Probe card holder capable of centrally limiting

Abstract

The utility model discloses a probe card holder capable of centrally limiting, which relates to the technical field of holders and comprises a holding frame, a groove, a fixing seat and a probe card main body, the groove is arranged in the holding frame, and the fixing seat is arranged on the outer side of the holding frame. According to the probe card holder capable of being centrally limited, a probe card main body can be inserted into two groups of grooves at first, so that the probe card main body can be inserted into the inner side of a clamping block, at the moment, a bidirectional threaded rod can be rotated forwards, and when the bidirectional threaded rod rotates, two groups of moving blocks can be driven to perform thread sliding close to each other; the threaded ring can extrude and fix the non-slip mat on the top surface of the fixing block, so that the positions of the T-shaped block and the fixing seat are fixed, at the moment, the fixing seat can be fixed on the table top of the test equipment through the bolt, the fixing of the holding frame is completed, and the fixing frame is fixed by adjusting the position of the fixing seat. And the holders with the same size can be fixed on different types of test equipment, so that the applicability of the holders is improved.

Description

Technical Field

[0001] This utility model relates to the field of holder technology, specifically a probe card holder that can be centrally positioned. Background Technology

[0002] Probe cards are core consumables in semiconductor wafer testing. They are mainly used to establish electrical connections between the tester and the chips on the wafer, and to perform chip function and performance testing by transmitting test signals. During use, probe cards require a holder to fix them in place and prevent them from shifting during use.

[0003] In the existing technology, probe card holders are special devices used to fix and position probe cards. Their core function is to ensure that the probe cards maintain stable contact during wafer testing. However, traditional holders usually use bolts to fix and limit the probe cards when in use. This fixing and limiting method is relatively cumbersome, resulting in low efficiency of probe cards during wafer testing. Utility Model Content

[0004] The purpose of this invention is to provide a probe card holder that can be centered and limited, so as to solve the problem of the probe card holder being difficult to fix and limit as mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a probe card holder with centered positioning, comprising: a holder frame, a groove, a fixing seat, and a probe card body. The holder frame has a groove inside, and a fixing seat is provided on the outer side of the holder frame. The probe card body is provided between two holder frames. A slider is slidably connected to the inner side of the groove. A compression spring is connected inside the slider. One end of the compression spring is connected to a clamping block. A rubber pad is adhered to the inner wall of the clamping block. A moving block is connected to the top of the slider. A mounting seat is connected to the top of the two holder frames. A bidirectional threaded rod is connected inside the mounting seat via a bearing. A limiting groove is provided on the bottom of the mounting seat near the moving block.

[0006] Preferably, the movable block is threaded onto the outside of the bidirectional threaded rod.

[0007] Preferably, the movable block and the retaining frame form a sliding structure.

[0008] Preferably, the retaining frame is connected to a fixing block near the outer side of the fixing base, and the fixing block has a guide groove inside.

[0009] Preferably, a T-shaped block is connected to the side of the fixing seat near the guide groove, and a threaded post is connected to the top of the T-shaped block.

[0010] Preferably, the outer side of the threaded post is threaded with a threaded ring, and the bottom of the threaded ring is bonded with an anti-slip pad, thus forming a sliding structure between the threaded post and the fixing block.

[0011] Compared with the prior art, the beneficial effects of this utility model are:

[0012] 1. Compression springs and rubber pads can provide a certain buffering effect, so that the outer side of the probe card body is not easily damaged when the clamping block clamps and fixes it. The clamping block can easily and conveniently clamp and limit the probe card body, thereby helping to improve the wafer testing efficiency of the probe card body. The probe card body is centered and fixed between the two sets of retaining frames.

[0013] 2. The threaded ring can press and fix the anti-slip pad onto the top surface of the fixing block, thereby fixing the position of the T-block and the fixing seat. By adjusting the position of the fixing seat, the holder of the same size can be fixed on different types of test equipment, thereby improving the applicability of the holder. Attached Figure Description

[0014] Figure 1 This is a three-dimensional structural diagram of the present invention;

[0015] Figure 2 This is a three-dimensional structural diagram of the retaining frame of this utility model;

[0016] Figure 3 This is a three-dimensional cross-sectional view of the slider of this utility model;

[0017] Figure 4 This is a three-dimensional sectional view of the mounting base of this utility model;

[0018] Figure 5 This is a three-dimensional cross-sectional view of the fixing block of this utility model.

[0019] In the diagram: 1. Holder; 2. Groove; 3. Fixing seat; 4. Probe card body; 5. Slider; 6. Compression spring; 7. Clamping block; 8. Rubber pad; 9. Moving block; 10. Mounting seat; 11. Two-way threaded rod; 12. Limiting groove; 13. Fixing block; 14. Guide groove; 15. T-block; 16. Threaded post; 17. Threaded ring; 18. Anti-slip pad. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0021] Please see Figures 1-4 It is understood that this utility model provides a technical solution: a probe card holder that can be centrally positioned, comprising: a holder 1, a groove 2, a fixing seat 3, and a probe card body 4. The holder 1 has a groove 2 inside, and a fixing seat 3 is provided on the outside of the holder 1. The probe card body 4 is provided between the two holders 1. A slider 5 is slidably connected to the inside of the groove 2. A compression spring 6 is connected inside the slider 5. A clamping block 7 is connected to one end of the compression spring 6. A rubber pad 8 is adhered to the inner wall of the clamping block 7. A moving block 9 is connected to the top of the slider 5.

[0022] The probe card holder, which can be positioned centrally, can move the slider 5 and the clamping block 7 by moving the moving block 9.

[0023] exist Figure 1 , Figure 2 and Figure 4 In the middle: the top of the two retaining brackets 1 are connected to the mounting base 10. The inside of the mounting base 10 is connected to the bidirectional threaded rod 11 through the bearing. The mounting base 10 has a limit groove 12 near the bottom of the moving block 9.

[0024] The probe card holder, which can be centered and limited, has a limiting groove 12 that can restrict the sliding distance of the moving block 9.

[0025] exist Figure 1 , Figure 2 and Figure 4 In the middle: the movable block 9 is threadedly connected to the outside of the bidirectional threaded rod 11, and the movable block 9 and the retaining frame 1 form a sliding structure.

[0026] The probe card holder, which can be centered and limited, has two sets of moving blocks 9 symmetrically arranged about the center of the mounting base 10.

[0027] In practical implementation, probe card holders are commonly used in wafer testing. Traditionally, the probe card body 4 is fixed using bolts, which is cumbersome and results in low wafer testing efficiency. A better approach is to first insert the probe card body 4 into the two sets of grooves 2, allowing it to be inserted into the inner side of the clamping block 7. At this point, the bidirectional threaded rod 11 can be rotated clockwise. When the bidirectional threaded rod 11 rotates, it drives the two sets of moving blocks 9 to slide closer together. As the moving blocks 9 move, they drive the slider 5 to move within the groove 2, and the moving blocks 9 can also drive... The clamping block 7 moves, and when the rubber pad 8 on the inner side of the clamping block 7 moves to the outer surface of the probe card body 4, the clamping block 7 can drive the rubber pad 8 to squeeze the outer side of the probe card body 4. At the same time, the clamping block 7 can compress the compression spring 6. When the rubber pad 8 comes into contact with the outer side of the probe card body 4, it will produce compression deformation. When the compression spring 6 is compressed to a specified degree, the clamping blocks 7 on the two sets of sliders 5 can clamp and fix the probe card body 4. The compression spring 6 and the rubber pad 8 can play a certain buffering role, so that the outer side of the probe card body 4 is not easily damaged when the clamping block 7 clamps and fixes the probe card body 4.

[0028] See Figures 1-4 It can be seen that the clamping block 7 can easily and conveniently clamp and limit the probe card body 4, thereby helping to improve the wafer testing efficiency of the probe card body 4, and the probe card body 4 is fixed in the center between the two sets of retaining frames 1.

[0029] exist Figure 1 and Figure 5 In the middle: a fixing block 13 is connected to the outside of the fixing bracket 1 near the fixing seat 3. A guide groove 14 is opened inside the fixing block 13. A T-shaped block 15 is connected to the side of the fixing seat 3 near the guide groove 14. A threaded post 16 is connected to the top of the T-shaped block 15.

[0030] The probe card holder, which can be centered and limited, allows the T-shaped block 15 to slide through the guide groove 14.

[0031] exist Figure 1 and Figure 5 In the middle: the outer side of the threaded post 16 is threadedly connected to a threaded ring 17, and an anti-slip pad 18 is bonded to the bottom of the threaded ring 17. The threaded post 16 and the fixed block 13 form a sliding structure.

[0032] The probe card holder, which can be centered and limited, has a silicone anti-slip pad 18.

[0033] In practical implementation, when using the holder, the fixing base 3 is usually installed on the test equipment table with bolts to fix the holder. Traditionally, the holder 1 and the fixing base 3 are usually integrated, making it difficult to adjust the installation position of the fixing base 3 according to different types of test equipment. Alternatively, the holder 1 can be placed on the test equipment table first, and then the fixing base 3 can be pushed towards the mounting hole on the test equipment table. When the fixing base 3 moves, it can drive the T-block 15 to move. When the T-block 15 moves, it can slide through the guide groove 14. When the T-block 15 moves, it can drive the threaded column 16 and the threaded ring 17 to move. While the threaded column 16 moves, it can slide with the fixed block 13. When the fixed seat 3 moves to the top of the mounting hole on the test equipment platform, the threaded ring 17 can be tightened. When the threaded ring 17 is tightened, it can press and fix the anti-slip pad 18 to the top surface of the fixed block 13, thereby fixing the position of the T-block 15 and the fixed seat 3. At this time, the fixed seat 3 can be fixed to the test equipment platform with bolts to complete the fixation of the holder 1.

[0034] See Figure 1 and Figure 5 It can be seen that by adjusting the position of the fixing seat 3, the holder of the same size can be fixed on different types of test equipment, thereby improving the applicability of the holder.

[0035] In summary, when using this centered and limiting probe card holder, the probe card body 4 can be inserted into the two sets of grooves 2 first, so that the probe card body 4 can be inserted into the inner side of the clamping block 7. At this time, the bidirectional threaded rod 11 can be rotated forward. When the bidirectional threaded rod 11 rotates, it can drive the two sets of moving blocks 9 to slide closer to each other. The clamping block 7 can easily and conveniently clamp and limit the probe card body 4, thereby helping to improve the wafer testing efficiency of the probe card body 4. Moreover, the probe card body 4 is centered and fixed between the two sets of holders 1. By adjusting the position of the fixing seat 3, the holder of the same size can be fixed on different types of testing equipment, thereby improving the applicability of the holder. The contents not described in detail in this specification are prior art known to those skilled in the art.

[0036] Although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the protection scope of the present invention.

Claims

1. A probe card holder with centrally positioned limit, characterized in that: include: The holder (1), the groove (2), the fixing seat (3), and the probe card body (4); The holder (1) has a groove (2) inside; a fixing seat (3) is provided on the outside of the holder (1); and a probe card body (4) is provided between the two holders (1). A slider (5) is slidably connected to the inner side of the groove (2); a compression spring (6) is connected inside the slider (5); a clamping block (7) is connected to one end of the compression spring (6); a rubber pad (8) is adhered to the inner wall of the clamping block (7); a moving block (9) is connected to the top of the slider (5); a mounting base (10) is connected to the top of the two retaining frames (1); a bidirectional threaded rod (11) is connected inside the mounting base (10) through a bearing; a limiting groove (12) is opened on the bottom of the mounting base (10) near the moving block (9).

2. The probe card holder with centering and limiting function according to claim 1, characterized in that: The movable block (9) is threaded to the outside of the bidirectional threaded rod (11).

3. The probe card holder with centrally positioned limiting according to claim 2, characterized in that: The movable block (9) and the retaining frame (1) form a sliding structure.

4. The probe card holder with centering and limiting function according to claim 1, characterized in that: The retaining frame (1) is connected to a fixing block (13) on the outside of the fixing seat (3).

5. A probe card holder with centrally positioned limiting according to claim 4, characterized in that: The fixing block (13) has a guide groove (14) inside.

6. A probe card holder with centrally positioned limiting according to claim 4, characterized in that: The fixed seat (3) is connected to a T-shaped block (15) on the side near the guide groove (14).

7. A probe card holder with centering and limiting function according to claim 6, characterized in that: The top of the T-block (15) is connected to a threaded post (16).

Images