Ion implantation equipment

Abstract

The utility model discloses ion implantation equipment, which comprises a wafer library, the wafer library comprises a vacuum cavity and a driving mechanism, the driving mechanism is connected with the vacuum cavity through a mounting plate, the driving mechanism comprises a driving rod, a first end of the driving rod extends into the vacuum cavity, a wafer boat is arranged at the first end of the driving rod, and a second end of the driving rod extends into the vacuum cavity. A sealing structure is arranged between the driving rod and the vacuum cavity and comprises a corrugated pipe arranged on the outer side of the driving rod in a sleeving mode, the first end of the corrugated pipe is in sealed connection with the vacuum cavity, and the second end of the corrugated pipe is in sealed connection with the second end of the driving rod. According to the wafer library of the ion implantation equipment provided by the utility model, the driving rod and the vacuum cavity are sealed by adopting the corrugated pipe, and the traditional sliding sealing is changed into static sealing, so that the sealing reliability is improved, the requirements on the processing and assembling precision of the driving rod are reduced, and the production cost is reduced. The problem that traditional sealing is prone to failure due to abrasion is solved.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor device manufacturing equipment technology, and more specifically, to an ion implantation device. Background Technology

[0002] This invention relates to the field of ion implantation in integrated circuits, and more specifically, to a sealing device for maintaining the reciprocating motion of a wafer in a high vacuum environment. Ion implantation is a technique that accelerates and implants specific elements into semiconductor materials in the form of an ion beam to alter the material's conductivity and crystal structure. Ion implantation must be performed in a high vacuum environment, typically below 10⁻⁵ Torr. If the vacuum level is too high, excessive gas molecules will be incorporated into the ion beam, affecting the beam current (the beam current represents the ion beam current, measured in milliamperes) and consequently the implantation dose (the dose represents the number of ions implanted per unit area of ​​the wafer surface, measured in atoms or ions per square centimeter).

[0003] Ion implantation equipment typically feeds multiple wafers into a crystal boat within a vacuum chamber. A vacuum robotic arm, working in conjunction with the crystal boat's vertical movement, removes the wafers to be implanted or returns implanted wafers to the boat. Ion implantation equipment requires strict control over impurity content during design and operation to minimize contamination of the vacuum environment. The crystal boat drive is a linear drive device, usually installed in the atmospheric environment, while the crystal boat is placed in the vacuum environment. The two are connected by a guide shaft, whose reciprocating motion drives the crystal boat's vertical movement. Therefore, a sealing device is required between the guide shaft and the vacuum chamber.

[0004] Because the guide shaft needs to move, the seal between it and the sealing device is dynamic, resulting in poor sealing reliability. Furthermore, it requires high precision in the machining and assembly of moving parts and sealing structures, which increases the manufacturing and maintenance costs of the equipment. Utility Model Content

[0005] In view of the shortcomings of the existing technology, this utility model innovatively provides an ion implantation device that can improve the sealing performance of the vacuum transmission section.

[0006] To achieve the aforementioned technical objectives, this utility model discloses an ion implantation device, including a wafer library. The wafer library includes a vacuum chamber and a driving mechanism. The driving mechanism is connected to the vacuum chamber via a mounting plate. The driving mechanism includes a driving rod, the first end of which extends into the vacuum chamber. A crystal boat is disposed at the first end of the driving rod.

[0007] A sealing structure is provided between the drive rod and the vacuum chamber. The sealing structure includes a bellows sleeved on the outside of the drive rod. The first end of the bellows is sealed to the vacuum chamber, and the second end of the bellows is sealed to the second end of the drive rod.

[0008] Furthermore, an end plate is fixedly connected to the second end of the drive rod, and the second end of the bellows is sealed to the end plate.

[0009] Furthermore, a guide ring is provided on the inner wall of the bellows, and the guide ring is sleeved on the drive rod.

[0010] Furthermore, the drive mechanism also includes a power output device, which is connected to the end plate and is used to drive the drive rod to move linearly.

[0011] Furthermore, the power output device includes a motor, and the drive mechanism further includes a screw, which is arranged parallel to the drive rod and is drivenly connected to the motor.

[0012] A slider is threaded onto the screw, and the slider is fixedly connected to the end plate.

[0013] Furthermore, the driving mechanism also includes a guide structure, which is arranged parallel to the driving rod, and the slider and / or the end plate is slidably connected to the guide structure.

[0014] Furthermore, the guiding structure is a guide rod.

[0015] Furthermore, the power output device includes a linear motor, a cylinder, or an electric cylinder.

[0016] Furthermore, the mounting plate includes a first part and a second part that are perpendicularly connected to each other, the drive mechanism is disposed on the first part, the first end of the bellows is connected to the second part, and the second part is connected to the vacuum chamber.

[0017] Furthermore, a sealing ring is provided between the vacuum chamber and the second part, and / or,

[0018] A sealing ring is provided between the first end of the corrugated pipe and the second part, and a sealing ring is provided between the second end of the corrugated pipe and the end plate.

[0019] The beneficial effects of this utility model are as follows:

[0020] The ion implantation equipment wafer library provided by this utility model uses a bellows for sealing between the drive rod and the vacuum chamber, changing the traditional sliding seal to a static seal, thereby improving the reliability of the seal and reducing the requirements for the processing and assembly precision of the drive rod, and solving the problem that traditional seals are prone to failure due to wear. Attached Figure Description

[0021] Figure 1 This diagram illustrates the motion sealing structure in existing related equipment.

[0022] Figure 2 Show Figure 1 Enlarged view at point I;

[0023] Figure 3 A schematic diagram of the U-shaped sealing ring structure is shown;

[0024] Figure 4 This diagram shows a partial structural schematic of an ion implantation device according to an embodiment of the present invention;

[0025] Figure 5 Show Figure 4 A partial sectional view of the central structure;

[0026] Figure 6 Show Figure 4 A schematic diagram of the exploded structure of the middle structural part.

[0027] In the picture,

[0028] 1' Drive rod; 2' Vacuum chamber; 3' U-shaped sealing ring; 31' Outer lip; 32' Inner lip;

[0029] 1. Vacuum chamber; 2. Drive rod; 3. Mounting plate; 31. First part; 32. Second part; 4. Bellows; 41. Guide ring; 5. Motor; 6. Screw; 7. Slider; 8. Guide rod; 9. Coupling; 10. Sealing ring. Detailed Implementation

[0030] The ion implantation device provided by this utility model will be explained and described in detail below with reference to the accompanying drawings.

[0031] like Figure 1 , Figure 2 , Figure 3As shown, in a vacuum environment, the existing linear motion sealing method between the drive rod 1' and the vacuum chamber 2' in a wafer library mostly uses U-shaped sealing rings 3' for sealing. To ensure vacuum level and reduce contamination, a sealing device with a vacuum pump between the two U-shaped sealing rings 3' is often used. A vacuum pump is installed between the two U-shaped sealing rings 3' to create a vacuum environment, but its vacuum level is less than that of the vacuum chamber (i.e., P>P1>P2, where P is atmospheric pressure). This creates a pressure difference on both sides of each U-shaped sealing ring 3'. The opening of each U-shaped sealing ring 3' is then placed against the high-pressure environment (high pressure, low vacuum level). The pressure difference causes the U-shaped sealing rings 3' to open, with the inner lip 32' surface tightly against the moving guide rod and the outer lip 31' surface tightly against the surface of the fixed mounting base, thus achieving a seal. However, friction is generated due to the relative movement between the moving guide rod and the sealing ring, which can easily lead to seal failure after prolonged use. Furthermore, this structure places high demands on the machining and assembly precision of the moving guide rod and its mating components. If the precision is not met, problems such as movement jamming or seal failure may occur.

[0032] The ion implantation equipment wafer library provided by this utility model uses a bellows for sealing between the drive rod and the vacuum chamber, changing the traditional sliding seal to a static seal. This improves the reliability of the seal, reduces the requirements for the machining and assembly precision of the drive rod, and solves the problem of traditional seals failing due to wear. The following detailed description of this utility model, in conjunction with specific embodiments, further illustrates this utility model:

[0033] In some embodiments, the present invention provides an ion implantation apparatus, including a wafer library, such as... Figure 4 , Figure 5 , Figure 6 As shown, the wafer library includes a vacuum chamber 1 and a drive mechanism. The drive mechanism is connected to the vacuum chamber 1 via a mounting plate 3. The drive mechanism includes a drive rod 2. A through hole is provided on the side wall of the vacuum chamber 1. The first end of the drive rod 2 extends into the vacuum chamber 1 through the through hole and can move along the axial direction of the drive rod 2. A wafer boat is provided at the first end of the drive rod 2. The drive rod 2 is used to drive the wafer boat to move within the vacuum chamber. The wafer boat is used to carry the wafers and, in conjunction with a robotic arm, to process the wafers within the vacuum chamber 1.

[0034] A sealing structure is provided between the drive rod 2 and the vacuum chamber 1. The sealing structure includes a bellows 4 sleeved on the outside of the drive rod 2. The first end of the bellows 4 is sealed to the vacuum chamber 1, and the second end of the bellows 4 is sealed to the second end of the drive rod 2. The interior of the bellows 4 is connected to the interior of the vacuum chamber 1, and both are in a vacuum state. The second end of the bellows 4 moves synchronously with the drive rod 2. The bellows 4 extends or contracts as the drive rod 2 moves, ensuring that the vacuum chamber 1 is isolated from the external environment without affecting the movement of the drive rod 2. Optionally, the bellows 4 is a compressible welded bellows.

[0035] Optionally, the mounting plate 3 includes a first part 31 and a second part 32, both of which are flat plate structures and are perpendicularly connected to each other. The drive mechanism is disposed on the first part 31, the first end of the bellows 4 is connected to the second part 32, and the second part 32 is connected to the vacuum chamber 1. The second part 32 has a hole that is opposite to a through hole on the vacuum chamber 1, allowing the drive rod 2 to extend into the vacuum chamber 1. The first part 31 is located between the vacuum chamber 1 and the bellows 4, and a sealing ring 10 is provided between the first end of the bellows and the second part 32, as well as between the vacuum chamber 1 and the second part 32.

[0036] In some embodiments, such as Figure 4 , Figure 6 As shown, the second end of the drive rod 2 is fixedly connected to an end plate, and the second end of the bellows 4 is sealed to the end plate. Optionally, a sealing ring 10 is provided between the second end of the bellows 4 and the end plate. Optionally, all sealing rings 10 provided can be O-rings, and sealing rings of the same specification can be used to make equipment assembly more convenient.

[0037] In some embodiments, such as Figure 5 As shown, a guide ring 41 is provided on the inner wall of the bellows 4. The guide ring 41 is sleeved on the drive rod 2. Optionally, multiple guide rings 41 are provided along the length of the bellows 4, and the multiple guide rings 41 are spaced apart by a certain distance. The provision of the guide ring 41 can avoid or reduce contact with the drive rod 2 during the extension or contraction of the bellows 4, thereby avoiding or reducing friction and making the movement of the drive rod 2 more reliable.

[0038] The drive mechanism also includes a power output device, which is connected to the end plate and is used to drive the drive rod 2 to move linearly along its axial direction.

[0039] In some embodiments, the power output device includes a motor 5, which is fixedly mounted on the first portion 31 of the mounting plate 3. The drive mechanism also includes a screw 6, which is parallel to and rotatably mounted on the first portion 31 of the mounting plate 3, and connected to the motor 5, for example, via a coupling 9. The motor 5 drives the screw 6 to rotate. A slider 7 is threadedly connected to the screw 6. The slider 7 includes a first connecting block and a second connecting block, which are integrated. The first connecting block has a threaded hole for threaded connection with the screw 6, and the second connecting block is fixedly connected to the end plate. When the screw 6 rotates, it can drive the slider 7 to move along the screw 6, thereby causing the slider 7 to drive the drive rod 2 to move. The direction of movement of the drive rod 2 can be controlled by controlling the rotation direction of the motor 5. For example, when the motor 5 rotates forward, the drive rod 2 moves towards the inside of the vacuum chamber 1, and when the motor 5 rotates in reverse, the drive rod 2 moves towards the outside of the vacuum chamber 1.

[0040] Alternatively, the power output device can also be a linear drive mechanism such as a linear motor, cylinder or electric cylinder, which can be directly connected to the end plate to drive the drive rod 2 to move linearly, making the overall structure simpler.

[0041] In some embodiments, the drive mechanism further includes a guide structure, which is arranged parallel to the drive rod 2, and the slider 7 and / or end plate are slidably connected to the guide structure. For example, the second connecting block of the slider 7 is slidably connected to the guide structure, and the guide structure can play a guiding role when the slider moves, thereby ensuring the stability of the movement of the drive rod 2.

[0042] Optionally, the guide structure is a guide rod 8, and a guide hole can be provided on the slider 7 or the end plate. The guide rod 8 passes through the guide hole and forms a sliding fit. Alternatively, the guide structure can also be a guide rail, with a guide block or guide wheel provided on the slider 7 or the end plate to cooperate with the guide rail to form a sliding connection.

[0043] This invention converts the dynamic seal between the drive rod 2 and the vacuum chamber 1 into a static seal through the bellows 4, which improves the reliability of the system, reduces contamination caused by wear due to the relative movement of moving parts and the sealing ring, and increases the system vacuum level. It also solves the problem of high precision requirements for component processing and assembly caused by over-positioning, simplifies the system structure, and reduces production costs.

[0044] In the description of this utility model, it should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship are based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0045] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0046] In the description of this specification, the references to terms such as "this embodiment," "an embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in a suitable manner in any at least one embodiment or example. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0047] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this utility model, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0048] The above are merely preferred embodiments of the present utility model and are not intended to limit the present utility model. Any modifications, equivalent substitutions, and simple improvements made on the substantive content of the present utility model should be included within the protection scope of the present utility model.

Claims

1. An ion implantation apparatus, characterized by, The device includes a wafer library, which comprises a vacuum chamber and a driving mechanism. The driving mechanism is connected to the vacuum chamber via a mounting plate. The driving mechanism includes a driving rod, the first end of which extends into the vacuum chamber, and a wafer boat is disposed at the first end of the driving rod. A sealing structure is provided between the drive rod and the vacuum chamber. The sealing structure includes a bellows sleeved on the outside of the drive rod. The first end of the bellows is sealed to the vacuum chamber, and the second end of the bellows is sealed to the second end of the drive rod.

2. The ion implantation apparatus of claim 1, wherein, The second end of the drive rod is fixedly connected to an end plate, and the second end of the bellows is sealed to the end plate.

3. The ion implantation apparatus of claim 2, wherein, A guide ring is provided on the inner wall of the bellows, and the guide ring is sleeved on the drive rod.

4. The ion implantation apparatus of claim 2, wherein, The drive mechanism also includes a power output device, which is connected to the end plate and is used to drive the drive rod to move linearly.

5. The ion implantation apparatus of claim 4, wherein, The power output device includes a motor, and the drive mechanism further includes a screw, which is arranged parallel to the drive rod and is drivenly connected to the motor. A slider is threaded onto the screw, and the slider is fixedly connected to the end plate.

6. The ion implantation apparatus of claim 5, wherein, The driving mechanism further includes a guide structure, which is arranged parallel to the driving rod, and the slider and / or the end plate are slidably connected to the guide structure.

7. The ion implantation apparatus according to claim 6, characterized in that, The guiding structure is a guide rod.

8. The ion implantation apparatus of claim 4, wherein, The power output device includes a linear motor, a cylinder, or an electric cylinder.

9. The ion implantation apparatus of any of claims 2-8, wherein, The mounting plate includes a first part and a second part that are perpendicularly connected to each other. The drive mechanism is disposed on the first part. The first end of the bellows is connected to the second part, and the second part is connected to the vacuum chamber.

10. The ion implantation apparatus of claim 9, wherein, A sealing ring is provided between the vacuum chamber and the second part, and / or, A sealing ring is provided between the first end of the corrugated pipe and the second part, and a sealing ring is provided between the second end of the corrugated pipe and the end plate.

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