Safe and efficient combustion cylinder for high-concentration silane tail gas

Abstract

The utility model relates to the technical field of combustion cylinders, in particular to a safe and efficient combustion cylinder for high-concentration silane tail gas, which comprises a gas suction hood, a flow dividing detection hood, a combustion cylinder main body, a sealing sliding cover, an igniter and a gas box, the flow dividing detection hood is arranged at the top of the combustion cylinder main body, and the gas suction hood is arranged at the top of the flow dividing detection hood. A sealing sliding cover is arranged at the upper position in the combustion cylinder body, an igniter and a silane tail gas leading-in head are arranged on the two sides of the combustion cylinder body respectively, and a gas box is arranged at the bottom of the combustion cylinder body. A flow dividing disc is arranged at the end of the silane tail gas guide-in head, flow dividing pipes are arranged on the two sides of the flow dividing disc, guided-in tail gas can be divided through the flow dividing pipes, the tail gas guide-in pressure is reduced, a gas box is arranged at the bottom of the combustion cylinder body, and the middle of the top end of the gas box is assembled with the combustion cylinder body in an embedded mode through a gas supply pipe. And an igniter is arranged on one side of the combustion cylinder main body, and combustion control can be conveniently carried out through the igniter.

Description

Technical Field

[0001] This utility model relates to the field of combustion chamber technology, specifically a safe and efficient combustion chamber for high-concentration silane tail gas. Background Technology

[0002] A silane tail gas combustion chamber is used to remove silane tail gas through combustion. Silanes refer to silicon-substituted analogues of carbon alkanes. Silanes consist of a main chain of silicon atoms linked together and hydrogen atoms covalently bonded to the main chain. Ignition and explosion of silanes are both results of reactions with oxygen. Silanes are extremely sensitive to oxygen and air. Even at -180°C, silanes of a certain concentration can react explosively with oxygen. The reaction of solid silanes with liquid oxygen is extremely dangerous. The silane combustion chamber is a device for the reaction of hydrogen (H2) and organosilicon (SiH4) to produce silicon. The main body of the silane combustion chamber is a heating furnace containing a deposition material (such as silica sand) to buffer the heat and ensure uniform heating of the semiconductor silicon wafer.

[0003] For example, the authorized patent with publication number CN214437714U (Silane Tail Gas Treatment Device) includes a silane tail gas treatment system, which includes a distillation column. This invention treats the tail gas by introducing it into a primary tail gas condenser for preliminary condensation, causing some chlorosilane to condense and be recovered. The primary silane tail gas, after separating some of the chlorosilane, is then introduced into a secondary tail gas condenser for further condensation. The secondary silane tail gas, after separating the chlorosilane, is then introduced into a gas-liquid separator. The silane gas exits the gas-liquid separator and enters a gas pressure stabilizing tank for pressure stabilization. Finally, the gas enters a storage tank for storage and then enters the incinerator through an inlet pipe for complete combustion. The combusted gas enters the sedimentation tank, and the precipitated gas containing silane tail gas re-enters the incinerator through a circulation pipe for complete combustion. Finally, it enters the sedimentation tank through a second conveying pipe and is discharged from the outlet.

[0004] The existing technology has a high concentration of silane tail gas, which makes the purification process incomplete and affects the purification effect. In addition, the combustion control of the gas is not convenient and the combustion efficiency is low. Furthermore, the treatment of silane tail gas cannot be circulated, resulting in incomplete purification. Utility Model Content

[0005] The purpose of this invention is to provide a safe and efficient combustion cylinder for high-concentration silane tail gas, in order to solve the problems mentioned in the background art, such as the high concentration of silane tail gas, which makes the purification process incomplete and affects the tail gas purification effect, the inconvenience of combustion control, the low combustion efficiency, and the inability to recycle the silane tail gas, resulting in incomplete purification.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a high-concentration silane tail gas safe and efficient combustion cylinder, comprising an intake hood, a flow diversion detection hood, a combustion cylinder body, a sealing sliding cover, an igniter, and a gas tank. The top of the combustion cylinder body is provided with a flow diversion detection hood, the top of the flow diversion detection hood is provided with an intake hood, the upper part of the interior of the combustion cylinder body is provided with a sealing sliding cover, the sides of the combustion cylinder body are respectively provided with an igniter and a silane tail gas inlet, and the bottom of the combustion cylinder body is provided with a gas tank.

[0007] Preferably, the gas box includes a gas supply pipe, a gas exhaust head, and a mounting bracket;

[0008] The gas supply pipe is located at the top center of the gas tank, the gas exhaust head is located at the top of the gas supply pipe, the top of the gas exhaust head is provided with multiple jet holes, the bottom of the gas supply pipe is provided with a gas duct, and the gas duct is inserted into the interior of the gas tank. The mounting bracket is installed on the top side of the gas tank, and the mounting bracket is fixedly connected to the igniter.

[0009] By adopting the above technical solution, the gas is discharged through the gas supply pipe, and the gas is evenly jetted out through the gas discharge head and jet hole, which facilitates efficient combustion control.

[0010] Preferably, the sealing slide cover is located inside the limiting frame, and guide rails are provided on both sides of the center of the limiting frame. The bottom of the sealing slide cover is slidably embedded in the guide rails through a sliding groove, and a silane concentration detection head is provided at the bottom of the sealing slide cover.

[0011] Using the above technical solution, the concentration of silane in the exhaust gas can be detected through the silane concentration detection head.

[0012] Preferably, the silane tail gas inlet head includes a distribution plate and a distribution pipe;

[0013] The flow divider is located at the end of the silane tail gas inlet, and the flow divider pipe is located outside the flow divider, with the end of the flow divider pipe connected to one side of the combustion chamber body.

[0014] The above technical solution uses a diversion plate to divert and buffer the exhaust gas before discharge.

[0015] Preferably, the bottom corner of the suction hood is provided with a pin, the top of the suction hood is provided with a protective cover, the top of the protective cover is provided with an exhaust pipe, and the end of the exhaust pipe is provided with an exhaust pump.

[0016] The above technical solution allows for easy installation of the air intake hood via a pin, and controls the exhaust gas discharge via an exhaust pump.

[0017] Preferably, it also includes a reflux pipe, which is located between the diversion detection hood and the silane tail gas inlet. The reflux pipe is equipped with an electromagnetic check valve, and the interior of the diversion detection hood is equipped with a silane tail gas concentration detection module.

[0018] Using the above technical solution, an electromagnetic check valve is used to control the opening and closing of the return pipe.

[0019] Compared with the prior art, the beneficial effects of this utility model are: the high-concentration silane tail gas safe and efficient combustion cylinder:

[0020] 1. A flow divider is provided at the end of the silane tail gas inlet head, and a flow divider pipe is provided on both sides of the flow divider. The introduced tail gas can be divided through the flow divider pipe to reduce the tail gas introduction pressure. A gas box is provided at the bottom of the combustion cylinder body. The gas box is embedded and assembled with the combustion cylinder body through a gas supply pipe at the top center. An igniter is provided on one side of the combustion cylinder body for convenient combustion control.

[0021] 2. A sealing sliding cover is provided inside the combustion chamber body, and a silane concentration detection head is provided at the bottom of the sealing sliding cover. The silane concentration can be detected in real time through the silane concentration detection head, and the combustion treatment effect can be accurately judged through the sealing sliding cover.

[0022] 3. A flow divider detection hood is installed on the top of the combustion cylinder body. Inside the flow divider detection hood is a silane tail gas concentration detection module. The flow divider detection hood and the silane tail gas inlet head are connected by a return pipe, and the return pipe is equipped with an electromagnetic check valve. The tail gas can be returned to the silane tail gas inlet head through the return pipe, so that the tail gas can be completely treated. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the structure of a high-concentration silane tail gas safe and efficient combustion cylinder according to the present invention;

[0024] Figure 2 This is a front view of the gas box of this utility model;

[0025] Figure 3 This is a schematic diagram of the structure of the limiting frame of this utility model;

[0026] Figure 4 This is a top view of the gas box of this utility model;

[0027] Figure 5 This is a front view of the air intake hood of this utility model;

[0028] Figure 6 This is a structural schematic diagram of part A of this utility model.

[0029] In the diagram: 1. Exhaust pump; 2. Exhaust pipe; 3. Intake hood; 4. Diverter detection hood; 5. Combustion cylinder body; 6. Sealing sliding cover; 7. Silane concentration detection head; 8. Igniter; 9. Mounting bracket; 10. Gas tank; 11. Electromagnetic check valve; 12. Return pipe; 13. Silane tail gas inlet head; 14. Diverter plate; 15. Diverter pipe; 16. Limiting bracket; 17. Pin; 18. Protective cover; 19. Gas exhaust head; 20. Gas supply pipe; 21. Inlet gas duct; 22. Guide rail; 23. Jet hole. Detailed Implementation

[0030] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0031] Please see Figure 1-6 This utility model provides a technical solution: a high-concentration silane tail gas safe and efficient combustion cylinder, including an intake hood 3, a flow diversion detection hood 4, a combustion cylinder body 5, a sealing sliding cover 6, an igniter 8, and a gas box 10. The top of the combustion cylinder body 5 is provided with a flow diversion detection hood 4, and the top of the flow diversion detection hood 4 is provided with an intake hood 3. The sealing sliding cover 6 is provided at the upper part of the interior of the combustion cylinder body 5. The igniter 8 and the silane tail gas inlet head 13 are respectively provided on both sides of the combustion cylinder body 5. The gas box 10 is provided at the bottom of the combustion cylinder body 5.

[0032] The treated exhaust gas is detected by the diversion detection hood 4 and can be diverted to the return pipe 12. The exhaust gas is efficiently absorbed by the intake hood 3. The inner cavity of the combustion cylinder body 5 is separated and sealed by the sealing sliding cover 6. The combustion of the exhaust gas is controlled by the igniter 8 and the silane exhaust gas inlet 13. The gas is stored and supplied by the gas tank 10.

[0033] The gas box 10 includes a gas supply pipe 20, a gas outlet 19, and a mounting bracket 9;

[0034] The gas supply pipe 20 is located at the top center of the gas tank 10, and the gas discharge head 19 is located at the top of the gas supply pipe 20. The top of the gas discharge head 19 is provided with multiple jet holes 23. The bottom of the gas supply pipe 20 is provided with a gas duct 21, which is inserted into the inside of the gas tank 10. The mounting bracket 9 is located on one side of the top of the gas tank 10 and is fixedly connected to the igniter 8. The gas is discharged through the gas supply pipe 20 and the gas is evenly jetted out through the gas discharge head 19 and the jet holes 23, which facilitates efficient combustion control.

[0035] The sealing slide cover 6 is located inside the limiting frame 16. The limiting frame 16 has guide rails 22 on both sides in the center. The bottom of the sealing slide cover 6 is slidably embedded in the guide rails 22 through a sliding groove. The bottom of the sealing slide cover 6 is provided with a silane concentration detection head 7. The silane tail gas inlet head 13 includes a diversion plate 14 and a diversion pipe 15.

[0036] The diversion plate 14 is located at the end of the silane exhaust gas inlet head 13, and the diversion pipe 15 is located on the outside of the diversion plate 14. The end of the diversion pipe 15 is connected to one side of the combustion cylinder body 5. The guide rail 22 facilitates the automatic opening and closing control of the sealing sliding cover 6. The silane concentration detection head 7 can detect the silane concentration in the exhaust gas. The diversion plate 14 is used to divert and buffer the exhaust gas for discharge.

[0037] A pin 17 is provided at the bottom corner of the suction hood 3, and a protective cover 18 is provided at the top of the suction hood 3. An exhaust pipe 2 is provided at the top of the protective cover 18, and an exhaust pump 1 is provided at the end of the exhaust pipe 2. It also includes a return pipe 12, which is located between the diversion detection hood 4 and the silane tail gas inlet 13. An electromagnetic check valve 11 is provided on the return pipe 12. A silane tail gas concentration detection module is provided inside the diversion detection hood 4. The pin 17 facilitates the installation of the suction hood 3. The exhaust pump 1 controls the discharge of the tail gas, and the electromagnetic check valve 11 is used to control the opening and closing of the return pipe 12.

[0038] Working principle: Silane exhaust gas is introduced into the distribution plate 14 through the silane exhaust gas inlet 13, and then distributed to the distribution pipe 15 through the distribution plate 14. The exhaust gas is discharged into the combustion chamber body 5 through the distribution pipe 15. The gas in the gas tank 10 is absorbed through the gas siphon 21, and discharged into the combustion chamber body 5 through the gas supply pipe 20 and the gas discharge head 19 on its top. At the same time, the gas is ignited by the igniter 8, and the gas is burned to remove silane exhaust gas. The gas is sealed by the sealing slide cover 6 and the concentration is detected by the silane concentration detection head 7. After the concentration is qualified, the sealing slide cover 6 is opened to discharge the exhaust gas into the distribution detection hood 4. After the concentration detection module of the distribution detection hood 4 detects the gas, it controls the opening and closing of the electromagnetic check valve 11, so that the exhaust gas can flow back to the silane exhaust gas inlet 13 through the return pipe 12 for circulation and purification. The thoroughly purified exhaust gas is absorbed by the intake hood 3 and discharged through the exhaust pipe 2 and exhaust pump 1.

[0039] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A high-concentration silane tail gas safe and efficient combustion cylinder, comprising an intake hood (3), a flow diversion detection hood (4), a combustion cylinder body (5), a sealing sliding cover (6), an igniter (8), and a gas tank (10), characterized in that: The top of the combustion cylinder body (5) is provided with a flow diversion detection hood (4), the top of the flow diversion detection hood (4) is provided with an air intake hood (3), the upper part of the inside of the combustion cylinder body (5) is provided with a sealing sliding cover (6), the sides of the combustion cylinder body (5) are respectively provided with an igniter (8) and a silane tail gas inlet head (13), and the bottom of the combustion cylinder body (5) is provided with a gas box (10).

2. The high-concentration silane tail gas safe and efficient combustion cylinder according to claim 1, characterized in that: The gas box (10) includes a gas supply pipe (20), a gas exhaust head (19), and a mounting bracket (9); The gas supply pipe (20) is located at the top center of the gas tank (10), the gas discharge head (19) is located at the top of the gas supply pipe (20), the top of the gas discharge head (19) is provided with multiple jet holes (23), the bottom of the gas supply pipe (20) is provided with a gas duct (21), and the gas duct (21) is inserted into the interior of the gas tank (10). The mounting bracket (9) is located on one side of the top of the gas tank (10), and the mounting bracket (9) is fixedly connected to the igniter (8).

3. The high-concentration silane tail gas safe and efficient combustion cylinder according to claim 1, characterized in that: The sealing slide cover (6) is located inside the limiting frame (16). The limiting frame (16) has guide rails (22) on both sides in the center. The bottom of the sealing slide cover (6) is slidably embedded in the guide rails (22) through a sliding groove. The bottom of the sealing slide cover (6) is provided with a silane concentration detection head (7).

4. The high-concentration silane tail gas safe and efficient combustion cylinder according to claim 1, characterized in that: The silane tail gas inlet head (13) includes a flow divider (14) and a flow divider (15); The flow divider (14) is located at the end of the silane tail gas inlet (13), and the flow divider (15) is located on the outside of the flow divider (14), with the end of the flow divider (15) connected to one side of the combustion chamber body (5).

5. The high-concentration silane tail gas safe and efficient combustion cylinder according to claim 1, characterized in that: The bottom corner of the suction hood (3) is provided with a pin (17), the top of the suction hood (3) is provided with a protective cover (18), the top of the protective cover (18) is provided with an exhaust pipe (2), and the end of the exhaust pipe (2) is provided with an exhaust pump (1).

6. The high-concentration silane tail gas safe and efficient combustion cylinder according to claim 1, characterized in that: It also includes a return pipe (12), which is located between the diversion detection hood (4) and the silane tail gas inlet (13). The return pipe (12) is equipped with an electromagnetic check valve (11), and the interior of the diversion detection hood (4) is equipped with a silane tail gas concentration detection module.

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