Film coating baffle adjusting mechanism and film coating equipment

Abstract

The utility model discloses a coating baffle plate adjusting mechanism and coating equipment. The coating baffle plate adjusting mechanism comprises a coating baffle plate body, a connecting rod and a driving piece, the coating baffle body is fixedly connected with the connecting rod; the output end of the driving part extends into the vacuum coating cavity, is connected with the connecting rod and is used for controlling the connecting rod to rotate around the axis direction of the connecting rod; the other end of the driving part is exposed out of the vacuum coating cavity; and a magnetic fluid sealing structure is arranged in the middle of the outer wall of the driving part and is used for separating the vacuum coating cavity from the outside. Through the arrangement, the angle of the coating baffle plate body can be adjusted on the premise that the vacuum environment in a vacuum coating cavity is not damaged, so that a process test can be quickly carried out after the adjustment is completed, the time required by the whole adjustment process is shortened, and the coating speed is improved.

Description

Technical Field

[0001] This utility model relates to the field of coating, and in particular to a coating baffle adjustment mechanism and coating equipment. Background Technology

[0002] Plate coating equipment refers to a thin film preparation technology that uses physical deposition to deposit materials onto the workpiece under high vacuum conditions. It is widely used in industries such as semiconductors and photovoltaic solar cells.

[0003] The thin film preparation process of high vacuum plate coating equipment mainly involves using a DC power supply, pulse power supply, or dedicated plasma generator under vacuum conditions to evaporate the target material and ionize the evaporated material. The evaporated material or its reaction products are then deposited on the substrate (silicon wafer) to form a thin film. In this process, problems such as uneven film formation, large film thickness deviation, and wrap-around coating often occur.

[0004] To solve the above problems, it is usually necessary to adjust the angle of the baffle to interfere with the plasma movement trajectory or plasma dynamics inside the cavity, control the amount or position of plasma adhering to the substrate (silicon wafer), and achieve the purpose of controlling the uniformity of the coating thickness.

[0005] However, in existing technologies, the adjustment hardware for the baffle is usually located inside the cavity. Therefore, adjustment requires stopping the equipment and opening the cavity. This process disrupts the vacuum environment inside the cavity, necessitating a vacuuming operation after adjustment. The thickness of the coating layer on the substrate surface must then be checked to ensure it meets parameter requirements. In other words, the adjustment process involves multiple steps: equipment shutdown and backpressure, opening the cavity, manual adjustment, closing the cavity, high vacuuming, and process testing. Repeated testing is required until the target is met, making the entire adjustment process quite time-consuming.

[0006] Therefore, a coating baffle adjustment mechanism and coating equipment are needed to solve the above problems. Utility Model Content

[0007] The purpose of this invention is to provide a coating baffle adjustment mechanism and coating equipment, so as to adjust the angle of the coating baffle body without destroying the vacuum environment inside the vacuum coating chamber, thereby enabling rapid process testing after adjustment, shortening the overall adjustment time and improving the coating rate.

[0008] To solve the above-mentioned technical problems, this utility model provides a coating baffle adjustment mechanism, including a coating baffle body, a connecting rod and a driving component;

[0009] The coated baffle body is fixedly connected to the connecting rod;

[0010] The output end of the drive unit extends into the vacuum coating cavity and is connected to the connecting rod, used to control the connecting rod to rotate about its axis.

[0011] The other end of the drive component is exposed to the outside of the vacuum coating cavity;

[0012] The drive component has a magnetohydrodynamic sealing structure in the middle of its outer wall to isolate the vacuum coating cavity from the outside.

[0013] Furthermore, the driving component includes a drive motor and an output shaft;

[0014] The output end of the drive motor is connected to the output shaft;

[0015] The output shaft is connected to the connecting rod;

[0016] The magnetohydrodynamic sealing structure is sleeved on the outer wall of the output shaft, enabling the output shaft to rotate relative to the magnetohydrodynamic sealing structure.

[0017] Furthermore, the magnetohydrodynamic sealing structure has a flange for fixing to the vacuum coating cavity to maintain relative movement with the output shaft.

[0018] Furthermore, the output shaft is arranged perpendicular to the connecting rod;

[0019] The end of the output shaft and the end of the connecting rod are fixedly fitted with meshing bevel gears.

[0020] Furthermore, the drive motor is configured as a servo motor or a stepper motor.

[0021] Furthermore, the connecting rod is configured as a rigid structure and is fixedly connected to the coating baffle body by fasteners.

[0022] On the other hand, a coating device is also proposed, including the coating baffle adjustment mechanism and the vacuum coating chamber described in the above embodiments;

[0023] One end of the connecting rod is rotatably mounted on the inner wall of the vacuum coating cavity, and the other end is located inside the vacuum coating cavity and connected to the driving component;

[0024] The coating baffle body is used to adjust the movement trajectory of the plasma inside the vacuum coating cavity;

[0025] The vacuum coating cavity has an opening for mounting the drive component;

[0026] The magnetohydrodynamic sealing structure is located at the opening to prevent external gas from seeping into the vacuum coating cavity.

[0027] Furthermore, the drive component is fixed to the top of the vacuum coating cavity by a bracket.

[0028] Furthermore, the drive unit is connected to an external control terminal.

[0029] Compared with the prior art, the present invention has at least the following beneficial effects:

[0030] By configuring a coating baffle body and a connecting rod, with the connecting rod fixedly connected to the coating baffle body and capable of moving around its axis, the deflection angle of the coating baffle body can be adjusted. A driving component is also included, with one end extending into the vacuum coating chamber and the other end exposed outside the chamber. This extended end of the driving component is connected to the connecting rod, causing it to rotate. This allows for control of the coating baffle body angle adjustment within the vacuum coating chamber from outside the chamber. Furthermore, a magnetic fluid sealing structure is installed in the middle of the outer wall of the driving component. Under the influence of the driving component's magnetic field, the magnetic fluid sealing structure ensures that the vacuum coating chamber remains isolated from the outside environment. This prevents the driving component's operation from interfering with the vacuum environment inside the vacuum coating chamber, thus achieving the function of adjusting the coating baffle body angle without disrupting the internal vacuum environment. This allows for rapid process testing after the coating baffle body angle is adjusted, shortening the overall adjustment time and increasing the coating rate. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the coating baffle adjustment mechanism in Embodiment 1 of this utility model;

[0032] Figure 2 This is a schematic diagram of the coating equipment in Embodiment 2 of this utility model.

[0033] Reference numerals: 1. Coating baffle body; 2. Connecting rod; 3. Driving component; 31. Drive motor; 32. Output shaft; 4. Magnetohydrodynamic sealing structure; 41. Flange; 5. Bevel gear; 6. Vacuum coating chamber. Detailed Implementation

[0034] The coating baffle adjustment mechanism and coating equipment of this utility model will be described in more detail below with reference to the schematic diagrams, which illustrate preferred embodiments of this utility model. It should be understood that those skilled in the art can modify the utility model described herein while still achieving the advantageous effects of this utility model. Therefore, the following description should be understood as being of general knowledge to those skilled in the art and is not intended to limit this utility model.

[0035] The present invention will be described in more detail below by way of example with reference to the accompanying drawings. The advantages and features of the present invention will become clearer from the following description. It should be noted that the drawings are in a very simplified form and use non-precise proportions, and are only used to facilitate and clarify the illustration of the embodiments of the present invention.

[0036] Example 1

[0037] like Figure 1 As shown, this embodiment proposes a coating baffle adjustment mechanism, including a coating baffle body 1, a connecting rod 2, and a driving component 3.

[0038] The coating baffle body 1 is fixedly connected to the connecting rod 2 so that the movement of the connecting rod 2 drives the coating baffle body 1 to rotate, thereby changing the movement trajectory of the plasma in the vacuum coating cavity 6, controlling the amount and position of the plasma attached to the substrate (silicon wafer), so that the thickness of the coating layer on the substrate is evenly distributed, thereby improving the coating effect.

[0039] In this embodiment, the output end of the driving component 3 extends into the vacuum coating cavity 6 and is connected to the connecting rod 2, used to control the rotation of the connecting rod 2 around its axis. The other end of the driving component 3 is exposed outside the vacuum coating cavity 6. That is, the angle of the coating baffle body 1 inside the vacuum coating cavity 6 is controlled by the driving component 3 outside the vacuum coating cavity 6, allowing adjustment of the angle of the coating baffle body 1 without opening the vacuum coating cavity 6. This effectively reduces the steps required for adjusting the coating thickness and improves the coating rate.

[0040] The driving component 3 has a magnetic fluid sealing structure 4 in the middle of its outer wall to isolate the vacuum coating cavity 6 from the outside world. This ensures that the driving component 3 does not affect the vacuum environment inside the vacuum coating cavity 6 while controlling the angle of the coating baffle body 1. As a result, process testing can be carried out directly without having to perform vacuuming operation on the vacuum coating cavity 6 again. This further reduces the steps required for adjusting the coating thickness and achieves the goal of further improving the coating rate.

[0041] This device, by setting up a coating baffle body 1 and a connecting rod 2, with the connecting rod 2 fixedly connected to the coating baffle body 1 and movable around its axis, can adjust the deflection angle of the coating baffle body 1. Furthermore, by setting up a driving component 3, with one end extending into the vacuum coating chamber 6 and the other end exposed outside the vacuum coating chamber 6, and the end of the driving component 3 extending into the vacuum coating chamber 6 connected to the connecting rod 2, it drives the connecting rod 2 to rotate, thereby achieving control of the angle adjustment of the coating baffle body 1 inside the vacuum coating chamber 6 from outside the vacuum coating chamber 6. In addition, a magnetic fluid sealing structure 4 is provided in the middle of the outer wall of the driving component 3, so that under the action of the magnetic field of the driving component 3, the magnetic fluid sealing structure 4 can always isolate the vacuum coating cavity 6 from the outside world. That is, the operation of the driving component 3 will not interfere with the vacuum environment inside the vacuum coating cavity 6. Thus, the function of adjusting the angle of the coating baffle body 1 can be completed without destroying the vacuum environment inside the vacuum coating cavity 6. After the angle of the coating baffle body 1 is adjusted, the process test can be carried out quickly, shortening the time required for the overall adjustment process and achieving the purpose of improving the coating rate.

[0042] In this embodiment, a specific driving component 3 is proposed to better control the rotation of the connecting rod 2, thereby improving the accuracy of the angle control of the coating baffle body 1.

[0043] Specifically, the driving component 3 includes a drive motor 31 and an output shaft 32.

[0044] The output end of the drive motor 31 is connected to the output shaft 32, and the output shaft 32 is connected to the connecting rod 2. The output shaft 32 is rotated by the drive motor 31, and the output shaft 32 is connected to the connecting rod 2. Therefore, the rotational power of the output shaft 32 can be converted into the rotational power of the connecting rod 2, thereby completing the control of the angle of the coating baffle body 1.

[0045] It should be noted that the magnetic fluid sealing structure 4 is sleeved on the outer wall of the output shaft 32, so that the output shaft 32 can rotate relative to the magnetic fluid sealing structure 4, that is, the magnetic fluid sealing structure 4 will not interfere with the operation of the output shaft 32.

[0046] It should also be noted that the magnetic fluid sealing structure 4 has a flange 41 for fixing on the vacuum coating cavity 6 to maintain relative movement with the output shaft 32, so that the magnetic fluid sealing structure 4 will not interfere with the output shaft 32 and ensure its sealing effect on the vacuum coating cavity 6.

[0047] The magnetohydrodynamic sealing structure 4 includes a sealing gap located between the output shaft 32 and the stationary sealing component (i.e., the vacuum coating cavity 6). The magnetohydrodynamic fluid fills this gap to fit tightly against the surface of the output shaft 32 and the stationary sealing component, thereby achieving a seal. This is prior art and will not be described in detail here.

[0048] In this embodiment, to reduce the space occupied by the drive component 3 in the horizontal direction, which would result in an overly large overall structure that is inconvenient for installation and application, the output shaft 32 is arranged perpendicularly to the connecting rod 2. A bevel gear 5 is fixedly installed at the end of the output shaft 32 and the end of the connecting rod 2 to mesh with each other, so as to convert the vertical rotational power of the output shaft 32 into the horizontal rotational power of the connecting rod 2.

[0049] In a further embodiment, in order to improve the adjustment accuracy of the coating baffle body 1, the drive motor 31 is set as a servo motor or a stepper motor.

[0050] In other embodiments, the connecting rod 2 is configured as a rigid structure and is fixedly connected to the coating baffle body 1 by fasteners to improve strength and prevent the coating baffle body 1 from being affected by its own deformation during rotation, thereby affecting the coating effect.

[0051] Example 2

[0052] like Figure 2 As shown, this embodiment proposes a coating device based on embodiment one, including the coating baffle adjustment mechanism and the vacuum coating chamber 6 described in embodiment one.

[0053] One end of the connecting rod 2 is rotatably mounted on the inner wall of the vacuum coating cavity 6, and the other end is located inside the vacuum coating cavity 6 and connected to the driving component 3.

[0054] The coating baffle body 1 is used to adjust the movement trajectory of the plasma inside the vacuum coating cavity 6.

[0055] The vacuum coating cavity 6 has an opening for installing the drive component 3, and the magnetohydrodynamic sealing structure 4 is disposed at the opening to intercept external gas from seeping into the vacuum coating cavity 6.

[0056] With the above settings, after the angle of the coating baffle body 1 is adjusted, the process test can be carried out quickly, shortening the overall adjustment time and achieving the goal of increasing the coating rate.

[0057] The drive unit 3 is fixed to the top of the vacuum coating cavity 6 by a bracket to reduce the space occupied by the equipment.

[0058] In a further embodiment, the drive unit 3 is connected to an external control terminal to cooperate with the detection sensor of the vacuum coating chamber 6 to complete the intelligent control of the angle of the coating baffle body 1.

[0059] Obviously, those skilled in the art can make various modifications and variations to this utility model without departing from its spirit and scope. Therefore, if these modifications and variations fall within the scope of the claims of this utility model and their equivalents, this utility model also intends to include these modifications and variations.

Claims

1. A coating baffle adjustment mechanism, characterized in that, Includes the coated baffle body, connecting rod, and drive components; The coated baffle body is fixedly connected to the connecting rod; The output end of the drive unit extends into the vacuum coating cavity and is connected to the connecting rod, used to control the connecting rod to rotate about its axis. The other end of the drive component is exposed to the outside of the vacuum coating cavity; The drive component has a magnetohydrodynamic sealing structure in the middle of its outer wall to isolate the vacuum coating cavity from the outside.

2. The coating baffle adjustment mechanism as described in claim 1, characterized in that, The driving component includes a drive motor and an output shaft; The output end of the drive motor is connected to the output shaft; The output shaft is connected to the connecting rod; The magnetohydrodynamic sealing structure is sleeved on the outer wall of the output shaft, enabling the output shaft to rotate relative to the magnetohydrodynamic sealing structure.

3. The coating baffle adjustment mechanism as described in claim 2, characterized in that, The magnetohydrodynamic sealing structure has a flange for fixing to the vacuum coating cavity to maintain relative movement with the output shaft.

4. The coating baffle adjustment mechanism as described in claim 2, characterized in that, The output shaft is perpendicular to the connecting rod; The end of the output shaft and the end of the connecting rod are fixedly fitted with meshing bevel gears.

5. The coating baffle adjustment mechanism as described in claim 2, characterized in that, The drive motor is configured as a servo motor or a stepper motor.

6. The coating baffle adjustment mechanism as described in claim 1, characterized in that, The connecting rod is configured as a rigid structure and is fixedly connected to the coating baffle body by fasteners.

7. A coating apparatus, characterized in that, Includes the coating baffle adjustment mechanism and the vacuum coating chamber as described in any one of claims 1-6; One end of the connecting rod is rotatably mounted on the inner wall of the vacuum coating cavity, and the other end is located inside the vacuum coating cavity and connected to the driving component; The coating baffle body is used to adjust the movement trajectory of the plasma inside the vacuum coating cavity; The vacuum coating cavity has an opening for mounting the drive component; The magnetohydrodynamic sealing structure is located at the opening to prevent external gas from seeping into the vacuum coating cavity.

8. The coating equipment as described in claim 7, characterized in that, The drive component is fixed to the top of the vacuum coating chamber by a bracket.

9. The coating equipment as described in claim 7, characterized in that, The drive unit is connected to an external control terminal.

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