Two-degree-of-freedom ultra-precision workpiece plane machining equipment

Abstract

The utility model relates to the technical field of polishing equipment, and provides two-degree-of-freedom ultra-precise workpiece plane machining equipment which comprises a workbench, a polishing disc, a polishing pad and a base. The first rotating assembly comprises a first rotating plate and a first motor, the first end of the first rotating plate is arranged on the base and rotationally connected with the base, and the first motor is used for controlling the first end of the first rotating plate to rotate; the second rotating assembly comprises a second rotating plate and a second motor, the first end of the second rotating plate is rotationally connected with the second end of the first rotating plate, and the second motor is used for controlling the first end of the second rotating plate to rotate; the polishing assembly comprises a supporting ring and a third motor, the first side of the supporting ring is rotationally connected with the second end of the second rotating plate, and the third motor is used for controlling the first side of the supporting ring to rotate; and the supporting pad is arranged on the outer side of the polishing pad in a sleeving mode and fixedly connected with the polishing disc, and the upper surface of the supporting pad is flush with the upper surface of the polishing pad.

Description

Technical Field

[0001] This utility model relates to the field of polishing equipment technology, specifically to a two-degree-of-freedom ultra-precision workpiece planar processing equipment. Background Technology

[0002] A surface polishing machine is a device used for fine polishing of various flat workpieces. In traditional surface polishing machines, the polishing components can rotate and swing during operation, thus having only two degrees of freedom and a limited polishing trajectory. Furthermore, the movement space of the polishing components on the polishing disc is also very limited, making it impossible for the polishing components to extend beyond the polishing disc. Otherwise, the polishing components and the flat workpiece will tilt, resulting in poor polishing effect. Therefore, only local polishing of flat workpieces is possible. Utility Model Content

[0003] In view of the shortcomings of the existing technology, the purpose of this utility model is to provide a two-degree-of-freedom ultra-precision workpiece plane machining equipment, which can improve the motion freedom of the polishing components and achieve better polishing results.

[0004] To achieve the above objectives, this utility model provides the following technical solution: a two-degree-of-freedom ultra-precision workpiece planar machining equipment, comprising a worktable, a polishing disc, and a polishing pad, and further comprising:

[0005] Base;

[0006] A first rotating assembly, comprising a first rotating plate and a first motor, wherein a first end of the first rotating plate is disposed on the base and rotatably connected to the base, and the first motor is used to control the rotation of the first end of the first rotating plate;

[0007] The second rotating assembly includes a second rotating plate and a second motor. The first end of the second rotating plate is rotatably connected to the second end of the first rotating plate. The second motor is used to control the rotation of the first end of the second rotating plate.

[0008] A polishing assembly, comprising a support ring and a third motor, wherein a first side of the support ring is rotatably connected to a second end of a second rotating plate, and the third motor is used to control the rotation of the first side of the support ring.

[0009] A support pad is sleeved on the outside of the polishing pad and fixedly connected to the polishing disc, and the upper surface of the support pad is flush with the upper surface of the polishing pad.

[0010] Furthermore, it also includes a pressurizing assembly, which includes a guide cylinder, a guide rod, a counterweight, a pressurizing block, and a spring;

[0011] The guide cylinder is arranged longitudinally and fixedly connected to the support ring. The guide rod is arranged longitudinally inside the guide cylinder and slidably connected to the guide cylinder. The counterweight is fixedly installed on the top of the guide rod. The pressure block is fixedly installed on the bottom of the guide rod and extends into the support ring. The spring causes the guide rod to have a downward tendency.

[0012] Furthermore, the outer wall of the pressure block is in contact with the inner wall of the support ring.

[0013] Furthermore, the inner side wall of the support ring is fitted with the outer side wall of the planar workpiece.

[0014] Furthermore, an annular receiving groove is formed between the polishing pad and the support pad.

[0015] Furthermore, the top of the support pad has multiple transversely penetrating guide grooves, which are connected to the annular receiving groove.

[0016] The beneficial effects of this invention are as follows: This invention provides a two-degree-of-freedom ultra-precision workpiece planar machining device. Through the coordinated operation of the first rotating component, the second rotating component, and the polishing component, the polishing component achieves two-degree-of-freedom motion of translation and rotation in the XY directions. This allows the support ring and planar workpiece to be processed at any position on the polishing pad, greatly expanding the polishing trajectory. Furthermore, the design of the support pad provides support for the support ring and planar workpiece when the polishing component extends beyond the polishing pad, preventing them from tilting, thus resulting in better polishing effects. Attached Figure Description

[0017] Figure 1 This is a partial cross-sectional structural diagram of the present invention;

[0018] Figure 2 for Figure 1 Enlarged structural diagram of section A in the middle;

[0019] Figure 3 This is a top view of the structure of this utility model;

[0020] Figure 4 This is a partial structural schematic diagram of the present invention.

[0021] Reference numerals: 10-Workbench, 11-Polishing disc, 12-Polishing pad, 20-Base, 30-First rotating assembly, 31-First rotating plate, 32-First motor, 40-Second rotating assembly, 41-First rotating plate, 42-First motor, 50-Polishing assembly, 51-Support ring, 52-Third motor, 60-Support pad, 61-Annular receiving groove, 62-Guide groove, 70-Pressure assembly, 71-Guide cylinder, 72-Guide rod, 73-Counterweight, 74-Pressure block, 75-Spring, 80-Planar workpiece. Detailed Implementation

[0022] To make the technical means, creative features, objectives and effects of this utility model easier to understand, the present utility model will be further described below in conjunction with specific embodiments.

[0023] In this application, unless otherwise expressly specified and limited, the terms "connection" and "fixed" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0024] In the description of this application, it should be understood that the terms "longitudinal", "horizontal", "level", "top", "bottom", "upper", "lower", "inner" and "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model.

[0025] Furthermore, the terms "first," "second," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly defined.

[0026] like Figures 1-4 As shown, this utility model provides a two-degree-of-freedom ultra-precision workpiece planar machining equipment, including a worktable 10, a polishing disc 11, a polishing pad 12, and a control cabinet. The drive motor inside the worktable 10 can drive the polishing disc 11 to rotate. The polishing pad 12 is fixedly mounted on the polishing disc 11, and the axis of the polishing pad 12 is collinear with the axis of the polishing disc 11. The above are all prior art, and the specific structure will not be described in detail here. This utility model also includes a base 20, a first rotating assembly 30, a second rotating assembly 40, a polishing assembly 50, and a support pad 60.

[0027] The base 20 is fixedly installed on the ground.

[0028] The first rotating assembly 30 includes a first rotating plate 31 and a first motor 32. The first end of the first rotating plate 31 is disposed on the base 20 and rotatably connected to the base 20. The first motor 32 is fixedly mounted on the base 20 and is used to control the rotation of the first end of the first rotating plate 31. The first motor 32 is electrically connected to the control cabinet.

[0029] The second rotating assembly 40 includes a second rotating plate 41 and a second motor 42. The first end of the second rotating plate 41 is rotatably connected to the second end of the first rotating plate 31. The second motor 42 is fixedly mounted on the second end of the first rotating plate 31 and is used to control the rotation of the first end of the second rotating plate 41. The second motor 42 is electrically connected to the control cabinet.

[0030] The polishing assembly 50 includes a support ring 51 and a third motor 52. The first side of the support ring 51 is rotatably connected to the second end of the second rotating plate 41. The third motor 52 is fixedly mounted on the second end of the second rotating plate 41 and is used to control the rotation of the first side of the support ring 51. The third motor 52 is electrically connected to the control cabinet.

[0031] The support pad 60 is fitted on the outside of the polishing pad 12 and is fixedly connected to the polishing disc 11. The upper surface of the support pad 60 is flush with the upper surface of the polishing pad 12.

[0032] In the initial state, the support ring 51 is in contact with the polishing pad 12.

[0033] In operation, the operator first applies polishing liquid and polishing medium to the polishing pad 12 and places the flat workpiece 80 inside the support ring 51. Then, the polishing disc 11 drives the polishing pad 12 to rotate, and the polishing liquid and polishing medium polish the bottom of the flat workpiece 80.

[0034] During the polishing process, the control cabinet can activate the first motor 32, the second motor 42, and the third motor 52, which in turn drive the first rotating plate 31, the second rotating plate 41, and the support ring 51 to rotate, respectively. This achieves two degrees of freedom of motion for the polishing assembly 50 in the XY directions (translation and rotation), allowing the support ring 51 and the planar workpiece 80 to remain and be processed at any position on the polishing pad 12, greatly expanding the polishing trajectory. Furthermore, the design of the support pad 60 provides support for the support ring 51 and the planar workpiece 80 when the polishing assembly 50 extends beyond the polishing pad 12, preventing them from tilting, thus resulting in a better polishing effect.

[0035] In one embodiment, the system further includes a pressurizing assembly 70, which includes a guide cylinder 71, a guide rod 72, a counterweight 73, a pressurizing block 74, and a spring 75.

[0036] The guide cylinder 71 is arranged longitudinally and is fixedly connected to the support ring 51. The guide rod 72 is arranged longitudinally inside the guide cylinder 71 and is slidably connected to the guide cylinder 71. The counterweight 73 is fixedly installed on the top of the guide rod 72. The pressure block 74 is fixedly installed on the bottom of the guide rod 72 and extends into the support ring 51. The spring 75 is arranged inside the guide cylinder 71 and sleeved on the guide rod 72. The two ends of the spring 75 are fixedly connected to the guide cylinder 71 and the guide rod 72 respectively. The spring 75 causes the guide rod 72 to have a downward tendency.

[0037] During operation, the counterweight 73 and spring 75 work together to press the flat workpiece 80 firmly onto the polishing pad 12, making the polishing operation more stable. The spring 75 is designed to provide flexible pressure, ensuring stable pressure and overcoming the drawback of traditional polishing machines that use cylinders for pressurization, which results in large pressure fluctuations.

[0038] In one embodiment, the outer wall of the pressure block 74 is in contact with the inner wall of the support ring 51, so that the pressure applied by the pressure block 74 can be transmitted to the planar workpiece 80 more stably, thereby improving the stability of the polishing operation.

[0039] In one embodiment, the inner side wall of the support ring 51 is fitted against the outer side wall of the planar workpiece 80 to prevent the planar workpiece 80 from shaking within the support ring 51 during polishing, thereby further improving the stability of the polishing operation.

[0040] In one embodiment, an annular receiving groove 61 is formed between the polishing pad 12 and the support pad 60. During the polishing operation, due to the centrifugal force, some polishing liquid and polishing media will fall into the annular receiving groove 61 and accumulate, so as to avoid them spilling onto the support pad 60 and causing over-polishing of the planar workpiece 80.

[0041] In one embodiment, the top of the support pad 60 has a plurality of transversely penetrating guide grooves 62, which are arranged at equal intervals along the circumference of the support pad 60 and are connected to an annular receiving groove 61. Polishing liquid and polishing media spilled into the annular receiving groove 61 are discharged through these drainage grooves.

[0042] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. It will be apparent to those skilled in the art that this utility model is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or basic characteristics of this utility model. Therefore, the embodiments should be considered exemplary and non-limiting in all respects. The scope of this utility model is defined by the appended claims rather than the foregoing description, and thus all variations falling within the meaning and scope of equivalents of the claims are intended to be included within this utility model.

[0043] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A two-degree-of-freedom ultra-precision workpiece planar machining equipment, comprising a worktable, a polishing disc, and a polishing pad, characterized in that: Also includes: Base; A first rotating assembly, comprising a first rotating plate and a first motor, wherein a first end of the first rotating plate is disposed on the base and rotatably connected to the base, and the first motor is used to control the rotation of the first end of the first rotating plate; The second rotating assembly includes a second rotating plate and a second motor. The first end of the second rotating plate is rotatably connected to the second end of the first rotating plate. The second motor is used to control the rotation of the first end of the second rotating plate. A polishing assembly, comprising a support ring and a third motor, wherein a first side of the support ring is rotatably connected to a second end of a second rotating plate, and the third motor is used to control the rotation of the first side of the support ring. A support pad is sleeved on the outside of the polishing pad and fixedly connected to the polishing disc, and the upper surface of the support pad is flush with the upper surface of the polishing pad.

2. The two-degree-of-freedom ultra-precision workpiece planar machining equipment according to claim 1, characterized in that: It also includes a pressurizing assembly, which includes a guide cylinder, a guide rod, a counterweight, a pressurizing block, and a spring; The guide cylinder is arranged longitudinally and fixedly connected to the support ring. The guide rod is arranged longitudinally inside the guide cylinder and slidably connected to the guide cylinder. The counterweight is fixedly installed on the top of the guide rod. The pressure block is fixedly installed on the bottom of the guide rod and extends into the support ring. The spring causes the guide rod to have a downward tendency.

3. The two-degree-of-freedom ultra-precision workpiece planar machining equipment according to claim 2, characterized in that: The outer wall of the pressure block is in contact with the inner wall of the support ring.

4. The two-degree-of-freedom ultra-precision workpiece planar machining equipment according to claim 3, characterized in that: The inner side wall of the support ring is in contact with the outer side wall of the planar workpiece.

5. The two-degree-of-freedom ultra-precision workpiece planar machining equipment according to claim 1, characterized in that: An annular receiving groove is formed between the polishing pad and the support pad.

6. The two-degree-of-freedom ultra-precision workpiece planar machining equipment according to claim 5, characterized in that: The top of the support pad has multiple transverse flow channels, which are connected to the annular receiving groove.

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