Target material magnetic permeability objective table device

Abstract

The utility model relates to the technical field of target production, in particular to a target magnetic permeability objective table device, which comprises a bottom table, and a lifting table capable of reciprocating up and down is mounted above the top surface of the bottom table. The detection device has the advantages that the L-shaped detection frame is arranged on the top surface of the bottom table, the detection device is arranged on the horizontal part above the detection frame, the lifting table capable of reciprocating up and down is arranged above the bottom table, the guide frame is rotationally arranged in the middle position above the lifting table, and the movable frame capable of reciprocating back and forth is arranged in the guide frame. The whole moving frame is in a U shape, the supporting tables are installed above the two sides of the outer portion of the moving frame, the moving bases capable of conducting left-right reciprocating motion are installed on the top faces of the two supporting tables, the objective table is installed between the two moving bases, the objective table can achieve lifting, rotating, front-back motion and left-right motion, the target is placed on the top face of the objective table, and moving of the target can be achieved; therefore, all-directional detection of the target material by the detection equipment is facilitated.

Description

Technical Field

[0001] This utility model relates to the field of target material production technology, and in particular to a target material permeability stage device. Background Technology

[0002] Currently, the magnetic permeability of sputtering target disks is measured by fixing a standard U-shaped magnet under a circular target disk and positioning the target disk at a certain distance above the N and S poles of the magnet. The magnetic field data transmitted through the target disk is measured using a Hall sensor. This method is usually performed manually, with the circular target disk being manually controlled to pass through the standard magnet point by point for inspection and recording. This method suffers from practical problems such as low inspection efficiency, high labor intensity, and inaccurate location of defects. Based on this, this application proposes a target magnetic permeability stage device that can solve the above problems. Utility Model Content

[0003] The purpose of this invention is to overcome the shortcomings of the prior art and provide a target material permeability stage device.

[0004] The objective of this utility model is achieved through the following technical solution: a target material permeability stage device, comprising a base platform, a lifting platform capable of reciprocating up and down is installed above the top surface of the base platform, a first motor is installed in the middle of the bottom surface of the lifting platform, a guide frame is installed at the output end of the first motor, a movable frame capable of reciprocating back and forth is installed inside the guide frame, the overall structure of the movable frame is U-shaped, a support platform is installed above both sides of the movable frame, a movable seat capable of reciprocating left and right is installed on the top surface of both support platforms, a stage is installed between the two movable seats, and detection frames are installed on both sides of one side of the top surface of the base platform, both detection frames are L-shaped and horizontal at the top, and a mounting groove is opened above the two detection frames, and a detection device is installed inside the two mounting grooves.

[0005] Optionally, mounting slots are provided at the four corners of the top surface of the lifting platform, and telescopic motors are installed inside the four mounting slots. The output ends of the four telescopic motors are all installed together with the top surface of the base platform.

[0006] Optionally, the guide frame is a U-shaped groove, closed on one side and open on the other. A second motor is installed on the closed side of the guide frame, and a threaded rod is installed on the output end of the second motor. The movable frame is located inside the guide frame, and the threaded rod and the movable frame are threaded together.

[0007] Optionally, multiple teeth are installed on one side of the exterior of each of the two movable seats, a fixing plate is installed on the outer side of the top surface of each of the two support platforms, a third motor is installed on the bottom surface of each of the two fixing plates, and gears are installed at the output ends of each of the two third motors, with the two gears meshing with the two sets of teeth respectively.

[0008] Optionally, each of the two movable seats has a guide groove on the side near the top surface of the tooth, and a limit block is installed at the center of the top surface of each of the two support platforms. The two limit blocks are slidably installed inside the two guide grooves respectively.

[0009] This utility model has the following advantages:

[0010] This target permeability stage device consists of a base platform as the main body. An L-shaped testing frame is installed on the top surface of the base platform. Testing equipment is installed on the horizontal part above the testing frame. A lifting platform capable of vertical reciprocating motion is installed above the base platform. A guide frame is rotatably installed in the middle above the lifting platform. Inside the guide frame is a movable frame capable of back-and-forth reciprocating motion. The movable frame is U-shaped. Support platforms are installed on the top of both sides of the movable frame. Movable seats capable of horizontal reciprocating motion are installed on the top surface of the two support platforms. The stage is installed between the two movable seats, enabling the stage to move up, down, rotate, back and forth, and left and right. The target material is placed on the top surface of the stage, allowing the target material to move, so that the testing equipment can perform all-round testing of the target material, meeting the needs of use.

[0011] Among them, a limit block is installed on the top surface of the support platform, and a guide groove is opened on the movable seat. The limit block is slidably installed inside the guide groove, which can limit the movement of the movable seat and prevent the movable seat from shaking. Attached Figure Description

[0012] Figure 1 This is a first-view overall structural diagram of the present invention;

[0013] Figure 2 This is a schematic diagram of the overall structure of the present invention from a second perspective;

[0014] Figure 3 In this utility model Figure 1 Internal structure diagram;

[0015] Figure 4 This is a schematic diagram of the overall structure of the base platform of this utility model;

[0016] Figure 5 This is a schematic diagram of the overall structure of the lifting platform in this utility model;

[0017] Figure 6 This is a schematic diagram of the overall structure of the guide frame in this utility model;

[0018] Figure 7 This is a schematic diagram of the overall structure of the mobile frame in this utility model;

[0019] Figure 8 This is a schematic diagram of the overall structure of the movable base in this utility model;

[0020] Figure 9 This is a schematic diagram of the internal structure of the movable base in this utility model.

[0021] In the diagram: 1-base platform, 2-lifting platform, 3-guide frame, 4-moving frame, 5-moving seat, 6-carrying platform, 7-testing equipment, 8-third motor, 9-gear, 10-telescopic motor, 11-threaded rod, 12-second motor, 13-first motor, 14-testing frame, 15-mounting slot, 16-mounting slot position, 17-support platform, 18-fixed plate, 19-limiting block, 20-tooth, 21-guide slot. Detailed Implementation

[0022] The present invention will be further described below with reference to the accompanying drawings, but the scope of protection of the present invention is not limited to the following description.

[0023] like Figures 1 to 9 As shown, a target permeability stage device includes a base 1, a lifting platform 2 that can move up and down reciprocally is installed above the top surface of the base 1, a first motor 13 is installed in the middle of the bottom surface of the lifting platform 2, a guide frame 3 is installed at the output end of the first motor 13, a movable frame 4 that can move back and forth is installed inside the guide frame 3, the movable frame 4 has an overall U-shaped structure, a support platform 17 is installed on the top of both sides of the movable frame 4, a movable seat 5 that can move left and right reciprocally is installed on the top surface of the two support platforms 17, a stage 6 is installed between the two movable seats 5, and a detection frame 14 is installed on both sides of one side of the top surface of the base 1. The two detection frames 14 are L-shaped and horizontal at the top, and a mounting groove 15 is opened above the two detection frames 14. A detection device 7 is installed inside the two mounting grooves 15.

[0024] As an optional technical solution of this utility model, installation slots 16 are provided at the four corners of the top surface of the lifting platform 2. Each of the four installation slots 16 is equipped with a telescopic motor 10. The output ends of the four telescopic motors 10 are installed together with the top surface of the base platform 1. The four telescopic motors 10 need to be controlled synchronously to realize the up and down movement of the lifting platform 2.

[0025] As an optional technical solution of this utility model, the guide frame 3 is a U-shaped groove with one side closed and the other side open. A second motor 12 is installed on the closed side of the guide frame 3. A threaded rod 11 is installed at the output end of the second motor 12. The movable frame 4 is located inside the guide frame 3. The threaded rod 11 and the movable frame 4 are threadedly engaged, which can limit the movable frame 4. Furthermore, the reciprocating motion of the movable frame 4 can be realized by rotating the threaded rod 11.

[0026] As an optional technical solution of this utility model, multiple teeth 20 are installed on one side of the two movable seats 5, and fixed plates 18 are installed on the outer side of the top surface of the two support platforms 17. A third motor 8 is installed on the bottom surface of the two fixed plates 18, and gears 9 are installed at the output end of the two third motors 8. The two gears 9 mesh with the two sets of teeth 20 respectively. The movement of the movable seats 5 can be realized by the cooperation of the gears 9 and the teeth 20.

[0027] As an optional technical solution of this utility model, guide grooves 21 are provided on the side of the two movable seats 5 near the top surface of the tooth 20, and limit blocks 19 are installed in the middle of the top surface of the two support platforms 17. The two limit blocks 19 are slidably installed inside the two guide grooves 21, which facilitates the movement of the movable seats 5, prevents the movable seats 5 from shaking, and makes them only able to move back and forth.

[0028] In summary, the features, assembly method, usage process, and functions of each component in this utility model are as follows: The base 1 serves as the main body of the device. An L-shaped detection frame 14 is mounted on the top surface of the base 1. A detection device 7 is mounted on the horizontal part above the detection frame 14. A lifting platform 2 capable of reciprocating up and down is mounted above the base 1. A guide frame 3 is rotatably mounted in the center above the lifting platform 2. A movable frame 4 capable of reciprocating back and forth is installed inside the guide frame 3. The movable frame 4 is U-shaped. Support platforms 17 are mounted on the upper sides of both outer sides of the movable frame 4. Each of the top surfaces of the support platform 17 is equipped with a movable seat 5 that can move back and forth. A platform 6 is installed between two movable seats 5, enabling the platform 6 to move up and down, rotate, move forward and backward, and move left and right. The target material is placed on the top surface of the platform 6, which allows the target material to move so that the testing equipment 7 can perform all-round testing on the target material to meet the needs of use. A limit block 19 is installed on the top surface of the support platform 17. A guide groove 21 is opened on the movable seat 5. The limit block 19 is slidably installed inside the guide groove 21 to limit the movement of the movable seat 5 and prevent the movable seat 5 from shaking.

[0029] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A target material permeability stage device, characterized in that: The system includes a base platform (1), a lifting platform (2) that can move up and down is installed on the top surface of the base platform (1), a first motor (13) is installed in the middle of the bottom surface of the lifting platform (2), a guide frame (3) is installed at the output end of the first motor (13), a movable frame (4) that can move back and forth is installed inside the guide frame (3), the overall structure of the movable frame (4) is U-shaped, a support platform (17) is installed on the top of both sides of the movable frame (4), a movable seat (5) that can move left and right is installed on the top surface of the two support platforms (17), a loading platform (6) is installed between the two movable seats (5), a detection frame (14) is installed on both sides of one side of the top surface of the base platform (1), the two detection frames (14) are L-shaped and horizontal at the top, an installation slot (15) is opened on the top of the two detection frames (14), and a detection device (7) is installed inside the two installation slots (15).

2. The target material permeability stage device according to claim 1, characterized in that: The lifting platform (2) has four installation slots (16) at the four corners of its top surface. Each of the four installation slots (16) is equipped with a telescopic motor (10), and the output ends of the four telescopic motors (10) are installed together with the top surface of the base platform (1).

3. The target permeability stage device according to claim 1, characterized in that: The guide frame (3) is a U-shaped groove with one side closed and the other side open. A second motor (12) is installed on the closed side outside the guide frame (3). A threaded rod (11) is installed at the output end of the second motor (12). The movable frame (4) is located inside the guide frame (3). The threaded rod (11) and the movable frame (4) are threaded together.

4. The target permeability stage device according to claim 1, characterized in that: Multiple teeth (20) are installed on one side of the exterior of the two movable seats (5), and fixed plates (18) are installed on the outer side of the top surface of the two support platforms (17). A third motor (8) is installed on the bottom surface of the two fixed plates (18), and gears (9) are installed at the output end of the two third motors (8). The two gears (9) mesh with the two sets of teeth (20) respectively.

5. The target permeability stage device according to claim 4, characterized in that: The two movable seats (5) are provided with guide grooves (21) on the side near the top surface of the tooth (20), and limit blocks (19) are installed in the middle of the top surface of the two support platforms (17). The two limit blocks (19) are slidably installed inside the two guide grooves (21).

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