Sampling device of radio frequency power supply

Abstract

The utility model provides a sampling device of a radio frequency power supply. The sampling device comprises a first sampling circuit, a second sampling circuit and a signal processing system, the first end of the first sampling circuit is connected with the power amplification final-stage output end of the radio frequency power supply; the second end of the first sampling circuit is connected with the signal processing system; the first end of the second sampling circuit is connected with the external output end of the radio frequency power supply; the second end of the second sampling circuit is connected with the signal processing system; wherein the signal processing system receives signals obtained by the first sampling circuit and the second sampling circuit; the signal processing system comprises: a differential operational amplifier module; the first end of the differential operational amplifier module is connected with the second end of the first sampling circuit and the second end of the second sampling circuit. According to the utility model, the current and the voltage of the output port of the radio frequency power supply are collected, and signal processing is carried out through the signal processing system, so that the voltage and the current which are output in real time are obtained, system closed-loop control is carried out, and the loop responsiveness is greatly improved.

Description

A sampling device for radio frequency power supply Technical Field

[0001] This utility model relates to the field of radio frequency power supply technology, and in particular to a sampling device for radio frequency power supply. Background Technology

[0002] Currently, in the field of RF power supply closed-loop control, passive hardware sampling schemes are mostly used to achieve system closed-loop sampling and control. However, passive hardware sampling schemes suffer from long loop delay times and slow dynamic response times. Furthermore, passive hardware sampling schemes can only acquire the frequency of the signal to be sampled and cannot acquire other frequency-coupled interference signals on the signal to be sampled, which is not conducive to filtering interference signals in the system's undesirable frequency bands. Summary of the Invention

[0003] This utility model provides a sampling device for radio frequency power supply to solve the problem that existing devices cannot acquire other frequency coupling interference signals on the signal to be sampled.

[0004] To solve the above-mentioned technical problems, this utility model is implemented as follows:

[0005] In a first aspect, embodiments of the present invention provide a sampling device for an radio frequency power supply, comprising:

[0006] The system comprises a first sampling circuit, a second sampling circuit, and a signal processing system.

[0007] The first terminal of the first sampling circuit is connected to the output terminal of the final stage of the RF power amplifier; the second terminal of the first sampling circuit is connected to the signal processing system.

[0008] The first terminal of the second sampling circuit is connected to the external output terminal of the RF power supply; the second terminal of the second sampling circuit is connected to the signal processing system; wherein, the signal processing system receives the signals obtained by the first sampling circuit and the second sampling circuit; the output terminal of the final stage of the RF power amplifier is connected to the external output terminal of the RF power supply.

[0009] The signal processing system includes a differential operational amplifier module; the first terminal of the differential operational amplifier module is connected to the second terminal of the first sampling circuit and the second terminal of the second sampling circuit, respectively.

[0010] Optionally, the first sampling circuit includes a current transformer, a first capacitor, a resistor structure, a first resistor, and a first filter unit;

[0011] The first terminal of the primary side of the current transformer is connected to the output terminal of the final stage of the power amplifier of the radio frequency power supply, the second terminal of the primary side of the current transformer is connected to the external output terminal of the radio frequency power supply, the first terminal of the secondary side of the current transformer is grounded, and the second terminal of the secondary side of the current transformer is connected to the first terminal of the first capacitor.

[0012] The second end of the first capacitor is connected to the first end of the resistor structure; the second end of the resistor structure is connected to the first end of the first resistor; the second end of the first resistor is connected to the first end of the first filter unit; and the second end of the first filter unit is connected to the signal processing system.

[0013] Optionally, the resistor structure includes at least two impedance matching resistors connected in parallel, wherein the first ends of each impedance matching resistor in the resistor structure are connected together, the first ends of each impedance matching resistor are respectively connected to the second end of the first capacitor and the first end of the first resistor, and the second ends of each impedance matching resistor in the resistor structure are connected to and grounded.

[0014] Optionally, the first filtering unit includes at least two LC filters connected in series.

[0015] Optionally, the second sampling circuit includes a second capacitor, a voltage divider unit, and a second filter unit;

[0016] The first terminal of the second capacitor is connected to the external output terminal of the RF power supply; the second terminal of the second capacitor is connected to the first terminal of the voltage divider unit and the first terminal of the second filter device; the second terminal of the voltage divider unit is grounded; and the second terminal of the second filter unit is connected to the signal processing system.

[0017] Optionally, the voltage divider unit includes a capacitor bank and a resistor bank connected in parallel. The capacitor bank includes at least one capacitor, and the resistor bank includes at least one resistor. A first terminal of the capacitor bank is connected to a first terminal of the resistor bank. A second terminal of the capacitor bank is connected to a second terminal of the resistor bank. A first terminal of the capacitor bank is connected to a second terminal of the second capacitor. A first terminal of the resistor bank is connected to a first terminal of the second filter unit.

[0018] Optionally, the capacitor bank includes a third capacitor and a fourth capacitor connected in parallel, and the resistor bank includes a second resistor; wherein, the first terminal of the third capacitor is connected to the first terminal of the fourth capacitor and the first terminal of the second resistor respectively; the second terminal of the third capacitor is connected to the second terminal of the fourth capacitor and the second terminal of the second resistor respectively; the first terminal of the third capacitor is connected to the second terminal of the second capacitor; and the first terminal of the second resistor is connected to the first terminal of the second filter unit.

[0019] Optionally, the second filtering unit includes at least two LC filters connected in series.

[0020] Optionally, the signal processing system further includes: an analog-to-digital converter and a field-programmable gate array (FPGA); the second terminal of the differential operational amplifier module is connected to the analog-to-digital converter; and the analog-to-digital converter is connected to the FPGA.

[0021] Optionally, the differential operational amplifier module includes a first differential operational amplifier module connected to the first sampling circuit and a second differential operational amplifier module connected to the second sampling circuit.

[0022] Optionally, the analog-to-digital converter is connected to the field-programmable gate array via a parallel data bus.

[0023] Secondly, the present invention provides a radio frequency power supply, characterized in that it includes a sampling device for the radio frequency power supply as described in any one of the first aspects.

[0024] In this invention, a first sampling circuit, a second sampling circuit, and a signal processing system are configured. The first terminal of the first sampling circuit is connected to the output of the final stage of the RF power amplifier. The second terminal of the first sampling circuit is connected to the signal processing system. The first terminal of the second sampling circuit is connected to the external output of the RF power supply. The second terminal of the second sampling circuit is also connected to the signal processing system. The signal processing system receives signals from both the first and second sampling circuits. The output of the final stage of the RF power amplifier is connected to the external output of the RF power supply. The signal processing system includes a differential operational amplifier module. The first terminal of the differential operational amplifier module is connected to the second terminals of both the first and second sampling circuits. By acquiring the current and voltage at the RF power supply output port and processing them through the signal processing system, the real-time output voltage and current of the RF power supply are obtained for system closed-loop control. This significantly improves the loop responsiveness and solves the problem of not being able to acquire other frequency-coupled interference signals on the sampled signal. Attached Figure Description

[0025] Various other advantages and benefits will become apparent to those skilled in the art upon reading the following detailed description of preferred embodiments. The accompanying drawings are for illustrative purposes only and are not intended to limit the scope of the invention. Furthermore, the same reference numerals denote the same parts throughout the drawings. In the drawings:

[0026] Figure 1 is a schematic diagram of the structure of a sampling device for an RF power supply provided in an embodiment of the present invention. Detailed Implementation

[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present utility model.

[0028] Please refer to Figure 1. This embodiment of the present invention provides a sampling device for an radio frequency power supply, comprising:

[0029] The first sampling circuit 01, the second sampling circuit 02, and the signal processing system 03;

[0030] The first terminal of the first sampling circuit 01 is connected to the output terminal ① of the final stage of the RF power amplifier; the second terminal of the first sampling circuit 01 is connected to the signal processing system 03.

[0031] The first terminal of the second sampling circuit 02 is connected to the external output terminal ② of the RF power supply; the second terminal of the second sampling circuit 02 is connected to the signal processing system 03; wherein, the signal processing system 03 receives the signals obtained by the first sampling circuit 01 and the second sampling circuit 02; the final output terminal ① of the RF power supply power amplifier is connected to the external output terminal ② of the RF power supply.

[0032] The signal processing system 03 includes a differential operational amplifier module 31; the first terminal of the differential operational amplifier module 31 is connected to the second terminal of the first sampling circuit 01 and the second terminal of the second sampling circuit 02.

[0033] In this embodiment of the utility model, a first sampling circuit 01, a second sampling circuit 02, and a signal processing system 03 are provided; the first sampling circuit 01, the second sampling circuit 02, and the signal processing system 03 are connected in series; the first terminal of the first sampling circuit 01 is connected to the output terminal ① of the final stage of the RF power amplifier; the second terminal of the first sampling circuit 01 is connected to the signal processing system 03; the first terminal of the second sampling circuit 02 is connected to the external output terminal ② of the RF power supply; the second terminal of the second sampling circuit 02 is connected to the signal processing system 03; wherein, the signal processing system 03 receives the signals obtained by the first sampling circuit 01 and the second sampling circuit 02. By acquiring the current and voltage at the output port of the RF power supply and processing them through a signal processing system, the signals acquired by the first sampling circuit 01 and the second sampling circuit 02 are input into the differential operational amplifier module 31. The differential operational amplifier module 31 uses conventional circuits or conventional devices, such as an amplifier supporting dual input and output, or two single-channel amplifiers. After the acquired AC voltage and AC current signals are amplified and common-mode conditioned by the differential operational amplifier module 31, the acquired digital voltage and current signals are modulated and demodulated to obtain the real-time output voltage and current of the RF power supply for system closed-loop control. This significantly improves the loop responsiveness and solves the problem of not being able to acquire other frequency coupling interference signals on the sampled signal.

[0034] In this embodiment of the present invention, optionally, the first sampling circuit 01 includes a current transformer 11, a first capacitor 12, a resistor structure 13, a first resistor 14, and a first filter unit 15.

[0035] The first terminal of the primary side of the current transformer 11 is connected to the output terminal ① of the final stage of the power amplifier of the radio frequency power supply, the second terminal of the primary side of the current transformer 11 is connected to the external output terminal ② of the radio frequency power supply, the first terminal of the secondary side of the current transformer 11 is grounded, and the second terminal of the secondary side of the current transformer 11 is connected to the first terminal of the first capacitor 12.

[0036] The second end of the first capacitor 12 is connected to the first end of the resistor structure 13; the second end of the resistor structure 13 is connected to the first end of the first resistor 141; the second end of the first resistor 141 is connected to the first end of the first filter unit 15; and the second end of the first filter unit 15 is connected to the signal processing system 03.

[0037] In this embodiment of the present invention, a current transformer 11 is connected in series between the output terminal ① of the final stage of the power amplifier of the RF power supply and the external output terminal ② of the RF power supply. The connecting line between the output terminal ① of the final stage of the power amplifier of the RF power supply and the external output terminal ② of the RF power supply passes through the coil of the current transformer 11, but is not connected through the current transformer 11. The current transformer 11 is connected to the circuit under test through its primary side to carry the actual current and is used to collect the output current of the RF power supply. The current is then connected to the first capacitor 12 through the output part of the secondary side of the current transformer 11. The first capacitor 12 is used to isolate the DC signal. The current is then collected through the resistor structure 13, which converts the current signal into a voltage signal. The total impedance of the circuit is then adjusted through the first resistor 14 to achieve impedance matching with the signal source or load. Good impedance matching can maximize power transmission and reduce reflection loss. The signal then passes through the first filter unit 15 and is finally input to the signal processing system 03.

[0038] In this embodiment of the present invention, optionally, the resistor structure 13 includes at least two impedance matching resistors connected in parallel, wherein the first ends of each impedance matching resistor in the resistor structure 13 are connected together, the first ends of each impedance matching resistor are respectively connected to the second end of the first capacitor 12 and the first end of the first resistor 14, and the second ends of each impedance matching resistor in the resistor structure 13 are connected and grounded.

[0039] In this embodiment of the invention, the resistor structure 13 formed by at least two parallel impedance matching resistors distributes power across multiple resistors, thereby improving the overall power handling capability of the circuit and preventing individual resistors from overheating or being damaged.

[0040] In this embodiment of the present invention, optionally, the first filtering unit 15 includes at least two LC filters connected in series.

[0041] In this embodiment of the present invention, the first filter unit 15 consists of two inductors (L) and two capacitors (C). The second-stage LC filter is used to smooth the DC voltage after rectification, reduce fluctuations, make the output voltage more stable, improve the stability of the system, and reduce oscillations and unnecessary fluctuations.

[0042] In this embodiment of the present invention, optionally, the second sampling circuit 02 includes a second capacitor 21, a voltage divider unit 22, and a second filter unit 23;

[0043] The first end of the second capacitor 21 is connected to the external output terminal ② of the RF power supply; the second end of the second capacitor 21 is connected to the first end of the voltage divider unit 22; the second end of the voltage divider unit 22 is connected to the first end of the second filter unit 23; and the second end of the second filter unit 23 is connected to the signal processing system 03.

[0044] In this embodiment of the present invention, the RF output voltage signal is obtained by voltage division unit 22, wherein the second capacitor 21 is used to isolate the DC signal, and then the voltage signal is input to the signal processing system 03 through the second filter unit 23.

[0045] In this embodiment of the present invention, optionally, the voltage divider unit includes a capacitor bank and a resistor bank connected in parallel, wherein the capacitor bank includes at least one capacitor and the resistor bank includes at least one resistor; a first end of the capacitor bank is connected to a first end of the resistor bank; a second end of the capacitor bank is connected to a second end of the resistor bank; a first end of the capacitor bank is connected to a second end of the second capacitor; and a first end of the resistor bank is connected to a first end of the second filter unit.

[0046] In this embodiment of the present invention, optionally, the voltage divider unit includes a third capacitor 221, a fourth capacitor 222, and a second resistor 223 connected in parallel; the first end of the third capacitor 221 is connected to the first end of the fourth capacitor 222 and the first end of the second resistor 223 respectively; the second end of the third capacitor 221 is connected to the second end of the fourth capacitor 222 and the second end of the second resistor 223 respectively; the first end of the third capacitor 221 is connected to the second end of the second capacitor 21; and the first end of the second resistor 223 is connected to the first end of the second filter unit 23.

[0047] In this embodiment of the invention, the voltage signal output by the RF power supply is obtained by voltage division through the second capacitor 21, the third capacitor 221 and the fourth capacitor 222. The second resistor 223 serves as a matching resistor, which effectively matches the impedance, reduces signal reflection and improves signal quality, thereby improving the overall performance of the circuit.

[0048] In this embodiment of the present invention, optionally, the second filtering unit includes at least two LC filters connected in series.

[0049] In this embodiment of the present invention, the second filter unit 23 consists of two inductors (L) and two capacitors (C). The two-stage LC filter is used to smooth the DC voltage after rectification, reduce fluctuations, make the output voltage more stable, improve the stability of the system, and reduce oscillations and unnecessary fluctuations.

[0050] In this embodiment of the present invention, the signal processing system 03 may optionally include: an analog-to-digital converter 32 (ADC) and a field-programmable gate array 33 (FPGA);

[0051] The second terminal of the differential operational amplifier module 31 is connected to the analog-to-digital converter 32; the analog-to-digital converter 32 is connected to the field-programmable gate array 33.

[0052] In this embodiment of the present invention, the signals acquired by the first sampling circuit 01 and the second sampling circuit 02 are both input into the differential operational amplifier module 31. The differential operational amplifier module 31 includes a first differential operational amplifier module connected to the first sampling circuit and a second differential operational amplifier module connected to the second sampling circuit. The acquired AC voltage and AC current signals are amplified and common-mode conditioned by the differential operational amplifier module 31, and then sent to the analog-to-digital converter 32, i.e., the high-speed ADC chip, for analog-to-digital conversion. The analog-to-digital converter 32 then sends the digital signals to the field-programmable gate array 33. The analog-to-digital converter 32 is connected to the field-programmable gate array 33 through a parallel data bus. The field-programmable gate array 33 modulates and demodulates the acquired digital voltage and current signals to obtain real-time RF output voltage and current for power system closed-loop control.

[0053] In this embodiment of the invention, the current at the output port of the RF power supply is collected by a current transformer, and the voltage at the output port is collected by a capacitor divider. After passing through two stages of CL filtering and differential operational amplifier module conditioning, the analog signal is converted into a digital signal by a high-speed ADC and sent to the processor chip for signal processing. The real-time output voltage and current of the RF power supply are obtained for system closed-loop control, which greatly improves the loop responsiveness. This enables functions such as pulse output and rapid arc detection, significantly improving the dynamic characteristics of the RF power supply. At the same time, it helps to analyze and filter other undesired interference harmonic frequencies, and the stability of the power supply system is significantly improved.

[0054] In this embodiment of the present invention, the radio frequency power supply according to this embodiment includes a sampling device for the radio frequency power supply according to the above embodiment. Since the sampling device for the radio frequency power supply according to the above embodiment of the present invention has the above-mentioned technical effects, the radio frequency power supply according to this embodiment also has the corresponding technical effects. By collecting the current and voltage at the output port of the radio frequency power supply and processing the signal through the signal processing system, the real-time output voltage and current of the radio frequency power supply can be obtained for system closed-loop control, thereby greatly improving the loop responsiveness.

[0055] It should be noted that, in this document, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Unless otherwise specified, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element.

[0056] The sequence numbers of the above embodiments of the present invention are for descriptive purposes only and do not represent the superiority or inferiority of the embodiments.

[0057] The above description is only a preferred embodiment of this application. It should be noted that for those skilled in the art, several improvements and modifications can be made without departing from the principle of this application, and these improvements and modifications should also be considered within the scope of protection of this application.

Claims

1. A sampling device for an radio frequency power supply, characterized in that, include: The system comprises a first sampling circuit, a second sampling circuit, and a signal processing system. The first terminal of the first sampling circuit is connected to the output terminal of the final stage of the RF power amplifier; the second terminal of the first sampling circuit is connected to the signal processing system; the first terminal of the second sampling circuit is connected to the external output terminal of the RF power supply; the second terminal of the second sampling circuit is connected to the signal processing system; wherein, the signal processing system receives signals obtained by the first sampling circuit and the second sampling circuit; the output terminal of the final stage of the RF power amplifier is connected to the external output terminal of the RF power supply; the signal processing system includes: a differential operational amplifier module; the first terminal of the differential operational amplifier module is connected to the second terminal of the first sampling circuit and the second terminal of the second sampling circuit, respectively.

2. The sampling device for the radio frequency power supply according to claim 1, characterized in that, The first sampling circuit includes a current transformer, a first capacitor, a resistor structure, a first resistor, and a first filter unit. The first terminal of the primary side of the current transformer is connected to the output terminal of the final stage of the RF power amplifier; the second terminal of the primary side of the current transformer is connected to the external output terminal of the RF power supply; the first terminal of the secondary side of the current transformer is grounded; the second terminal of the secondary side of the current transformer is connected to the first terminal of the first capacitor; the second terminal of the first capacitor is connected to the first terminal of the resistor structure; the second terminal of the resistor structure is connected to the first terminal of the first resistor; the second terminal of the first resistor is connected to the first terminal of the first filter unit; and the second terminal of the first filter unit is connected to the signal processing system.

3. The sampling device for radio frequency power supply according to claim 2, characterized in that, The resistor structure includes at least two impedance matching resistors connected in parallel. The first ends of each impedance matching resistor in the resistor structure are connected together, and the first ends of each impedance matching resistor are respectively connected to the second end of the first capacitor and the first end of the first resistor. The second ends of each impedance matching resistor in the resistor structure are connected to and grounded.

4. The sampling device for radio frequency power supply according to claim 2, characterized in that, The first filtering unit includes at least two LC filters connected in series.

5. The sampling device for the radio frequency power supply according to claim 1, characterized in that, The second sampling circuit includes a second capacitor, a voltage divider unit, and a second filter unit; the first end of the second capacitor is connected to the external output terminal of the RF power supply; the second end of the second capacitor is connected to the first end of the voltage divider unit and the first end of the second filter unit; the second end of the voltage divider unit is grounded; and the second end of the second filter unit is connected to the signal processing system.

6. The sampling device for radio frequency power supply according to claim 5, characterized in that, The voltage divider unit includes a capacitor bank and a resistor bank connected in parallel. The capacitor bank includes at least one capacitor, and the resistor bank includes at least one resistor. A first terminal of the capacitor bank is connected to a first terminal of the resistor bank. A second terminal of the capacitor bank is connected to a second terminal of the resistor bank. A first terminal of the capacitor bank is connected to a second terminal of the second capacitor. A first terminal of the resistor bank is connected to a first terminal of the second filter unit.

7. The sampling device for radio frequency power supply according to claim 6, characterized in that, The capacitor bank includes a third capacitor and a fourth capacitor connected in parallel, and the resistor bank includes a second resistor; wherein, the first terminal of the third capacitor is connected to the first terminal of the fourth capacitor and the first terminal of the second resistor respectively; the second terminal of the third capacitor is connected to the second terminal of the fourth capacitor and the second terminal of the second resistor respectively; the first terminal of the third capacitor is connected to the second terminal of the second capacitor; and the first terminal of the second resistor is connected to the first terminal of the second filter unit.

8. The sampling device for radio frequency power supply according to claim 5, characterized in that, The second filtering unit includes at least two LC filters connected in series.

9. The sampling device for the radio frequency power supply according to any one of claims 1 to 8, characterized in that, The signal processing system further includes: an analog-to-digital converter and a field-programmable gate array; the second terminal of the differential operational amplifier module is connected to the analog-to-digital converter; the analog-to-digital converter is connected to the field-programmable gate array.

10. The sampling device for radio frequency power supply according to claim 9, characterized in that, The differential operational amplifier module includes a first differential operational amplifier module connected to the first sampling circuit and a second differential operational amplifier module connected to the second sampling circuit.

11. The sampling device for radio frequency power supply according to claim 9, characterized in that, The analog-to-digital converter is connected to the field-programmable gate array via a parallel data bus.

12. A radio frequency power supply, characterized in that, The sampling device includes the radio frequency power supply as described in any one of claims 1-11.

Images