High-temperature-resistant probe card horizontal adjusting device

Abstract

This utility model discloses a high-temperature resistant probe card leveling device, relating to the field of probe card leveling technology. It includes a base, a balancing component mounted on and rotatably connected to the base, a level monitoring instrument mounted on and fixedly connected to the base, a mounting plate mounted on and fixedly connected to the balancing component, two fixing mechanisms mounted on the mounting plate, and an adjustment mechanism mounted on the base. This device, through its adjustment mechanism, can level the probe card mounted on it, ensuring it remains horizontal. The leveling method is simple and easy to use. The fixing mechanisms secure the probe card, preventing movement and ensuring accurate subsequent leveling adjustments.

Description

Technical Field

[0001] This utility model relates to the field of probe card leveling technology, and in particular to a high-temperature resistant probe card leveling adjustment device. Background Technology

[0002] In semiconductor testing and related fields, probe cards are key components used to connect test equipment to the chip or wafer under test. With continuous technological advancements, the performance requirements for probe cards are increasing, especially in high-temperature testing scenarios, such as the high-temperature characteristic testing of semiconductor materials. Currently, existing probe card leveling devices are not convenient enough in terms of adjustment methods, making it difficult to meet the rapid adjustment of probe card leveling under different testing needs. Furthermore, probe card movement during adjustment can affect leveling, thus requiring improvement. Utility Model Content

[0003] In view of the shortcomings of the existing technology, the purpose of this utility model is to provide a high-temperature resistant probe card leveling device, which aims to solve the above-mentioned technical problems.

[0004] To achieve the above objectives, the present invention adopts the following technical solution:

[0005] A high-temperature resistant probe card leveling device includes a base and further includes:

[0006] A balancing component is mounted on the base and rotatably connected to the base;

[0007] A level monitoring device is mounted on the base and fixedly connected to the base;

[0008] A mounting plate is disposed on the balance component and fixedly connected to the balance component;

[0009] The mounting plate has two fixing mechanisms for fixing the probe card.

[0010] An adjustment mechanism, located on the base, is used for balance adjustment of the device.

[0011] Preferably, the fixing mechanism includes:

[0012] A mounting section is provided on the mounting plate for mounting components;

[0013] An adjustment section is provided on the mounting section for balancing the device.

[0014] The mounting unit includes:

[0015] The mounting component is disposed on the mounting plate and is fixedly connected to the mounting plate;

[0016] The device has two fixing posts, which are disposed between the mounting plate and the mounting component and are fixedly connected to the mounting plate and the mounting component.

[0017] Preferably, the adjustment unit includes:

[0018] An adjusting bolt is provided on the mounting plate and the mounting component, and is rotatably connected to the mounting plate and the mounting component;

[0019] A pressure plate is mounted on the adjusting bolt and is threadedly connected to the adjusting bolt.

[0020] Preferably, the adjustment mechanism includes:

[0021] A mounting slot is provided inside the base for mounting components;

[0022] A balancing unit, located within the mounting slot, is used to adjust the balance.

[0023] Preferably, the balancing part includes:

[0024] An adjusting gear is mounted on the balancing component and fixedly connected to it.

[0025] An adjusting rack is disposed within the mounting groove and is slidably connected to the mounting groove;

[0026] An adjusting bar is disposed on the adjusting rack and is fixedly connected to the adjusting rack.

[0027] Preferably, the balancing part further includes:

[0028] A fixing block is disposed within the mounting groove and is slidably connected to the mounting groove;

[0029] A fixing bolt is provided in the mounting groove and is threadedly connected to the mounting groove.

[0030] The device has two springs, which are disposed between the base and the mounting plate and are fixedly connected to the base and the mounting plate.

[0031] In summary, due to the adoption of the above technical solution, the beneficial effects of this utility model are:

[0032] 1. This device has an adjustment mechanism that allows for horizontal adjustment of the probe card installed on it, ensuring that the probe card is in a horizontal position. Moreover, the method of adjusting the probe card is simpler and easier to use.

[0033] 2. This device has a fixing mechanism that can fix the probe card and can fix probe cards of different thicknesses. After fixing, it can ensure that the probe card will not move, thus ensuring the accuracy of subsequent horizontal adjustment of the probe card. Attached Figure Description

[0034] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0035] Figure 1 A three-dimensional structural schematic diagram of a high-temperature resistant probe card horizontal adjustment device is shown.

[0036] Figure 2 A front view schematic diagram of a high-temperature resistant probe card horizontal adjustment device is shown.

[0037] Figure 3 It shows Figure 2 A schematic diagram of the cross-sectional structure of AA.

[0038] Figure 4 A top view schematic diagram of a high-temperature resistant probe card horizontal adjustment device is shown.

[0039] Figure 5 It shows Figure 4 A cross-sectional view of the CC structure.

[0040] Figure 6 A three-dimensional exploded view of the adjustment mechanism of a high-temperature resistant probe card leveling device is shown.

[0041] Legend:

[0042] 1. Base; 2. Balancing component; 3. Level monitor; 4. Mounting plate; 5. Mounting component; 6. Fixing column; 7. Adjusting bolt; 8. Pressure plate; 9. Mounting groove; 10. Adjusting gear; 11. Adjusting rack; 12. Adjusting bar; 13. Fixing block; 14. Fixing bolt; 15. Spring. Detailed Implementation

[0043] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0044] In the description of this utility model, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0045] It should be noted that when a component is described as "fixed to" another component, it can be directly on the other component or may have a component in between. When a component is considered "connected to" another component, it can be directly connected to the other component or may have a component in between. When a component is considered "set on" another component, it can be directly set on the other component or may have a component in between. The terms "vertical," "horizontal," "left," "right," and similar expressions used in this document are for illustrative purposes only.

[0046] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0047] Reference Figures 1 to 6 The present invention provides a further description of an embodiment of a high-temperature resistant probe card leveling device.

[0048] A high-temperature resistant probe card leveling device includes a base 1, a balance component 2 mounted on the base 1 and rotatably connected to the base 1, a level monitoring instrument 3 mounted on the base 1 and fixedly connected to the base 1, a mounting plate 4 mounted on the balance component 2 and fixedly connected to the balance component 2, two fixing mechanisms mounted on the mounting plate 4 for fixing the probe card, and an adjustment mechanism mounted on the base 1 for adjusting the balance of the device.

[0049] refer to Figure 1 In a preferred embodiment, the fixing mechanism includes: a mounting part disposed on the mounting plate 4 for mounting the component; and an adjustment part disposed on the mounting part for balancing the device.

[0050] refer to Figure 1 and Figure 2 In a preferred embodiment, the mounting part includes: a mounting member 5, which is disposed on the mounting plate 4 and fixedly connected to the mounting plate 4; and two fixing posts 6, which are disposed between the mounting plate 4 and the mounting member 5 and fixedly connected to the mounting plate 4, and the fixing posts 6 are fixedly connected to the mounting member 5.

[0051] refer to Figure 1 and Figure 2 as well as Figure 3 In a preferred embodiment, the adjusting part includes: an adjusting bolt 7, which is disposed on the mounting plate 4 and the mounting component 5 and is rotatably connected to the mounting plate 4; and a pressure plate 8, which is disposed on the adjusting bolt 7 and is threadedly connected to the adjusting bolt 7.

[0052] In this configuration, the pressure plate 8 is used to press and fix the probe card, and the pressure plate 8 is also in contact with the fixing post 6 and can slide on the fixing post 6; the fixing post 6 is used to ensure the vertical movement of the pressure plate 8; the adjusting bolt 7 is used to drive the pressure plate 8 to move up and down by rotating itself, so that the pressure plate 8 can be adjusted in height.

[0053] refer to Figure 1 In a preferred embodiment, the adjustment mechanism includes: a mounting groove 9 disposed within the base 1 for mounting components; and a balancing part disposed within the mounting groove 9 for adjusting balance.

[0054] refer to Figure 4 and Figure 5 as well as Figure 6 In a preferred embodiment, the balancing unit includes: an adjusting gear 10, disposed on the balancing member 2 and fixedly connected to the balancing member 2; an adjusting rack 11, disposed in the mounting groove 9 and slidably connected to the mounting groove 9; an adjusting strip 12, disposed on the adjusting rack 11 and fixedly connected to the adjusting rack 11; a fixing block 13, disposed in the mounting groove 9 and slidably connected to the mounting groove 9; a fixing bolt 14, disposed in the mounting groove 9 and threadedly connected to the mounting groove 9; and two springs 15, disposed between the base 1 and the mounting plate 4 and fixedly connected to the base 1, and the springs 15 are fixedly connected to the mounting plate 4.

[0055] In this configuration, the mounting groove 9 contacts the fixing bolt 14 at a threaded hole; the adjusting gear 10 rotates to drive the balancer 2; the adjusting gear 10 meshes with the adjusting gear 10 to drive the adjusting gear 10 to rotate by adjusting the movement of the rack 11; the adjusting strip 12 facilitates the movement of the adjusting rack 11; the fixing bolt 14 uses its position within the mounting groove 9 to press and release the fixing block 13. In the pressed state, the fixing block 13 and the adjusting gear 10 are in close contact to prevent the adjusting gear 10 from rotating; in the released state, the fixing block 13 and the adjusting gear 10 are not in close contact, and the adjusting gear 10 rotates freely. At the same time, lugs are provided on both sides of the fixing block 13 to prevent the fixing block 13 from rotating; the spring 15 is mainly used to support both sides of the mounting plate 4.

[0056] This device, through its adjustment mechanism, can horizontally adjust the probe cards installed on it, ensuring they are in a level position. Furthermore, this device offers a simple and user-friendly method for adjusting the probe cards' level. The device also includes a fixing mechanism that secures the probe cards, allowing for the fixing of probe cards of varying thicknesses. Once fixed, the probe cards are prevented from moving, ensuring the accuracy of subsequent horizontal adjustments.

[0057] Working Principle: When the device is in operation, the probe card is placed on the mounting plate 4. By rotating the adjusting bolts 7 on both sides, the adjusting bolts 7 move the pressure plate 8 until it contacts the probe card and firmly secures it. After securing the probe card, the tilt direction and angle are read from the balance monitor. Then, the fixing bolt 14 is loosened, releasing the fixing block 13 and preventing it from being in close contact with the adjusting gear 10. Next, the adjusting rack 11 is pulled, causing it to rotate the adjusting gear 10. The direction of pulling the adjusting rack 11 is opposite to the tilt direction. While moving the adjusting rack 11, the balance monitor is observed. Once balance is achieved, the fixing bolt 14 is rotated again to tighten it. When the fixing bolt 14 is tightened, it pushes the fixing block 13 into close contact with the adjusting gear 10, preventing the adjusting gear 10 from rotating. This completes the horizontal operation of the probe card.

[0058] The above description of the embodiments enables those skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A high-temperature resistant probe card horizontal adjustment device, comprising a base (1), characterized in that, Also includes: A balancing component (2) is disposed on the base (1) and rotatably connected to the base (1); A level monitoring instrument (3) is mounted on the base (1) and fixedly connected to the base (1); Mounting plate (4) is mounted on the balance component (2) and fixedly connected to the balance component (2); The fixing mechanism has two parts, and the two fixing mechanisms are set on the mounting plate (4) for fixing the probe card; An adjustment mechanism is provided on the base (1) for the balance adjustment of this device.

2. The horizontal adjustment device for a high-temperature-resistant probe card according to claim 1, wherein The fixing mechanism includes: The mounting part is provided on the mounting plate (4) and is used for mounting the component; An adjustment section is provided on the mounting section for balancing the device.

3. The horizontal adjustment device for a high-temperature-resistant probe card according to claim 2, wherein The mounting unit includes: Mounting component (5) is disposed on the mounting plate (4) and fixedly connected to the mounting plate (4); There are two fixing posts (6), and the two fixing posts (6) are disposed between the mounting plate (4) and the mounting component (5) and are fixedly connected to the mounting plate (4). The fixing posts (6) are fixedly connected to the mounting component (5).

4. The horizontal adjustment device of a high temperature resistant probe card according to claim 3, wherein, The adjustment unit includes: Adjusting bolt (7) is set on the mounting plate (4) and the mounting part (5) and is rotatably connected to the mounting plate (4), and the adjusting bolt (7) is rotatably connected to the mounting part (5); The pressure plate (8) is set on the adjusting bolt (7) and is threadedly connected to the adjusting bolt (7).

5. The horizontal adjustment device for a high-temperature-resistant probe card according to claim 4, wherein The adjustment mechanism includes: Mounting slot (9) is provided in the base (1) for mounting components; The balancing part is provided in the mounting groove (9) and is used to adjust the balance.

6. The horizontal adjustment device of a high temperature resistant probe card according to claim 5, wherein, The balancing unit includes: Adjusting gear (10) is mounted on the balancer (2) and fixedly connected to the balancer (2); Adjusting rack (11) is set in the mounting groove (9) and is slidably connected to the mounting groove (9); An adjusting bar (12) is disposed on the adjusting rack (11) and is fixedly connected to the adjusting rack (11).

7. The horizontal adjustment device of a high temperature resistant probe card according to claim 6, wherein, The balancing unit also includes: A fixing block (13) is disposed in the mounting groove (9) and is slidably connected to the mounting groove (9); A fixing bolt (14) is provided in the mounting groove (9) and threadedly connected to the mounting groove (9); There are two springs (15), and the two springs (15) are disposed between the base (1) and the mounting plate (4) and are fixedly connected to the base (1), and the springs (15) are fixedly connected to the mounting plate (4).

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