Target material magnet lifting device and physical vapor deposition equipment

Abstract

The utility model relates to the technical field of semiconductor manufacturing, and provides a target material magnet lifting device and physical vapor deposition equipment, and the target material magnet lifting device comprises a base body, a lifting main body, a lifting assembly and a lifting seat, one end of the hoisting main body is arranged on the base body in a manner of being driven to rotate; the lifting assembly is rotationally connected with the lifting main body, the lifting seat is connected with the lifting assembly, and a connecting structure used for being connected with a target magnet is arranged on the lifting seat; the rotating central axis of the connecting position of the lifting body and the base body is parallel to the rotating central axis of the connecting position of the lifting assembly and the lifting body. The target material magnet lifting device is improved, so that the target material magnet lifting device is more suitable for the use scene of target material magnet lifting, meanwhile, the lifting process of the target material magnet is simplified, the lifting efficiency is improved, and the labor intensity is reduced.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing technology, and in particular to a target magnet lifting device and a physical vapor deposition equipment. Background Technology

[0002] Physical vapor deposition (PVD) is an important thin film preparation technology. It involves heating the target material to a high temperature through physical processes to evaporate it into a gas, or vaporizing the target material through sputtering or other methods, and then depositing these gaseous substances onto the substrate surface to form a thin film.

[0003] Magnetron sputtering is an important method in physical vapor deposition. The target material is a crucial raw material in magnetron sputtering, and the target magnet is a key component of the equipment; its structure and performance directly affect the sputtering efficiency and film quality. During magnetron sputtering, a magnetic field is introduced onto the target cathode surface using a target magnet. This magnetic field confines charged particles, increasing plasma density and thus the sputtering rate. For example, when electrons are accelerated towards the substrate under the influence of an electric field, they collide with argon atoms, ionizing into a large number of argon ions and electrons. These secondary electrons, during their acceleration towards the substrate, are bound by the Lorentz force of the magnetic field and confined to a plasma region near the target surface. This region has a high plasma density, and the secondary electrons, under the influence of the magnetic field, move in a circular motion around the target surface, lengthening their path and increasing the ionization rate of the gas. This allows more argon ions to be accelerated and bombard the target under the influence of the electric field, sputtering out a large number of target atoms that deposit onto the substrate to form a film.

[0004] Target magnets often need to be disassembled, for example, during the maintenance of magnetron sputtering equipment, the target magnets need to be removed. Existing methods for hoisting target magnets usually involve traditional hoisting methods (such as hoisting with slings). This method is difficult to adapt to the application scenarios of target magnets and may cause scratches or damage to the surface of the target magnets, affecting their performance and service life. In addition, the hoisting process requires multiple people to work together, is complex to operate, and has a high labor intensity.

[0005] Therefore, this utility model provides a target magnet lifting device and a physical vapor deposition equipment to improve the lifting efficiency of target magnets. Utility Model Content

[0006] The purpose of this invention is to provide a target magnet lifting device and a physical vapor deposition equipment. By improving the target magnet lifting device, it is made more suitable for the application scenarios of target magnets, while simplifying the lifting process of target magnets, improving lifting efficiency, and reducing labor intensity.

[0007] This utility model provides a target magnet lifting device, comprising: a base, a lifting main body, a lifting assembly, and a lifting seat; one end of the lifting main body is rotatably mounted on the base; the lifting assembly is rotatably connected to the lifting main body, and the lifting seat is connected to the lifting assembly, with a connection structure for connecting to the target magnet on the lifting seat; the rotation axis at the connection between the lifting main body and the base is parallel to the rotation axis at the connection between the lifting assembly and the lifting main body. With this configuration, the target magnet lifting device is well-suited for lifting target magnets, and its operation is convenient, simplifying the lifting process, effectively reducing the experience threshold for lifting and adjustment, improving lifting efficiency, and eliminating the need for multiple people to coordinate during the lifting process, thus reducing labor intensity. In this utility model, the lifting device uses the rotation of the lifting main body to achieve lifting and lowering, which helps to calibrate the lifting height on equipment without reference objects by the rotation angle of the lifting main body, making the lifting and conveying position more standardized. The aforementioned lifting device can be added above the target magnet that does not have a labor-saving mechanism to ensure higher lifting accuracy and efficiency.

[0008] Optionally, the target magnet lifting device further includes a locking component, which is at least disposed on the base to lock the rotation angle of the lifting body relative to the base.

[0009] Optionally, the target magnet lifting device further includes a telescopic drive component, one end of which is rotatably connected to the base body along its telescopic direction, and the other end of which is rotatably connected to the lifting body along its telescopic direction.

[0010] The rotation axis at the connection between the telescopic drive and the base is parallel to the rotation axis at the connection between the telescopic drive and the hoisting body, and is also parallel to the rotation axis at the connection between the hoisting body and the base.

[0011] Optionally, the target magnet lifting device further includes a lifting frame, on which the base is rotatably mounted;

[0012] The rotation axis of the base relative to the lifting frame is perpendicular to the rotation axis at the connection between the lifting body and the base.

[0013] Optionally, the target magnet lifting device further includes a folding assembly, on which at least one rotating joint is provided;

[0014] One end of the folding assembly is connected to the base;

[0015] The rotation axis at the connection between the hoisting body and the base is perpendicular to the rotation axis of the rotating joint;

[0016] When the target magnet lifting device includes a lifting frame, the other end of the folding assembly is rotatably connected to the lifting frame, and the rotation axis of the connection between the folding assembly and the lifting frame is perpendicular to the rotation axis of the connection between the lifting body and the base.

[0017] Optionally, the lifting assembly is detachably connected to the lifting base.

[0018] Optionally, the lifting assembly includes a lifting connector and a lifting base connector, wherein the lifting connector is rotatably connected to the lifting body, and the lifting base connector is connected to the lifting connector.

[0019] Optionally, the lifting base includes an annular base body and a plurality of protrusions connected to the outer peripheral surface of the base, wherein the connecting structure is disposed on the protrusions.

[0020] Optionally, the target magnet lifting device further includes an adjustment handle, which is disposed on the lifting body.

[0021] This invention also provides a physical vapor deposition (PVD) apparatus, which includes the target magnet lifting device described above.

[0022] In summary, the target magnet lifting device includes: a base, a lifting body, a lifting assembly, and a lifting seat; one end of the lifting body is rotatably mounted on the base; the lifting assembly is rotatably connected to the lifting body, and the lifting seat is connected to the lifting assembly, with a connection structure for connecting to the target magnet provided on the lifting seat; the rotation axis at the connection between the lifting body and the base is parallel to the rotation axis at the connection between the lifting assembly and the lifting body.

[0023] With this configuration, the aforementioned target magnet lifting device is well-suited for lifting target magnets. It is easy to operate, simplifies the lifting process, effectively lowers the experience threshold for lifting and adjustment, improves lifting efficiency, and does not require multiple people to work together during the lifting process, thus helping to reduce labor intensity.

[0024] In this invention, the lifting device achieves lifting and lowering by rotating the lifting body. This helps to determine the lifting height by the rotation angle of the lifting body on equipment without reference points, thus making the lifting and conveying position more standardized. The aforementioned lifting device can be added above the target magnet where there is no labor-saving mechanism to ensure high lifting accuracy and efficiency. Attached Figure Description

[0025] Figure 1 This is a three-dimensional structural schematic diagram of the target magnet lifting device according to some embodiments of the present invention;

[0026] Figure 2 This is a schematic diagram of the structure of the locking component in some embodiments of the present invention;

[0027] Figure 3 This is a schematic diagram of the structure of the locking component in some embodiments of the present invention;

[0028] Figure 4 This is a partial structural schematic diagram of the target magnet lifting device according to some embodiments of the present invention;

[0029] Figure 5 This is a partial structural schematic diagram of a physical vapor deposition apparatus according to some embodiments of the present invention.

[0030] In the attached diagram:

[0031] 10-Matrix;

[0032] 20 - Lifting body; 21 - First lifting rod; 22 - Second lifting rod; 23 - Adjusting handle; 24 - Drive shaft;

[0033] 30 - Lifting and lowering assembly; 31 - Lifting and lowering connector; 32 - Lifting bracket connector; 33 - Through hole;

[0034] 40 - Lifting bracket; 41 - Base body; 42 - Protrusion; 43 - Snap-fit ​​component; 44 - Connection hole;

[0035] 50 - Telescopic drive component;

[0036] 60-Locking assembly; 61-Ratchet; 62-Pawl; 61'-Locking wheel; 62'-Locking tooth;

[0037] 70 - Lifting frame;

[0038] 80 - Folding assembly; 81 - First connecting arm; 82 - Second connecting arm; 83 - Connecting seat;

[0039] 90-Workbench;

[0040] 100-Target magnet;

[0041] a - First direction; b - Second direction; c - Third direction. Detailed Implementation

[0042] The target magnet lifting device proposed in this utility model will be further described in detail below with reference to the accompanying drawings and specific embodiments. The advantages and features of this utility model will become clearer from the following description. It should be noted that the drawings are all in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of this utility model.

[0043] As used in this invention, the singular forms “a,” “an,” and “the” include plural objects; the term “or” is generally used to mean “and / or”; the term “a number” is generally used to mean “at least one”; and the terms “at least two” or “more than” are generally used to mean “two or more”. Furthermore, the terms “first,” “second,” and “third” are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined with “first,” “second,” or “third” may explicitly or implicitly include one or at least two of that feature. Furthermore, the terms "installed," "connected," and "attached," as used in this utility model, and the term "set" on one element from another, should be interpreted broadly. They generally only indicate a connection, coupling, cooperation, or transmission relationship between the two elements, which can be direct or indirect through an intermediate element. They should not be construed as indicating or implying a spatial positional relationship between the two elements, meaning one element can be located inside, outside, above, below, or to one side of the other element, unless otherwise explicitly stated. Those skilled in the art can understand the specific meaning of these terms in this utility model according to the specific circumstances. Additionally, directional terms such as above, below, up, down, upward, downward, left, and right are used relative to exemplary embodiments as shown in the figures, with upward or up direction pointing towards the top of the corresponding figure, and downward or down direction pointing towards the bottom of the corresponding figure.

[0044] In this embodiment, the first direction a, the second direction b, and the third direction c are three mutually perpendicular directions.

[0045] This utility model proposes a target magnet lifting device, including: a base 10, a lifting body 20, a lifting assembly 30, and a lifting base 40.

[0046] Combination Figure 1 As shown, the substrate 10 has a cuboid block structure.

[0047] One end of the hoisting body 20 is rotatably mounted on the base 10. For example... Figure 1 As shown, in this embodiment, the hoisting body 20 is a double-rod structure, which includes a first hoisting rod 21 and a second hoisting rod 22 arranged in parallel, and one end of the first hoisting rod 21 and the second hoisting rod 22 ( Figure 1 The right ends of the first and second lifting rods 21 and 22 are respectively rotatably mounted on the two opposite side walls of the base 10. Specifically, the first lifting rod 21 and the second lifting rod 22 are mounted on the base 10 via a mounting shaft that passes through the base 10 along the first direction a.

[0048] The base 10 is located between the first lifting rod 21 and the second lifting rod 22, and the other ends of the first lifting rod 21 and the second lifting rod 22 ( Figure 1 The left end of the hoisting rod 21 is connected via an adjusting handle 23. The adjusting handle 23 is preferably perpendicular to the first hoisting rod 21 and the second hoisting rod 22. The adjusting handle 23 serves two purposes: firstly, it connects the free ends of the first hoisting rod 21 and the second hoisting rod 22 to form a frame structure, thereby improving the structural strength and rigidity of the hoisting body 20; secondly, the adjusting handle 23 also facilitates manual adjustment of the angle of the hoisting body 20.

[0049] The lifting assembly 30 is rotatably connected to the hoisting body 20, and the lifting base 40 is fixedly connected to the lifting assembly 30. The lifting base 40 is provided with a connection structure for connecting with the target magnet.

[0050] The rotation axis (extending along the first direction a) at the connection between the hoisting body 20 and the base 10 is parallel to the rotation axis (extending along the first direction a) at the connection between the lifting assembly 30 and the hoisting body 20. Figure 1 As shown, both of the aforementioned rotational axes extend along the first direction a. During normal hoisting operations, these two rotational axes should be kept horizontal, i.e., the first direction a should be kept horizontal. During this process, the hoisting body 20 rotates, driving the lifting assembly 30 and the lifting seat 40 to move up and down, thereby lifting the target magnet. Since the lifting assembly 30 is rotatably connected to the hoisting body 20, the lifting assembly 30 can adaptably rotate relative to the hoisting body 20 during rotation, ensuring that the lifting assembly 30 remains vertical at all times.

[0051] In this embodiment, the base 10, the hoisting body 20, the lifting assembly 30, and the lifting base 40 are all made of stainless steel to meet the strength and rigidity requirements. In other alternative embodiments, the materials of the various components of the hoisting device can be selected based on actual needs.

[0052] The above-mentioned target magnet lifting device is well-suited for the application scenarios of target magnets. It is easy to operate, simplifies the lifting process of target magnets, effectively lowers the experience threshold for lifting and adjustment, improves lifting efficiency, and does not require multiple people to work together during the lifting process, which helps to reduce labor intensity.

[0053] In this embodiment, the lifting device achieves lifting and lowering by rotating the lifting body 20. This helps to calibrate the lifting height by the rotation angle of the lifting body 20 on equipment without a reference object, making the lifting and conveying position more standardized. The aforementioned lifting device can also be added above the target magnet where there is no force-saving mechanism to ensure higher lifting accuracy.

[0054] Furthermore, the target magnet lifting device also includes a telescopic drive component 50, one end of which is rotatably connected to the base 10 along its telescopic direction, and the other end of which is rotatably connected to the lifting body 20 along its telescopic direction.

[0055] Combination Figure 1 As shown, in this embodiment, two telescopic drive members 50 are provided, which are respectively used to cooperate with the first lifting rod 21 and the second lifting rod 22. The two telescopic drive members 50 are arranged in parallel and at an angle to the first lifting rod 21 and the second lifting rod 22. To accommodate the telescopic drive members 50, the lifting body 20 in this embodiment also includes a drive shaft 24, which is connected between the first lifting rod 21 and the second lifting rod 22 and is perpendicular to the first lifting rod 21 and the second lifting rod 22. One end of each of the two telescopic drive members 50 is rotatably mounted on two opposite side walls of the base 10, and the other end of each of the two telescopic drive members 50 is rotatably connected to the drive shaft 24 near both ends.

[0056] The rotational axes at both ends of the telescopic drive member 50 are parallel and extend along the first direction a. That is, the rotational axis at the connection between the telescopic drive member 50 and the base 10 is parallel to the rotational axis at the connection between the telescopic drive member 50 and the hoisting body 20, and is also parallel to the rotational axis at the connection between the hoisting body 20 and the base 10.

[0057] Combination Figure 1 As shown, when the telescopic drive component 50 extends or retracts, it can drive the hoisting body 20 to rotate relative to the base 10, thereby driving the lifting assembly 30 and the lifting seat 40 to move up and down. Through the configuration of the telescopic drive component 50, the hoisting body 20 can be effectively driven. At the same time, combined with the setting of the adjustment handle 23, manual intervention can also be achieved to adjust the lifting position.

[0058] In this embodiment, the drive shaft 24 facilitates cooperation with the telescopic drive component 50. Furthermore, the drive shaft 24 connects the first lifting rod 21 and the second lifting rod 22, forming a rectangular closed frame structure with the first lifting rod 21, the second lifting rod 22, the adjusting handle 23, and the drive shaft 24, thus ensuring optimal structural rigidity of the lifting body 20. In other alternative embodiments, the telescopic drive component 50 can directly rotatably cooperate with the first lifting rod 21 and the second lifting rod 22, in which case the drive shaft 24 is not required.

[0059] In this embodiment, the telescopic drive 50 is a hydraulic rod. In other alternative embodiments, the telescopic drive 50 may be a cylinder, a linear motor, or other known linear drive structures.

[0060] In this embodiment, the lifting body 20 is driven to rotate via a linear telescopic structure. In other alternative embodiments, the lifting body 20 can also be driven to rotate via a rotational drive structure, for example, by directly connecting a motor to the lifting body 20 to achieve direct rotational drive. The specific drive method can be adjusted based on the actual driving torque requirements.

[0061] Combination Figure 1 As shown, in this embodiment, the first lifting rod 21 has four connection positions, two of which are located at both ends of the first lifting rod 21, and the remaining two are located in the middle of the first lifting rod 21. From left to right, the four connection positions connect to the adjusting handle 23, the drive shaft 24, the lifting assembly 30, and the base 10, respectively. The connection method of the second lifting rod 22 is symmetrical to that of the first lifting rod 21, and will not be described again here.

[0062] The arrangement of the aforementioned connection points helps to form a more efficient, labor-saving structure. Through the rational layout of each connection point, the hoisting body 20 can be driven with a smaller force by the telescopic drive component 50, and also with a smaller force by the adjusting handle 23.

[0063] Please combine Figure 1 As shown, in this embodiment, the first lifting rod 21 and the second lifting rod 22 are provided with a connection hole to facilitate adjustment of the connection position. In other alternative embodiments, the first lifting rod 21 and the second lifting rod 22 may be provided with more connection holes to allow for more flexible adjustment of the connection position with each component.

[0064] In this embodiment, the hoisting body 20 is a frame structure consisting of a first hoisting rod 21, a second hoisting rod 22, an adjusting handle 23, and a drive shaft 24. In other alternative embodiments, the hoisting body 20 can be a single-arm structure or other structures, and the specific structure of the hoisting body 20 can be adaptively adjusted based on its hoisting requirements.

[0065] In this embodiment, the target magnet lifting device further includes a locking component 60, which is at least disposed on the base 10 for locking the rotation angle of the lifting body 20 relative to the base 10.

[0066] Combination Figure 2 As shown, in this embodiment, the one-way locking structure of the locking component 60 is used for locking. Figure 1 The angle at which the hoisting main body rotates counterclockwise.

[0067] Taking the first lifting rod 21 as an example, the locking assembly 60 includes a ratchet 61 and a pawl 62. The ratchet 61 is mounted on the rotation shaft of the first lifting rod 21 and the base 10 and rotates synchronously with the first lifting rod 21. The pawl 62 is rotatably mounted on the base 10. By driving the pawl 62 to rotate so that its teeth approach or move away from the ratchet 61, the unidirectional rotation of the ratchet 61 can be locked or unlocked, thereby limiting the counterclockwise rotation angle of the first lifting rod 21. The pawl 62 can be driven to rotate by a motor built into the base 10.

[0068] Similarly, the second lifting rod 22 is also equipped with a locking component 60, which is set in a similar manner to the first lifting rod 21, and will not be described in detail here.

[0069] Combination Figure 3 As shown, in other alternative embodiments, the locking component 60 is a two-way locking structure used for locking. Figure 1 The rotation angles of the main hoisting body 20 counterclockwise and clockwise.

[0070] Taking the first lifting rod 21 as an example, the locking assembly 60 includes a locking wheel 61' and a locking tooth 62'. The locking wheel 61' has teeth on its outer circumference and is mounted on the rotation shaft between the first lifting rod 21 and the base 10, rotating synchronously with the first lifting rod 21. The locking tooth 62' is linearly mounted on the base 10 and has multiple meshing teeth that mesh with the teeth on the outer circumference of the locking wheel 61'. When the locking tooth 62' is driven to move linearly towards the locking wheel 61' and mesh with the teeth on the outer circumference of the locking wheel 61', the bidirectional rotation of the locking wheel 61' is locked, thereby locking the counterclockwise and clockwise rotation angles of the first lifting rod 21. When the locking tooth 62' is driven to move linearly away from the locking wheel 61', the locking wheel 61' is unlocked, and the first lifting rod 21 can rotate freely. The locking tooth 62' can be driven to move linearly by a linear motor built into the base 10.

[0071] Similarly, the second lifting rod 22 is equipped with a locking component 60, which is set in the same way as... Figure 3 The first hoisting rod 21 is set up in a similar way, so it will not be described again here.

[0072] In the above embodiments, a portion of the locking component 60 is disposed on the base 10, and the other portion forms a mating relationship with the hoisting body 20. In other alternative embodiments, the locking component 60 may be disposed on the base 10. For example, the locking component 60 may be a locking screw or a pin, and the specific locking structure of the locking component 60 may be adaptively adjusted based on actual locking requirements.

[0073] In this embodiment, the locking component 60 is configured to lock the lifting angle, allowing the target magnet to be locked in any suspended posture during lifting. The locking component 60 helps to precisely control the lifting position of the target magnet. On the one hand, during equipment PM (preventive maintenance), the target magnet can be suspended in the air without needing to be lifted and placed in a designated position, saving the action of lowering the target magnet, thus saving space for maintenance during PM and reducing maintenance disassembly and assembly time, allowing the machine to return to production more quickly and improving PM efficiency. On the other hand, maintaining the suspended posture of the target magnet prevents it from contacting other objects (such as the ground), thus preventing contamination.

[0074] Furthermore, the target magnet lifting device also includes a lifting frame 70 and a folding assembly 80, wherein the base 10 is rotatably mounted on the lifting frame 70 via the folding assembly 80;

[0075] The rotation axis of the base 10 relative to the lifting frame 70 extends along a third direction c, that is, the rotation axis of the base 10 relative to the lifting frame 70 is perpendicular to the rotation axis at the connection between the lifting body 20 and the base 10.

[0076] In this embodiment, the third direction c corresponds to the vertical direction, so the base 10 can rotate horizontally. This arrangement allows the base 10 to rotate horizontally over a wide range, enabling the hoisting body 20, the lifting assembly 30, and the lifting seat 40 to move horizontally over a wide range, thereby ensuring a large movement distance during hoisting to meet the hoisting requirements of the target magnet and the space requirements during equipment maintenance; moreover, this arrangement also facilitates the hoisting of target magnets on multiple workbenches by a single hoisting device.

[0077] In this embodiment, the lifting frame 70 has an axial structure, and the central axis of the lifting frame 70 extends along the third direction c.

[0078] One end of the folding assembly 80 is connected to the base 10, and the other end of the folding assembly 80 is rotatably connected to the lifting frame 70 and can rotate around the central axis of the lifting frame 70.

[0079] In this embodiment, the folding assembly 80 is provided with two rotating joints. Figure 1 As shown, the folding assembly 80 includes a first connecting arm 81, a second connecting arm 82, and a connecting seat 83.

[0080] The first connecting arm 81 is connected to the base 10, and the second connecting arm 82 is rotatably connected to the first connecting arm 81 to form a rotating joint. The second connecting arm 82 is rotatably connected to the connecting seat 83 to form another rotating joint. The connecting seat 83 is sleeved on the lifting frame 70 and rotatably installed on the lifting frame 70. Thus, the connecting seat 83 can rotate around the central axis of the lifting frame 70, thereby enabling the entire folding assembly 80 to drive the base 10 to rotate a wide range in the horizontal direction around the lifting frame 70.

[0081] The rotation axes of the two aforementioned rotating joints extend along a third direction c. Therefore, the rotation axis (extending along the first direction a) at the connection between the hoisting body 20 and the base 10 is perpendicular to the rotation axis (extending along the third direction c) of the rotating joint. The rotation axis at the connection between the connecting seat 83 and the lifting frame 70 extends along the third direction c. Therefore, the longitudinal axis of rotation is parallel to the rotation axis (extending along the third direction c) of the rotating joint and perpendicular to the rotation axis (extending along the first direction a) at the connection between the hoisting body 20 and the base 10.

[0082] The folding assembly 80 is equipped with two rotating joints. These joints allow for flexible adjustment of the horizontal position of the lifting body 20, increasing its lifting range. They also facilitate horizontal folding when not in use, freeing up more workspace and preventing interference with other components during normal operation. In other alternative embodiments, the folding assembly 80 can have one, three, four, or more rotating joints, the number of which can be adjusted based on actual folding requirements.

[0083] In this embodiment, the first connecting arm 81 is rotatably connected to the base 10, and its rotation axis extends along the third direction c. In essence, the first connecting arm 81 and the base 10 also form a rotating joint, making folding more flexible.

[0084] In this embodiment, the folding component 80 facilitates adjustment of the lifting position of the hoisting body 20 during use, thereby increasing its lifting range, and allows for folding and storage when not in use, resulting in better obstacle avoidance. In other alternative embodiments, the folding component 80 may not be provided; for example, the base 10 may be directly rotatably connected to the lifting frame 70. In other alternative embodiments, the lifting frame 70 may not be provided; for example, a stationary component of the working equipment (e.g., the housing) may be used as the base 10, allowing the lifting device to be directly integrated into the working equipment.

[0085] In this embodiment, the substrate 10 is configured as a block structure, which facilitates connection with the first connecting arm 81 and also serves as the installation base for the hoisting body 20. In other alternative embodiments, the shape of the substrate 10 can be adaptively adjusted based on actual connection requirements. For example, it can be configured as a rod-shaped structure or other irregularly shaped structures. The substrate 10 can also be a component in an existing physical vapor deposition device.

[0086] Combination Figure 4 As shown, the lifting assembly 30 is detachably connected to the lifting base 40. This detachable connection allows the target magnet lifting device to have sufficient design flexibility and adaptability to meet the lifting requirements of target magnets of different shapes and sizes, and also facilitates maintenance or replacement after the lifting base 40 is removed.

[0087] Please continue to refer to this. Figure 1 and Figure 4 As shown, the lifting assembly 30 includes a lifting connector 31 and a lifting seat connector 32.

[0088] In this embodiment, the lifting and lowering connector 31 has a rod-shaped structure, and two are arranged in parallel, with one end of each of the two lifting and lowering connectors 31 ( Figure 1 The upper ends of the lifting and lowering connecting parts 31 are rotatably connected to the first lifting rod 21 and the second lifting rod 22 respectively, and the other ends of the two lifting and lowering connecting parts 31 ( Figure 1 The lower end of the lifting and lowering connector 31 is connected to the lifting seat connector 32.

[0089] The lifting seat connector 32 has an approximately "U" shaped structure, with its open side extending along the second direction b. The lower ends of the two lifting connectors 31 are symmetrically connected to the straight arm of the lifting seat connector 32.

[0090] The "U"-shaped structure of the lifting bracket connector 32 is designed to facilitate detachable connection with the lifting bracket 40.

[0091] Please continue to refer to this. Figure 4 As shown, the lifting base 40 includes an annular base 41 and a plurality of protrusions 42 connected to the outer peripheral surface of the base 41. The protrusions 42 are provided with a connecting structure for connecting with the target magnet.

[0092] In addition, one end of the seat 41 along its axial direction ( Figure 4 The upper part of the bracket is equipped with three snap-fit ​​pieces 43, which have a stepped shaft structure and whose small diameter section is fixedly connected to the base 41. The bracket connector 32 has three slots, which are arc-shaped slots adapted to the small diameter section of the snap-fit ​​piece 43. The opening direction of the three slots is the same and is in the same direction as the opening side of the U-shaped bracket connector 32.

[0093] Each of the two free ends of the hanging bracket connector 32 is provided with a slot, and a slot is provided on the inner wall of the hanging bracket connector 32. The three slots are adapted to the positions of the three fasteners 43.

[0094] When the lifting base connector 32 is detachably connected to the lifting base 40, the small-diameter ends of the three locking members 43 are horizontally conformally fitted into their respective slots, and the shoulder surfaces of the large-diameter sections of the locking members 43 support the upper surface of the lifting base connector 32. The support of the upper surface of the lifting base connector 32 on the shoulder surfaces of the locking members 43 provides vertical support to the lifting base 40, thereby providing a vertical lifting force for the target magnet connected to the lifting base 40. This modular connection method facilitates the rapid assembly and disassembly of the lifting base 40, thereby improving lifting efficiency and shortening equipment changeover time.

[0095] In this embodiment, the lifting seat connector 32 and the lifting seat 40 are detachably connected by a stepped shaft-shaped snap-fit ​​and an arc-shaped groove. The connection and disassembly process is relatively simple and convenient to use, which helps to improve lifting efficiency. In other alternative embodiments, the lifting seat connector 32 and the lifting seat 40 can be connected by other known detachable methods such as hooks or bolts.

[0096] In this embodiment, the three snap-fit ​​pieces 43 are symmetrically distributed around the central axis of the base 41. The hanger connector 32 is configured with a U-shaped structure to facilitate the placement of the three slots, adapting to the positions of the three snap-fit ​​pieces 43, and ensuring easy engagement between the snap-fit ​​pieces 43 and the slots. In other alternative embodiments, the number of snap-fit ​​pieces 43 and the number of slots can be adjusted based on actual connection requirements. Furthermore, the specific shape of the hanger connector 32 can also be adaptively adjusted based on the position of the slots.

[0097] Please refer to Figure 4 As shown, in this embodiment, the lifting bracket connector 32 has a through hole 33 reserved. This through hole is reserved for connection with the lifting bracket 40 of other structures to ensure the flexibility of the lifting bracket connector 32.

[0098] In this embodiment, the base 41 is arranged in a ring shape, which is adapted to the cylindrical shape of the existing target magnet, so as to facilitate the alignment of the base 41 and the target magnet during the lifting process, so as to ensure that the lifting force is relatively balanced and to prevent the target magnet from being biased during the lifting process.

[0099] In this embodiment, the protrusion 42 has an approximately cuboid block structure, and three protrusions 42 are provided, evenly distributed around the central axis of the base 41. The connection structure is a connecting hole 44 opened on the protrusion 42. It can be connected to the threaded hole on the target magnet by a screw passing through the connecting hole. In other alternative embodiments, the specific structure and number of protrusions 42 can be adjusted based on the actual connection method with the target magnet. In addition, the connection structure for connecting with the target magnet can also be adjusted based on the actual target magnet structure. For example, the connection structure can be a hook or an existing snap-fit ​​structure.

[0100] In this embodiment, the lifting connector 31 is configured as a double-bar structure. The two lifting connectors 31 are connected to the lifting seat connector 32, forming a frame structure to ensure the rigidity of the entire lifting assembly 30. Simultaneously, the two bar-shaped lifting connectors 31 also adapt to the "U"-shaped structure of the lifting seat connector 32 to ensure balanced force distribution. In other alternative embodiments, the specific structure of the lifting connector 31 can be adjusted based on the actual structural adaptability of the lifting seat connector 32; for example, the lifting connector 31 can be a single-bar structure.

[0101] This embodiment also provides a physical vapor deposition (PVD) apparatus, which includes the target magnet lifting device described above.

[0102] Combination Figure 5 As shown, the target magnet lifting device is located on the side of the workbench 90. The target magnet 100 is placed on the target to form a magnetic field around the target surface, constraining the trajectory of electrons and improving ionization efficiency. The target magnet lifting device can be connected to the target magnet 100 on the workbench 90 to lift the target magnet 100.

[0103] Figure 5 The image shows an embodiment in which a workbench 90 is coupled with a target magnet lifting device. In other alternative embodiments, a target magnet lifting device may be coupled with multiple workbenches 90 arranged around the target magnet lifting device, i.e., the lifting requirements of multiple workbenches 90 are met by a single target magnet lifting device.

[0104] In addition, physical vapor deposition equipment also includes vacuum systems, cooling systems, gas introduction systems, etc.

[0105] A vacuum system consists of a vacuum chamber, a vacuum pump assembly (such as a mechanical pump or a molecular pump), and a vacuum measuring device. The vacuum system is used to remove air to provide a high-vacuum deposition environment and prevent impurities from interfering with thin film deposition.

[0106] The cooling system is a water-cooled or liquid nitrogen circulating device, which is used to cool the target material and prevent it from overheating due to high-energy ion bombardment.

[0107] The gas introduction system is used for gas control, such as introducing inert gases like argon into the deposition environment to maintain the gas pressure required for sputtering, and integrates a real-time gas pressure monitoring module.

[0108] The physical vapor deposition equipment in this embodiment differs from existing equipment in the setting of the target magnet lifting device. The rest of the structure can remain the same as the existing structure, and will not be described in detail here.

[0109] The various embodiments in this specification are described in a progressive manner, with each embodiment focusing on the differences from other embodiments. The same or similar parts between the various embodiments can be referred to each other.

[0110] The above description is only a description of the preferred embodiment of the present utility model and is not intended to limit the scope of the present utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure shall fall within the protection scope of the claims.

Claims

1. A target magnet lifting device, characterized in that, include: Base, hoisting body, lifting assembly and hoisting base; One end of the hoisting body is rotatably mounted on the base. The lifting assembly is rotatably connected to the hoisting body, the lifting base is connected to the lifting assembly, and the lifting base is provided with a connection structure for connecting to the target magnet; The rotation axis at the connection between the hoisting body and the base is parallel to the rotation axis at the connection between the lifting assembly and the hoisting body.

2. The target magnet lifting device as described in claim 1, characterized in that, The target magnet lifting device also includes a locking component, which is at least disposed on the base to lock the rotation angle of the lifting body relative to the base.

3. The target magnet lifting device as described in claim 1, characterized in that, The target magnet lifting device also includes a telescopic drive component, one end of which is rotatably connected to the base body along its telescopic direction, and the other end of which is rotatably connected to the lifting body along its telescopic direction. The rotation axis at the connection between the telescopic drive and the base is parallel to the rotation axis at the connection between the telescopic drive and the hoisting body, and is also parallel to the rotation axis at the connection between the hoisting body and the base.

4. The target magnet lifting device as described in claim 1, characterized in that, The target magnet lifting device also includes a lifting frame, and the base is rotatably mounted on the lifting frame; The rotation axis of the base relative to the lifting frame is perpendicular to the rotation axis at the connection between the lifting body and the base.

5. The target magnet lifting device according to any one of claims 1 to 4, characterized in that, The target magnet lifting device also includes a folding assembly, on which at least one rotating joint is provided; One end of the folding assembly is connected to the base; The rotation axis at the connection between the hoisting body and the base is perpendicular to the rotation axis of the rotating joint; When the target magnet lifting device includes a lifting frame, the other end of the folding assembly is rotatably connected to the lifting frame; the rotation axis of the connection between the folding assembly and the lifting frame is perpendicular to the rotation axis of the connection between the lifting body and the base.

6. The target magnet lifting device as described in claim 1, characterized in that, The lifting assembly is detachably connected to the lifting base.

7. The target magnet lifting device as described in claim 1, characterized in that, The lifting assembly includes a lifting connector and a lifting base connector. The lifting connector is rotatably connected to the lifting body, and the lifting base connector is connected to the lifting connector.

8. The target magnet lifting device as described in claim 1, characterized in that, The lifting base includes a ring-shaped base body and a plurality of protrusions connected to the outer peripheral surface of the base, and the connecting structure is disposed on the protrusions.

9. The target magnet lifting device as described in claim 1, characterized in that, The target magnet lifting device also includes an adjustment handle, which is located on the lifting body.

10. A physical vapor deposition apparatus, characterized in that, The physical vapor deposition equipment includes a target magnet lifting device as described in any one of claims 1 to 9.

Images