Adjusting mechanism of light emitting device

Abstract

The utility model provides an adjusting mechanism of a light emitting device, the adjusting mechanism comprises a support seat and a floating disc, the support seat is fixed on a measuring device rack, the floating disc is connected on the support seat in a floating manner, a light emitting lens cone is installed on the floating disc, and the floating disc drives the lens cone to move so as to adjust the light emitting angle. Driving parts are arranged on the front side and the end side of the adjusting mechanism, the driving parts are arranged in a space convenient to operate and comprise the transverse driving part and the vertical driving part, the transverse driving part drives at least one part of the floating disc to move along the end face of the supporting base, and the vertical driving part is used for adjusting the distance and inclination of the floating disc relative to the supporting base. The height of the floating disc in the normal direction of the end face of the supporting base and the swing angle of the floating disc are changed.

Description

Technical Field

[0001] This invention relates to the field of wafer metrology technology, and more specifically to an adjustment mechanism for a light-emitting device. Background Technology

[0002] One of the current wafer surface measurement technologies is to use laser scanning to scan a high-speed rotating wafer. The laser is emitted onto the wafer surface through a light-emitting device. The shape of the laser spot on the wafer surface is determined by the orientation of the light-emitting device relative to the base. Due to the limitations of processing and assembly precision, the light-emitting device needs to be fine-tuned after installation to meet the angle requirements of the measurement light.

[0003] However, the limited installation space of wafer metrology equipment makes it impossible to adjust the light emission device from multiple angles, resulting in poor adjustability. Furthermore, existing adjustment mechanisms are complex in structure, occupy a large space, and are unsuitable for the installation environment of wafer metrology equipment. Therefore, designing an adjustment mechanism for the light emission device to meet the multi-degree-of-freedom adjustment requirements within a confined space is a technical problem that needs to be solved in this field. Utility Model Content

[0004] To solve the above-mentioned technical problems, this utility model proposes an adjustment mechanism for a light-emitting device. By optimizing the internal structure of the adjustment mechanism and setting the drive part of the adjustment mechanism on an easily operable end face, the light-emitting device can be adjusted with multiple degrees of freedom within the narrow space of the measuring device frame.

[0005] To achieve the above objectives, the adjustment mechanism of the light-emitting device of this utility model includes a support base and a floating disk. The support base is fixed on the frame of the measuring device, the floating disk is buoyantly connected to the support base, and the light-emitting lens is mounted on the floating disk. The floating disk drives the light-emitting lens to move, thereby adjusting the light-emitting angle. Operating space is provided on the front side (in this invention, "front side" refers to the side that is not interfered with by other components and is convenient for operation) and the end side of the adjustment mechanism. A drive unit is located on the front side and the end side of the adjustment mechanism. The drive unit includes a lateral drive unit and a vertical drive unit. The lateral drive unit drives at least a portion of the floating disk to move along the end face of the support base, and the vertical drive unit is used to adjust the distance and inclination of the floating disk relative to the support base, thereby changing the height of the floating disk in the normal direction of the end face of the support base and the swing angle of the floating disk.

[0006] A lateral drive unit is located on the front side of the support base, and a vertical drive unit is located on the end side of the floating disk. A receiving cavity is provided in the middle of the support base. The floating disk includes a top plate and an abutment sleeve located on the end face of the top plate, wherein the abutment sleeve is inserted into the receiving cavity. A vertical drive unit is provided between the top plate and the end face of the support base. The lateral drive unit includes two lateral drive members, which are spaced apart circumferentially along the support base. The lateral drive members abut against the abutment sleeve to drive it. An elastic support member is provided in the receiving cavity at a position balancing the force applied by the lateral drive members. The elastic support member abuts against the abutment sleeve, providing elastic support to ensure that the abutment sleeve can move within the receiving cavity and remain stable when the lateral drive members drive it. The vertical drive unit includes a vertical drive member that drives the top plate to move along the normal direction of the end face of the support base, or adjusts the swing angle of the top plate relative to the normal direction.

[0007] Furthermore, the end of one of the lateral drive members abuts against the abutment sleeve, and the other lateral drive member drives the lateral steering member located inside the support seat. The lateral steering member abuts against the abutment sleeve, and the lateral steering member converts the movement of the lateral drive member into an abutment movement against the abutment sleeve.

[0008] The aforementioned driving components can be electric, such as an electric telescopic rod; manually driven, such as a tightening screw; or hydraulic, such as a hydraulic telescopic rod. As long as they can be placed within the space on the front and end sides of the adjusting mechanism, they are all within the technical concept of this invention.

[0009] The technical effects of this utility model are as follows:

[0010] The adjustment mechanism of the light-emitting device of this utility model has the drive unit set on the front and end sides, so that the light-emitting lens tube can be adjusted with multiple degrees of freedom from both sides. This solves the drawback of the prior art which requires adjustment from multiple sides. In addition, the drive unit has a simple structure, which reduces the size of the adjustment module and makes it convenient to install in the narrow space of the measurement device frame. Attached Figure Description

[0011] Figure 1 This is a structural diagram of the light emission device in Embodiment 1 located on the frame of the measuring device.

[0012] Figure 2 This is a structural diagram of the adjustment mechanism of the light-emitting device in Embodiment 1.

[0013] Figure 3 yes Figure 2 A cross-sectional view of the central section line AA.

[0014] Figure 4 This is a structural diagram of the adjustment mechanism of the light-emitting device in Embodiment 2. Detailed Implementation

[0015] The specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustration and explanation only and are not intended to limit the scope of this utility model. Example 1

[0016] See Figure 1-3 An adjustment mechanism for a light-emitting device, wherein the light-emitting device is mounted on a measuring device frame 3, the light-emitting device is located in the normal direction of the wafer surface, and the light-emitting device is provided with an adjustment mechanism for adjusting the angle of the measuring light.

[0017] The adjustment mechanism includes a support base 1 and a floating disk 2. The support base 1 is fixed on the measuring device frame 3, and a light-emitting lens tube 8 is connected to the floating disk 2. A lateral drive unit is provided on the front side of the support base 1, and a vertical drive unit is provided on the end side of the support base 1. The support base 1 has a receiving cavity 4 in the middle. The floating disk 2 includes a top plate 5 and an abutment sleeve 6 located on the end face of the top plate 5. The abutment sleeve 6 is inserted into the receiving cavity 4, and the floating disk 2 has an entrance hole 7 that penetrates the top plate 5 and the abutment sleeve 6 in the middle.

[0018] In Embodiment 1, the driving components for the lateral drive unit and the vertical drive unit are selected as tightening screws. The lateral drive unit includes two lateral tightening screws 9 screwed to the front side of the support base 1. The lateral tightening screws 9 extend into the receiving cavity 4 and abut against the abutment sleeve 6. The lateral tightening screws 9 move axially to drive the abutment sleeve 6 to move. An elastic support member 10 is provided in the receiving cavity 4 at a position on the rear side of the support base 1. The elastic support member 10 abuts against the other side of the abutment sleeve 6. The two lateral tightening screws 9 cooperate and move towards the abutment sleeve 6 simultaneously, or one moves towards the abutment sleeve 6 while the other moves away from the abutment sleeve 6 or remains stationary. Correspondingly, the elastic support member 10 is compressed or extended to cooperate with the lateral tightening screws 9 to change the position of the floating disk 2 on the end face of the support base 1, thereby driving the light-emitting lens barrel 8 to move.

[0019] The vertical drive unit includes three vertical clamping screws 11, which are spaced apart circumferentially along the support base 1. Each vertical clamping screw 11 is screwed onto the top plate 5, with its bottom end abutting against the end face of the support base. The three screws cooperate by moving closer to or further away from the support base 1, thereby changing the height of the floating disk 2 in the normal direction of the support base end face; or partially moving closer to the support base 1, partially moving away from the support base 1, or remaining stationary, thereby changing the swing angle of the floating disk 2 relative to the normal direction of the support base end face. Correspondingly, the elastic support member 10 is compressed or extended to accommodate the tilt angle change of the floating disk 2. Alternatively, the three vertical clamping screws 11 are screwed onto the end side of the support base, with a rotatable connection between the screws 11 and the top plate 5, driving the top plate 5 to move and changing its swing angle.

[0020] To increase the stability of the floating disk 2's movement, preferably, an elastic connector is provided between the top plate 5 and the support base 1. The elastic connector includes two rods 121 and an elastic body 122 located between the rods 121. The rods 121 are located in grooves 13 on opposite sides of the top plate 5 and the support base 1, and the elastic body 122 is located in through holes in the top plate 5 and the support base 1. The elastic connector provides a pulling force to the floating disk 2 towards the support base 1, which facilitates the stable operation of the floating disk 2 under the drive of the lateral drive and the vertical drive. Example 2

[0021] See Figure 4 The difference from Embodiment 1 is that the floating disk 2 also includes an adjusting cylinder 30, which is screwed into the entrance hole 7, and the light-emitting lens tube 8 is connected to the adjusting cylinder 30. In this way, the adjusting cylinder 30 moves up and down within the entrance hole 7, thereby driving the light-emitting lens tube 8 to move up and down, increasing the stroke of the light-emitting lens tube 8.

[0022] The basic principles, main features, and advantages of this utility model in the explored field have been described in detail above, and some usage examples have been detailed. Finally, it should be noted that the examples given above are only for explaining this utility model and are not intended to limit it. Although we have described this utility model in detail with reference to the examples, those skilled in the art can still modify the described examples and solutions, or replace related technical parts. Therefore, any modifications or equivalent substitutions made within the spirit and principles of this utility model are within the protection scope of the claims of this utility model.

Claims

1. An adjustment mechanism for a light-emitting device, characterized in that: The device includes a support base and a floating disk. The support base is fixed to the frame of the measuring device, and the floating disk is buoyantly connected to the support base. A light-emitting lens is mounted on the floating disk. A driving unit is provided on the front and end sides of the adjustment mechanism. The driving unit includes a lateral driving unit and a vertical driving unit. The lateral driving unit drives at least a portion of the floating disk to move along the end face of the support base. The vertical driving unit is used to adjust the distance and inclination of the floating disk relative to the support base.

2. The adjustment mechanism of the light-emitting device as described in claim 1, characterized in that: The lateral drive unit is located on the front side of the support base, and the vertical drive unit is located on the end side of the floating disk. A receiving cavity is provided in the middle of the support base. The floating disk includes a top plate and an abutment sleeve located on the end face of the top plate. The abutment sleeve is inserted into the receiving cavity. A vertical drive unit is provided between the top plate and the end face of the support base. The lateral drive unit includes two lateral drive members, which are spaced apart circumferentially along the support base. The lateral drive members abut against the abutment sleeve. An elastic support member is provided in the receiving cavity at a position balancing the force applied by the lateral drive members. The elastic support member abuts against the abutment sleeve. The vertical drive unit includes a vertical drive member, which drives the top plate to move along the normal direction of the end face of the support base, or adjusts the swing angle of the top plate relative to the normal direction.

3. The adjustment mechanism of the light-emitting device as described in claim 2, characterized in that: One of the lateral drive members has its end abutting against the abutment sleeve, and the other lateral drive member drives a lateral steering member located inside the support base. The lateral steering member abuts against the abutment sleeve and converts the movement of the lateral drive member into abutting movement against the abutment sleeve.

4. The adjustment mechanism of the light-emitting device as described in claim 2, characterized in that: The floating disk also includes an adjusting cylinder, and a through-hole is provided in the top plate and the abutment sleeve. The adjusting cylinder is screwed into the through-hole, and the light-emitting lens is connected to the adjusting cylinder.

5. The adjustment mechanism of the light-emitting device as described in claim 2, characterized in that: The lateral drive and vertical drive components are selected by tightening screws. The tightening screw located on the front side of the support base is screwed to the front side of the support base; the tightening screw located on the end side of the floating disk is screwed to the support base or the top plate. When the tightening screw is screwed to the end side of the support base, the tightening screw is rotatably connected to the top plate; when the tightening screw is screwed to the top plate, the tightening screw passes through the top plate and abuts against the end face of the support base.

6. The adjustment mechanism of the light-emitting device as described in claim 5, characterized in that: An elastic connector is provided between the top plate and the support base. The elastic connector includes two rods and an elastic body located between the rods. The rods are respectively located in the grooves on opposite sides of the top plate and the support base, and the elastic body is located in the through holes of the top plate and the support base.

Images