Wafer box clamping structure

Abstract

The utility model relates to a wafer cassette clamping structure, which is arranged on a carrying crown block and comprises a supporting seat, a wafer cassette clamping mechanism and a wafer cassette clamping mechanism, the driving mechanism comprises a servo motor, a screw rod, a first driving frame and a driving arm; the clamping structure is used for clamping a wafer box; the clamping structure comprises a first clamping jaw assembly and a second clamping jaw assembly, the first clamping jaw assembly and the second clamping jaw assembly each comprise a second driving frame and a clamping jaw, the clamping jaws are fixed to the bottom of the second driving frame, and the second driving frame is connected with the driving arm; the anti-slip-out mechanism is arranged on the clamping jaw and is used for preventing the wafer from slipping out of the wafer box; the anti-slipping-out mechanism comprises a blocking arm, a first follow-up roller and a second follow-up roller, and the blocking arm is connected with the clamping jaw and can rotate on the side face of the clamping jaw. According to the utility model, the anti-slip mechanism and the cam jacking mechanism prevent the wafer from slipping out of the wafer box in the carrying process, the wafer is protected from being damaged, and the clamping mechanism can adapt to the wafer boxes with different sizes and weights when clamping the wafer box.

Description

Technical Field

[0001] This utility model relates to the field of overhead crane handling technology, and in particular to a wafer box clamping structure. Background Technology

[0002] In automated material handling systems, Overhead Hoist Transport (OHT) cranes are commonly used equipment. They move along tracks above the factory floor to automatically transport open CST (Cassette Spindle Transport) wafer cassettes. However, existing OHT crane systems have some limitations in transporting open CST wafer cassettes, including efficiency issues. Traditional OHT cranes are complex to operate when picking up and placing open CST wafer cassettes, are inefficient, and are easily affected by human factors. During transport, open CST wafer cassettes may tilt or fall due to friction, vibration, or improper handling, resulting in wafer damage. Different production lines may need to transport open CST wafer cassettes of different sizes and weights, and traditional OHT cranes often lack sufficient flexibility to adapt to these changes. Utility Model Content

[0003] Therefore, the technical problem to be solved by this utility model is to overcome the shortcomings of the prior art and provide a wafer cassette clamping structure. The action of the gripper mechanism controlled by the drive mechanism can avoid scratching the wafer when picking up and putting down the wafer cassette, thus protecting the wafer from damage. The anti-slip mechanism and the cam lifting mechanism effectively prevent the wafer from slipping out of the wafer cassette during transportation, thus protecting the wafer from damage. Furthermore, the clamping mechanism can adapt to wafer cassettes of different sizes and weights when gripping the wafer cassette, and has strong adaptability and flexibility.

[0004] To solve the above-mentioned technical problems, this utility model provides a wafer cassette clamping structure, which is installed on a transport crane for clamping wafer cassettes, including:

[0005] Support base, connected to the overhead crane;

[0006] The drive mechanism includes a servo motor, a lead screw, a first drive frame, and a drive arm. The servo motor and the lead screw are both mounted on the support base. The output shaft of the servo motor is connected to one end of the lead screw. The first drive frame is threadedly connected to the lead screw. The two ends of the first drive frame are respectively connected to the drive arm.

[0007] A clamping structure for gripping a wafer cassette; the clamping structure includes a first gripper assembly and a second gripper assembly, each of the first gripper assembly and the second gripper assembly including a second drive frame and a gripper, the gripper being fixed to the bottom of the second drive frame, and the second drive frame being connected to the drive arm;

[0008] An anti-slip mechanism is provided on the gripper to prevent the wafer from sliding out of the wafer cassette. The anti-slip mechanism includes a blocking arm, a first follower roller, and a second follower roller. The blocking arm is connected to the gripper via a rotating shaft, and the blocking arm can rotate on the side of the gripper. The first follower roller is located above the end of the blocking arm, and the second follower roller is located at the bottom of the middle position of the blocking arm.

[0009] A cam lifting mechanism is provided on the support base to control the opening or closing of the blocking arm. When the clamping structure is in the open state, the cam lifting mechanism lifts the first follower roller, and the blocking arm opens away from the wafer cassette. When the clamping structure contacts the wafer cassette, the second follower roller contacts the upper surface of the wafer cassette, lifts the blocking arm, and the blocking arm closes towards the wafer cassette.

[0010] In one embodiment of the present invention, a first linear slide rail is provided on the support base between the second drive frame and the support base; and the first linear slide rail is arranged perpendicularly to the lead screw; and a slider adapted to the first linear slide rail is provided at the bottom of the second drive frame.

[0011] In one embodiment of the present invention, the drive arm is provided with a sliding groove, and the second drive frame is provided with a first pin, which is inserted into the sliding groove of the drive arm.

[0012] In one embodiment of the present invention, a second linear slide rail is provided on the support base below the first drive frame. The second linear slide rail is parallel to the lead screw, and a slider adapted to the second linear slide rail is provided at the bottom of the first drive frame.

[0013] In one embodiment of this utility model, the blocking arm is provided with a waist hole, and the second drive frame is provided with a second pin. The second pin passes through the waist hole to realize the connection between the blocking arm and the second drive frame.

[0014] In one embodiment of this utility model, a return spring is also provided between the blocking arm and the support base.

[0015] In one embodiment of this utility model, a gasket is provided on the inner side of the blocking arm.

[0016] In one embodiment of this utility model, the cam lifting mechanism is a wedge block.

[0017] In one embodiment of the present invention, the bottom of the support base is provided with a positioning block for positioning with the wafer cassette to be clamped.

[0018] In one embodiment of the present invention, the side of the support base is provided with a sensor for detecting whether the wafer has slipped.

[0019] Compared with the prior art, the above-mentioned technical solution of this utility model has the following beneficial effects:

[0020] The wafer cassette clamping structure described in this utility model, through the action of the gripper mechanism controlled by the drive mechanism, can avoid scratching the wafer when picking up and placing the wafer cassette, protecting the wafer from damage; the anti-slip mechanism and the cam lifting mechanism work together to effectively prevent the wafer from slipping out of the wafer cassette during transportation, protecting the wafer from damage; and the clamping mechanism can also adapt to wafer cassettes of different sizes and weights when gripping the wafer cassette, with strong adaptability and flexibility, and can meet diverse transportation needs. Attached Figure Description

[0021] To make the content of this utility model easier to understand, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings.

[0022] Figure 1 This is a schematic diagram of the wafer box clamping structure in a preferred embodiment of the present invention;

[0023] Figure 2 for Figure 1 A schematic diagram of the internal structure of the wafer box clamping structure shown;

[0024] Figure 3 for Figure 2 A schematic diagram of the wafer box clamping structure from another angle;

[0025] Figure 4 for Figure 1 A schematic diagram of the anti-slip mechanism of the wafer cassette clamping structure after it is opened;

[0026] Figure 5 for Figure 1 The diagram shows the wafer box clamping structure and the overhead crane structure.

[0027] Explanation of reference numerals in the accompanying drawings: 1. Support base; 11. Second linear slide rail; 12. Sensor; 21. Servo motor; 22. Lead screw; 23. First drive frame; 24. Drive arm; 241. Slide groove; 3. Clamping structure; 31. Second drive frame; 311. First pin; 32. Gripper; 33. First linear slide rail; 4. Anti-slip mechanism; 41. Blocking arm; 411. Waist hole; 412. Second pin; 413. Shim; 42. First follower roller; 43. Second follower roller; 5. Cam lifting mechanism; 6. Positioning block; 7. Return spring. Detailed Implementation

[0028] The present invention will be further described below with reference to the accompanying drawings and specific embodiments, so that those skilled in the art can better understand and implement the present invention. However, the embodiments are not intended to limit the present invention.

[0029] Reference Figure 1-4 As shown, the wafer cassette clamping structure of this utility model is installed on a transport crane and used to clamp wafer cassettes 200. It includes: a support base 1 connected to the transport crane 100; and a drive mechanism 2, which includes a servo motor 21, a lead screw 22, a first drive frame 23, and a drive arm 24. The servo motor 21 and the lead screw 22 are both mounted on the support base 1. The output shaft of the servo motor 21 is connected to one end of the lead screw 22. The first drive frame 23 is threadedly connected to the lead screw 22, and both ends of the first drive frame 23 are connected to the drive arm 24. The servo motor 21 serves as a power source, enabling precise speed and position control. When the servo motor 21 rotates, it converts the rotational motion into linear motion through the connected lead screw 22. The first drive frame 23 is threadedly connected to the lead screw 22, transmitting the linear motion of the lead screw 22 to the first drive frame 23 via the threaded mechanism, causing it to move along the direction of the lead screw 22.

[0030] The clamping structure 3 is used to clamp the wafer cassette 200. The clamping structure 3 includes a first gripper assembly and a second gripper assembly. Both the first gripper assembly and the second gripper assembly include a second drive frame 31 and a gripper 32. The gripper 32 is fixed to the bottom of the second drive frame 31. The second drive frame 31 is connected to the drive arm 24. When the first drive frame 23 moves along the lead screw 22, the drive arm 24 drives the second drive frame 31 to move in a direction perpendicular to the lead screw 22, thereby controlling the opening and closing of the gripper 32.

[0031] An anti-slip mechanism 4, disposed on the gripper 32, is used to prevent the wafer from sliding out of the wafer cassette 200. The anti-slip mechanism 4 includes a blocking arm 41, a first follower roller 42, and a second follower roller 43. The blocking arm 41 is connected to the gripper 32 via a rotating shaft, and the blocking arm 41 can rotate on the side of the gripper 32. The first follower roller 42 is disposed above the end of the blocking arm 41, and the second follower roller 43 is disposed at the bottom of the middle position of the blocking arm 41. The blocking arm 41 is connected to the gripper 32 via a rotating shaft, allowing the blocking arm 41 to rotate on the side of the gripper 32. The side rotation design allows the blocking arm 41 to be adjusted to a suitable position during different operational stages (such as clamping and releasing the wafer cassette). The first follower roller 42 is located above the end of the blocking arm 41, and the second follower roller 43 is located at the bottom of the middle position of the blocking arm 41. This arrangement allows the blocking arm 41 to dynamically adjust its contact position with the wafer cassette 200 according to operational needs. When clamping and releasing the wafer cassette 200, the arrangement of the first follower roller 42 and the second follower roller 43 allows the blocking arm 41 to rotate, reducing the impact on the wafer cassette 200 and the wafer, and protecting the wafer from damage.

[0032] A cam lifting mechanism 5 is mounted on the support base 1 and is used to control the opening or closing of the blocking arm 41. When the clamping structure 3 is in the open state, the cam lifting mechanism 5 lifts the first follower roller 42, and the blocking arm 41 opens away from the wafer cassette. When the clamping structure 3 contacts the wafer cassette 200, the second follower roller 43 contacts the upper surface of the wafer cassette 200, lifts the blocking arm 41, and the blocking arm 41 closes and moves closer to the wafer cassette.

[0033] Furthermore, a first linear slide rail 33 is provided on the support base 1 between the second drive frame 31 and the support base 1; and the first linear slide rail 33 is arranged perpendicularly to the lead screw 22; the bottom of the second drive frame 31 is provided with a slider adapted to the first linear slide rail 33. The first linear slide rail 33 provides a smooth guide path, allowing the second drive frame 31 to slide smoothly during movement, reducing friction and resistance during movement, and improving overall movement efficiency.

[0034] Preferably, the drive arm 24 is provided with a sliding groove 241, and the second drive frame 31 is provided with a first pin 311, which passes through the sliding groove 241 of the drive arm 24. When the drive arm 24 reciprocates along the lead screw 22, the first pin 311 can slide in the sliding groove 241, driving the second drive frame 31 to reciprocate along the first linear slide rail 33, thereby realizing the opening and closing of the gripper 32.

[0035] Furthermore, a second linear slide rail 11 is provided on the support base 1 below the first drive frame 23. The second linear slide rail 11 is parallel to the lead screw 22, and a slider adapted to the second linear slide rail 11 is provided at the bottom of the first drive frame 23. The second linear slide rail 11 provides a smooth guide path, allowing the first drive frame 23 to slide smoothly during movement, reducing friction and resistance during movement, and improving overall movement efficiency.

[0036] The blocking arm 41 is provided with a waist hole 411, and the second drive frame 31 is provided with a second pin 412. The second pin 412 passes through the waist hole 411 to connect the blocking arm 41 and the second drive frame 31. The waist hole 411 and the second pin 412 cooperate to achieve precise positioning of the rotation position of the blocking arm 41, thereby improving the reliability of the blocking arm 41.

[0037] In this embodiment, a return spring 7 is also provided between the blocking arm 41 and the support base 1. The function of the return spring 7 is to automatically return the blocking arm 41 to its initial position after the clamping action is completed, so as to prepare for the next clamping action.

[0038] Furthermore, a pad 413 is provided on the inner side of the blocking arm 41. The pad 413 can serve as a cushioning material. When the blocking arm 41 contacts the wafer cassette 200, the pad 413 can reduce the damage that may be caused by direct contact and protect the surface of the wafer cassette 200 from wear or scratches. In addition, during the clamping or releasing of the wafer cassette 200, the pad 413 can absorb impact forces and reduce noise and vibration, which is very important for maintaining the stability and safety of the production line.

[0039] In this embodiment, the cam lifting mechanism 5 is a wedge block. When the clamping mechanism 3 opens or closes, the drive arm 24 moves horizontally following the gripper 32, causing the first follower roller 42 at the end of the blocking arm 41 to roll at the bottom of the wedge block. Since the contact surface between the wedge block and the first follower roller 42 is inclined, the first follower roller 42 drives the blocking arm 41 to rotate on the gripper 32 when it rolls, thus opening or closing the blocking arm 41.

[0040] In addition, the bottom of the support base 1 is provided with a positioning block 6 for positioning with the wafer cassette 200 to be clamped. The positioning block 6 can provide a precise positioning reference for the wafer cassette 200, ensuring that each clamping operation is performed in the same position. This helps maintain the consistency of operation and reduces handling errors caused by positional deviations. It can also stabilize the wafer cassette 200 during clamping, reducing the risk of tilting or falling due to improper positioning or instability, and enhancing the safety of the handling process.

[0041] In this embodiment, the support base 1 is provided with a sensor 12 on its side for detecting whether the wafer has slipped. The sensor 12 can monitor the status of the wafer in real time and detect whether the wafer has slipped during handling or storage, thus improving the reliability and accuracy of the detection. It can also prevent damage or loss caused by wafer slippage, protect the expensive wafer from loss, and enhance the safety of the entire handling system.

[0042] like Figure 5 As shown, the wafer cassette clamping structure based on the above structure is installed on the overhead crane 100. During material handling: the clamping structure 3 descends. When it reaches the wafer cassette 200, the gripper 32 is open, and the second follower roller 43 is not in contact with the wafer cassette 200. The first follower roller 42 is in contact with the wedge block, causing the blocking arm 41 to be in a lifted state. When the gripper 32 closes, the blocking arm 41 slowly closes and approaches the wafer. Only then will the second follower roller 43 contact the wafer cassette 200, preventing the blocking arm 41 from going too low and hitting the wafer. During material unloading: the clamping mechanism 3 grips the material and falls downwards. The blocking arm 41 needs to be lifted to open the gripper 32 to prevent the gripper 32 from scraping against the wafer cassette 200 and causing vibration. At this time, the second follower roller 43 of the blocking arm 41 contacts the wafer cassette 200, lifting the blocking arm 41. Since the gripper 32 is in a closed state, the first follower roller 42 is not in contact with the wedge block.

[0043] Obviously, the above embodiments are merely illustrative examples for clear explanation and are not intended to limit the implementation. Those skilled in the art will recognize that other variations or modifications can be made based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. However, obvious variations or modifications derived therefrom are still within the protection scope of this invention.

Claims

1. A wafer cassette clamping structure, mounted on a transport crane, characterized in that: include: Support base, connected to the overhead crane; The drive mechanism includes a servo motor, a lead screw, a first drive frame, and a drive arm. The servo motor and the lead screw are both mounted on the support base. The output shaft of the servo motor is connected to one end of the lead screw. The first drive frame is threadedly connected to the lead screw. The two ends of the first drive frame are respectively connected to the drive arm. Clamping structure for gripping wafer cassettes; The clamping structure includes a first gripper assembly and a second gripper assembly. Both the first gripper assembly and the second gripper assembly include a second drive frame and a gripper. The gripper is fixed to the bottom of the second drive frame, and the second drive frame is connected to the drive arm. An anti-slip mechanism is provided on the gripper to prevent the wafer from sliding out of the wafer cassette; The anti-slip mechanism includes a blocking arm, a first follower roller, and a second follower roller. The blocking arm is connected to the gripper via a rotating shaft, and the blocking arm can rotate on the side of the gripper. The first follower roller is located above the end of the blocking arm, and the second follower roller is located at the bottom of the middle position of the blocking arm. A cam lifting mechanism is provided on the support base to control the opening or closing of the blocking arm; when the clamping structure is in the open state, the cam lifting mechanism lifts the first follower roller, the blocking arm opens, and moves away from the wafer cassette. When the clamping structure comes into contact with the wafer cassette, the second follower roller contacts the upper surface of the wafer cassette, lifting the blocking arm and causing it to retract and move closer to the wafer cassette.

2. The wafer cassette clamping structure according to claim 1, characterized in that: A first linear slide rail is provided on the support base between the second drive frame and the support base; and the first linear slide rail is arranged perpendicular to the lead screw; the bottom of the second drive frame is provided with a slider that is adapted to the first linear slide rail.

3. The wafer cassette clamping structure according to claim 2, characterized in that: The drive arm is provided with a sliding groove, and the second drive frame is provided with a first pin, which is inserted into the sliding groove of the drive arm.

4. The wafer cassette clamping structure according to claim 1, characterized in that: The support base is provided with a second linear slide rail located below the first drive frame. The second linear slide rail is parallel to the lead screw. The bottom of the first drive frame is provided with a slider that is adapted to the second linear slide rail.

5. The wafer cassette clamping structure according to claim 1, characterized in that: The blocking arm is also provided with a waist hole, and the second drive frame is provided with a second pin. The second pin passes through the waist hole to realize the connection between the blocking arm and the second drive frame.

6. The wafer cassette clamping structure according to claim 5, characterized in that: A return spring is also provided between the blocking arm and the support base.

7. The wafer cassette clamping structure according to claim 1, characterized in that: A gasket is provided on the inner side of the blocking arm.

8. The wafer cassette clamping structure according to claim 1, characterized in that: The cam lifting mechanism is a wedge-shaped block.

9. A wafer cassette clamping structure according to claim 1, characterized in that: The bottom of the support base is provided with a positioning block for positioning with the wafer cassette to be clamped.

10. A wafer cassette clamping structure according to claim 1, characterized in that: The side of the support is equipped with a sensor for detecting whether the wafer has slipped.

Images