Large-angle fast reflecting mirror eddy current sensor calibration device

Abstract

The utility model relates to the technical field of fast reflecting mirror eddy current sensor calibration, in particular to a large-angle fast reflecting mirror eddy current sensor calibration device, which comprises a photoelectric auto-collimator, a large-angle electromagnetic fast reflecting mirror and an angle adjusting mechanism connected with the large-angle electromagnetic fast reflecting mirror. The angle adjusting mechanism drives the large-angle electromagnetic fast reflecting mirror to perform azimuth angle and rolling angle deflection, and the photoelectric autocollimator directly faces the center of the large-angle electromagnetic fast reflecting mirror; the angle adjusting mechanism is connected with the large-angle electromagnetic fast reflecting mirror and is matched with the photoelectric autocollimator, so that large-stroke precise rotation angle measurement can be realized, the precise calibration requirement of an eddy current sensor of the large-angle electromagnetic fast reflecting mirror is met, and meanwhile, the angle coupling error of calibration of two rotating shafts can be greatly eliminated; the structure is compact, deformation in the calibration process is reduced, and the measurement precision is improved.

Description

Technical Field

[0001] This utility model relates to the field of calibration technology for fast-reflecting mirror eddy current sensors, and specifically to a calibration device for a large-angle fast-reflecting mirror eddy current sensor. Background Technology

[0002] A large-angle electromagnetic fast reflector is a fast reflector with a large swing amplitude, high acceleration, and precise pointing control. It can be applied in fields such as space laser communication, airborne (or shipborne) optoelectronic imaging and detection tracking, large optical cable theodolite tracking, and laser marking. It is an important supplement to small-swing fast reflectors.

[0003] Eddy current sensors are the main sensing components of large-angle electromagnetic fast-reflecting mirrors due to their high reliability, high sensitivity, strong anti-interference ability, and fast response speed. For small-angle and large-angle electromagnetic fast-reflecting mirrors, the operating range of the eddy current sensor is generally within 1mm, and the linearity meets the requirements of the entire system. However, for large-angle electromagnetic fast-reflecting mirrors (±5° or larger swing angle), the operating range of the eddy current sensor reaches 3mm, and the sensing voltage exhibits a strong nonlinear relationship with the measured angle. In this case, the eddy current sensor needs to be calibrated to obtain a more accurate curve showing the correspondence between the sensing voltage and the measured angle.

[0004] Currently, the only equipment available for precise measurement of the rotation angle of a fast reflector is the photoelectric autocollimator (accuracy ±0.1″), but its precision measurement range is generally only within ±1°. Therefore, to calibrate the eddy current sensor of a large-angle electromagnetic fast reflector, it is necessary to develop a device that can expand the precision angle measurement range. Utility Model Content

[0005] The purpose of this invention is to provide a calibration device for a large-angle fast-reflection mirror eddy current sensor, thereby solving the problems of the prior art.

[0006] The solution of this utility model to the above-mentioned technical problems is as follows:

[0007] A calibration device for a large-angle fast-reflecting mirror eddy current sensor includes an opto-autocollimator, a large-angle electromagnetic fast-reflecting mirror, and an angle adjustment mechanism. The angle adjustment mechanism is connected to the large-angle electromagnetic fast-reflecting mirror and drives the large-angle electromagnetic fast-reflecting mirror to deflect in azimuth and roll angles. The opto-autocollimator is directly aligned with the center of the large-angle electromagnetic fast-reflecting mirror.

[0008] Further specified, the angle adjustment mechanism includes an azimuth adjustment platform, a transition bracket, and a roll angle adjustment platform;

[0009] The azimuth adjustment platform is horizontally set, and the roll angle adjustment platform is vertically set. The azimuth adjustment platform is connected to the adapter bracket and drives the adapter bracket to rotate around the axis of the azimuth adjustment platform. The adapter bracket is connected to the large-angle electromagnetic fast-reflecting mirror through the roll angle adjustment platform. The roll angle adjustment platform drives the large-angle electromagnetic fast-reflecting mirror to rotate around the axis of the roll angle adjustment platform. The roll angle adjustment platform and the large-angle electromagnetic fast-reflecting mirror are coaxially set.

[0010] Further defined, the azimuth adjustment platform includes an adjustment platform, a turntable, a turntable deflection rod, an adjustment groove, an adjustment knob, and a spring reset rod;

[0011] The turntable and the adjustment table are coaxially arranged. An adjustment limit port is provided on the adjustment table. The adjustment limit port is arranged along the radial direction of the adjustment table. The adjustment groove is arranged outside the adjustment limit port and is directly opposite to the adjustment limit port.

[0012] The turntable deflection rod is arranged along the radial direction of the turntable. One end of the turntable deflection rod is connected to the turntable, and the other end of the turntable deflection rod extends through the adjustment limit port to the adjustment groove. The adjustment knob passes through one side of the adjustment groove and contacts one side of the turntable deflection rod. The spring reset rod passes through the other side of the adjustment groove and contacts the other side of the turntable deflection rod.

[0013] Furthermore, the rotation angle of the turntable is -8° to 8°.

[0014] Further specified, the adapter bracket has a ⊥-shaped structure, the horizontal section of the adapter bracket is centered and connected to the upper surface of the turntable, and the roll angle adjustment platform is connected to the vertical section of the adapter bracket.

[0015] Furthermore, the large-angle fast-reflection mirror eddy current sensor calibration device also includes an optical vibration isolation platform, and the photoelectric autocollimator and angle adjustment mechanism are both connected to the optical vibration isolation platform.

[0016] Further defined, the large-angle electromagnetic fast-reflecting mirror includes a base, a drive coil, an eddy current sensor, a flexible bearing, a bracket, a permanent magnet, and a reflector; the base is coaxially arranged with the roll angle adjustment platform, and the center of the photoelectric autocollimator is directly opposite the center of the reflector;

[0017] The base has a flexible bearing hole in the middle. The drive coil and eddy current sensor are both located on the upper side of the base. The drive coil is located outside the eddy current sensor. The drive coil and eddy current sensor are both located on the periphery of the flexible bearing hole. The flexible bearing and permanent magnet are both located at the bottom of the bracket. The flexible bearing and the flexible bearing hole are directly connected. The drive coil is sleeved on the outside of the permanent magnet. The reflector is located on the upper side of the bracket.

[0018] Furthermore, the number of the driving coil, the eddy current sensor, and the permanent magnet are all four;

[0019] The four drive coils and the four eddy current sensors are all equally spaced around the circumference of the flexible bearing hole, and the four permanent magnets are equally spaced around the circumference of the flexible bearing. The angle between the eddy current sensors and the drive coils on the same side is 45°. The permanent magnets and the drive coils are directly opposite each other.

[0020] Furthermore, both the reflector and the flexible bearing are coaxially arranged with the bracket.

[0021] Further defined, the base has a square cross-section, the center of the drive coil is located on the diagonal of the base, and the four eddy current sensors are located on the transverse and longitudinal axes of symmetry of the base, respectively.

[0022] The beneficial effects of this utility model are as follows:

[0023] This invention, by setting an angle adjustment mechanism connected to a large-angle electromagnetic fast reflector and in conjunction with a photoelectric autocollimator, can achieve large-stroke precision angle measurement, meet the precision calibration requirements of the eddy current sensor of the large-angle electromagnetic fast reflector, and at the same time, can significantly eliminate the angle coupling error of the two rotating shafts during calibration; the structure is compact, reducing deformation during the calibration process and improving measurement accuracy. Attached Figure Description

[0024] Figure 1 This is a structural diagram of the large-angle fast-reflection mirror eddy current sensor calibration device of this utility model;

[0025] Figure 2 This is a side view of the calibration device for the large-angle fast-reflection mirror eddy current sensor of this utility model.

[0026] Figure 3 This is an exploded view of the calibration device for the large-angle fast-reflection mirror eddy current sensor of this utility model.

[0027] Figure 4 for Figure 3 Enlarged diagram of part A in the middle;

[0028] Figure 5 This is a schematic diagram of the large-angle electromagnetic fast-reflection mirror structure of this utility model.

[0029] In the diagram, 10-photoelectric autocollimator; 20-large angle electromagnetic fast reflector; 21-base; 22-drive coil; 23-eddy current sensor; 24-flexible bearing; 25-bracket; 26-permanent magnet; 27-reflector; 28-flexible bearing hole; 30-azimuth adjustment platform; 31-adjustment platform; 32-turntable; 33-turntable deflection rod; 34-adjustment groove; 35-adjustment knob; 36-spring reset rod; 40-adapter bracket; 50-roll angle adjustment platform; 60-optical vibration isolation platform. Detailed Implementation

[0030] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some, not all, of the embodiments of the present utility model. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the scope of protection of the present utility model.

[0031] Example 1

[0032] This embodiment provides a calibration device for a large-angle fast-reflecting mirror eddy current sensor, including an optoelectronic autocollimator 10, a large-angle electromagnetic fast-reflecting mirror 20, and an angle adjustment mechanism. The angle adjustment mechanism is connected to the large-angle electromagnetic fast-reflecting mirror 20 and drives the large-angle electromagnetic fast-reflecting mirror 20 to deflect in azimuth and roll angles. The center of the optoelectronic autocollimator 10 is directly opposite that of the center of the large-angle electromagnetic fast-reflecting mirror 20, and the optoelectronic autocollimator 10 is set horizontally.

[0033] To improve the accuracy and reliability of calibration, a preferred calibration device for a large-angle fast-reflection mirror eddy current sensor also includes an optical vibration isolation platform 60, an optoelectronic autocollimator 10, and an angle adjustment mechanism, all mounted on the optical vibration isolation platform 60.

[0034] refer to Figure 1 and Figure 2 Specifically, the angle adjustment mechanism includes an azimuth adjustment platform 30, a transition bracket 40, and a roll angle adjustment platform 50 connected in sequence.

[0035] The azimuth adjustment platform 30 is horizontally set, preferably both the azimuth adjustment platform 30 and the photoelectric autocollimator 10 are set along the z-axis. The rotating end of the azimuth adjustment platform 30 is connected to the adapter bracket 40 and drives the adapter bracket 40 to rotate around the axis of the azimuth adjustment platform 30. The roll angle adjustment platform 50 is vertically set, and the adapter bracket 40 is connected to the large-angle electromagnetic fast-reflecting mirror 20 through the roll angle adjustment platform 50. The roll angle adjustment platform 50 drives the large-angle electromagnetic fast-reflecting mirror 20 to rotate around the axis of the roll angle adjustment platform 50. The roll angle adjustment platform 50 and the large-angle electromagnetic fast-reflecting mirror 20 are coaxially set.

[0036] The azimuth adjustment platform 30 can drive the adapter bracket 40, the roll angle adjustment platform 50 and the large-angle electromagnetic quick-reflecting mirror 20 to perform a wide range of fine adjustments to the azimuth angle (around the y-axis); the roll angle adjustment platform 50 can drive the large-angle electromagnetic quick-reflecting mirror 20 to perform a wide range of fine adjustments to the roll angle (around the z-axis).

[0037] Both the azimuth adjustment table 30 and the roll angle adjustment table 50 are selected as high-precision equipment to improve rotation accuracy.

[0038] refer to Figure 3 and Figure 4 The azimuth adjustment platform 30 includes an adjustment platform 31, a turntable 32, a turntable deflection rod 33, an adjustment groove 34, an adjustment knob 35, and a spring reset rod 36. The turntable 32 is coaxially arranged with the adjustment platform 31, and both the turntable 32 and the adjustment platform 31 are horizontally arranged. The bottom of the adjustment platform 31 is connected to the optical vibration isolation platform 60 by bolts.

[0039] The side of the adjustment platform 31 is provided with an adjustment limit port, which is set along the radial direction of the adjustment platform 31. The adjustment groove 34 is set on the outside of the adjustment platform 31 and connected to the adjustment platform 31. The adjustment groove 34 has a U-shaped structure, with the opening of the adjustment groove 34 facing upward and directly opposite the adjustment limit port.

[0040] A turntable deflection rod 33 is located at the bottom of the turntable 32. The turntable deflection rod 33 is arranged along the radial direction of the turntable 32. One end of the turntable deflection rod 33 is connected to the turntable 32, and the other end of the turntable deflection rod 33 extends through the adjustment limit port into the adjustment groove 34. An adjustment knob 35 is located on one side of the adjustment groove 34 and is threadedly connected to the adjustment groove 34. A spring return rod 36 is located on the other side of the adjustment groove 34, and the other end of the turntable deflection rod 33 is located between the adjustment knob 35 and the spring return rod 36.

[0041] By rotating the adjustment knob 35, the knob pushes the turntable deflection rod 33 to deflect around the axis of the turntable 32 in the adjustment groove 34, while simultaneously squeezing the spring reset rod 36, ensuring that the turntable deflection rod 33 drives the turntable 32 to rotate stably and reliably. When the turntable 32 returns to its original position or rotates in the opposite direction, the adjustment knob 35 is rotated in the opposite direction, and the spring reset rod 36 pushes the turntable deflection rod 33 to reverse. This process is simple to operate and has high adjustment accuracy.

[0042] The roll angle adjustment table 50 has the same structure as the azimuth angle adjustment table 30.

[0043] The rotation angle of turntable 32 is -8° to 8°.

[0044] To further explain, the adapter bracket 40 has a ⊥-shaped structure. The horizontal section of the adapter bracket 40 is coaxially connected to the upper surface of the turntable 32, and the roll angle adjustment table 50 is connected to the vertical section of the adapter bracket 40. In order to improve the structural strength of the adapter bracket 40, it is preferable to provide a reinforcing rib between the horizontal and vertical sections of the adapter bracket 40, and the vertical section of the adapter bracket 40 is located between the reinforcing rib and the roll angle adjustment table 50.

[0045] refer to Figure 5The large-angle electromagnetic fast-reflecting mirror 20 includes a base 21, a drive coil 22, an eddy current sensor 23, a flexible bearing 24, a bracket 25, a permanent magnet 26, and a reflector 27. The base 21 is coaxially arranged with the roll angle adjustment stage 50, and the center of the photoelectric autocollimator 10 is directly opposite the center of the reflector 27. The transverse cross-section of the base 21 can be circular, elliptical, triangular, or polygonal. The transverse cross-section of the base 21 is illustrated using a square as an example.

[0046] A flexible bearing hole 28 is provided in the middle of the base 21. The drive coil 22 and the eddy current sensor 23 are both arranged on the upper surface of the base 21. The drive coil 22 is located outside the eddy current sensor 23. The drive coil 22 and the eddy current sensor 23 are both arranged around the flexible bearing hole 28. The flexible bearing 24 and the permanent magnet 26 are both arranged at the bottom of the bracket 25. The flexible bearing 24 is directly opposite the flexible bearing hole 28. The drive coil 22 is sleeved on the outside of the permanent magnet 26. The reflector 27 is arranged on the upper surface of the bracket 25.

[0047] The system comprises four drive coils 22, four eddy current sensors 23, and four permanent magnets 26. The four drive coils 22 and four eddy current sensors 23 are arranged at equal intervals around the axis of the flexible bearing hole 28, and the four permanent magnets 26 are arranged at equal intervals around the axis of the flexible bearing 24. The angle between the eddy current sensor 23 and the drive coil 22 on the same side is 45°. The permanent magnets 26 are directly opposite the drive coils 22. The reflector 27 and the flexible bearing 24 are coaxially arranged with the bracket 25.

[0048] At this time, the center of the drive coil 22 is located on the diagonal of the base 21, and the four eddy current sensors 23 are located on the transverse axis of symmetry and the longitudinal axis of symmetry of the base 21, respectively.

[0049] The reflector 27 can deflect around the two rotation axes (denoted as x-axis and y-axis) of the flexible bearing 24. The eddy current sensors 23 are arranged symmetrically along the rotation axis in pairs to achieve differential measurement of the motion angle of the rotation axis.

[0050] By supplying the drive coil 22 with a drive current that changes according to a certain pattern, such as a sinusoidal drive current, the reflector 27 of the large-angle electromagnetic fast reflector 20 can be made to swing around the corresponding rotation axis.

[0051] Working principle:

[0052] First, assemble the calibration device for the large-angle fast-reflecting mirror eddy current sensor.

[0053] Taking the curve relationship between the rotation angle of the calibrated reflector 27 around the y-axis and the sensing voltage of the eddy current sensor 23 as an example, it is necessary to install the y-axis of the large-angle electromagnetic fast reflector 20 in the vertical direction on the roll angle adjustment table 50.

[0054] Next, power is supplied to the drive coil 22 so that the reflector 27 swings only around the y-axis; at the same time, the rotation angle of the reflector 27 is measured using the photoelectric autocollimator 10, and the angle display of the photoelectric autocollimator 10 is observed.

[0055] If a change in the vertical angle is displayed, adjust the roll angle adjustment stage 50 to rotate the large-angle electromagnetic fast-reflecting mirror 20 along the roll angle direction until the photoelectric autocollimator 10 only displays a change in the horizontal angle.

[0056] Finally, power is supplied to the drive coil 22, causing the reflector 27 to rotate around the y-axis (set to the positive direction) by a sampling angle from the zero position, and the readings of the photoelectric autocollimator 10 and the sensing voltage value of the eddy current sensor 23 are recorded.

[0057] After rotating the photoelectric autocollimator 10 for several sampling angles, the reading is close to its positive maximum range. At this point, the azimuth adjustment stage 30 is rotated one angle in the negative direction to bring the reading of the photoelectric autocollimator 10 close to its negative maximum range. Then, the reflector 27 can be driven to rotate around the y-axis for several more sampling angles, and the corresponding sensing voltage can be recorded.

[0058] By repeating this process, the angle calibration around the positive y-axis can be completed.

[0059] The method for calibrating the angle around the negative y-axis is similar to that described above, as are the methods for calibrating the angle around the positive and negative x-axis. These will not be elaborated upon further.

[0060] The above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit this utility model. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of this utility model.

Claims

1. A calibration device for a large-angle fast-reflection mirror eddy current sensor, characterized in that, It includes an opto-collimator (10), a large-angle electromagnetic fast reflector (20), and an angle adjustment mechanism. The angle adjustment mechanism is connected to the large-angle electromagnetic fast reflector (20). The angle adjustment mechanism drives the large-angle electromagnetic fast reflector (20) to deflect in azimuth and roll angle. The center of the opto-collimator (10) is directly opposite the center of the large-angle electromagnetic fast reflector (20).

2. The calibration device for a large-angle fast-reflection mirror eddy current sensor according to claim 1, characterized in that, The angle adjustment mechanism includes an azimuth adjustment platform (30), a transition bracket (40), and a roll angle adjustment platform (50). The azimuth adjustment platform (30) is set horizontally, and the roll angle adjustment platform (50) is set vertically. The azimuth adjustment platform (30) is connected to the adapter bracket (40) and drives the adapter bracket (40) to rotate around the axis of the azimuth adjustment platform (30). The adapter bracket (40) is connected to the large-angle electromagnetic fast-reflecting mirror (20) through the roll angle adjustment platform (50). The roll angle adjustment platform (50) drives the large-angle electromagnetic fast-reflecting mirror (20) to rotate around the axis of the roll angle adjustment platform (50). The roll angle adjustment platform (50) and the large-angle electromagnetic fast-reflecting mirror (20) are set coaxially.

3. The calibration device for a large-angle fast-reflection mirror eddy current sensor according to claim 2, characterized in that, The azimuth adjustment platform (30) includes an adjustment platform (31), a turntable (32), a turntable deflection rod (33), an adjustment groove (34), an adjustment knob (35), and a spring reset rod (36). The turntable (32) is coaxially arranged with the adjustment table (31). The adjustment table (31) is provided with an adjustment limit port. The adjustment limit port is arranged along the radial direction of the adjustment table (31). The adjustment groove (34) is arranged outside the adjustment limit port and is directly opposite to the adjustment limit port. The turntable deflection rod (33) is arranged along the radial direction of the turntable (32). One end of the turntable deflection rod (33) is connected to the turntable (32), and the other end of the turntable deflection rod (33) extends through the adjustment limit port to the adjustment groove (34). The adjustment knob (35) passes through one side of the adjustment groove (34) and contacts one side of the turntable deflection rod (33). The spring reset rod (36) passes through the other side of the adjustment groove (34) and contacts the other side of the turntable deflection rod (33).

4. The calibration device for a large-angle fast-reflection mirror eddy current sensor according to claim 3, characterized in that, The rotation angle of the turntable (32) is -8° to 8°.

5. The calibration device for a large-angle fast-reflection mirror eddy current sensor according to claim 3, characterized in that, The adapter bracket (40) has a ⊥-shaped structure. The horizontal section of the adapter bracket (40) is centered and connected to the upper surface of the turntable (32). The roll angle adjustment table (50) is connected to the vertical section of the adapter bracket (40).

6. The calibration device for a large-angle fast-reflection mirror eddy current sensor according to claim 1, characterized in that, The large-angle fast-reflection mirror eddy current sensor calibration device also includes an optical vibration isolation platform (60), and the photoelectric autocollimator (10) and the angle adjustment mechanism are both connected to the optical vibration isolation platform (60).

7. The calibration device for a large-angle fast-reflection mirror eddy current sensor according to claim 2, characterized in that, The large-angle electromagnetic fast-reflecting mirror (20) includes a base (21), a drive coil (22), an eddy current sensor (23), a flexible bearing (24), a bracket (25), a permanent magnet (26), and a reflector (27); the base (21) is coaxially arranged with the roll angle adjustment table (50), and the center of the photoelectric autocollimator (10) is directly opposite to the center of the reflector (27); The base (21) has a flexible bearing hole (28) in the middle. The drive coil (22) and the eddy current sensor (23) are both located on the upper side of the base (21). The drive coil (22) is located on the outside of the eddy current sensor (23). The drive coil (22) and the eddy current sensor (23) are both located on the periphery of the flexible bearing hole (28). The flexible bearing (24) and the permanent magnet (26) are both located at the bottom of the bracket (25). The flexible bearing (24) is directly connected to the flexible bearing hole (28). The drive coil (22) is sleeved on the outside of the permanent magnet (26). The reflector (27) is located on the upper side of the bracket (25).

8. The calibration device for a large-angle fast-reflection mirror eddy current sensor according to claim 7, characterized in that, The number of the drive coil (22), eddy current sensor (23), and permanent magnet (26) are all four; The four drive coils (22) and the four eddy current sensors (23) are all arranged at equal intervals around the axis of the flexible bearing hole (28), and the four permanent magnets (26) are arranged at equal intervals around the axis of the flexible bearing (24); the angle between the eddy current sensor (23) and the drive coil (22) on the same side is 45°; the permanent magnets (26) and the drive coils (22) are directly opposite each other.

9. The calibration device for a large-angle fast-reflection mirror eddy current sensor according to claim 7, characterized in that, The reflector (27) and the flexible bearing (24) are both coaxially arranged with the bracket (25).

10. The calibration device for a large-angle fast-reflection mirror eddy current sensor according to claim 8, characterized in that, The base (21) has a square cross-section, the center of the driving coil (22) is located on the diagonal of the base (21), and the four eddy current sensors (23) are located on the transverse axis of symmetry and the longitudinal axis of symmetry of the base (21), respectively.

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