Vacuum pipeline connecting device and vacuum system

Abstract

The utility model discloses a vacuum pipeline connecting device and a vacuum system, and belongs to the technical field of vacuum equipment. According to the technical key points, the device comprises a middle module and a T-shaped connecting piece; the middle module comprises a first tool block, a second connector and a gas connector. The second connector and the gas connector are arranged on the bottom face and the lateral face of the first tool block respectively, and a pipeline is arranged in the first tool block so that the gas connector can be communicated with the second connector. The T-shaped connecting piece comprises a second tool block and a first connector, and the first connector is fixedly arranged on the top face of the second tool block. Wherein the second connector is matched with the connecting port of the first connector, and the second connector can be inserted into the first connector; a vacuum pipeline B is arranged in the middle of the first connector in a protruding mode. The utility model aims to provide a vacuum pipeline connecting device and a vacuum system, which can ensure the sealing performance of vacuum equipment connection.

Description

Technical Field

[0001] This utility model relates to the technical field of vacuum equipment, and more specifically, to a vacuum pipe connection device and a vacuum system. Background Technology

[0002] Currently, vacuum pipeline connection devices generally adopt rigid fixed docking methods, such as CN217898374U and CN217239807U, which have significant limitations in complex pipeline layouts or dynamic operating conditions.

[0003] The following technical problems exist with vacuum pipeline connection devices:

[0004] (1) When using flanges or other methods for connection, if there is a small axial offset in the vacuum pipeline connection device, it will lead to sealing failure or stress concentration.

[0005] (2) Existing pipeline connections mainly rely on the pipe diameter matching of the pipe openings. Sealing in the radial direction of the pipe openings is relatively difficult.

[0006] Therefore, it is necessary to develop a new vacuum pipe connection device. Utility Model Content

[0007] The purpose of this invention is to address the shortcomings of the prior art by providing a vacuum pipe connection device.

[0008] Another objective of this application is to provide a vacuum system.

[0009] The technical solution of this utility model is:

[0010] A vacuum pipe connection device for connecting vacuum pipe A and vacuum pipe B, comprising: a central module and a T-shaped connector;

[0011] The middle module includes: a first tooling block, a second connector, and a gas connector;

[0012] The second connector and the gas connector are respectively disposed on the bottom surface and the side surface of the first tooling block. The first tooling block has a pipe inside so that the gas connector and the second connector are connected. The pipe, the gas connector and the second connector inside the first tooling block together constitute a vacuum pipe A.

[0013] The T-shaped connector includes a second tooling block and a first connector, wherein the first connector is fixedly disposed on the top surface of the second tooling block;

[0014] The second connector is compatible with the connector of the first connector, and the second connector can be inserted into the first connector.

[0015] The first connector has a vacuum pipe B protruding from its center.

[0016] Furthermore, the first connector is connected to the second tooling block by threads.

[0017] Furthermore, a guide alignment rod is provided on the bottom surface of the middle module, and the front end of the guide alignment rod is a tapered head; the second tooling block is provided with a guide hole, and the guide hole is a tapered hole; the guide alignment rod is adapted to the guide hole;

[0018] The middle module further includes an angle steering mechanism; the angle steering mechanism includes a clamping plate, multiple springs, a floating joint, and a flange; the flange is fixedly disposed on the top surface of the first tooling block; the clamping plate is disposed above the flange; one end of the spring is connected to the top surface of the flange, and the other end is connected to the bottom surface of the clamping plate.

[0019] The top clamping plate is provided with a through hole, and the front end of the cylinder connecting rod is provided with a thread. The cylinder connecting rod passes through the through hole and is threadedly connected to the floating joint.

[0020] The cylinder connecting rod has a clamping part at the front end. When the cylinder connecting rod is threadedly connected to the floating joint, the clamping part, the top plate, and the floating joint can contact each other in sequence.

[0021] Initially, the spring is in a compressed state.

[0022] Furthermore, it also includes: a drive cylinder, one end of which is provided with a connection hole, and the drive cylinder and the cylinder connecting rod are connected through the connection hole.

[0023] Furthermore, the number of springs is three or more.

[0024] Furthermore, the number of springs is four.

[0025] A vacuum system includes the aforementioned vacuum pipe connection device, drive cylinder, outer casing, and workpiece vacuum chamber;

[0026] The workpiece vacuum chamber is disposed inside the outer casing;

[0027] The vacuum pipe connection device is disposed between the outer casing and the workpiece vacuum chamber;

[0028] The drive cylinder is fixed to the bottom surface of the top plate of the outer casing, and the drive cylinder is connected to the cylinder connecting rod of the vacuum pipeline connecting device;

[0029] The T-shaped connector is fixed to the top surface of the workpiece vacuum chamber;

[0030] The vacuum pipe B is connected to the vacuum chamber of the workpiece.

[0031] Furthermore, it also includes a backing pump, wherein the vacuum pipe A is connected to the backing pump.

[0032] The beneficial effects of this application are as follows:

[0033] (1) This application proposes a vacuum pipeline connection device, wherein a gas connector is connected to a vacuum pipeline (connecting a backing pump, a molecular pump, etc.), and both the gas connector and the second connector are set on a first tooling block. A connecting pipe is set inside the first tooling block so that the gas connector and the second connector are connected, and the second connector is inserted into the first connector. When evacuating, the second connector and the first connector are sealed by negative pressure, that is, this application realizes gas pressure (atmospheric pressure) driven sealing.

[0034] At the same time, a vacuum connection pipe is inserted inside the first connector, realizing the docking connection of the vacuum pipe, that is, the connection between the gas connector and the vacuum connection pipe.

[0035] (2) The first connector 320 and the second connector 220 will inevitably have axial misalignment. To solve this problem, by "the guide alignment rod 240 corresponds to the guide hole 303, the front end of the guide alignment rod 240 is a tapered head, and the guide hole 303 is a tapered hole", "the cylinder connecting rod 100 passes through the through hole and is threadedly connected to the floating joint 253, the front end of the cylinder connecting rod 100 has a pressing part, when the cylinder connecting rod 100 is threadedly connected to the floating joint 253, the pressing part, the top plate, and the floating joint 253 are all in contact from top to bottom; in the initial state, the spring 252 is in a compressed state", a certain angle of rotation can be generated between the floating joint and the flange. Attached Figure Description

[0036] The present invention will be further described in detail below with reference to the embodiments shown in the accompanying drawings, but this does not constitute any limitation on the present invention.

[0037] Figure 1 This is a three-dimensional structural diagram of a vacuum pipe connection device according to Embodiment 1.

[0038] Figure 2 This is a three-dimensional structural diagram of the middle module in Embodiment 1.

[0039] Figure 3 This is a three-dimensional structural diagram of the T-shaped connector in Embodiment 1.

[0040] Figure 4 This is a cross-sectional view of a vacuum pipe connection device according to Embodiment 1.

[0041] Figure 5This is a schematic diagram of the three-dimensional structural design of the vacuum system in Example 2.

[0042] Figures 1-5 The annotations in the accompanying drawings are explained as follows:

[0043] Vacuum pipe connection device 1000;

[0044] Cylinder connecting rod 100, connecting hole 101;

[0045] The components include: central module 200, first tooling block 210, second connector 220, gas connector 230, guide alignment rod 240, angle steering mechanism 250, top clamping plate 251, multiple springs 252, floating joint 253, and flange 254.

[0046] T-shaped connector 300, second tooling block 310, first connector 320. Detailed Implementation

[0047] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings. It should be understood that these descriptions are merely exemplary and not intended to limit the scope of this utility model. Furthermore, descriptions of well-known structures and technologies are omitted in the following description to avoid unnecessarily obscuring the concept of this utility model.

[0048] <Example 1: A Vacuum Pipe Connection Device>

[0049] Figure 1 A three-dimensional structural diagram of a vacuum pipe connection device is shown. The three-dimensional structural diagram of a vacuum pipe connection device 1000 includes: a cylinder connecting rod 100, a central module 200, and a T-shaped connector 300.

[0050] like Figure 1 As shown, one end of the cylinder connecting rod 100 is provided with a connecting hole 101, which is used to connect with the drive cylinder.

[0051] Figure 2 The diagram illustrates the three-dimensional structure of the central module. The central module 200 includes: a first tooling block 210, a second connector 220, a gas connector 230, and a guide alignment rod 240.

[0052] a. The second connector 220 and the gas connector 230 are respectively disposed on the bottom surface and the side surface of the first tooling block 210. The first tooling block 210 is provided with a pipe so that the gas connector is connected to the second connector and the gas connector 230 is connected to the second connector 220.

[0053] b. The guide alignment rod 240 is fixedly mounted on the bottom surface of the first tooling block 210;

[0054] Figure 3 A three-dimensional structural diagram of the T-shaped connector is shown. The T-shaped connector 300 includes: a second tooling block 310 and a first connector 320. The first connector is fixedly disposed on the top surface of the second tooling block, and the second tooling block 310 is provided with a guide hole 311.

[0055] The connection and mating relationship between the middle module and the T-shaped connector is as follows:

[0056] a. The second connector is compatible with the connector of the first connector, and the second connector 220 can be inserted into the first connector 310;

[0057] b. The guide alignment rod 240 corresponds to the guide hole 303, the front end of the guide alignment rod 240 is a tapered head, and the guide hole 303 is a tapered hole.

[0058] from Figure 2 It is known that the middle module 200 also includes: an angle steering mechanism 250; the angle steering mechanism 250 includes: a top plate 251, multiple springs 252, a floating joint 253, and a flange 254; the flange 254 is fixedly disposed on the top surface of the first tooling block 210; the top plate 251 is disposed above the flange 254; one end of the spring 252 is connected to the top surface of the flange 254, and the other end is connected to the bottom surface of the top plate 251; the floating joint 253 and the flange 254 can adopt an integral structure or a separate structure, and the floating joint 253 and the flange 254 can generate an oscillation of about 5°.

[0059] The connection relationship between the angle steering mechanism 250 and the cylinder connecting rod 100 is as follows:

[0060] a. The top plate 251 is provided with a through hole, and the front end of the cylinder connecting rod 100 is provided with a thread. The cylinder connecting rod 100 passes through the through hole and is threadedly connected to the floating joint 253.

[0061] b. The front end of the cylinder connecting rod 100 has a clamping part. When the cylinder connecting rod 100 is threadedly connected to the floating joint 253, the clamping part, the top plate, and the floating joint 253 are all in contact from top to bottom.

[0062] c. In the initial state, the spring 252 is in a compressed state.

[0063] Through the above connection relationship, in the initial state, the floating joint 253 and the flange are kept perpendicular by multiple springs 252; that is, when the guide alignment rod 240 is separated from the guide hole 303, the floating joint 253 and the flange do not swing.

[0064] The vacuum pipe connection device disclosed in this application operates as follows:

[0065] First, the first connector 302 and the second connector 204 are connected;

[0066] Specifically, the drive cylinder and the cylinder connecting rod 100 are connected to form an axial propulsion system. The drive alignment rod 203 is inserted into the guide hole 303, and at the same time, the first connector 302 and the second connector 204 are mated, that is, the second connector 204 is inserted into the first connector 302. During this process, the tapered end of the guide alignment rod 240 corresponds to the tapered hole of the guide hole 303. Through the cooperation of the two, the positional relationship between the second connector and the first connector can be adjusted. During this process, the flange and the floating joint can generate a certain angle.

[0067] Secondly, the gas connector 205 is evacuated, so that the first connector 302 and the second connector 204 achieve dynamic adaptive sealing, that is, the contact surfaces of the first connector and the second connector are sealed by negative pressure.

[0068] It should be noted that there are more than three top springs 252.

[0069] It should be noted that the second tooling block 310 and the first connector 320 are connected by threads, that is, the second tooling block 310 is provided with a threaded hole in the middle, and the first connector 320 is provided with a threaded joint at the bottom, and the threaded joint of the first connector 320 is adapted to the threaded hole of the second tooling block 310.

[0070] <Example 2: A Vacuum System>

[0071] Figure 5 A three-dimensional structural diagram of a vacuum system is shown. The vacuum system includes: a drive cylinder, a vacuum pipe connection device 1000 as described in Embodiment 1, an outer casing 2000, and a workpiece vacuum chamber 3000;

[0072] The workpiece vacuum chamber 3000 is disposed inside the outer casing 2000; the vacuum pipe connecting device 1000 of Embodiment 1 is disposed between the outer casing 2000 and the workpiece vacuum chamber 3000;

[0073] The driving cylinder is fixed to the bottom surface of the top plate of the outer casing 2000, and the driving cylinder is connected to the cylinder connecting rod 100 of the vacuum pipeline connecting device 1000.

[0074] The T-shaped connector 300 is fixed to the top surface of the workpiece vacuum cavity 3000;

[0075] The vacuum pipe B is connected to the vacuum cavity of the workpiece.

[0076] The vacuum pipeline A and the forepump ( Figure 5 (Not indicated) Connected.

[0077] The above-described embodiments are preferred embodiments of the present utility model and are only used to facilitate the illustration of the present utility model. They are not intended to limit the present utility model in any way. Any person skilled in the art who makes partial modifications or alterations to the technical content disclosed in the present utility model without departing from the scope of the technical features of the present utility model shall still fall within the scope of the technical features of the present utility model.

Claims

1. A vacuum pipe connection device for connecting vacuum pipe A and vacuum pipe B, characterized in that, include: Middle module, T-shaped connector; The middle module includes: a first tooling block, a second connector, and a gas connector; The second connector and the gas connector are respectively disposed on the bottom surface and the side surface of the first tooling block. The first tooling block has a pipe inside so that the gas connector and the second connector are connected. The pipe, the gas connector and the second connector inside the first tooling block together constitute a vacuum pipe A. The T-shaped connector includes a second tooling block and a first connector, wherein the first connector is fixedly disposed on the top surface of the second tooling block; The second connector is compatible with the connector of the first connector, and the second connector can be inserted into the first connector. The first connector has a vacuum pipe B protruding from its center.

2. The vacuum pipe connection device according to claim 1, characterized in that, The first connector is connected to the second tooling block by threads.

3. The vacuum pipe connection device according to claim 1, characterized in that, The bottom surface of the middle module is provided with a guide alignment rod, the front end of which is a tapered head; the second tooling block is provided with a guide hole, which is a tapered hole; The guide alignment rod is adapted to the guide hole; The middle module further includes an angle steering mechanism; the angle steering mechanism includes a clamping plate, multiple springs, a floating joint, and a flange; the flange is fixedly disposed on the top surface of the first tooling block; the clamping plate is disposed above the flange; one end of the spring is connected to the top surface of the flange, and the other end is connected to the bottom surface of the clamping plate. The top clamping plate is provided with a through hole, and the front end of the cylinder connecting rod is provided with a thread. The cylinder connecting rod passes through the through hole and is threadedly connected to the floating joint. The cylinder connecting rod has a clamping part at the front end. When the cylinder connecting rod is threadedly connected to the floating joint, the clamping part, the top plate, and the floating joint can contact each other in sequence. Initially, the spring is in a compressed state.

4. A vacuum pipe connection device according to claim 3, characterized in that, Also includes: A drive cylinder is provided with a connecting hole at one end of the cylinder connecting rod, and the drive cylinder is connected to the cylinder connecting rod through the connecting hole.

5. A vacuum pipe connection device according to claim 3, characterized in that, The number of springs is three or more.

6. A vacuum pipe connection device according to claim 5, characterized in that, The number of springs is 4.

7. A vacuum system, characterized in that, Includes the vacuum pipe connection device, drive cylinder, outer casing, and workpiece vacuum chamber as described in any one of claims 1 to 6; The workpiece vacuum chamber is disposed inside the outer casing; The vacuum pipe connection device is disposed between the outer casing and the workpiece vacuum chamber; The drive cylinder is fixed to the bottom surface of the top plate of the outer casing, and the drive cylinder is connected to the cylinder connecting rod of the vacuum pipeline connecting device; The T-shaped connector is fixed to the top surface of the workpiece vacuum chamber; The vacuum pipe B is connected to the vacuum chamber of the workpiece.

8. A vacuum system according to claim 7, characterized in that, Also includes: A backing pump is connected to the vacuum pipeline A.

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