Wafer elastic positioning support and wafer transfer box cover plate

Abstract

The utility model relates to a wafer elastic positioning support and a wafer transfer box cover plate, which comprise a square support main body, the support main body is hollow, a plurality of wafer elastic jacking and positioning modules are uniformly arranged at the hollow part, and each wafer elastic jacking and positioning module comprises a wafer elastic jacking and positioning sheet. The two sides of the wafer elastic jacking and positioning piece are connected with the support body through a connecting column and an elastic column respectively, the elastic column is obliquely connected with the support body by 15-20 degrees, the wafer elastic jacking and positioning piece, the connecting column and the elastic column are all made of PEI materials, the elastic column obliquely connected with the support body is combined, and the high-quality wafer elastic jacking and positioning structure is formed.

Description

Wafer flexible positioning bracket and wafer transfer box cover Technical Field

[0001] This utility model relates to wafer fabrication technology and its equipment, specifically, a wafer elastic positioning bracket and a wafer transfer box cover. Background Technology

[0002] Wafer transfer boxes are commonly used wafer storage and transportation equipment. They are used to load wafers and transport them to the corresponding processes. To ensure that the wafers are fixed during transportation, a layer of sponge pad is currently installed on the inside of the cover of the wafer transfer box. After the cover is sealed, the sponge pad elastically supports the wafer.

[0003] However, after prolonged use, the sponge will deteriorate and fail, making it unable to provide flexible support and fixation. In addition, after prolonged use, the sponge can easily contaminate the wafer, affecting the wafer quality.

[0004] Therefore, it is necessary to provide a wafer elastic positioning bracket and a wafer transfer box cover to solve the above problems. Summary of the Invention

[0005] The purpose of this invention is to provide a wafer elastic positioning bracket and a wafer transfer box cover.

[0006] One of the technical solutions is as follows:

[0007] A wafer elastic positioning bracket includes a square-shaped bracket body, which is hollow. Several wafer elastic support positioning modules are evenly arranged in the hollow space. Each wafer elastic support positioning module includes a wafer elastic support positioning piece. The wafer elastic support positioning piece is connected to the bracket body on both sides by connecting posts and elastic posts. The elastic posts are inclined at 15-20° to the bracket body. The wafer elastic support positioning piece, connecting posts, and elastic posts are all made of PEI material. The combination of the inclined elastic posts connected to the bracket body forms a high-quality wafer elastic support positioning structure.

[0008] Furthermore, the length of the wafer elastic support positioning piece is 1 / 2 to 3 / 5 of the width of the hollow part of the support body.

[0009] Furthermore, the wafer elastic support positioning pieces located at both ends of the support body have an arc-shaped anti-jamming collision part on one side of the support body, and correspondingly, the support body has an outwardly protruding corresponding arc groove.

[0010] Furthermore, the wafer elastic support positioning plates located at both ends of the support body are provided with corresponding ramps on the other side, and the wafer elastic support positioning plates located in the middle are provided with corresponding ramps on both sides.

[0011] Furthermore, there is a 3-6mm gap between the arc-shaped anti-jamming collision part and the corresponding convex space arc groove, as well as between the corresponding avoidance ramps.

[0012] The second technical solution is as follows:

[0013] A wafer transfer box cover includes a support body disposed in a wafer positioning corresponding groove in the cover body. The support body is a square hollow body. Loading positioning grooves are provided in the middle of both sides of the long end of the support body, and fixing corresponding openings are provided at both ends.

[0014] Several wafer elastic support and positioning modules are evenly arranged in the hollow part of the support body. Each wafer elastic support and positioning module includes a wafer elastic support and positioning piece. The wafer elastic support and positioning piece is connected to the support body on both sides by connecting posts and elastic posts. The elastic posts are connected to the support body at an angle of 15-20°. The wafer elastic support and positioning piece, connecting posts, and elastic posts are all made of PEI material. The combination of the elastic posts that are tilted to connect to the support body forms a high-quality wafer elastic support and positioning wafer transfer box cover structure.

[0015] Furthermore, the length of the wafer elastic support positioning piece is 1 / 2 to 3 / 5 of the width of the hollow part of the support body.

[0016] Furthermore, the wafer elastic support positioning pieces located at both ends of the support body have an arc-shaped anti-jamming collision part on one side of the support body, and correspondingly, the support body has an outwardly protruding corresponding arc groove.

[0017] Furthermore, the wafer elastic support positioning plates located at both ends of the support body are provided with corresponding ramps on the other side, and the wafer elastic support positioning plates located in the middle are provided with corresponding ramps on both sides.

[0018] Furthermore, there is a 3-6mm gap between the arc-shaped anti-jamming collision part and the corresponding convex space arc groove, as well as between the corresponding avoidance ramps.

[0019] Compared with the prior art, this utility model, through a high-quality wafer elastic support and positioning structure, can maintain wafer support and positioning normally for a long time without causing wafer deterioration or contamination, thus ensuring high-quality wafer fabrication. Attached Figure Description

[0020] Figure 1 is one of the structural schematic diagrams of this utility model.

[0021] Figure 2 is the second structural schematic diagram of this utility model. Detailed Implementation

[0022] Example:

[0023] Please refer to Figures 1-2. This embodiment shows a wafer transfer box cover, including a support body 1 disposed in a wafer positioning corresponding groove in the cover body. The support body 1 is a square hollow body. Loading positioning grooves 11 are provided in the middle of both sides of the long end of the support body 1, and fixing corresponding openings 12 are provided at both ends.

[0024] Several wafer elastic support and positioning modules 3 are evenly arranged in the hollow part 2 of the support body 1. Each wafer elastic support and positioning module 3 includes a wafer elastic support and positioning piece 31. The wafer elastic support and positioning piece 31 is connected to the support body 1 on both sides by connecting posts 32 and elastic posts 33 respectively. The elastic posts 33 are connected to the support body 1 at an angle of 15-20°. The wafer elastic support and positioning piece 31, connecting posts 32, and elastic posts 33 are all made of PEI material. The combination of the elastic posts 33 that are inclined to connect to the support body 1 forms a high-quality wafer elastic support and positioning wafer transfer box cover structure.

[0025] Among them, after several wafer elastic support and positioning modules 3 are evenly arranged in the hollow part 2 of the support body 1, it can be used directly as a wafer elastic positioning support alone.

[0026] The length of the wafer elastic support positioning piece 31 is 1 / 2 to 3 / 5 of the width of the hollow part 2 of the support body 1.

[0027] The wafer elastic support positioning piece 31 located at both ends of the support body 1 has an arc-shaped anti-jamming collision part 311 on one side of the support body 1, and a corresponding convex arc groove 10 on the support body 1.

[0028] On the other side of the wafer elastic support positioning piece 31 located at both ends of the support body 1, there is a corresponding ramp 312 for avoiding obstacles. On both sides of the wafer elastic support positioning piece 31 located in the middle, there are corresponding ramps 312 for avoiding obstacles.

[0029] The arc-shaped anti-jamming collision part 311 and the corresponding convex space arc groove 10, as well as the corresponding avoidance ramp 312, all have a gap of 3-6mm.

[0030] The main body of the support is fixed to the wafer positioning groove of the cover plate. After the cover plate is sealed with the wafer transfer box, the wafer elastic support positioning piece 31 supports the wafer. During the supporting process, the elastic column 33 and the connecting column 32, which are inclined at 15-20°, generate elastic deformation. The wafer elastic support positioning piece 31 is made of PEI material, which is not easy to deteriorate and has high elastic deformation performance, so as to achieve high-quality support positioning of the wafer.

[0031] Compared with the prior art, this utility model, through a high-quality wafer elastic support and positioning structure, can maintain wafer support and positioning normally for a long time without causing wafer deterioration or contamination, thus ensuring high-quality wafer fabrication.

[0032] For those skilled in the art, various modifications and improvements can be made without departing from the inventive concept of this utility model, and these modifications and improvements all fall within the protection scope of this utility model.

Claims

1. A wafer elastic positioning support, characterized in that: The device includes a square-shaped support body, which is hollow. Several wafer elastic support and positioning modules are evenly arranged in the hollow space. Each wafer elastic support and positioning module includes a wafer elastic support and positioning piece. The wafer elastic support and positioning piece is connected to the support body on both sides by connecting posts and elastic posts. The elastic posts are inclined at 15-20° to the support body. The wafer elastic support and positioning piece, connecting posts, and elastic posts are all made of PEI material. The combination of the inclined elastic posts connected to the support body forms a high-quality wafer elastic support and positioning structure.

2. The wafer elastic positioning support according to claim 1, characterized in that: The length of the wafer elastic support positioning piece is 1 / 2 to 3 / 5 of the width of the hollow part of the support body.

3. The wafer elastic positioning support according to claim 2, characterized in that: The wafer elastic support positioning pieces located at both ends of the support body have an arc-shaped anti-jamming collision part on one side of the support body, and correspondingly, the support body has an outwardly protruding corresponding arc groove.

4. A wafer elastic positioning bracket according to claim 3, characterized in that: The wafer elastic support positioning plates located at both ends of the support body are provided with corresponding ramps on the other side, and the wafer elastic support positioning plates located in the middle are provided with corresponding ramps on both sides.

5. A wafer elastic positioning support according to claim 4, characterized in that: There is a 3-6mm gap between the arc-shaped anti-jamming collision part and the corresponding convex space arc groove, as well as between the corresponding avoidance ramps.

6. A wafer transfer box cover, characterized in that: The system includes a support body housed within a wafer positioning groove on the main body of the cover plate. The support body is a hollow, square-shaped body with loading and positioning grooves on both sides of its long end and fixed corresponding openings at both ends. Several wafer elastic support positioning modules are evenly arranged in the hollow part of the support body. Each wafer elastic support positioning module includes a wafer elastic support positioning piece. The wafer elastic support positioning piece is connected to the support body on both sides via connecting posts and elastic posts. The elastic posts are inclined at 15-20° to the support body. The wafer elastic support positioning piece, connecting posts, and elastic posts are all made of PEI material. The combination of the inclined elastic posts connecting to the support body forms a high-quality wafer elastic support positioning wafer transfer box cover plate structure.

7. A wafer transfer box cover according to claim 6, characterized in that: The length of the wafer elastic support positioning piece is 1 / 2 to 3 / 5 of the width of the hollow part of the support body.

8. A wafer transfer box cover according to claim 7, characterized in that: The wafer elastic support positioning pieces located at both ends of the support body have an arc-shaped anti-jamming collision part on one side of the support body, and correspondingly, the support body has an outwardly protruding corresponding arc groove.

9. A wafer transfer box cover according to claim 8, characterized in that: The wafer elastic support positioning plates located at both ends of the support body are provided with corresponding ramps on the other side, and the wafer elastic support positioning plates located in the middle are provided with corresponding ramps on both sides.

10. A wafer transfer box cover according to claim 9, characterized in that: There is a 3-6mm gap between the arc-shaped anti-jamming collision part and the corresponding convex space arc groove, as well as between the corresponding avoidance ramps.

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