Optical fiber temperature sensor for electrostatic chuck of wafer etching machine

Abstract

The utility model relates to the technical field of temperature measurement, in particular to an optical fiber temperature sensor for an electrostatic chuck of a wafer etching machine, which comprises a sensor body, a connecting piece, a locking piece, an elastic piece and a limiting piece, the end parts of the limiting piece, the elastic piece and the locking piece are propped against one another in sequence; the locking piece is locked with a temperature measuring hole of an object to be measured, the elastic piece is compressed, the elastic piece pushes the limiting piece and the connecting piece to move when stretching, and the connecting piece drives the sensor body to go deep into the temperature measuring hole. According to the utility model, the locking piece, the elastic piece and the limiting piece are all sleeved on the outer wall of the connecting piece and are axially stacked instead of radially expanded, so that the transverse size is reduced, and a narrow mounting environment of the wafer etching machine is adapted; the elastic piece releases elastic force after being extruded by the locking piece and continuously pushes the limiting piece and the connecting piece, so that the front end of the sensor body is always tightly attached to the inner wall of the temperature measuring hole, and the elastic force of the elastic piece can still keep stable contact even under the influence of vibration.

Description

A fiber optic temperature sensor for an electrostatic chuck in a wafer etching machine Technical Field

[0001] This utility model relates to the field of temperature measurement technology, specifically to an optical fiber temperature sensor for an electrostatic chuck in a wafer etching machine. Background Technology

[0002] In the semiconductor manufacturing field, wafer etching is one of the key processes determining chip performance and yield. Precise temperature monitoring and control during this process directly affects the etching rate, uniformity, and wafer structure integrity. Currently, temperature monitoring in etching machines mainly relies on traditional technologies such as thermocouples and infrared sensors, but these have limitations in practical applications. Thermocouples, with their metallic sensor materials, are difficult to adapt to the strong radiation and corrosive environment inside etching machines, and their large thermal inertia makes it difficult to monitor instantaneous temperature changes. Infrared temperature measurement accuracy is easily affected by factors such as wafer surface reflectivity, environmental radiation, and window contamination, making it difficult to achieve high-resolution, precise, multi-point real-time temperature monitoring. Fiber optic temperature sensing technology, based on the analysis of light information to derive temperature information, offers fast response times, immunity to electromagnetic interference, and unrestricted sensor materials, making it suitable for temperature measurement in etching machine scenarios.

[0003] However, current fiber optic temperature sensors are large in size and cannot make stable contact with the electrostatic chuck of the wafer etching machine, resulting in low measurement accuracy. Summary of the Invention

[0004] (I) Purpose of the utility model

[0005] The purpose of this invention is to provide a small-sized fiber optic temperature sensor for use with the electrostatic chuck of a wafer etching machine, which can make stable contact with the electrostatic chuck of the wafer etching machine.

[0006] (II) Technical Solution

[0007] To address the aforementioned issues, this invention provides an optical fiber temperature sensor for an electrostatic chuck in a wafer etching machine, comprising: a sensor body, a connector, a locking component, an elastic component, and a limiting component;

[0008] The connector has a hollow internal structure, the locking element and the elastic element are sleeved on the outer wall of the connector, and the sensor body is disposed inside the connector and fixedly connected to the connector.

[0009] The limiting member is sleeved on the outer wall of the connector, and the limiting member is disposed on the front end of the connector near the sensor body;

[0010] The limiting member, elastic member and locking member abut each other at their ends in sequence;

[0011] The locking member locks with the temperature measuring hole of the object to be tested, compresses the elastic member, and when the elastic member expands, it pushes the limiting member and the connecting member to move, and the connecting member drives the sensor body to penetrate deeper into the temperature measuring hole.

[0012] In another aspect of this utility model, preferably, the connector is provided with a protrusion, the protrusion being located near the rear end of the sensor body, and the limiting member, elastic member, locking member and protrusion abutting each other at their ends in sequence.

[0013] In another aspect, preferably, the present invention further includes a heat-conducting element, which is connected to the front end of the sensor body.

[0014] In another aspect, preferably, the present invention further includes an outer protective member, which is sleeved on the rear outer wall of the sensor body, and the outer protective member is partially disposed inside the connector and fixedly connected to the connector.

[0015] In another aspect of this utility model, preferably, the inner diameter of the tail end of the connector is larger than the inner diameter of the head end of the connector, and the inner diameter of the tail end of the connector is adapted to the outer diameter of the outer protective member.

[0016] In another aspect of this utility model, preferably, the outer diameter of the head end of the connector is smaller than the outer diameter of the middle part of the connector, the limiting member is provided with a stepped hole inside, the smaller diameter of the stepped hole is adapted to the outer diameter of the head end of the connector, the smaller diameter of the stepped hole is adapted to the outer diameter of the middle part of the connector, and the limiting member is sleeved on the outside of the connector through the stepped hole.

[0017] In another aspect of this utility model, preferably, the outer wall of the locking member is provided with a first thread, and the inner wall of the temperature measuring hole is provided with a second thread. The first thread and the second thread are adapted to each other, and the locking member is locked to the temperature measuring hole through the first thread, the second thread and the temperature measuring hole.

[0018] In another aspect, preferably, the present invention further includes a sealing ring, which is sleeved on the outer wall of the connector and disposed between the elastic member and the locking member.

[0019] In another aspect of this utility model, preferably, the outer wall of the locking member is provided with an operating part, and the outer wall of the operating part is provided with a tool locking structure, the tool locking structure including a polygonal prism, a spline or a planar bayonet.

[0020] In another aspect of this utility model, preferably, the locking member and the connecting member are in clearance fit.

[0021] (III) Beneficial Effects

[0022] The above-mentioned technical solution of this utility model has the following beneficial technical effects:

[0023] This invention reduces the lateral dimension by fitting the locking element, elastic element, and limiting element onto the outer wall of the connector, using axial stacking rather than radial expansion, thus adapting to the narrow installation environment of the wafer etching machine. The elastic element releases its elastic force after being squeezed by the locking element, continuously pushing the limiting element and the connector, ensuring that the front end of the sensor body is always in close contact with the inner wall of the temperature measuring hole. Even when affected by vibration, the elastic force of the elastic element can still maintain stable contact. Attached Figure Description

[0024] Figure 1 is a cross-sectional view of the overall structure of an embodiment of the present invention;

[0025] Figure 2 is a schematic diagram of the relaxed state according to an embodiment of the present invention;

[0026] Figure 3 is a schematic diagram of the locking state according to an embodiment of the present invention;

[0027] Figure 4 is a schematic diagram of the usage state of an embodiment of the present invention;

[0028] Figure label:

[0029] 1: Sensor body; 2: Connector; 210: Protrusion; 3: Locking part; 310: First thread; 320: Operating part; 4: Elastic part; 5: Limiting part; 6: Heat-conducting part; 7: Outer protective part; 8: Sealing ring. Detailed Implementation

[0030] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings. It should be understood that these descriptions are merely exemplary and not intended to limit the scope of this utility model. Furthermore, descriptions of well-known structures and technologies are omitted in the following description to avoid unnecessarily obscuring the concept of this utility model.

[0031] The accompanying drawings show structural schematic diagrams according to embodiments of the present invention. These drawings are not drawn to scale, and some details have been enlarged for clarity, and some details may have been omitted. The shapes of the various regions and layers shown in the drawings, as well as their relative sizes and positional relationships, are merely exemplary and may deviate from reality due to manufacturing tolerances or technical limitations. Furthermore, those skilled in the art can design regions / layers with different shapes, sizes, and relative positions as needed.

[0032] Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without inventive effort are within the scope of protection of this utility model.

[0033] Furthermore, the technical features involved in the different embodiments of this utility model described below can be combined with each other as long as they do not conflict with each other.

[0034] The present invention will now be described in more detail with reference to the accompanying drawings. In the various drawings, the same elements are indicated by similar reference numerals. For clarity, the parts in the drawings are not drawn to scale.

[0035] Example 1

[0036] A fiber optic temperature sensor for an electrostatic chuck in a wafer etching machine is disclosed. Figure 1 shows a cross-sectional view of the overall structure of one embodiment of the present invention. As shown in Figure 1, the sensor includes: a sensor body 1, a connector 2, a locking member 3, an elastic member 4, and a limiting member 5. The connector 2 serves as the structural frame, and the locking member 3 can be a threaded structure that matches and locks to the temperature sensing hole. The elastic member can be an alloy spring, and the preload can be calculated based on the contact pressure. The front end of the sensor body 1 is configured as a temperature sensing probe, which is in contact with the environment to be measured and senses temperature changes.

[0037] The connector 2 has a hollow internal structure, with its inner diameter slightly larger than the outer diameter of the sensor body 1, providing space for the introduction and arrangement of the sensor body 1. The outer diameter of the connector 2 is divided into three sections. The first section is close to the temperature probe and has the smallest outer diameter, allowing it to penetrate into smaller temperature measuring holes of different sizes. The second section is the functional section with a centrally located outer diameter, providing suitable space and position for the installation of locking and elastic components, ensuring the stability and reliability of the entire structure. The third section has the largest outer diameter and is used for connection and fixation with other parts of the sensor system or external devices, providing support and fixation. The locking member 3 and the elastic member 4 are sleeved on the outer wall of the connecting member 2. The locking member 3 and the elastic member 4 are sleeved on the second section. The sensor body 1 is disposed inside the connecting member 2 and is fixedly connected to the connecting member 2. The limiting member 5 is sleeved on the outer wall of the connecting member 2. The limiting member 5 is disposed on the part of the connecting member 2 near the front end of the sensor body 1. The limiting member 5, the elastic member 4 and the locking member 3 abut against each other at their ends in sequence. The locking member 3 locks with the temperature measuring hole of the object to be measured, compresses the elastic member 4, and when the elastic member 4 expands, it pushes the limiting member 5 and the connecting member 2 to move. The connecting member 2 drives the sensor body 1 to penetrate deeper into the temperature measuring hole. Figure 2 shows a schematic diagram of the relaxed state of an embodiment of the present invention; Figure 3 shows a schematic diagram of the locked state of an embodiment of the present invention; Figure 4 shows a schematic diagram of the usage state of an embodiment of the present invention. As shown in Figures 2, 3, and 4, in the relaxed state, the elastic element 4 is in a relaxed state. The entire sensor is inserted into the pre-reserved temperature measuring hole of the electrostatic chuck. The locking element engages with the internal thread of the temperature measuring hole and is screwed into the temperature measuring hole to lock it. The front end of the locking element abuts against the elastic element 4. While the elastic element 4 is compressed, it drives the limiting element, the connecting element, and the sensor body 1 inside to move towards the surface of the electrostatic chuck. In the locked state, the sensor body 1 does not rotate with the rotation of the locking element. After locking, the sensor body 1 exchanges temperature through contact with the surface of the electrostatic chuck, thereby performing temperature detection.

[0038] When the locking member 3 is locked to the temperature measuring hole of the object to be measured, it compresses the elastic member 4, causing it to generate elastic potential energy. When the elastic potential energy is released, it pushes the limiting member 5 and the connecting member 2 to move. The connecting member 2 drives the sensor body 1 to penetrate deeper into the temperature measuring hole, making the temperature probe in close contact with the area to be measured, thereby achieving accurate temperature measurement. The working principle ensures the stability and reliability of the sensor during installation and use through the elastic action of the elastic member, while also facilitating the installation and adjustment of the sensor. Furthermore, in this embodiment, the outer wall of the locking member 3 is provided with a first thread 310, and the inner wall of the temperature measuring hole is provided with a second thread. The first thread and the second thread are adapted to each other, and the locking member 3 is locked to the temperature measuring hole through the first thread, the second thread, and the first thread. The locking member 3 and the connecting member 2 are in clearance fit. When the locking member 3 is locked and rotated, it does not drive the connecting member 2 to rotate, reducing the operational difficulty and damage during installation and avoiding temperature measurement position deviation caused by the rotation of the connecting member. The threaded structure allows for easy and quick locking, requiring no complicated tools or special skills, making it convenient for on-site installation and maintenance personnel to quickly install and remove the sensor.

[0039] Furthermore, in this embodiment, the connector 2 is provided with a protrusion 210, which is located near the rear end of the sensor body 1. The limiting member 5, the elastic member 4, the locking member 3, and the protrusion 210 abut against each other at their ends in sequence. The protrusion 210 restricts the backward movement of the locking member 3, preventing the locking member 3 from falling off the connector 2 due to vibration, impact, or other external forces during device operation, thus ensuring the stability of the entire sensor structure. By restricting the position of the locking member 3, the protrusion 210 helps maintain the stability of the relative positions between the limiting member 5, the elastic member 4, the locking member 3, and the connector 2.

[0040] Furthermore, this embodiment also includes a heat-conducting component 6, which is connected to the front end of the sensor body 1. The front end of the sensor body 1 is a temperature sensing probe. The heat-conducting component 6 is made of a material with high thermal conductivity, such as copper, aluminum, or graphene, which can quickly conduct heat from the area to be measured to the temperature sensing probe of the sensor body 1. This allows the sensor to detect temperature changes more rapidly, improving the real-time performance and sensitivity of temperature measurement. Adding the heat-conducting component 6 between the temperature sensing probe and the area to be measured can effectively reduce the thermal resistance on the heat conduction path, allowing heat to be transferred to the sensor more efficiently and ensuring the accuracy of temperature measurement. The connecting parts, locking parts, and limiting parts can be made of low thermal conductivity, insulating materials, such as polyetheretherketone, Teflon, or nylon. The heat-conducting component 6 can act as a physical barrier, protecting the temperature sensing probe from mechanical damage and chemical corrosion.

[0041] Furthermore, this embodiment also includes an outer protective member 7, which is sleeved on the rear outer wall of the sensor body 1. The outer protective member 7 is partially disposed inside the connector 2 and fixedly connected to it. The inner diameter of the tail end of the connector 2 is larger than the inner diameter of the head end, and the inner diameter of the tail end of the connector 2 is adapted to the outer diameter of the outer protective member 7. The outer protective member 7, sleeved on the rear outer wall of the sensor body 1, provides additional physical protection for the sensor body, reducing the risk of damage. The outer protective member 7, partially disposed inside the connector 2 and fixedly connected to it, creates a stable connection between the sensor body 1 and the connector 2, enhancing the overall structural stability of the sensor. The inner diameter of the tail end of the connector 2 is larger than the inner diameter of the head end and is adapted to the outer diameter of the outer protective member 7. This design provides good support for the outer protective member 7 inside the connector 2, further improving the structural strength of the sensor. The fixed connection design between the outer protective part 7 and the connector 2 makes it easier to position the sensor body 1 when installing the sensor, reducing the adjustment time during the installation process.

[0042] Furthermore, in this embodiment, the outer diameter of the head end of the connector 2 is smaller than the outer diameter of the middle part of the connector 2. The limiting member 5 is internally configured with a stepped hole. The smaller diameter portion of the stepped hole is adapted to the outer diameter of the head end of the connector 2, and the smaller diameter portion of the stepped hole is adapted to the outer diameter of the middle part of the connector 2. The limiting member 5 is sleeved on the outside of the connector 2 through the stepped hole. The stepped hole of the limiting member 5 ensures the accurate position of the limiting member 5 on the connector 2. The difference between the outer diameters of the head end and the middle part of the connector 2, and the corresponding design of the stepped hole of the limiting member 5, help to disperse the stress generated during the connection process and prevent structural damage caused by local stress concentration.

[0043] Furthermore, in this embodiment, a sealing ring 8 is also included. The sealing ring 8 is sleeved on the outer wall of the connector 2 and disposed between the elastic member 4 and the locking member 3. The sealing ring 8 can effectively fill the gap between the connector 2 and the locking member 3, preventing liquids, gases, and other media from leaking out from these gaps.

[0044] Furthermore, in this embodiment, the outer wall of the locking member 3 is provided with an operating part 320, and the outer wall of the operating part 320 is provided with a tool locking structure, which includes a polygonal prism, spline, or planar bayonet. The operator can easily tighten or loosen the locking member 3 using a tool (such as a wrench, screwdriver, etc.) that matches the tool locking structure, saving a lot of time and labor costs.

[0045] This invention reduces the lateral dimension by fitting the locking element, elastic element, and limiting element onto the outer wall of the connector, using axial stacking rather than radial expansion, thus adapting to the narrow installation environment of the wafer etching machine. The elastic element releases its elastic force after being squeezed by the locking element, continuously pushing the limiting element and the connector, ensuring that the front end of the sensor body is always in close contact with the inner wall of the temperature measuring hole. Even when affected by vibration, the elastic force of the elastic element can still maintain stable contact.

[0046] It should be understood that the specific embodiments described above are merely illustrative or explanatory of the principles of this utility model and do not constitute a limitation thereof. Therefore, any modifications, equivalent substitutions, improvements, etc., made without departing from the spirit and scope of this utility model should be included within its protection scope. Furthermore, the appended claims are intended to cover all variations and modifications falling within the scope and boundaries of the appended claims, or equivalent forms of such scope and boundaries.

[0047] The above description does not provide detailed explanations of the technical aspects of each layer's patterning and etching. However, those skilled in the art should understand that various methods existing in the prior art can be used to form layers and regions of the desired shape. Furthermore, to form the same structure, those skilled in the art can also design methods that are not entirely identical to those described above.

[0048] The present invention has been described above with reference to embodiments thereof. However, these embodiments are for illustrative purposes only and are not intended to limit the scope of the present invention. The scope of the present invention is defined by the appended claims and their equivalents. Various substitutions and modifications can be made by those skilled in the art without departing from the scope of the present invention, and all such substitutions and modifications should fall within the scope of the present invention.

[0049] Although the embodiments of the present invention have been described in detail, it should be understood that various changes, substitutions and modifications can be made to the embodiments of the present invention without departing from the spirit and scope of the present invention.

[0050] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the protection scope of this invention.

Claims

1. A fiber optic temperature sensor for use in an electrostatic chuck of a wafer etching machine, characterized in that, include: The sensor body (1), connector (2), locking member (3), elastic member (4), and limiting member (5) are configured as follows: the connector (2) has a hollow internal structure; the locking member (3) and elastic member (4) are sleeved on the outer wall of the connector (2); the sensor body (1) is disposed inside the connector (2) and fixedly connected to the connector (2); the limiting member (5) is sleeved on the outer wall of the connector (2) and is disposed on the front end of the connector (2) near the sensor body (1); the limiting member (5), elastic member (4), and locking member (3) abut against each other at their ends in sequence; the locking member (3) locks the temperature measuring hole of the object to be measured, compresses the elastic member (4), and when the elastic member (4) expands, it pushes the limiting member (5) and connector (2) to move, and the connector (2) drives the sensor body (1) to penetrate deeper into the temperature measuring hole.

2. The fiber optic temperature sensor according to claim 1, characterized in that, The connector (2) is provided with a protrusion (210), which is located near the rear end of the sensor body (1). The limiting member (5), elastic member (4), locking member (3) and protrusion (210) abut against each other in sequence.

3. The fiber optic temperature sensor according to claim 1, characterized in that, It also includes a heat-conducting component (6), which is connected to the front end of the sensor body (1).

4. The fiber optic temperature sensor according to claim 1, characterized in that, It also includes an outer protective member (7), which is sleeved on the rear outer wall of the sensor body (1). The outer protective member (7) is partially disposed inside the connector (2) and is fixedly connected to the connector (2).

5. The fiber optic temperature sensor according to claim 4, characterized in that, The inner diameter of the tail end of the connector (2) is larger than the inner diameter of the head end of the connector (2), and the inner diameter of the tail end of the connector (2) is adapted to the outer diameter of the outer protective member (7).

6. The fiber optic temperature sensor according to claim 1, characterized in that, The outer diameter of the head end of the connector (2) is smaller than the outer diameter of the middle part of the connector (2). The limiting member (5) is configured with a stepped hole inside. The smaller part of the stepped hole is adapted to the outer diameter of the head end of the connector (2), and the smaller part of the stepped hole is adapted to the outer diameter of the middle part of the connector (2). The limiting member (5) is sleeved on the outside of the connector (2) through the stepped hole.

7. The fiber optic temperature sensor according to claim 1, characterized in that, The locking member (3) has a first thread (310) on its outer wall and a second thread on its inner wall. The first thread and the second thread are adapted to each other, and the locking member (3) is locked to the temperature measuring hole by the first thread, the second thread and the temperature measuring hole.

8. The fiber optic temperature sensor according to claim 4, characterized in that, It also includes a sealing ring (8), which is sleeved on the outer wall of the connector (2) and is disposed between the elastic member (4) and the locking member (3).

9. The fiber optic temperature sensor according to claim 1, characterized in that, The locking member (3) has an operating part (320) on its outer wall. The operating part (320) has a tool locking structure on its outer wall. The tool locking structure includes a polygonal prism, a spline, or a planar bayonet.

10. The fiber optic temperature sensor according to claim 1, characterized in that, The locking member (3) and the connecting member (2) are fitted with a clearance.

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