Device for treating tail gas of acidic gas of CVD (Chemical Vapor Deposition) sintering furnace

Abstract

The utility model belongs to the technical field of environmental protection, and particularly discloses a CVD sintering furnace acid gas tail gas treatment device which comprises a pipeline connected with the exhaust end of a sintering furnace, and a first filtering assembly, a cleaning assembly and a second filtering assembly are sequentially arranged in the length direction of the pipeline. The cleaning assembly comprises an oil washing part and a water washing part; the oil washing part comprises a mixing chamber and a separation chamber, the mixing chamber is used for mixing gas and oil, and the separation chamber is used for separating the gas and the oil; the washing part comprises a spray tower which is communicated with the pipeline; the spray tower is provided with a spray head; the spray header is used for spraying alkali liquor into the spray tower; the spray tower is provided with a pH sensor which is used for detecting the pH value of the alkali liquor. According to the utility model, particle filtration and multi-stage purification are realized, the safety of the device can be effectively improved, and the problems of easiness in corrosion, low protection effect and low treatment efficiency of equipment in the prior art are solved.

Description

Technical Field

[0001] This utility model belongs to the field of environmental protection technology, specifically relating to a device for treating acidic gas tail gas from a CVD sintering furnace. Background Technology

[0002] CVD (Chemical Vapor Deposition) sintering furnaces generate large amounts of acidic gaseous exhaust gases, such as hydrochloric acid mist, during operation. Direct emission of these acidic gases without effective treatment will cause serious environmental pollution and harm human health. Traditional methods typically employ simple water washing or alkaline neutralization, which have the following drawbacks: 1. Particulate matter easily clogs pipes, leading to severe equipment corrosion in serious cases; 2. Frequent acid backflow affects the safety of upstream and downstream equipment; 3. Low treatment efficiency, making it difficult to meet exhaust emission standards.

[0003] Patent CN111578295B discloses a combustion-water-washing semiconductor waste gas treatment device. It utilizes the high-temperature combustion of methane and air to oxidize and decompose the waste gas at a high temperature (1000℃). The resulting water-soluble high-temperature acidic gas is cooled by a cooling tower, and some of the acidic gas enters a storage tank for alkaline washing and neutralization absorption. Simultaneously, solid particles entrained in the waste gas settle in the storage tank. The remaining acidic gas is completely absorbed in a packed scrubbing tower, ultimately achieving a waste gas removal rate of over 95% from the CVD equipment. The final exhaust gas contains only neutral gases, basically meeting the requirements for discharge into the factory's exhaust pipes. Patent application CN107670465A relates to a VOCs waste gas treatment process, employing multiple exhaust gas treatment units arranged in series to treat VOCs waste gas. The waste gas enters from the first exhaust gas treatment unit, and the waste gas treated by the previous unit serves as pre-treated waste gas for the next unit.

[0004] The aforementioned existing technologies involve complex exhaust gas treatment devices with high operational difficulty, and the problem of synergistic integration of multi-stage protection and high-efficiency filtration remains unresolved. Therefore, developing a highly efficient, stable, and easy-to-operate acid gas exhaust gas treatment system and method is of significant practical importance. Utility Model Content

[0005] The purpose of this invention is to provide a device for treating acidic gas tail gas from a CVD sintering furnace, which achieves particle filtration, multi-stage purification, and effectively improves the safety of the device, solving the problems of easy corrosion, low protection effect, and low processing efficiency in the prior art.

[0006] To achieve the above objectives, the present invention adopts the following technical solution:

[0007] In a first aspect, this utility model provides an apparatus for treating acidic gas tail gas from a CVD sintering furnace, comprising:

[0008] The pipe connected to the exhaust end of the sintering furnace is provided with a first filter assembly, a cleaning assembly and a second filter assembly in sequence along the length of the pipe;

[0009] The cleaning components include an oil washing unit and a water washing unit; the oil washing unit includes a mixing chamber and a separation chamber, the mixing chamber being used to mix gas with oil, and the separation chamber being used to separate gas from oil; the water washing unit includes a spray tower connected to a pipeline; the spray tower is equipped with spray heads; the spray heads are used to spray alkaline solution into the spray tower; the spray tower is equipped with a pH sensor for detecting the pH value of the alkaline solution.

[0010] The above technical solution utilizes a series structure to treat the exhaust gas discharged from the sintering furnace. The exhaust gas treated by the previous treatment unit serves as the pre-treated exhaust gas for the next treatment unit, thus achieving multi-stage purification of the exhaust gas. The first filter component utilizes the fluidity and high temperature of the exhaust gas to reduce the probability of clogging and improve the uniformity of the exhaust gas, reducing the difficulty of subsequent treatment. The oil washing component uses the oil within to absorb heat from the exhaust gas, achieving cooling treatment and reducing the impact of high temperature on subsequent equipment.

[0011] According to one embodiment of the present invention, a spray head is located at the top of a spray tower, and alkaline solution is stored at the bottom of the spray tower. A guide pipe is connected between the spray head and the bottom of the spray tower, and the guide pipe is used in conjunction with a second pump body to pump the alkaline solution into the spray head.

[0012] Typically, the spray tower has a barrel-like structure. Alkali solution accumulates at the bottom of the tower. A second pump pumps the solution through a guide pipe into the spray heads, which then evenly spray the solution into the interior of the tower. This allows for the effective absorption of acidic components in the acidic exhaust gas emitted from the CVD sintering furnace. The spray tower design expands the contact space and area between the alkali solution and the acidic components in the exhaust gas, increasing the probability of contact and thus improving absorption efficiency while ensuring effective absorption of acidic gases. The combination of the second pump and the guide pipe enables the recycling of the alkali solution.

[0013] Multiple spray heads are evenly distributed at the top of the spray tower. This further improves the uniformity of the alkaline solution sprayed into the internal space of the spray tower, effectively ensuring the contact between the acidic gas in the exhaust gas from the CVD sintering furnace and the alkaline solution. Furthermore, the multiple dispersed spray heads increase the probability of atomization of the sprayed alkaline solution, which helps the alkaline solution encapsulate the gas inside the spray tower. When the exhaust gas containing acidic gas enters the spray tower, the exhaust gas flow comes into contact with the alkaline solution sprayed from the spray heads, and the acidic gas is encapsulated by the alkaline solution droplets, which further improves the neutralization reaction efficiency and effectively enhances the deacidification effect of the exhaust gas.

[0014] According to one embodiment of this utility model, the guide pipe is equipped with a valve, so that the valve can be opened or closed as needed to control the spray head.

[0015] The spray tower is equipped with an air inlet and an air outlet for connection to pipelines. The air inlet is located in the upper part of the spray tower, and the air outlet is located in the lower part. The alkaline solution is stored at the bottom of the spray tower, with the liquid level below the air outlet to prevent leakage.

[0016] According to one embodiment of the present invention, the bottom of the spray tower is provided with a drain pipe for discharging alkaline solution whose pH value does not meet the requirements after neutralization reaction with acidic gas. The drain pipe is equipped with a second valve.

[0017] Thus, the pH value of the alkaline solution inside the spray tower gradually decreases after reacting with the acidic gas. When the pH value reaches a certain threshold range, valve two can be opened to discharge it through the guide pipe. Generally, when the pH value of the alkaline solution drops to 7, it can be discharged from the spray tower and replaced with new alkaline solution.

[0018] According to one embodiment of this utility model, the spray tower is equipped with a controller, which works in conjunction with a pH sensor and a second valve; the controller controls the opening and closing of the second valve based on the pH value detected by the pH sensor. Thus, by utilizing the cooperation of the pH sensor and the controller, automatic discharge of alkaline solution can be achieved.

[0019] According to one embodiment of this utility model, the controller works in conjunction with the alarm, and the controller controls the activation and deactivation of the alarm based on the pH value detected by the pH sensor.

[0020] According to one embodiment of this utility model, the mixing chamber and the separation chamber are connected to each other to realize the recycling of oil.

[0021] Generally, the mixing chamber can be equipped with agitators, vibrators, etc., to improve the dispersion of exhaust gas from the CVD sintering furnace in the oil, thereby ensuring the oil washing effect and removing oil-soluble components from the exhaust gas. In the separation chamber, multiple baffles can be installed to guide the oil mixed with exhaust gas to flow along the surface of the baffles, and in this process, promote the overflow of gas, thereby achieving gas-oil separation.

[0022] According to one embodiment of the present invention, both the first filter assembly and the second filter assembly are multi-layer structures, including a coarse filter layer, a solid filter layer and a HEPA filter layer arranged sequentially along the gas flow direction.

[0023] The solid filter layer includes activated carbon and caustic soda. The coarse filter layer contains a first particulate matter, and the HEPA filter layer contains a second particulate matter. The particle size of the first particulate matter is larger than that of the second particulate matter.

[0024] The coarse filter layer is used to remove slightly larger particles from the exhaust gas; the solid filter layer is filled with activated carbon and caustic soda (NaOH). Activated carbon mainly removes tar by adsorption and can also partially remove HCl gas. Caustic soda reacts with HCl gas in the mixed gas to produce salt and water, which can also remove odors from the mixture; the HEPA filter layer filters smaller particles from the exhaust gas and can effectively remove particles with a diameter of 0.3 micrometers or larger.

[0025] The first and second filter components are designed with a multi-layer structure, which not only effectively filters out particles of different sizes, acidic gases, and other components in the exhaust gas, but also extends the service life of the first and second filter components. Since HEPA filter layers are generally made of polypropylene or other composite materials, most of them are not washable. Utilizing coarse filter layers and solid filter layers can filter out most of the acidic gases and water in the exhaust gas flow, reducing damage to the HEPA filter layer.

[0026] Furthermore, air gaps are provided between the coarse filter layer and the solid filter layer in both the first and second filter components, and between the solid filter layer and the HEPA filter layer. Thus, when the exhaust gas from the CVD sintering furnace passes through the first or second filter component, larger particles are intercepted by the coarse filter layer, then remixed in the air gap before entering the solid filter layer; it then re-enters the air gap for further mixing before entering the HEPA filter layer. The air gaps not only improve the uniformity of the exhaust gas but also help dissipate heat, reducing the damage to the first and / or second filter components caused by the high temperature of the exhaust gas from the CVD sintering furnace.

[0027] The air gap also helps to improve the heat exchange efficiency and heat exchange balance in the first and second filter components, improve the overall integrity of the first and second filter components, avoid local damage, and extend service life.

[0028] According to one embodiment of this utility model, a first pump body is provided between the oil-washing component and the water-washing component for pressurizing the gas in the pipeline. The first pump body is provided for two purposes: firstly, to draw gas flow from the sintering furnace, and secondly, to pressurize hydrochloric acid for subsequent processing and storage.

[0029] Furthermore, the first pump body is a centrifugal pump. Centrifugal pumps have high flow rates and high pressures, making them suitable for transporting hydrochloric acid.

[0030] According to one embodiment of the present invention, a first anti-backflow component is provided between the first filter component and the cleaning component. The first anti-backflow component is a one-way valve. After the first filter component filters the powdery and particulate components in the exhaust gas, in order to prevent the acidic components in the exhaust gas from being drawn back into the previous stage equipment during operation, a first anti-backflow component is provided in the pipeline.

[0031] According to one embodiment of this utility model, a second anti-backflow component, which is a safety valve, is provided between the oil washing component and the water washing component. The second anti-backflow component is installed after the first pump body to prevent hydrochloric acid in the exhaust gas from being drawn back into the preceding equipment during operation, thus avoiding damage to the equipment.

[0032] Compared with the prior art, the present invention has at least the following beneficial effects:

[0033] 1. This utility model utilizes a series structure to treat the exhaust gas discharged from the sintering furnace. The exhaust gas treated by the previous treatment unit serves as the pre-treated exhaust gas for the next treatment unit, thus achieving multi-stage purification of the exhaust gas and improving the compliance rate of exhaust gas emissions. The exhaust gas treatment process reduces the impact on downstream equipment, achieving multi-level protection and extending the service life of the equipment.

[0034] 2. This utility model, through the setting of a spray tower, utilizes spray nozzles to spray alkaline solution, which can increase the contact probability between the alkaline solution and the acidic components in the exhaust gas. This improves the absorption efficiency while ensuring the absorption effect of acidic gases. Furthermore, the setting of the spray nozzles can increase the probability of atomization of the sprayed alkaline solution, which helps the alkaline solution to encapsulate the gas inside the spray tower. When the exhaust gas containing acidic gases enters the spray tower, the exhaust gas flow comes into contact with the alkaline solution sprayed from the spray nozzles. The acidic gases are encapsulated by the alkaline solution droplets, which can further improve the neutralization reaction efficiency and effectively enhance the deacidification effect of the exhaust gas.

[0035] 3. In this utility model, both the first filter component and the second filter component have a multi-layer structure, which can not only effectively filter out particulate matter in the exhaust gas, but also make full use of the heat in the exhaust gas to reduce the probability of blockage. In particular, the setting of the air gap helps to improve the heat exchange efficiency and heat exchange balance in the first filter component and the second filter component, improve the overall integrity of the first filter component and the second filter component, avoid local damage, and extend the service life. Attached Figure Description

[0036] The accompanying drawings, which form part of this specification, are used to provide a further understanding of this utility model. The illustrative embodiments and descriptions of this utility model are used to explain this utility model and do not constitute an undue limitation thereof. In the drawings:

[0037] Figure 1 This is a schematic diagram of the structure of a device for treating acidic gas tail gas from a CVD sintering furnace according to the present invention.

[0038] Figure 2 for Figure 1 The diagram shows the structure of the water-washing component.

[0039] Figure 3 for Figure 1 The diagram shows the structure of the first filter component.

[0040] Reference numerals: 10 Sintering furnace; 11 Pipeline; 12 First filter assembly; 13 First anti-backflow component; 14 Condenser; 15 First pump body; 16 Second anti-backflow component; 17 Second filter assembly; 31 Coarse filter layer; 32 Solid filter layer; 33 HEPA filter layer; 34 Air barrier; 40 Oil washing component; 50 Water washing component; 51 Spray tower; 52 Spray head; 53 pH sensor; 54 Guide pipe; 55 Second pump body; 56 Valve 1; 57 Drain pipe; 58 Valve 2; 59 Controller; 60 Alarm; 61 Rotating blade. Detailed Implementation

[0041] The present invention will now be described in detail with reference to the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described herein can be combined with each other.

[0042] The following detailed description is exemplary and intended to provide further detailed explanation of the present invention. Unless otherwise specified, all technical terms used in this invention have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used in this invention is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this invention.

[0043] Example 1

[0044] An apparatus for treating the acidic gas tail gas of a CVD sintering furnace 10, such as Figures 1-3 As shown, it includes:

[0045] The pipe 11 connected to the exhaust end of the sintering furnace 10 is provided with a first filter assembly 12, a cleaning assembly, and a second filter assembly 17 in sequence along the length of the pipe 11; the cleaning assembly includes an oil washing component 40 and a water washing component 50; a first anti-backflow component 13 is provided between the first filter assembly 12 and the cleaning assembly, and the first anti-backflow component 13 is a one-way valve; a second anti-backflow component 16 is provided between the oil washing component 40 and the water washing component 50, and the second anti-backflow component 16 is a safety valve.

[0046] After the first filter assembly 12 filters the powdery and particulate components in the exhaust gas, a first anti-backflow component 13 is installed in the pipeline 11 to prevent acidic components in the exhaust gas from being drawn back into the upstream equipment during operation. The first anti-backflow component 13 is a one-way valve. When hydrochloric acid mist in the exhaust gas flows through, the one-way valve opens, allowing hydrochloric acid to pass through; when the hydrochloric acid stops flowing, the one-way valve closes to prevent hydrochloric acid backflow.

[0047] A second anti-backflow component 16 is installed after the first pump body 15 to prevent hydrochloric acid in the exhaust gas from being drawn back into the preceding equipment during operation, thus avoiding damage to the equipment. The second anti-backflow component 16 is a safety valve. When the pressure of the hydrochloric acid exceeds the set value, the safety valve automatically opens to discharge the excess hydrochloric acid, thereby ensuring the safe operation of the hydrochloric acid system.

[0048] The above technical solution utilizes a series structure to treat the exhaust gas discharged from the sintering furnace 10. The exhaust gas treated by the previous treatment unit serves as the pre-treated exhaust gas for the next treatment unit, thus achieving multi-stage purification of the exhaust gas. The first filter assembly 12 utilizes the fluidity and high temperature of the exhaust gas to reduce the probability of clogging and improve the uniformity of the exhaust gas, reducing the difficulty of subsequent treatment. The oil washing component 40 uses the oil within it to absorb heat from the exhaust gas, achieving cooling treatment of the exhaust gas and reducing the impact of high temperature on subsequent equipment.

[0049] Filter components are installed at both the front and rear ends of the cleaning assembly to remove particulate matter from the airflow, preventing clogging and significantly reducing the particulate matter content in the exhaust gas. The cleaning assembly includes an oil-washing component 40 and a water-washing component 50, ensuring the absorption of both oil-soluble and water-soluble harmful components in the exhaust gas and improving the compliance rate of exhaust emissions.

[0050] A first pump body 15 is provided between the oil washing component 40 and the water washing component 50 to extract acidic gases from the sintering furnace and ensure airflow within the pipe 11. The first filter assembly 12 and the oil washing component 40 are positioned upstream of the first pump body 15 to prevent acidic gases from directly entering its interior, thus enhancing protection for the first pump body 15 and downstream equipment. The first pump body 15 is located at the front end of the second anti-backflow component 16. The first pump body 15 serves two purposes: extracting gases from the sintering furnace 10 and pressurizing hydrochloric acid for subsequent processing and storage. The first pump body 15 is a centrifugal pump with high flow rate and high pressure, suitable for hydrochloric acid transport.

[0051] The oil washing component 40 includes a mixing chamber and a separation chamber. The mixing chamber is used to mix the gas with the oil, and the separation chamber is used to separate the gas from the oil. The mixing chamber and the separation chamber are connected to realize the recycling of the oil. Specifically, the oil inside the mixing chamber is mixed with the exhaust gas from the CVD sintering furnace and then enters the separation chamber. The oil and gas are separated inside the separation chamber, and the degassed oil can be returned to the mixing chamber.

[0052] Generally, the mixing chamber can be equipped with agitators, vibrators, etc., to improve the dispersion of exhaust gas from the CVD sintering furnace 10 in the oil, thereby ensuring the oil washing effect and removing oil-soluble components from the exhaust gas. In the separation chamber, multiple baffles can be installed to guide the oil mixed with exhaust gas to flow along the surface of the baffles, and in this process, promote the overflow of gas and achieve gas-oil separation.

[0053] The exhaust gas from the CVD sintering furnace 10 has a high temperature. When it comes into contact with the oil in the mixing chamber, it can quickly absorb the heat from the exhaust gas by utilizing the good thermal conductivity of the oil. During the flow of the exhaust gas, the heat is diffused to the vicinity, thereby accelerating the cooling of the exhaust gas and preventing subsequent equipment from malfunctioning due to overheating.

[0054] Furthermore, a condenser 14 is provided between the oil washing component 40 and the first pump body 15, which can further improve the separation effect of exhaust gas and oil, and prevent the oil in the oil washing component 40 from entering the subsequent first pump body 15 or water washing component 50, etc.

[0055] The washing unit 50 includes a spray tower 51 connected to the pipe 11; the spray tower 51 is equipped with spray heads 52; the spray heads 52 are used to spray alkaline solution into the spray tower 51; the spray tower 51 is equipped with a pH sensor 53 for detecting the pH value of the alkaline solution. The alkaline solution can be a saturated solution of NaOH, or can be replaced with an alkaline solution of other components or concentrations as needed.

[0056] A spray head 52 is located at the top of the spray tower 51, while the alkaline solution is stored at the bottom of the spray tower 51. A guide pipe 54 connects the spray head 52 to the bottom of the spray tower 51. The guide pipe 54 cooperates with a second pump body 55 to pump the alkaline solution into the spray head 52. A pH sensor 53 can be installed at the bottom of the spray tower 51 (see Appendix). Figure 2 Alternatively, it can be installed on the guide pipe 54 or other suitable locations depending on the actual situation. In addition, a rotating blade 61 can be installed inside the spray tower 51. The rotating blade 61 is placed at the bottom of the spray tower 51 to stir the alkaline solution, which can improve the uniformity of the alkaline solution and avoid excessive local differences in the pH value of the alkaline solution due to uneven mixing during the change process.

[0057] Generally, the spray tower 51 has a barrel-type structure. Alkali solution accumulates at the bottom of the spray tower 51. The second pump 55 pumps the alkali solution through the guide pipe 54 into the spray head 52, which then evenly sprays the alkali solution into the interior space of the spray tower 51. In this way, the alkali solution can effectively absorb the acidic components in the acidic exhaust gas emitted from the CVD sintering furnace 10. The design of the spray tower 51 expands the contact space and area between the alkali solution and the acidic components in the exhaust gas, increasing the probability of contact and thus improving absorption efficiency while ensuring the absorption effect of the acidic gas.

[0058] Multiple spray heads 52 are evenly distributed at the top of the spray tower 51. This further improves the uniformity of the alkaline solution sprayed by the spray heads 52 into the internal space of the spray tower 51, effectively ensuring the contact between the acidic gas in the tail gas from the CVD sintering furnace 10 and the alkaline solution. Furthermore, the multiple dispersed spray heads 52 increase the probability of atomization of the sprayed alkaline solution, which helps the alkaline solution to encapsulate the gas inside the spray tower 51. When the tail gas containing acidic gas enters the spray tower 51, the tail gas flow comes into contact with the alkaline solution sprayed by the spray heads 52, and the acidic gas is encapsulated by the alkaline solution droplets, which can further improve the neutralization reaction efficiency and effectively enhance the deacidification effect of the tail gas.

[0059] The cooperation between the second pump body 55 and the guide pipe 54 enables the recycling of alkaline solution. The guide pipe 54 is equipped with a valve 56, which can be adjusted to open or close as needed to control the spray head 52.

[0060] The spray tower 51 is equipped with an air inlet and an air outlet for connection to the pipeline 11. The air inlet is located in the upper half of the spray tower 51, and the air outlet is located in the lower half of the spray tower 51. The alkaline solution is stored at the bottom of the spray tower 51, and the liquid level of the alkaline solution is below the air outlet to prevent alkaline solution leakage.

[0061] The bottom of the spray tower 51 is equipped with a drain pipe 57, which is used to drain alkaline solution whose pH value does not meet the requirements after neutralization reaction with acidic gas. The drain pipe 57 is equipped with valve 58.

[0062] Thus, the pH value of the alkaline solution inside the spray tower 51 gradually decreases after reacting with the acidic gas. When the pH value reaches a certain threshold range, valve 58 can be opened to discharge it through the guide pipe 54. Generally, when the pH value of the alkaline solution drops to 7, it can be discharged from the spray tower 51 and replaced with new alkaline solution.

[0063] The spray tower 51 is equipped with a controller 59, which works in conjunction with a pH sensor 53 and a second valve 58. The controller 59 controls the opening and closing of the second valve 58 based on the pH value detected by the pH sensor 53. Thus, the automatic discharge of the alkaline solution can be achieved through the cooperation of the pH sensor 53 and the controller 59. The controller 59 also works in conjunction with an alarm 60, controlling the activation and deactivation of the alarm 60 based on the pH value detected by the pH sensor 53. Therefore, when the pH of the alkaline solution drops to a certain value, the alarm 60 will sound, prompting the replacement of the alkaline solution and ensuring the continued operation of the equipment.

[0064] Both the first filter assembly 12 and the second filter assembly 17 are multi-layer structures, including a coarse filter layer 31, a solid filter layer 32 and a HEPA filter layer 33 arranged sequentially along the gas flow direction.

[0065] The solid filter layer 32 includes activated carbon and caustic soda. The coarse filter layer 31 contains first particulate matter, and the HEPA filter layer 33 contains second particulate matter. The particle size of the first particulate matter is larger than that of the second particulate matter.

[0066] The coarse filter layer 31 is used to remove slightly larger particles in the exhaust gas; the solid filter layer 32 is filled with activated carbon and caustic soda (NaOH). The activated carbon mainly removes tar by adsorption and can also partially remove HCl gas. The caustic soda reacts with the HCl gas in the mixed gas to produce salt and water, which can also remove odors from the mixture; the HEPA filter layer 33 filters smaller particles in the exhaust gas and can effectively remove particles with a diameter of 0.3 micrometers or larger.

[0067] The first filter assembly 12 and the second filter assembly 17 are configured with a multi-layer structure, which can not only effectively filter out particles of different sizes, acidic gases, and other components in the exhaust gas, but also extend the service life of the first filter assembly 12 and the second filter assembly 17. Since the HEPA filter layer 33 is generally made of polypropylene or other composite materials, most of it cannot be washed with water. The coarse filter layer 31 and the solid filter layer 32 can filter out most of the acidic gases and water in the exhaust gas flow, which can reduce damage to the HEPA filter layer 33.

[0068] Furthermore, air gaps 34 are provided between the coarse filter layer 31 and the solid filter layer 32 in the first filter assembly 12 and the second filter assembly 17, and between the solid filter layer 32 and the HEPA filter layer 33. Thus, when the exhaust gas from the CVD sintering furnace 10 passes through the first filter assembly 12 or the second filter assembly 17, larger particles are intercepted by the coarse filter layer 31, then remixed in the air gap 34 before entering the solid filter layer 32; it then re-enters the air gap 34 for further mixing before entering the HEPA filter layer 33. The air gap 34 not only improves the uniformity of the exhaust gas but also helps dissipate heat, reducing the damage to the first filter assembly 12 and / or the second filter assembly 17 caused by the high temperature of the exhaust gas from the CVD sintering furnace 10.

[0069] The air gap 34 also helps to improve the heat exchange efficiency and heat exchange uniformity in the first filter assembly 12 and the second filter assembly 17, improve the overall integrity of the first filter assembly 12 and the second filter assembly 17, avoid local damage, and extend service life. During the flow of exhaust gas from the CVD sintering furnace 10 through the first particulate matter in the coarse filter layer 31, the airflow is divided by the granular filler, resulting in an uncertain flow direction. As it enters the air gap 34, the airflows with different flow directions and velocities mix, improving uniformity. This enhances the uniformity of the airflow entering the solid filter layer 32, allowing for more balanced contact and heat exchange with the activated carbon and caustic soda at different locations in the solid filter layer 32. During this process, the airflow is divided again, changing its flow direction and velocity, and then mixes again in the air gap 34, further improving uniformity. It then enters the HEPA filter layer 33, achieving more balanced contact and heat exchange with the second particulate matter at different locations in the HEPA filter layer 33.

[0070] Furthermore, especially for the first filter assembly 12, the high temperature of the exhaust gas can reduce the clogging of the coarse filter layer 31 and the solid filter layer 32. Because of the heat of the airflow itself, it causes thermal radiation to the first particulate matter, the second particulate matter, activated carbon, and caustic soda filled in the first filter assembly 12. These particulate materials expand within a certain range when heated, which enhances the filtration effect on the exhaust gas. Moreover, the particulate matter filled in the first filter assembly 12 continuously adjusts its position and affects the arrangement of surrounding particles during the process of thermal expansion, thereby helping the intercepted particles to fall off and preventing clogging.

[0071] Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of this utility model and not to limit it. Although the utility model has been described in detail with reference to the above embodiments, those skilled in the art should understand that modifications or equivalent substitutions can still be made to the specific implementation of this utility model. Any modifications or equivalent substitutions that do not depart from the spirit and scope of this utility model should be covered within the protection scope of the claims of this utility model.

Claims

1. An apparatus for treating acidic gas tail gas from a CVD sintering furnace, characterized in that, include: The pipe (11) connected to the exhaust end of the sintering furnace (10) is provided with a first filter assembly (12), a cleaning assembly and a second filter assembly (17) in sequence along the length of the pipe (11). The cleaning assembly includes an oil washing component (40) and a water washing component (50); the oil washing component (40) includes a mixing chamber and a separation chamber, the mixing chamber being used to mix gas with oil, and the separation chamber being used to separate gas from oil; the water washing component (50) includes a spray tower (51), the spray tower (51) being connected to the pipeline (11); the spray tower (51) is provided with a spray head (52); the spray head (52) is used to spray alkaline solution into the spray tower (51); the spray tower (51) is provided with a pH sensor (53) for detecting the pH value of the alkaline solution.

2. The apparatus for treating acidic gas tail gas from a CVD sintering furnace according to claim 1, characterized in that, The spray head (52) is located at the top of the spray tower (51), and the alkaline solution is stored at the bottom of the spray tower (51). The spray head (52) is connected to the bottom of the spray tower (51) by a guide pipe (54). The guide pipe (54) cooperates with the second pump body (55) to pump the alkaline solution into the spray head (52).

3. The apparatus for treating acidic gas tail gas from a CVD sintering furnace according to claim 2, characterized in that, The guide pipe (54) is equipped with a valve (56); There are multiple spray heads (52), and the multiple spray heads (52) are evenly distributed on the top of the spray tower (51); The spray tower (51) is equipped with an air inlet and an air outlet for connecting to the pipe (11). The air inlet is located in the upper half of the spray tower (51), and the air outlet is located in the lower half of the spray tower (51).

4. The apparatus for treating acidic gas tail gas from a CVD sintering furnace according to claim 1, characterized in that, The bottom of the spray tower (51) is provided with a drain pipe (57), and the drain pipe (57) is provided with valve two (58).

5. The apparatus for treating acidic gas tail gas from a CVD sintering furnace according to claim 4, characterized in that, The spray tower (51) is equipped with a controller (59), which works in conjunction with the pH sensor (53) and the valve (58); The controller (59) controls the opening and closing of the valve (58) based on the pH value detected by the pH sensor (53).

6. The apparatus for treating acidic gas tail gas from a CVD sintering furnace according to claim 5, characterized in that, The controller (59) works in conjunction with the alarm (60), and the controller (59) controls the activation and deactivation of the alarm (60) based on the pH value detected by the pH sensor (53).

7. The apparatus for treating acidic gas tail gas from a CVD sintering furnace according to claim 1, characterized in that, The mixing chamber and the separation chamber are connected to each other to realize the recycling of oil.

8. The apparatus for treating acidic gas tail gas from a CVD sintering furnace according to claim 1, characterized in that, Both the first filter assembly (12) and the second filter assembly (17) are multi-layer structures, including a coarse filter layer (31), a solid filter layer (32) and a HEPA filter layer (33) arranged sequentially along the gas flow direction. The solid filter layer (32) includes activated carbon and caustic soda, the coarse filter layer (31) contains a first particulate matter, and the HEPA filter layer (33) contains a second particulate matter, wherein the particle size of the first particulate matter is larger than that of the second particulate matter.

9. The apparatus for treating acidic gas tail gas from a CVD sintering furnace according to claim 1, characterized in that, A first pump body (15) is provided between the oil washing component (40) and the water washing component (50) for pressurizing the gas in the pipeline (11); The first pump body (15) is a centrifugal pump.

10. The apparatus for treating acidic gas tail gas from a CVD sintering furnace according to claim 1, characterized in that, A first anti-backflow component (13) is provided between the first filter component (12) and the cleaning component, and the first anti-backflow component (13) is a one-way valve; A second anti-backflow component (16) is provided between the oil washing component (40) and the water washing component (50), and the second anti-backflow component (16) is a safety valve.

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