Exhaust pipeline ash removal device of Czochralski single crystal furnace

Abstract

The utility model discloses an exhaust duct deashing device of a Czochralski single crystal furnace, the deashing device is integrated with a dedusting brush, a first dust collection head, a second dust collection head and a connecting pipe, the first dust collection head and the second dust collection head are respectively arranged at the top side and the bottom side of the dedusting brush, the connecting pipe is arranged at the top end of the first dust collection head, and the connecting pipe is arranged at the bottom end of the second dust collection head. The connecting pipe is used for being connected with a vacuum adsorption pipeline, the interior of the first dust collection head communicates with the interior of the connecting pipe, and the interior of the second dust collection head communicates with the interior of the first dust collection head. The ash cleaning device can synchronously scrape and suck ash, so that the bad influence on the internal environment of the furnace body and the health of a worker caused by the fact that floating dust generated by ash scraping enters the furnace body or enters the mouth and the nose of the worker can be effectively relieved, a working procedure is saved, the ash cleaning efficiency is improved, a large arrangement space is not needed, and the cost is reduced. And a single crystal plant or single crystal equipment does not need to be transformed, so that the application cost is low, and efficient cleaning and low-cost ash removal are realized.

Description

Technical Field

[0001] This utility model relates to the field of crystal pulling production technology, and in particular to a dust removal device for the exhaust pipe of a Czochralski single crystal furnace. Background Technology

[0002] The Czochralski method (also known as the CZ method or Czochralski method) is a commonly used crystal pulling method for producing crystalline materials such as single-crystal silicon. During production, silicon raw materials are heated above their melting point in a Czochralski furnace. A small rod with a seed crystal attached to its head is then placed into the molten metal. Due to the presence of the seed crystal, atoms in the melt gradually arrange themselves into a crystalline structure outside the seed crystal, forming single-crystal silicon through rapid stretching. In the high-temperature environment, dust is generated due to the volatilization of impurities in the molten silicon, the reaction of silicon with the quartz crucible to form silicon oxides, and the reaction of silicon with graphite to form silicon carbide compounds. This dust is discharged from the exhaust pipe of the Czochralski furnace with the airflow, resulting in a large accumulation of dust on the inner wall of the exhaust pipe. Therefore, it is necessary to clean the exhaust pipe of the Czochralski furnace regularly.

[0003] Currently, the automatic online dust removal devices developed in the industry require a large installation space. When applied, they require significant modifications to the monocrystalline silicon plant and equipment, resulting in high costs and making them difficult to promote and apply. Moreover, the dust removal stroke is limited, making it difficult to clean the entire exhaust pipe and creating dust removal dead zones, thus failing to replace manual dust removal after furnace shutdown.

[0004] During manual dust removal, workers first use a dust scraper to remove the dust from the inner wall of the exhaust pipe, and then use a vacuum cleaner to suck up the scraped dust. This process is not only inefficient, but it also generates a large amount of floating dust, which can enter the furnace body of the single crystal furnace, polluting the production environment, and can also enter the mouths and noses of workers, causing harm to their health.

[0005] Therefore, how to clean the exhaust pipes of the Czochralski single crystal furnace more efficiently, cleanly, and cost-effectively is a technical problem that needs to be solved by those skilled in the art. Utility Model Content

[0006] To solve the above-mentioned technical problems, this application provides a dust removal device for the exhaust pipe of a Czochralski single crystal furnace. The dust removal device integrates a dust removal brush, a first dust suction head, a second dust suction head, and a connecting pipe. The first dust suction head and the second dust suction head are respectively disposed on the top and bottom sides of the dust removal brush. The connecting pipe is disposed at the top of the first dust suction head and is used to connect to a vacuum adsorption pipeline. The interior of the first dust suction head is in communication with the interior of the connecting pipe, and the interior of the second dust suction head is in communication with the interior of the first dust suction head.

[0007] One embodiment of the exhaust pipe cleaning device for a Czochralski single crystal furnace includes a first dust suction head comprising a first dust suction disc and a first central cylinder coaxially arranged. The first dust suction disc is a conical disc with an outer diameter that gradually increases from top to bottom. The first dust suction disc is provided with a plurality of first dust suction holes. The first central cylinder is located within the enclosed space of the first dust suction disc and extends from the small diameter end of the first dust suction disc to the large diameter end of the first dust suction disc. The interior of the first central cylinder is connected to the interior of the connecting pipe. The first central cylinder is provided with a first connecting hole that connects the interior area of ​​the first central cylinder and the area between the first central cylinder and the first dust suction disc.

[0008] One embodiment of the exhaust pipe cleaning device for a Czochralski single crystal furnace includes a second dust suction head comprising a second dust suction disc and a second central cylinder coaxially arranged, and a sealing plate. The second dust suction disc is a conical disc with an outer diameter that gradually decreases from top to bottom. The second dust suction disc is provided with a plurality of second dust suction holes. The second central cylinder is located within the enclosed space of the second dust suction disc and extends from the small diameter end of the second dust suction disc to the large diameter end of the second dust suction disc. The interior of the second central cylinder communicates with the interior of the first central cylinder. The second central cylinder is provided with a second connecting hole that connects the interior area of ​​the second central cylinder and the area between the second central cylinder and the second dust suction disc.

[0009] One embodiment of the exhaust pipe cleaning device for a Czochralski single crystal furnace has a taper range of 10°-30° for the first and second dust collection discs.

[0010] One embodiment of the dust removal device for the exhaust pipe of a Czochralski single crystal furnace is provided with multiple layers of first dust suction holes spaced apart along the axial direction, and each layer has multiple arc-shaped first dust suction holes spaced apart along the circumferential direction. The second dust suction plate is provided with multiple layers of second dust suction holes spaced apart along the axial direction, and each layer has multiple arc-shaped second dust suction holes spaced apart along the circumferential direction.

[0011] In one embodiment of the exhaust pipe cleaning device for a Czochralski single crystal furnace, the partition wall between adjacent first dust collection holes on the same layer and the partition wall between adjacent second dust collection holes on the same layer are fixed width walls or gradually widening walls whose width gradually increases from the small diameter end to the large diameter end of the corresponding dust collection disc.

[0012] In one embodiment of the exhaust pipe cleaning device for a Czochralski single crystal furnace, the width of the partition wall between the small-diameter end face of the first dust collection disc and the first dust collection hole of the top layer, and the width of the partition wall between the small-diameter end face of the second dust collection disc and the second dust collection hole of the bottom layer, ranges from 8mm to 15mm. The width of the partition wall between two adjacent layers of the first dust collection hole and the width of the partition wall between two adjacent layers of the second dust collection hole ranges from 0.5mm to 1.5mm.

[0013] One embodiment of the exhaust pipe cleaning device for a Czochralski single crystal furnace includes a first connecting sleeve and a second connecting sleeve. The first connecting sleeve is coaxially disposed at the bottom end of the first dust suction head, and the second connecting sleeve is coaxially disposed at the top end of the second dust suction head. The first connecting sleeve and the second connecting sleeve are connected to each other. The dust removal brush sleeve is located outside the interconnected first connecting sleeve and the second connecting sleeve. The interior of the second central cylinder is connected to the interior of the first central cylinder through the first connecting sleeve and / or the second connecting sleeve.

[0014] In one embodiment of the exhaust pipe cleaning device for a Czochralski single crystal furnace, the first connecting sleeve and the second connecting sleeve are connected by a threaded pair.

[0015] One embodiment of the dust removal device for the exhaust pipe of a Czochralski single crystal furnace is described, wherein the dust removal brush is made of a high-temperature resistant soft material, and the first and second dust suction heads are made of a high-temperature resistant hard material. The outer diameter of the dust removal brush is 5mm-20mm larger than the outer diameter of the first and second dust suction heads.

[0016] The dust removal device provided in this application can simultaneously scrape and suck up dust, which can effectively reduce the adverse effects of dust generated by scraping entering the furnace body or entering the mouth and nose of workers on the internal environment of the furnace body and the health of workers. Moreover, compared with scraping dust first and then sucking up dust, it saves one process and improves the dust removal efficiency. In addition, it does not require a large layout space, nor does it require modification of the monocrystalline factory or monocrystalline equipment. The application cost is low, achieving efficient cleaning and low-cost dust removal. Attached Figure Description

[0017] Figure 1 A schematic diagram of one embodiment of the exhaust pipe cleaning device for the Czochralski single crystal furnace provided in this application;

[0018] Figure 2 for Figure 1 A schematic diagram of the first suction head, the first connecting part, and the connecting tube;

[0019] Figure 3 for Figure 2 A sectional view;

[0020] Figure 4for Figure 2 A bottom view;

[0021] Figure 5 for Figure 1 Schematic diagram of the second suction head and the second connecting part;

[0022] Figure 6 for Figure 5 A sectional view.

[0023] The annotations in the attached figures are explained as follows:

[0024] 10 - Dust removal brush;

[0025] 20-First suction head, 201-First suction disc, 201a-First suction hole, 202-First central cylinder, 202a-First connecting hole;

[0026] 30-Second suction head, 301-Second suction disc, 301a-Second suction hole, 302-Second central cylinder, 302a-Second connecting hole;

[0027] 40 - Connecting pipe;

[0028] 50 - First connecting sleeve;

[0029] 60 - Second connecting sleeve. Detailed Implementation

[0030] This application provides a dust removal device for the exhaust pipe of a Czochralski single crystal furnace, sometimes referred to as a dust removal device. In order to enable those skilled in the art to better understand the technical solution of this application, the technical solution of this application will be further described in detail below with reference to the accompanying drawings and specific embodiments.

[0031] like Figure 1 As shown, the dust removal device provided in this application integrates a dust removal brush 10, a first suction head 20, a second suction head 30, and a connecting pipe 40. The first suction head 20 is located on the top side of the dust removal brush 10, and the second suction head 30 is located on the bottom side of the dust removal brush 10. The connecting pipe 40 is located at the top of the first suction head 20 and is used to connect to a vacuum adsorption pipeline. The connecting pipe 40 is preferably a thin-walled pipe with a wall thickness of 1mm-2mm. The interior of the first suction head 20 communicates with the interior of the connecting pipe 40, and the interior of the second suction head 30 communicates with the interior of the first suction head 20. Thus, the second suction head 30 and the first suction head 20 can communicate with the same vacuum adsorption pipeline, thereby generating a vacuum adsorption effect under the negative pressure of the same vacuum adsorption pipeline.

[0032] In application, one end of the vacuum adsorption tubing is connected to the connecting pipe 40, for example, it can be directly sleeved on the outside of the connecting pipe 40 and secured with a clamp. The other end of the vacuum adsorption tubing is connected to the pipe opening of the vacuum dust removal system, for example, it can be directly and tightly inserted into the pipe opening of the vacuum dust removal system. The connection between the vacuum adsorption tubing and the pipe opening of the vacuum dust removal system is almost unaffected by external pulling forces, so securing is not required. The vacuum adsorption tubing is a flexible hose. The vacuum dust removal system has pipe openings distributed in many areas of the monocrystalline silicon plant.

[0033] After connecting, slowly push the cleaning device into the exhaust pipe of the Czochralski single crystal furnace until it reaches the air inlet of the exhaust pipe, and then slowly pull the cleaning device back to the air outlet of the exhaust pipe. Repeat this 2-3 times to clean the accumulated ash in the exhaust pipe.

[0034] When the dust removal device moves back and forth in the exhaust pipe, the dust removal brush 10 contacts and rubs against the inner wall of the exhaust pipe, thereby scraping off the accumulated dust on the inner wall of the exhaust pipe. The scraped dust is immediately sucked away by the suction head (i.e., the first suction head 20 and the second suction head 30) integrated with the dust removal brush 10. When the dust removal device moves towards the exhaust outlet of the exhaust pipe, the dust removed by the dust removal brush 10 is effectively sucked away by the suction head, i.e., the first suction head 20, located on the side of the dust removal brush 10 near the exhaust outlet of the exhaust pipe. When the dust removal device moves towards the exhaust inlet of the exhaust pipe, the dust removed by the dust removal brush 10 is effectively sucked away by the suction head, i.e., the second suction head 30, located on the side of the dust removal brush 10 near the exhaust inlet of the exhaust pipe. This ensures that the dust can always be quickly and effectively sucked away, whether the dust removal device moves towards the exhaust inlet or the exhaust outlet of the exhaust pipe.

[0035] As can be seen, the dust removal device provided in this application can simultaneously perform dust scraping and dust suction. This can effectively alleviate the adverse effects of dust generated by dust scraping entering the furnace body or entering the mouth and nose of workers on the internal environment of the furnace body and the health of workers. Moreover, compared with the previous method of scraping dust first and then suctioning dust, it saves one process and improves the dust removal efficiency. Furthermore, it does not require a large layout space, nor does it require modification of the monocrystalline factory or monocrystalline equipment. The application cost is low, achieving efficient cleaning and low-cost dust removal.

[0036] In some embodiments, such as Figure 2 and Figure 3As shown, the first suction head 20 includes a first suction disc 201 and a first central cylinder 202. The first suction disc 201 is a conical disc with an outer diameter that gradually increases from top to bottom. That is, the outer diameter of the first suction disc 201 is larger as it gets closer to the dust brush 10, which helps to improve the suction effect. Specifically, the taper range of the first suction disc 201 is preferably 10°-30°, for example, 10°, 15°, 20°, 25°, or 30°. The first suction disc 201 is provided with a plurality of first suction holes 201a. The first central cylinder 202 is coaxial with the first suction disc 201 and is located within the enclosed space of the first suction disc 201. The first central cylinder 202 extends from the small-diameter end of the first suction disc 201 to the large-diameter end of the first suction disc 201. The interior of the first central cylinder 202 is connected to the interior of the connecting pipe 40. The first central cylinder 202 is provided with a first connecting hole 202a, which connects the internal region of the first central cylinder 202 with the region between the first central cylinder 202 and the first dust suction plate 201. In this way, the floating dust generated during the dust removal process can be transferred to the outside of the exhaust pipe of the Czochralski single crystal furnace under the action of negative pressure through the first dust suction hole 201a, the region between the first central cylinder 202 and the first dust suction plate 201, the first connecting hole 202a, the internal region of the first central cylinder 202, the internal region of the connecting pipe 40, and the vacuum adsorption pipe.

[0037] In some embodiments, such as Figure 5 and Figure 6As shown, the second suction head 30 includes a second suction disc 301, a second central cylinder 302, and a sealing plate 303. The second suction disc 301 is a conical disc with an outer diameter that gradually decreases from top to bottom. That is, the outer diameter of the second suction disc 301 is larger as it gets closer to the dust removal brush 10, which helps to improve the suction effect. Specifically, the taper range of the second suction disc 301 is preferably 10°-30°, for example, 10°, 15°, 20°, 25°, or 30°. The sealing plate 303 closes the small-diameter end of the second suction disc 301. The second suction disc 301 is provided with a plurality of second suction holes 301a. The second central cylinder 302 is coaxial with the second suction disc 301 and is located within the enclosed space of the second suction disc 301. The second central cylinder 302 extends from the small-diameter end of the second suction disc 301 to the large-diameter end of the second suction disc 301. The interior of the second central cylinder 302 is connected to the interior of the first central cylinder 202. The second central cylinder 302 is provided with a second connecting hole 302a, which connects the interior region of the second central cylinder 302 with the region between the second central cylinder 302 and the second dust suction disc 301. In this way, the floating dust generated during the dust removal process can be transferred to the exhaust pipe of the Czochralski single crystal furnace under negative pressure through the second dust suction hole 301a, the region between the second central cylinder 302 and the second dust suction disc 301, the second connecting hole 302a, the interior region of the second central cylinder 302, the interior region of the first central cylinder 202, the interior region of the connecting pipe 40, and the vacuum adsorption pipe.

[0038] In some embodiments, such as Figure 2 and Figure 3 As shown, the dust removal device includes a first connecting sleeve 50 and a second connecting sleeve 60. The first connecting sleeve 50 is coaxially disposed at the bottom end of the first dust suction head 20, as shown below. Figure 5 and Figure 6 As shown, the second connecting sleeve 60 is coaxially disposed at the top of the second suction head 30, and the first connecting sleeve 50 and the second connecting sleeve 60 are connected to each other. The dust removal brush 10 is fitted over the connected first connecting sleeve 50 and the second connecting sleeve 60. The interior of the first central cylinder 202 and the interior of the second central cylinder 302 are interconnected through the first connecting sleeve 50 and / or the second connecting sleeve 60. The first connecting sleeve 50 and the second connecting sleeve 60 serve not only to connect the first suction head 20 and the second suction head 30, but also to connect the first central cylinder 202 of the first suction head 20 and the second central cylinder 302 of the second suction head 30. To facilitate the installation of the dust removal brush 10, the central hole diameter of the dust removal brush 10 is set slightly larger than the outer diameter of the outer connecting sleeve (first connecting sleeve 50 or second connecting sleeve 60). For example, when the first connecting sleeve 50 is fitted over the second connecting sleeve 60, the central hole diameter of the dust removal brush 10 is 2mm-5mm larger than the outer diameter of the first connecting sleeve 50.

[0039] Preferably, the first connecting sleeve 50 and the second connecting sleeve 60 are connected by a threaded pair. Specifically, the first connecting sleeve 50 may have an internal thread and the second connecting sleeve 60 may have an external thread, or the first connecting sleeve 50 may have an external thread and the second connecting sleeve 60 may have an internal thread. This threaded connection allows for quick separation of the first suction head 20 and the second suction head 30, enabling rapid replacement of the dust brush 10.

[0040] In some embodiments, such as Figure 4 As shown, the first suction disk 201 has multiple layers of first suction holes 201a spaced apart axially, with each layer having multiple arc-shaped first suction holes 201a spaced apart circumferentially. The number of layers of first suction holes 201a is related to the outer diameter and taper of the first suction disk 201. Similarly, the second suction disk 301 has multiple layers of second suction holes 301a spaced apart radially, with each layer having multiple arc-shaped second suction holes 301a spaced apart circumferentially. The number of layers of second suction holes 301a is related to the outer diameter and taper of the second suction disk 301. The multiple layers of suction holes on the suction disk improve the suction effect.

[0041] Preferably, the height of each suction hole ranges from 3mm to 8mm. The height of the suction hole refers to the distance between the top and bottom edges of the suction hole on the slope of the corresponding suction disc.

[0042] Preferably, the width of the partition wall between the small-diameter end face of the first dust collection disc 201 and the topmost first dust collection hole 201a is in the range of 8mm-15mm, for example, it can be 8mm, 10mm, 12mm, or 15mm. The width of the partition wall between the small-diameter end face of the second dust collection disc 301 and the bottommost first dust collection hole 201a is in the range of 8mm-15mm, for example, it can be 8mm, 10mm, 12mm, or 15mm.

[0043] Preferably, the width of the partition wall between two adjacent first dust collection holes 201a ranges from 0.5mm to 1.5mm, for example, it can be 0.5mm, 1mm, 1.2mm, or 1.5mm. The width of the partition wall between two adjacent second dust collection holes 301a ranges from 0.5mm to 1.5mm, for example, it can be 0.5mm, 1mm, 1.2mm, or 1.5mm.

[0044] Specifically, the partition wall between adjacent first dust collection holes 201a on the same layer is either a fixed-width partition or a gradually widening partition whose width increases from the small-diameter end to the large-diameter end of the first dust collection disk 201. In the illustrated embodiment, partition wall A between adjacent first dust collection holes 201a on the copper layer is a gradually widening partition. The partition wall between adjacent second dust collection holes 301a on the same layer is either a fixed-width partition or a gradually widening partition whose width increases from the small-diameter end to the large-diameter end of the second dust collection disk 301.

[0045] Preferably, the width of the partition wall between adjacent first dust collection holes 201a in the same layer ranges from 1mm to 8mm, for example, it can be 1mm, 2mm, 4mm, or 8mm. The width of the partition wall between adjacent second dust collection holes 301a in the same layer ranges from 1mm to 8mm, for example, it can be 1mm, 2mm, 4mm, or 8mm.

[0046] Preferably, the dust brush 10 is made of a high-temperature resistant soft material, such as ceramic fiber, high-temperature silicone rubber, or PTFE fiber. The first suction head 20 and the second suction head 30 are made of a high-temperature resistant hard material, such as stainless steel alloy or aluminum alloy. The outer diameter of the dust brush 10 is 5mm-20mm larger than the outer diameters of the first suction head 20 and the second suction head 30, so that while the dust brush 10 is in close contact with the inner wall of the exhaust pipe, the first suction head 20 and the second suction head 30 do not contact the inner wall of the exhaust pipe.

[0047] The above embodiments can be freely combined without conflict.

[0048] The above examples illustrate the principles and implementation methods of this utility model. The descriptions of these embodiments are merely for the purpose of helping to understand the method and core ideas of this utility model. It should be noted that those skilled in the art can make various improvements and modifications to this utility model without departing from its principles, and these improvements and modifications also fall within the protection scope of the claims of this utility model.

Claims

1. A dust removal device for the exhaust pipe of a Czochralski single crystal furnace, characterized in that, The dust removal device integrates a dust removal brush (10), a first suction head (20), a second suction head (30), and a connecting pipe (40). The first suction head (20) and the second suction head (30) are respectively located on the top and bottom sides of the dust removal brush (10). The connecting pipe (40) is located at the top of the first suction head (20) and is used to connect to the vacuum adsorption pipeline. The inside of the first suction head (20) is connected to the inside of the connecting pipe (40), and the inside of the second suction head (30) is connected to the inside of the first suction head (20).

2. The ash removal device for the exhaust pipe of the Czochralski single crystal furnace according to claim 1, characterized in that, The first suction head (20) includes a first suction disc (201) and a first central cylinder (202) arranged coaxially. The first suction disc (201) is a conical disc with an outer diameter that gradually increases from top to bottom. The first suction disc (201) is provided with a plurality of first suction holes (201a). The first central cylinder (202) is located within the enclosed space of the first suction disc (201). The first central cylinder (202) extends from the small diameter end of the first suction disc (201) to the large diameter end of the first suction disc (201). The interior of the first central cylinder (202) is connected to the interior of the connecting pipe (40). The first central cylinder (202) is provided with a first connecting hole (202a). The first connecting hole (202a) connects the interior area of ​​the first central cylinder (202) and the area between the first central cylinder (202) and the first suction disc (201).

3. The ash removal device for the exhaust pipe of the Czochralski single crystal furnace according to claim 2, characterized in that, The second suction head (30) includes a second suction disc (301) and a second central cylinder (302) arranged coaxially, and also includes a sealing plate (303). The second suction disc (301) is a conical disc with an outer diameter that gradually decreases from top to bottom. The sealing plate (303) closes the small-diameter end of the second suction disc (301). The second suction disc (301) is provided with a plurality of second suction holes (301a). The second central cylinder (302) is located within the enclosed space of the second suction disc (301). The second central cylinder (302) extends from the small diameter end of the second dust collection disc (301) to the large diameter end of the second dust collection disc (301). The interior of the second central cylinder (302) is connected to the interior of the first central cylinder (202). The second central cylinder (302) is provided with a second connecting hole (302a). The second connecting hole (302a) connects the interior area of ​​the second central cylinder (302) and the area between the second central cylinder (302) and the second dust collection disc (301).

4. The ash removal device for the exhaust pipe of the Czochralski single crystal furnace according to claim 3, characterized in that, The taper range of the first dust collection disc (201) and the second dust collection disc (301) is 10°-30°.

5. The exhaust pipe cleaning device for the Czochralski single crystal furnace according to claim 3, characterized in that, The first dust collection disk (201) has multiple layers of first dust collection holes (201a) arranged sequentially along the axial direction, and each layer has multiple arc-shaped first dust collection holes (201a) arranged sequentially along the circumferential direction. The second dust collection disk (301) has multiple layers of second dust collection holes (301a) arranged sequentially along the axial direction, and each layer has multiple arc-shaped second dust collection holes (301a) arranged sequentially along the circumferential direction.

6. The ash removal device for the exhaust pipe of the Czochralski single crystal furnace according to claim 5, characterized in that, The partition wall between adjacent first suction holes (201a) on the same layer and the partition wall between adjacent second suction holes (301a) on the same layer are either fixed-width walls with a certain width or gradually widening walls with a width that gradually increases from the small diameter end to the large diameter end of the corresponding suction disc.

7. The exhaust pipe cleaning device for a Czochralski single crystal furnace according to claim 5, characterized in that, The width of the partition wall between the small diameter end face of the first dust collection plate (201) and the topmost first dust collection hole (201a), and the width of the partition wall between the small diameter end face of the second dust collection plate (301) and the bottommost second dust collection hole (301a) are in the range of 8mm-15mm. The width of the partition wall between two adjacent layers of the first dust collection hole (201a) and the width of the partition wall between two adjacent layers of the second dust collection hole (301a) are in the range of 0.5mm-1.5mm.

8. The exhaust pipe cleaning device for the Czochralski single crystal furnace according to claim 3, characterized in that, The dust removal device includes a first connecting sleeve (50) and a second connecting sleeve (60). The first connecting sleeve (50) is coaxially disposed at the bottom end of the first dust suction head (20), and the second connecting sleeve (60) is coaxially disposed at the top end of the second dust suction head (30). The first connecting sleeve (50) and the second connecting sleeve (60) are connected to each other. The dust removal brush (10) is sleeved on the outside of the interconnected first connecting sleeve (50) and the second connecting sleeve (60). The interior of the second central cylinder (302) is connected to the interior of the first central cylinder (202) through the first connecting sleeve (50) and / or the second connecting sleeve (60).

9. The ash removal device for the exhaust pipe of the Czochralski single crystal furnace according to claim 8, characterized in that, The first connecting sleeve (50) and the second connecting sleeve (60) are connected by a threaded pair.

10. The exhaust pipe cleaning device for a Czochralski single crystal furnace according to any one of claims 1-9, characterized in that, The dust removal brush (10) is made of high temperature resistant soft material, and the first suction head (20) and the second suction head (30) are made of high temperature resistant hard material. The outer diameter of the dust removal brush (10) is 5mm-20mm larger than the outer diameter of the first suction head (20) and the outer diameter of the second suction head (30).

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