to rise and fall; the limiting component enables the support components to switch between a bucket shape and an arch shape, so as to be suitable for round tube quartz workpieces and semi-circular tube quartz workpieces respectively.

[0011] A further preferred technical solution is that the support assembly includes a support portion, two extension plates disposed at both ends of the support portion, and a rotating rod disposed on the extension plates and used to insert the rectangular frame.

[0012] A further preferred technical solution is that the limiting component includes a rotating handle disposed on the rotating rod and used to flip the support part, an insertion hole disposed on the rotating handle, a limiting hole disposed on the rectangular frame and corresponding to the insertion hole, and a pin disposed in the insertion hole and used to be inserted into the limiting hole to maintain the flipped state of the support part.

[0013] A further preferred technical solution includes a transmission assembly disposed on the rectangular frame and used to connect adjacent rotating rods so that the rotating rods rotate synchronously.

[0014] A further preferred technical solution is that the transmission assembly includes gears disposed on the rotating rod and transmission chains disposed on two adjacent gears.

[0015] A further preferred technical solution is that the limiting component further includes a stop block disposed on the rectangular frame and used to limit the rotation degree of the rotating handle.

[0016] A further preferred technical solution is that the support portion includes two first support plates respectively disposed on the extension plate and inclined relative to each other, for supporting the circular tube quartz workpiece, and a second support plate connecting the two first support plates and, after being flipped, for supporting the inner wall of the semi-circular tube quartz assembly.

[0017] A further preferred technical solution is that the support portion includes an arc-shaped support plate disposed between the two extension plates and used to support the bottom surface of the round quartz workpiece or the inner wall of the semi-circular quartz workpiece.

[0018] A further preferred technical solution is that the mounting plate assembly includes a side plate disposed on the frame and used for mounting the drive assembly, a perforated bottom plate disposed on the side plate and used for inserting the lifting rod, an i-shaped protective side plate disposed on the perforated bottom plate and enclosing a space for lifting the lifting rod to move up and down, and a top plate disposed at the upper end of the side plate and the i-shaped protective side plate.

[0019] A further preferred technical solution is that the drive assembly includes a rotary motor, a motor mounting base disposed on the side plate for mounting the rotary motor, a screw rotatably disposed on the perforated bottom plate and the top plate, a lifting block sleeved on the screw for connecting the lifting rod, a transmission belt disposed at the output end of the rotary motor for driving the screw to rotate, a guide rod rotatably disposed on the perforated bottom plate and the top plate, a sliding block sleeved on the guide rod, and a connector disposed on the sliding block for connecting the lifting block.

[0020] The beneficial effects of this utility model are: 1. By switching the bucket-shaped / arch-shaped state of the support component through the limiting component, it can adapt to different types of quartz workpieces, which is highly practical, ingenious in structure, and improves cleaning efficiency; 2. It retains the advantages of horizontal cleaning and effectively reduces the problems of impurity accumulation and water leakage when cleaning semi-circular tube quartz workpieces horizontally. At the same time, the cleaning difficulty of spraying with the spray gun is low in this state, and it is easier to integrate into the automated process; 3. The transmission component improves the linkage of the support component, and the switching of the support component is more convenient. Attached Figure Description

[0021] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 is a perspective view of this utility model.

[0023] Figure 2 is a side view of the present invention.

[0024] Figure 3 is a rear view structural diagram of this utility model.

[0025] Figure 4 is a partial structural schematic diagram of the supporting circular tube quartz workpiece in this utility model from a side view angle.

[0026] Figure 5 is a partial structural schematic diagram of the semi-circular quartz workpiece supported by the present invention from a side view angle.

[0027] Figure 6 is a magnified view of part A in Figure 4.

[0028] Figure 7 is a schematic diagram of the position of the forward viewing angle lower limit component in this utility model.

[0029] Figure 8 is a schematic diagram of the location of this utility model.

[0030] The meanings of the markings in the diagram are as follows:

[0031] a) Cleaning tank; b) Quartz workpiece; c) Frame; d) Roller assembly;

[0032] Round quartz workpiece b1, semi-circular quartz workpiece b2;

[0033] Mounting plate assembly 1, lifting rod 2, rectangular frame 3, support assembly 4, limiting assembly 5, drive assembly 6, transmission assembly 7;

[0034] Side plate 11, bottom plate with holes 12, C-shaped protective side plate 13, top plate 14, frame strip 31, frame plate 32, support part 41, extension plate 42, rotating rod 43, rotating handle 51, insertion hole 52, limit hole 53, pin 54, stop block 55, rotary motor 61, motor mounting base 62, screw 63, lifting block 64, transmission belt 65, guide rod 66, sliding block 67, connecting piece 68, gear 71, transmission chain 72;

[0035] First support plate 411, second support plate 412, arc-shaped support plate 413. Detailed Implementation

[0036] The embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The following description is only a preferred embodiment of the present invention and is not intended to limit the scope of the present invention.

[0037] The directional terms such as up, down, left, right, front, back, front, back, top, bottom, etc., mentioned or possibly mentioned in this specification are defined relative to the structure shown in the accompanying drawings. The terms "inner" and "outer" refer to the direction toward or away from the geometric center of a specific component, respectively. These are relative concepts and may therefore vary depending on their location and usage. Therefore, these or other directional terms should not be interpreted as restrictive terms.

[0038] As shown in Figures 1-8, a support structure for cleaning a quartz boat includes a mounting plate assembly 1, a lifting rod 2 inserted into the mounting plate assembly 1 and extending into the cleaning tank a, a rectangular frame 3 located at the lower end of the lifting rod 2 for accommodating a quartz workpiece b, a plurality of support components 4 rotatably mounted on the rectangular frame 3 and spaced apart for supporting the bottom of the quartz workpiece b, a limiting component 5 located on the rectangular frame 3 for locking the rotation angle of the support components 4, and a drive component 6 located on the mounting plate assembly 1 for driving the lifting rod 2 to rise and fall; the limiting component 5 enables the support components 4 to switch between a bucket shape and an arch shape to be suitable for a round tube quartz workpiece b1 and a semi-circular tube quartz workpiece b2, respectively.

[0039] In this embodiment, the quartz boat cleaning support structure is mounted on the frame c and serves as a support component for moving the quartz workpiece b into or out of the cleaning tank a. The cleaning tank a is an upward-facing open tank mounted on the frame c, containing a solvent liquid for soaking and cleaning the quartz workpiece b. The bottom of the cleaning tank a is equipped with the roller assembly d. The roller assembly d rotates the quartz workpiece b in contact with it, thereby improving the cleaning efficiency and effect. The quartz workpiece b includes a cylindrical quartz workpiece b1 and a semi-cylindrical quartz workpiece b2. The quartz boat cleaning support structure can meet the support requirements for cleaning either the cylindrical quartz workpiece b1 or the semi-cylindrical quartz workpiece b2, demonstrating high practicality.

[0040] Furthermore, the mounting plate assembly 1 is fixed to the frame c, and the lifting rod 2 is inserted into the mounting plate assembly 1 and extends into the cleaning tank a. A rectangular frame 3 is located at the lower end of the lifting rod 2; preferably, two lifting rods 2 are provided and used to fix one side of the rectangular frame 3. The rectangular frame 3 includes two frame strips 31 and two frame plates 32. The two frame strips 31 are arranged opposite each other and parallel to the length direction of the quartz workpiece b. The two frame plates 32 are arranged opposite each other and used to connect the two frame strips 31. The frame strips 31 and the frame plates 32 enclose a space for accommodating the quartz workpiece b. A support assembly 4 is rotatably disposed between the two frame strips 31 and used to support the quartz workpiece b. Several support assemblies 4 are spaced apart to stably support the quartz workpiece b. The bucket shape presents a trapezoidal shape that is wider at the top and narrower at the bottom, or has the characteristics of an inverted isosceles triangle, with an open top and an overall shape that is larger at the top and smaller at the bottom. The arch shape presents a structure that is higher in the middle and lower on both sides. The rotation of the support component 4 can realize the transformation between the arch and bucket shapes. The limiting component 5 is used to lock the rotation angle of the support component 4 to switch and lock the bucket / arch shape of the support component 4, thereby meeting the usage requirements of the round tube quartz workpiece b1 and the semi-circular tube quartz workpiece b2. The driving component 6 drives the lifting rod 2 to rise and fall, thereby driving the quartz workpiece b placed on the support component 4 to rise and fall, so as to meet the soaking and removal requirements of the quartz workpiece b. Preferably, the lifting rod 2 and the rectangular frame 3 are hollow structures to reduce the difficulty of raising and lowering the driving component 6.

[0041] Finally, when the cylindrical quartz workpiece b1 needs to be cleaned, as shown in Figure 4, the limiting component 5 locks the supporting component 4 into a bucket-shaped state. The cylindrical quartz workpiece b1 is placed on the supporting component 4, and the driving component 6 is driven so that the cylindrical quartz workpiece b1 is immersed in the cleaning tank a. The rollers of the supporting component 4 and the roller assembly d are misaligned. After the cylindrical quartz workpiece b1 is in place, the driving component 6 is turned off and the roller assembly d is started, so that the roller assembly d drives the cylindrical quartz workpiece b1 to roll. The supporting component 4 can limit the cylindrical quartz workpiece b1 to prevent it from rolling excessively and colliding with other structures. After soaking, the roller assembly d is turned off and the driving component 6 is started to raise the cylindrical quartz workpiece b1 to the appropriate position. Then, the outer wall of the cylindrical quartz workpiece b1 is further sprayed with a spray gun. When the semi-circular quartz workpiece b2 needs to be cleaned, the locking of the limiting component 5 is released, and the supporting component 4 is flipped into an arch shape, as shown in Figure 5. Then, the limiting component 5 is used to lock the supporting component 4 to maintain the arch shape of the supporting component 4. The semi-circular quartz workpiece b2 is placed upside down on the supporting component 4, and the driving component 6 is driven to move the semi-circular quartz workpiece b2 into the cleaning tank a for soaking. After soaking, the driving component 6 is driven to move the semi-circular quartz workpiece b2 out of the cleaning tank a, and the outer wall of the circular quartz workpiece b1 is further sprayed with a spray gun. The support structure for cleaning the quartz boat meets the support requirements for the round quartz workpiece b1 and the semi-circular quartz workpiece b2. While retaining the advantages of horizontal cleaning, when cleaning the semi-circular quartz workpiece b2, it also has the drainage advantages of vertical cleaning, reducing chemical residue and water accumulation problems, and improving cleaning efficiency and equipment practicality.

[0042] The support assembly 4 includes a support portion 41, two extension plates 42 disposed at both ends of the support portion 41, and a rotating rod 43 disposed on the extension plates 42 and used to insert the rectangular frame 3.

[0043] In this embodiment, the support portion 41 supports the quartz workpiece b, the extension plate 42 is located at both ends of the support portion 41, and the rotating rod 43 allows the support portion 41 to rotate relative to the rectangular frame 3. Preferably, the rotating rod 43 is disposed on the frame strip 31. The support portion 41 is stably flipped on the frame strip 31, and the flipped state of the support portion 41 is locked by the limiting component 5. The support portion 41 includes an upper surface and a lower surface. When the support portion 41 is bucket-shaped, the upper surface of the support portion 41 supports the outer wall of the cylindrical quartz workpiece b1; when the support portion 41 is arched, the semi-circular quartz workpiece b2 is inverted, the lower surface of the support portion 41 supports the inner wall of the semi-circular quartz workpiece b2, and the extension plate 42 can support the open end face of the semi-circular quartz workpiece b2.

[0044] The limiting component 5 includes a rotating handle 51 disposed on the rotating rod 43 and used to flip the support part 41, an insertion hole 52 disposed on the rotating handle 51, a limiting hole 53 disposed on the rectangular frame 3 and corresponding to the insertion hole 52, and a pin 54 disposed in the insertion hole 52 and used to be inserted into the limiting hole 53 to maintain the flipped state of the support part 41.

[0045] In this embodiment, the rotating rod 43 passes through the rectangular frame 3 and protrudes from the outer surface of the rectangular frame 3. The rotating handle 51 is disposed on the rotating rod 43, and the support part 41 can be flipped by turning the rotating handle 51. The insertion hole 52 is provided near the end of the rotating handle 51, and the limiting hole 53 is disposed on the rectangular frame 3 and located on the rotation path of the insertion hole 52. Preferably, there are two limiting holes 53, located at the upper and lower ends of the rotating rod 43 and corresponding to the inserted hole 52 after rotation. The pin 54 is inserted into the insertion hole 52 and the corresponding limiting hole 53 to fix the rotating handle 51, thereby locking the flipped state of the support part 41 and making the support part 41 stably maintain a bucket / arch shape. Preferably, the limiting component 5 is disposed on the frame strip 31 and near the side area where human operation is performed.

[0046] It also includes a transmission assembly 7 disposed on the rectangular frame 3 and used to connect adjacent rotating rods 43 so that the rotating rods 43 rotate synchronously.

[0047] In this embodiment, at least two support components 4 are provided. When it is necessary to change the flip state of the support components 4, the limiting components 5 provided on each support component 4 must be adjusted one by one, which is highly complicated. Therefore, the transmission component 7 links adjacent support components 4 together. By turning one of the rotating handles 51 and inserting the pin 54 to lock it, the flip state of all support components 4 can be changed and locked, which is highly convenient to operate.

[0048] The transmission assembly 7 includes a gear 71 disposed on the rotating rod 43 and a transmission chain 72 disposed on two adjacent gears 71.

[0049] In this embodiment, the rotating rod 43 is provided with the gear 71, and the transmission chain 72 is used to connect adjacent gears 71 so that adjacent rotating rods 43 can rotate synchronously. When there are only two support components 4, two gears 71 and one transmission chain 72 are sufficient to meet the requirement of synchronous rotation. When there are two or more support components 4, as shown in Figure 7, the two outer rotating rods 43 are provided with one gear 71, and the middle rotating rod 43 is provided with two gears 71. The two adjacent gears 71 are connected by the transmission chain 72. When connecting, it should be noted that the two meshing gears 71 are on the same plane. Preferably, when setting the transmission component 7, the locking of the pin 54 on the rotating handle 51 can be applied to only one to improve the efficiency of synchronous rotation. On this basis, the convenience of rotating the rotating handle 51 closest to the outermost part is higher.

[0050] The limiting component 5 also includes a stop 55 disposed on the rectangular frame 3 and used to limit the rotation of the rotating handle 51.

[0051] In this embodiment, the stop 55 is used to limit the rotation angle of the rotating handle 51. After the rotating handle 51 is rotated, the insertion hole 52 and the corresponding limiting hole 53 need to be aligned before the pin 54 is inserted for locking. This requires visual observation. According to the rotation angle requirement, the stop 55 is set in advance. When the rotating handle 51 rotates and contacts the stop 55, it means that the insertion hole 52 and the corresponding limiting hole 53 are aligned, making it more convenient to use.

[0052] The support portion 41 includes two first support plates 411 respectively disposed on the extension plate 42 and inclined relative to each other, for supporting the circular tube quartz workpiece b1, and a second support plate 412 connecting the two first support plates 411 and used to support the inner wall of the semi-circular tube quartz assembly b2 after being flipped.

[0053] In this embodiment, each of the extension plates 42 is provided with a first support plate 411. The two first support plates 411 are inclined to each other, and the distance between their upper ends is greater than the distance between their lower ends, forming an inverted octagon shape with a larger upper end and a smaller lower end. When the support part 41 presents a bucket shape with a larger upper end and a smaller lower end, the outer wall of the cylindrical quartz workpiece b1 near its lower end is in tangential contact with the upper surface of the two support parts 41, thereby satisfying the support effect for the cylindrical quartz workpiece b1. There is a certain gap between the lower ends of the two first support plates 411. The second support plate 412 is used to connect the two first support plates 411. The first support plate 411 and the second support plate 412 are integrally formed. When the support part 41 is flipped into an arch shape, the two connection points of the first support plate 411 and the second support plate 412 can stably support the inner wall of the semi-circular quartz assembly b2, thereby achieving the support effect for the semi-circular quartz assembly b2.

[0054] The support portion 41 includes an arc-shaped support plate 413 disposed between the two extension plates 42 and used to support the bottom surface of the circular quartz workpiece b1 or the inner wall of the semi-circular quartz workpiece b2.

[0055] In this embodiment, the arc-shaped support plate 413 is fitted to the inner wall of the round tube quartz workpiece b1 or the semi-circular tube quartz workpiece b2, so that the arc-shaped support plate 413 can stably support the round tube quartz workpiece b1 or the semi-circular tube quartz workpiece b2, and the possibility of the quartz workpiece b being detached by external force is small. The arc-shaped support plate 413 provides good support for the quartz workpieces b that are in contact with each other. The arc-shaped support plate 413 can support the round quartz workpiece b1 that is smaller than its own radius. When the radius of the round quartz workpiece b1 is larger than the radius of the arc-shaped support plate 413, the limiting effect of the arc-shaped support plate 413 is not good, and the round quartz workpiece b1 is easy to detach during rolling. The arc-shaped support plate 413 can support the semi-circular quartz workpiece b2 that is larger than its own radius. When the radius of the semi-circular quartz workpiece b2 is smaller than the radius of the arc-shaped support plate 413, the arc-shaped support plate 413 contacts the open end of the semi-circular quartz workpiece b2, and the contact stability is poor. The semi-circular quartz workpiece b2 is easy to roll off during lifting.

[0056] The mounting plate assembly 1 includes a side plate 11 disposed on the frame c and used for mounting the drive assembly 6, a perforated bottom plate 12 disposed on the side plate 11 and used for inserting the lifting rod 2, an inverted protective side plate 13 disposed on the perforated bottom plate 12 and enclosing a space for the lifting rod 2 to rise and fall, and a top plate 14 disposed at the upper end of the side plate 11 and the inverted protective side plate 13.

[0057] In this embodiment, the mounting plate assembly 1 is a hollow structure and can be fixed to the frame c by welding or screwing. The side plate 11 is mounted on the frame c, and the top plate 14 and the perforated bottom plate 12 are located at the upper and lower ends of the side plate 11. The perforated bottom plate 12 is provided with mounting holes for inserting the lifting rod 2. The U-shaped protective side plate 13 reinforces and supports the side plate 11, the perforated bottom plate 12, and the top plate 14, and encloses and protects the structure located between the top plate 14 and the perforated bottom plate 12, forming a space for the lifting rod 2 to rise and fall.

[0058] The drive assembly 6 includes a rotary motor 61, a motor mounting base 62 mounted on the side plate 11 for mounting the rotary motor 61, a screw 63 rotatably mounted on the perforated bottom plate 12 and the top plate 14, a lifting block 64 sleeved on the screw 63 for connecting the lifting rod 2, a transmission belt 65 mounted on the output end of the rotary motor 61 for driving the screw 63 to rotate, a guide rod 66 rotatably mounted on the perforated bottom plate 12 and the top plate 14, a sliding block 67 sleeved on the guide rod 66, and a connector 68 mounted on the sliding block 67 for connecting the lifting block 64.

[0059] In this embodiment, the rotary motor 61 is mounted on the side plate 11, and the motor mounting base 62 fixes the rotary motor 61 to the side plate 11. The screw 63 is rotatably mounted on the perforated bottom plate 12 and the top plate 14. The lifting block 64 has a thread that connects to the screw 63. The transmission belt 65 transmits the power output from the rotary motor 61 to the screw 63, causing the screw 63 to rotate. The guide rod 66 is rotatably mounted on the perforated bottom plate 12 and the top plate 14 and is parallel to the screw 63. The sliding block 67 is sleeved on the guide rod 66, and the sliding block 67 and the lifting block 64 are fixedly connected by the connecting member 68, thus restricting the rotational freedom of the lifting block 64. When the rotary motor 61 is started, the transmission belt 65 drives the screw 63 to rotate. Because the lifting block 64 is constrained by the sliding block 67 on the guide rod 66, the rotational motion of the screw 63 is converted into the lifting motion of the lifting block 64, thereby causing the lifting rod 2 to rise and fall accordingly. Preferably, two drive components 6 are provided to stably lift / release the lifting rod 2.

[0060] It should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and are not intended to limit it. Although this utility model has been described in detail with reference to preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions can be made to the technical solution of this utility model without departing from the spirit and scope of the technical solution of this utility model, and all such modifications or substitutions should be covered within the scope of this utility model.

Claims

1. A support structure for cleaning quartz boats, characterized in that, The assembly includes a mounting plate assembly (1), a lifting rod (2) inserted into the mounting plate assembly (1) and extending into the cleaning tank (a), a rectangular frame (3) located at the lower end of the lifting rod (2) and used to accommodate a quartz workpiece (b), several support components (4) rotatably mounted on the rectangular frame (3) and spaced apart to support the bottom of the quartz workpiece (b), a limiting component (5) mounted on the rectangular frame (3) and used to lock the rotation angle of the support components (4), and a drive component (6) mounted on the mounting plate assembly (1) and used to drive the lifting rod (2) to rise and fall; the limiting component (5) enables the support components (4) to switch between a bucket shape and an arch shape to be suitable for round tube quartz workpieces (b1) and semi-circular tube quartz workpieces (b2) respectively.

2. The support structure for cleaning a quartz boat according to claim 1, characterized in that, The support assembly (4) includes a support part (41), two extension plates (42) disposed at both ends of the support part (41), and a rotating rod (43) disposed on the extension plates (42) and used to insert the rectangular frame (3).

3. The support structure for cleaning a quartz boat according to claim 2, wherein The limiting component (5) includes a rotating handle (51) disposed on the rotating rod (43) and used to flip the support (41), an insertion hole (52) disposed on the rotating handle (51), a limiting hole (53) disposed on the rectangular frame (3) and corresponding to the insertion hole (52), and a pin (54) disposed in the insertion hole (52) and used to insert into the limiting hole (53) to maintain the flipped state of the support (41).

4. The support structure for cleaning a quartz boat according to claim 3, wherein It also includes a transmission assembly (7) disposed on the rectangular frame (3) and used to connect adjacent rotating rods (43) so that the rotating rods (43) rotate synchronously.

5. The support structure for cleaning a quartz boat according to claim 4, characterized in that, The transmission assembly (7) includes a gear (71) disposed on the rotating rod (43) and a transmission chain (72) disposed on two adjacent gears (71).

6. The support structure for cleaning a quartz boat according to claim 4, wherein The limiting component (5) further includes a stop (55) disposed on the rectangular frame (3) and used to limit the rotation of the rotating handle (51).

7. The support structure for cleaning a quartz boat according to claim 2, characterized in that, The support part (41) includes two first support plates (411) respectively disposed on the extension plate (42) and disposed at an angle to each other and used to support the circular tube quartz workpiece (b1), and a second support plate (412) connecting the two first support plates (411) and used to support the inner wall of the semi-circular tube quartz workpiece (b2) after being flipped.

8. The support structure for cleaning a quartz boat according to claim 2, characterized in that, The support (41) includes an arc-shaped support plate (413) disposed between the two extension plates (42) and used to support the bottom surface of the round tube quartz workpiece (b1) or the inner wall of the semi-circular tube quartz workpiece (b2).

9. The support structure for cleaning a quartz boat according to claim 1, characterized in that, The mounting plate assembly (1) includes a side plate (11) disposed on the frame (c) and used for mounting the drive assembly (6), a perforated bottom plate (12) disposed on the side plate (11) and used for inserting the lifting rod (2), a C-shaped protective side plate (13) disposed on the perforated bottom plate (12) and enclosing a space for the lifting rod (2) to rise and fall, and a top plate (14) disposed on the upper end of the side plate (11) and the C-shaped protective side plate (13).

10. A support structure for cleaning a quartz boat according to claim 9, characterized in that, The drive assembly (6) includes a rotary motor (61), a motor mounting base (62) mounted on the side plate (11) for mounting the rotary motor (61), a screw (63) rotatably mounted on the perforated bottom plate (12) and the top plate (14), a lifting block (64) sleeved on the screw (63) for connecting the lifting rod (2), a transmission belt (65) mounted on the output end of the rotary motor (61) for driving the screw (63) to rotate, a guide rod (66) rotatably mounted on the perforated bottom plate (12) and the top plate (14), a sliding block (67) sleeved on the guide rod (66), and a connector (68) mounted on the sliding block (67) for connecting the lifting block (64).

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