Overlay alignment device
By designing a matching and alignment device, and utilizing a prism assembly and a positioning adjustment device, high-precision alignment of the standard workpiece and the workpiece to be processed is achieved, solving the problem of high cost in existing technologies, reducing the cost of the matching device, and improving the matching accuracy.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- GUANGDONG AOPUTE TECH CO LTD
- Filing Date
- 2025-02-20
- Publication Date
- 2026-05-05
AI Technical Summary
Existing overlay positioning methods require multiple imaging devices and lens assemblies, resulting in high device costs.
A precision overlay alignment device is used, comprising an imaging device, a prism assembly, and a positioning adjustment device. The prism assembly reflects the top surface image of a standard workpiece and the bottom surface image of the workpiece to be processed onto the imaging device, and the positioning adjustment device adjusts the position of the workpiece to achieve precise overlay.
It reduced equipment costs while improving overlay accuracy and precision, achieving high-precision overlay alignment.
Smart Images
Figure CN224203573U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of photolithography technology, and in particular to a photolithography alignment device. Background Technology
[0002] As technology advances, semiconductor technology continues to extend Moore's Law, with critical dimensions becoming smaller and chip integration becoming higher. This places increasingly stringent requirements on semiconductor manufacturing processes, necessitating minimizing overlay errors during the manufacturing process.
[0003] Existing overlay positioning methods generally require multiple imaging devices and multiple lens groups to reduce overlay errors, but this will significantly increase the cost of the equipment.
[0004] Therefore, it is necessary to design an overlay alignment device to reduce the cost of the device.
[0005] The above information is provided as background information only to aid in understanding this disclosure and does not constitute an assertion or admission that any of the above content can be used as prior art relative to this disclosure. Utility Model Content
[0006] This invention provides a matching and alignment device to reduce device costs.
[0007] To achieve the above objectives, this utility model provides the following technical solution:
[0008] A positioning and alignment device for locating a standard workpiece and a workpiece to be machined for overlay; comprising:
[0009] Imaging devices;
[0010] A prism assembly is used to transmit the top surface image of a standard workpiece to the imaging device and the bottom surface image of the workpiece to be processed to the imaging device.
[0011] A positioning and adjustment device is used to support and fix a standard workpiece and adjust the position of the workpiece to be processed along a horizontal plane, wherein the standard workpiece is located on the top side of the workpiece to be processed; the imaging device is electrically connected to the positioning and adjustment device.
[0012] Optionally, the centerline of the imaging device is located in a predetermined plane of symmetry;
[0013] The prism assembly includes an upper triangular prism, a lower triangular prism, and a middle triangular prism. The upper and lower triangular prisms are symmetrical about the set symmetry plane, and the middle triangular prism has a first total reflection surface and a second total reflection surface that are symmetrical about the set symmetry plane.
[0014] The top surface image of the standard workpiece is sequentially reflected by the upper triangular prism and the first total reflection surface into the imaging device, and the bottom surface image of the workpiece to be processed is sequentially reflected by the lower triangular prism and the second total reflection surface into the imaging device.
[0015] Optionally, the upper triangular prism includes a first upper reflecting surface and a second upper reflecting surface that are perpendicular to each other;
[0016] The second upper reflecting surface is parallel to the first total reflection surface and is located directly above the first total reflection surface;
[0017] The first upper reflective surface is opposite to the top surface of the standard workpiece.
[0018] Optionally, the lower triangular prism includes a first lower reflecting surface and a second lower reflecting surface that are perpendicular to each other;
[0019] The second lower reflecting surface is parallel to the second total reflection surface and is located directly above the second total reflection surface;
[0020] The first lower reflective surface is opposite to the top surface of the workpiece to be processed.
[0021] Optionally, the positioning adjustment device includes a first support for supporting a positioning standard workpiece, a second support located on one side of the bottom of the first support for supporting the workpiece to be processed, and a horizontal drive platform fixedly connected to the first support, wherein the drive part of the horizontal drive platform is fixedly connected to the second support.
[0022] Optionally, the prism assembly includes a first reflecting prism group and a second reflecting prism group, and the first reflecting prism group and the second reflecting prism group are symmetrical about a set symmetry plane;
[0023] The centerline of the imaging device is located on the designated plane of symmetry.
[0024] Optionally, the overlay alignment device also includes an industrial control computer, which is electrically connected to the imaging device and the positioning adjustment device respectively.
[0025] Optionally, the horizontal drive platform is an XY platform.
[0026] Optionally, the first support frame is provided with a positioning groove for positioning the standard workpiece;
[0027] The top of the first support frame has a through-hole for taking images.
[0028] Optionally, the imaging device includes a detection camera and a lens.
[0029] Compared with the prior art, the present invention has the following beneficial effects:
[0030] The overlay engraving device provided by this utility model, through its ingenious structural design, enables the imaging device to simultaneously detect the top surface image of the standard workpiece and the bottom surface image of the workpiece to be processed through the prism lens group. Then, the relative position of the standard workpiece and the workpiece to be processed is adjusted by the positioning adjustment device, thereby achieving accurate overlay alignment and improving the overlay accuracy on the bottom surface of the workpiece to be processed.
[0031] This invention has other features and advantages that will be apparent from or will be set forth in detail in the accompanying drawings and the following detailed description, which together serve to explain the particular principles of this invention. Attached Figure Description
[0032] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0033] Figure 1 This is a schematic diagram of the assembly structure of the overlay alignment device provided in this embodiment of the utility model;
[0034] Figure 2 This is a three-dimensional installation structure diagram of the overlay alignment device provided in this embodiment of the utility model.
[0035] Reference numerals: 100, Standard workpiece; 200, Workpiece to be processed; 1, Imaging device; 101, Setting symmetry plane; 2, Prism assembly; 21, Upper triangular prism; 211, First upper reflecting surface; 212, Second upper reflecting surface; 22, Lower triangular prism; 221, First lower reflecting surface; 222, Second lower reflecting surface; 23, Middle triangular prism; 231, First total reflection surface; 232, Second total reflection surface; 3, Positioning and adjustment device; 31, First support frame; 32, Second support frame; 33, Horizontal drive platform. Detailed Implementation
[0036] To illustrate the possible application scenarios, technical principles, implementable specific solutions, and achievable objectives and effects of this application in detail, the following description, in conjunction with the listed specific embodiments and accompanying drawings, provides a detailed explanation. The embodiments described herein are merely illustrative of the technical solutions of this application and are therefore intended to limit the scope of protection of this application.
[0037] In this document, the term "embodiment" means that a specific feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The term "embodiment" appearing in various places throughout the specification does not necessarily refer to the same embodiment, nor does it specifically limit its independence or connection with other embodiments. In principle, in this application, as long as there are no technical contradictions or conflicts, the technical features mentioned in each embodiment can be combined in any way to form corresponding implementable technical solutions.
[0038] Unless otherwise defined, the technical terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains; the use of related terms herein is merely for the purpose of describing particular embodiments and is not intended to limit this application.
[0039] In the description of this application, the term "and / or" is used to describe the logical relationship between objects, indicating that three relationships can exist. For example, A and / or B means: A exists, B exists, and A and B exist simultaneously. Additionally, the character " / " in this document generally indicates that the preceding and following objects have an "or" logical relationship.
[0040] In this application, terms such as “first” and “second” are used only to distinguish one entity or operation from another, and do not necessarily require or imply any actual quantity, hierarchy or order relationship between these entities or operations.
[0041] Unless otherwise specified, the use of terms such as “comprising,” “including,” “having,” or other similar expressions in this application is intended to cover non-exclusive inclusion, which does not exclude the presence of additional elements in a process, method, or product that includes the stated elements, such that a process, method, or product that includes a list of elements may include not only those defined elements but also other elements not expressly listed, or elements inherent to such a process, method, or product.
[0042] Similar to the understanding in the Examination Guidelines, in this application, expressions such as "greater than," "less than," and "exceeding" are understood to exclude the stated number; expressions such as "above," "below," and "within" are understood to include the stated number. Furthermore, in the description of the embodiments in this application, "multiple" means two or more (including two), and similar expressions related to "multiple" are also understood in this way, such as "multiple groups" and "multiple times," unless otherwise explicitly specified.
[0043] In the description of the embodiments of this application, the space-related expressions used, such as "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "vertical," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential," indicate the orientation or positional relationship based on the orientation or positional relationship shown in the specific embodiments or drawings. They are only for the purpose of describing the specific embodiments of this application or for the reader's understanding, and do not indicate or imply that the device or component referred to must have a specific position, a specific orientation, or be constructed or operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application.
[0044] Unless otherwise expressly specified or limited, the terms "installation," "connection," "linking," "fixing," and "setting," as used in the description of the embodiments of this application, should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral setting; it can be a mechanical connection, an electrical connection, or a communication connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be the internal connection of two components or the interaction between two components. For those skilled in the art to which this application pertains, the specific meaning of the above terms in the embodiments of this application can be understood according to the specific circumstances.
[0045] In view of the shortcomings of the existing overlay alignment methods, the applicant, based on years of practical experience and professional knowledge in the design and manufacture of such products, and in conjunction with the application of theoretical principles, actively researched and innovated in order to create a technology that could solve the shortcomings of the existing technology and make the overlay alignment device more practical. After continuous research, design, and repeated prototype production and improvement, this utility model with real practical value was finally created.
[0046] Please refer to Figures 1 to 2 This utility model provides a matching device for positioning a standard workpiece 100 and a workpiece 200 to be matched: it includes an imaging device 1, a prism assembly 2 and a positioning adjustment device 3.
[0047] The prism assembly 2 transmits the top surface image of the standard workpiece to the imaging device 1 and the bottom surface image of the workpiece 200 to be processed to the imaging device 1. The positioning adjustment device 3 supports and fixes the standard workpiece and can adjust the position of the workpiece 200 to be processed along the horizontal plane, with the standard workpiece located on the top side of the workpiece 200 to be processed. The imaging device 1 is electrically connected to the positioning adjustment device 3. The imaging device 1 simultaneously detects the top surface image of the standard workpiece 100 and the bottom surface image of the workpiece 200 to be processed through the prism assembly 2, and controls the position of the workpiece 200 to be processed through the positioning adjustment device 3, thereby improving the overlay accuracy.
[0048] In this embodiment, the overlay device, through its ingenious structural design, enables the imaging device 1 to simultaneously detect the top surface image of the standard workpiece 100 and the bottom surface image of the workpiece 200 to be processed through the prism lens group 2. Then, the positioning and adjustment device 3 adjusts the relative positions of the standard workpiece and the workpiece to be processed, thereby achieving accurate overlay alignment and improving the overlay accuracy on the bottom surface of the workpiece to be processed.
[0049] It should be noted that the positioning adjustment device 3 can adjust its position based on the image of the upper surface of the standard workpiece 100 and the image of the bottom surface of the workpiece 200 to be processed, which is existing technology. Furthermore, it should be noted that the substrate shape of the standard workpiece 100 and the substrate workpiece shape of the workpiece 200 to be processed are the same. Therefore, it is obviously easy to position the workpiece 200 directly below the standard workpiece 100 based on the image of the upper surface of the standard workpiece 100 and the image of the bottom surface of the workpiece 200 to be processed.
[0050] Optionally, the centerline of the imaging device 1 is located in the set symmetry plane 101; the prism assembly 2 includes an upper triangular prism 21, a lower triangular prism 22 and a middle triangular prism 23, the upper triangular prism 21 and the lower triangular prism 22 are symmetrical about the set symmetry plane 101, and the middle triangular prism 23 has a first total reflection surface 231 and a second total reflection surface 232 that are symmetrical about the set symmetry plane 101; the top surface image of the standard workpiece is sequentially reflected into the imaging device 1 by the upper triangular prism 21 and the first total reflection surface 231, and the bottom surface image of the workpiece 200 to be processed is sequentially reflected into the imaging device 1 by the lower triangular prism 22 and the second total reflection surface 232.
[0051] In this embodiment, only one upper triangular prism 21, one lower triangular prism 22 and one middle triangular prism 23 are needed to simultaneously reflect the image of the upper surface of the standard workpiece 100 and the bottom surface of the workpiece 200 to be processed onto the imaging device 1, which can effectively reduce the complexity of the structure and make the production cost lower.
[0052] Optionally, the upper triangular prism 21 includes a first upper reflecting surface 211 and a second upper reflecting surface 212 that are perpendicular to each other; the second upper reflecting surface 212 is parallel to the first total reflection surface 231 and is located directly above the first total reflection surface 231; the first upper reflecting surface 211 is opposite to the top surface of the standard workpiece. Specifically, the top surface of the standard workpiece 100 reflects light to the first upper reflecting surface 211, the first upper reflecting surface 211 then reflects the light to the second upper reflecting surface 212, the second upper reflecting surface 212 then reflects the light to the first total reflection surface 231, and then the first total reflection surface 231 reflects the light into the imaging device 1.
[0053] Optionally, the lower triangular prism 22 includes a first lower reflecting surface 221 and a second lower reflecting surface 222 that are perpendicular to each other; the second lower reflecting surface 222 is parallel to the second total reflection surface 232 and is located directly above the second total reflection surface 232; the first lower reflecting surface 221 is opposite to the top surface of the workpiece 200 to be processed. Similarly, the bottom surface image of the workpiece 200 to be processed enters the imaging device 1 through the first lower reflecting surface 221, the second lower reflecting surface 222, and the second total reflection surface 232.
[0054] Optionally, the positioning adjustment device 3 includes a first support frame 31 for supporting and positioning the standard workpiece 100, a second support frame 32 located on one side of the bottom of the first support frame 31 to support the workpiece 200 to be processed, and a horizontal drive platform 33 fixedly connected to the first support frame 31, wherein the drive part of the horizontal drive platform 33 is fixedly connected to the second support frame 32. In this embodiment, the position of the first support frame 31 remains unchanged, and then the horizontal drive platform 33 drives the second support frame 32 to move horizontally, thereby positioning the workpiece 200 to be processed directly below the standard workpiece 100.
[0055] Optionally, the prism assembly 2 includes a first reflecting prism group and a second reflecting prism group, and the first reflecting prism group and the second reflecting prism group are symmetrical about the set symmetry plane 101; the center line of the imaging device 1 is located on the set symmetry plane 101.
[0056] Optionally, the overlay alignment device also includes an industrial computer, which is electrically connected to the imaging device 1 and the positioning adjustment device 3. The industrial computer is used to control the positioning adjustment device 3 to perform actions.
[0057] Optionally, the horizontal drive platform 33 is an XY platform.
[0058] Optionally, the first support 31 is provided with a positioning groove for positioning a standard workpiece; the top of the first support 31 is provided with a through image-taking hole.
[0059] Optionally, the imaging device 1 includes a detection camera and a lens.
[0060] Finally, it should be noted that although the above embodiments have been described in the text and drawings of this application, this should not limit the scope of patent protection of this application. Any technical solutions that are based on the essential concept of this application and utilize the content described in the text and drawings of this application, resulting in equivalent structural or procedural substitutions or modifications, as well as the direct or indirect application of the technical solutions of the above embodiments to other related technical fields, are all included within the scope of patent protection of this application.
Claims
1. A registration and alignment device, characterized in that, Used for positioning standard workpieces (100) and workpieces to be processed (200) that need to be overlaid; include, Imaging device (1); A prism assembly (2) is used to transmit the top surface image of a standard workpiece to the imaging device (1) and the bottom surface image of the workpiece to be processed (200) to the imaging device (1); The positioning adjustment device (3) is used to support and fix the standard workpiece and adjust the position of the workpiece to be processed (200) along the horizontal plane, and the standard workpiece is located on the top side of the workpiece to be processed (200); the imaging device (1) is electrically connected to the positioning adjustment device (3).
2. The overlay alignment device according to claim 1, characterized in that, The centerline of the imaging device (1) is located in a set symmetry plane (101); The prism assembly (2) includes an upper triangular prism (21), a lower triangular prism (22) and a middle triangular prism (23). The upper triangular prism (21) and the lower triangular prism (22) are symmetrical about the set symmetry plane (101), and the middle triangular prism (23) has a first total reflection surface (231) and a second total reflection surface (232) that are symmetrical about the set symmetry plane (101). The top surface image of the standard workpiece is sequentially reflected by the upper triangular prism (21) and the first total reflection surface (231) and enters the imaging device (1). The bottom surface image of the workpiece to be processed (200) is sequentially reflected by the lower triangular prism (22) and the second total reflection surface (232) and enters the imaging device (1).
3. The overlay alignment device according to claim 2, characterized in that, The upper triangular prism (21) includes a first upper reflecting surface (211) and a second upper reflecting surface (212) that are perpendicular to each other; The second upper reflective surface (212) is parallel to the first total reflective surface (231) and is located directly above the first total reflective surface (231); The first upper reflective surface (211) is opposite to the top surface of the standard workpiece.
4. The overlay alignment device according to claim 2, characterized in that, The lower triangular prism (22) includes a first lower reflecting surface (221) and a second lower reflecting surface (222) that are perpendicular to each other; The second lower reflecting surface (222) is parallel to the second total reflecting surface (232) and is located directly above the second total reflecting surface (232); The first lower reflective surface (221) is opposite to the top surface of the workpiece (200) to be processed.
5. The overlay alignment device according to claim 1, characterized in that, The positioning adjustment device (3) includes a first support frame (31) for supporting the positioning standard workpiece (100), a second support frame (32) located on one side of the bottom of the first support frame (31) to support the workpiece (200) to be processed, and a horizontal drive platform (33) fixedly connected to the first support frame (31), and the drive part of the horizontal drive platform (33) is fixedly connected to the second support frame (32).
6. The overlay alignment device according to claim 1, characterized in that, The prism assembly (2) includes a first reflecting prism group and a second reflecting prism group, and the first reflecting prism group and the second reflecting prism group are symmetrical about a set symmetry plane (101). The centerline of the imaging device (1) is located on the set symmetry plane (101).
7. The overlay alignment device according to claim 1, characterized in that, It also includes an industrial control computer, which is electrically connected to the imaging device (1) and the positioning adjustment device (3).
8. The overlay alignment device according to claim 5, characterized in that, The horizontal drive platform (33) is an XY platform.
9. The overlay alignment device according to claim 5, characterized in that, The first support bracket (31) is provided with a positioning groove for positioning the standard workpiece; The top of the first support bracket (31) has a through-hole for taking images.
10. The overlay alignment device according to claim 1, characterized in that, The imaging device (1) includes a detection camera and a lens.