Evaporation coating device

Abstract

The utility model provides an evaporation coating device which comprises a coating assembly, a shell assembly and a deposition source, the coating assembly comprises a sealing shell, a movable inner rod, a rotary driving assembly and a baffle, the rotary driving assembly comprises a rotary driving motor and a coating piece, and the shell assembly comprises a vacuum coating shell, a power mechanism, a guide column and a communicating pipe. The rotary driving motor is arranged in the sealing shell, the output end of the rotary driving motor extends out of the sealing shell from the bottom of the sealing shell and is fixedly connected with the coating piece, the baffle is arranged on the lower side of the coating piece, and the power mechanism is arranged at the top end of the vacuum coating shell. The output end of the power mechanism penetrates through the top end of the vacuum coating shell and is fixedly connected with the top of the sealing shell, the coating piece can be driven to ascend and descend through ascending and descending of the power mechanism, then the distance between the deposition source and the base material can be controlled and adjusted in real time, and the evaporation quality of different base materials is improved.

Description

Technical Field

[0001] This utility model relates to the field of coating technology, and in particular to an evaporation coating apparatus. Background Technology

[0002] Currently, in the processing of substrates such as glass, crystals, and chips, vacuum coating is generally used to form a coating on the surface of the shaped substrate. The principle is to use physical methods under vacuum conditions to vaporize the surface of the material source into gas atoms, molecules, or partially ionize them into ions, and then deposit them on the substrate surface as a thin film with special functions after low-pressure gas treatment to meet the needs of the substrate during use. In order to improve the adhesion of the film, evaporation treatment is usually performed during coating.

[0003] In existing coating processes, for substrates with complex structures or different materials and coating requirements, evaporation is an indispensable step in order to achieve coating quality that meets their respective requirements. However, existing coating equipment usually has a fixed deposition source, which cannot adjust the evaporation effect in real time according to the coating requirements of different substrates. This lack of flexibility leads to problems such as inconsistent coating quality. Utility Model Content

[0004] To address the aforementioned technical problems, the present invention adopts the following technical solution: an evaporation coating apparatus, comprising a coating component, a housing component, and a deposition source. The coating component includes a sealing shell, a movable inner rod, a rotary drive component, and a baffle. The rotary drive component includes a rotary drive motor and a coating component. The housing component includes a vacuum coating housing, a power mechanism, a guide post, and a connecting pipe. The coating component is disposed inside the vacuum coating housing. The movable inner rod is fixedly connected to the top end of the sealing shell, and the guide post is fixedly connected to the top end of the vacuum coating housing. The movable inner rod is inserted into... Inside the guide post, the rotary drive motor is located inside the sealing shell. The output end of the rotary drive motor extends from the bottom of the sealing shell to the outside of the sealing shell and is fixedly connected to the coating part. The baffle is located on the lower side of the coating part. The end of the baffle near the vacuum coating shell is fixedly connected to the side end of the sealing shell through a support arm. The power mechanism is located at the top of the vacuum coating shell, and the output end of the power mechanism passes through the top of the vacuum coating shell and is fixedly connected to the top of the sealing shell. One end of the connecting pipe is connected to the sealing shell, and the other end extends to the outside of the vacuum coating shell.

[0005] Specifically, there are two baffles, which are located on both sides of the lower end of the coated part.

[0006] Specifically, the coated part is a pot-shaped structure with the opening facing downwards.

[0007] Furthermore, the end of the baffle that is away from the vacuum coating shell is tilted upwards.

[0008] Specifically, the bottom of the deposition source is provided with a lifting base, and the bottom end of the lifting base is fixed to the bottom inner side of the vacuum coating shell.

[0009] Specifically, a light controller is installed inside the sealed housing.

[0010] Specifically, the vacuum coating housing includes an upper housing and a lower housing, which are sealed together, and a storage channel is provided on the outer surface of the upper housing or the lower housing.

[0011] Specifically, there are two guide posts, and the two guide posts are symmetrically arranged on both sides of the top of the vacuum coating shell.

[0012] Specifically, a substrate fixing plate is provided on the upper surface of the baffle.

[0013] This utility model embodiment has at least the following technical effects: During coating, the lifting and lowering adjustment of the power mechanism can drive the lifting of the coating part. The moving inner rod moves up and down along the guide column with the lifting and lowering of the output end of the power mechanism, ensuring the balance and stability of the coating part during coating. By setting the coating part into a pot shape and cooperating with the baffle, the coating material sputtered during coating can stay between the coating part and the baffle, effectively preventing the coating material from sputtering into the cavity of the vacuum coating shell, thus preventing the deposition source from being covered and affecting the evaporation effect. When facing different substrate coating thickness and quality requirements, the distance between the substrate and the deposition source can be adjusted in real time according to the preset lifting and lowering rate before or during coating, which has high flexibility and can meet the coating evaporation requirements of different substrates, thereby improving the coating quality and reducing production losses. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in the embodiments of this utility model or related technologies, the drawings used in the description of the embodiments or related technologies will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1 A cross-sectional structural schematic diagram of the evaporation coating apparatus provided by this utility model;

[0016] Figure 2 Another structural schematic diagram of the deposition source provided by this utility model;

[0017] Among them, 1-coating assembly; 11-sealing shell; 111-light control; 12-moving inner rod; 13-rotation drive assembly; 131-rotation drive motor; 132-coating part; 14-baffle; 2-outer shell assembly; 21-vacuum coating shell; 211-upper shell; 212-lower shell; 22-power mechanism; 23-guide column; 24-connecting pipe; 3-deposition source; 31-lifting base; 4-vacuum shell; 5-rotation mechanism; 51-rotation drive motor; 52-rotation rod; 6-cavity; 7-electron gun. Detailed Implementation

[0018] To make the technical problems, technical solutions and advantages of this utility model clearer, the technical solutions of this utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of this utility model.

[0019] In the description of this utility model, it should be noted that the terms "upper," "lower," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0020] Furthermore, in the description of this utility model, unless otherwise explicitly defined, the terms "installation," "connection," "joining," and "connector" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model in light of the specific circumstances.

[0021] like Figure 1 As shown, this utility model embodiment provides an evaporation coating apparatus, including: a coating component 1, a housing component 2, and a deposition source 3, wherein the coating component 1 and the deposition source 3 are both located inside the vacuum coating housing 21.

[0022] The coating assembly 1 includes: a sealing shell 11, a movable inner rod 12, a rotary drive assembly 13, and a baffle 14; the rotary drive assembly 13 includes a rotary drive motor 131 and a coating component 132; wherein, the movable inner rod 12 is fixedly connected to the top end of the sealing shell 11, the rotary drive motor 131 is disposed inside the sealing shell 11, the output end of the rotary drive motor 131 extends from the bottom of the sealing shell 11 to the outside of the sealing shell 11 and is fixedly connected to the coating component 132, and is used to control the rotation of the coating component 132; the baffle 14 is disposed on the lower side of the coating component 132, and the end of the baffle 14 near the vacuum coating shell 21 is fixedly connected to the side end of the sealing shell 11 through a support arm.

[0023] Two baffles 14 are provided, and the two baffles 14 are respectively located on both sides of the lower end of the coated part 132, so as to provide a balanced support effect for the substrate.

[0024] Furthermore, a substrate fixing plate is provided on the upper surface of the baffle 14 for fixing the substrate to the upper surface of the baffle 14.

[0025] The coating component 132 is a pot-shaped structure with the opening facing downwards. The coating component 132 is equipped with an electron gun for emitting an electron beam for coating. The specific coating method can adopt existing technology. By setting the coating component 132 with a pot-shaped structure, most of the sputtered coating material can be surrounded inside the pot during coating, effectively reducing the sputtering of coating material to the deposition source 3.

[0026] Furthermore, the end of the baffle 14 away from the vacuum coating housing 21 is tilted upward to prevent the substrate from falling off.

[0027] A light controller 111 is provided inside the sealed housing 11.

[0028] The outer casing assembly 2 includes: a vacuum coating outer casing 21, a power mechanism 22, a guide post 23, and a connecting pipe 24; wherein, the guide post 23 is fixedly connected to the top end of the vacuum coating outer casing 21, and the movable inner rod 12 is inserted into the inner side of the guide post 23, so that the movable inner rod 12 can slide up and down within the guide post 23 as the power mechanism extends and retracts, thereby guiding and stabilizing the coating assembly 1; the power mechanism 22 is located at the top end of the vacuum coating outer casing 21, and the output end of the power mechanism 22 passes through the top end of the vacuum coating outer casing 21 and is fixedly connected to the top of the sealing shell 11; wherein, the power mechanism 22 can be a servo motor, used to control the lifting and lowering of the sealing shell 11; one end of the connecting pipe 24 is connected to the sealing shell 11, and the other end extends to the outside of the vacuum coating outer casing 21, thereby providing ventilation and heat dissipation.

[0029] The vacuum coating housing 21 includes an upper housing 211 and a lower housing 212, which are sealed together. The outer surface of the upper housing 211 or the lower housing 212 is provided with a placement channel for placing a substrate.

[0030] Furthermore, rubber rings are provided on the inner side of the upper shell 211 and the outer side of the lower shell 212. The upper shell 211 is sleeved on the outer side of the lower shell 212 and sealed by the rubber rings. The sleeve depth is adjustable, thereby achieving the effect of adjusting the evaporation distance.

[0031] The number of guide posts 23 is two, and the two guide posts 23 are symmetrically arranged on both sides of the top of the vacuum coating shell 21 to achieve a balanced guiding effect.

[0032] The bottom of the deposition source 3 is provided with a lifting base 31, and the bottom end of the lifting base 31 is fixed to the bottom inner side of the vacuum coating shell 21. By setting the lifting base 31, the height of the deposition source 3 can be adjusted, thereby adjusting the distance between the deposition source and the substrate. Different evaporation distances can be set according to different substrates to improve the evaporation effect of the substrate.

[0033] The working principle of the evaporation coating device provided in this embodiment is as follows: During coating, the lifting and lowering adjustment of the power mechanism 22 can drive the lifting and lowering of the coating part 132. The moving inner rod 12 moves up and down along the guide column 23 with the lifting and lowering of the output end of the power mechanism 22, ensuring the balance and stability of the coating part during coating. By setting the coating part 132 into a pot shape and cooperating with the baffle 14, the coating material sputtered during coating can stay between the coating part 132 and the baffle 14, effectively preventing the coating material from sputtering into the cavity of the vacuum coating shell 21, so as to prevent covering the deposition source 3 and affecting the evaporation effect. When facing different substrate coating thickness and quality requirements, the distance between the substrate and the deposition source 3 can be adjusted in real time according to the preset lifting and lowering rate before or during coating, which has high flexibility and can meet the coating evaporation requirements of different substrates, thereby improving the coating quality and reducing production losses.

[0034] This invention also provides another implementation of the deposition source, such as... Figure 2 The diagram shown is a top view of a portion of the structure, including a vacuum housing 4, a rotating mechanism 5, and a deposition source 3. The rotating mechanism 5 includes a rotating drive 51 and a rotating rod 52. The rotating drive 51 is mounted on the outer wall of the vacuum housing 4. The output end of the rotating drive 51 extends into the cavity 6 of the vacuum housing 4 and is connected to the rotating rod 52. The tail end of the rotating rod 52 is fixedly mounted with the deposition source 3. An electron gun 7 is disposed inside the cavity 6 of the vacuum housing 4. The deposition source 3 is positioned facing the lower side of the emission end of the electron gun 7 and is used for evaporation coating.

[0035] When the electron gun 7 emits an electron beam for coating, the rotating mechanism 5 is controlled to operate, so that the deposition source 3 rotates with the rotating rod 52 to the lower side of the electron gun 7 that is being coated to evaporate the substrate. After evaporation is completed, the rotating mechanism 5 is controlled to operate again, so that the rotating rod 52 rotates in the opposite direction to reset. In this embodiment, the vertical movement of the deposition source 3 is changed to horizontal movement. When evaporation is not required, it is far away from the substrate and close to the inner wall of the vacuum shell 4. When evaporation is required, it is close to the substrate. By adjusting the evaporation distance of the deposition source 3, the quality of evaporation coating is improved.

[0036] While specific embodiments of the present invention have been described in detail by way of examples, those skilled in the art should understand that the above examples are for illustrative purposes only and are not intended to limit the scope of the present invention. Those skilled in the art should also understand that various modifications can be made to the embodiments without departing from the scope and spirit of the present invention. The scope of the present invention is defined by the appended claims.

Claims

1. An evaporation coating apparatus, characterized in that, include: The coating assembly (1), the housing assembly (2), and the deposition source (3); The coating assembly (1) includes: a sealing shell (11), a movable inner rod (12), a rotary drive assembly (13), and a baffle (14); the rotary drive assembly (13) includes a rotary drive motor (131) and a coating component (132); The outer casing assembly (2) includes: a vacuum-coated outer casing (21), a power mechanism (22), a guide post (23), and a connecting pipe (24); The coating assembly (1) is disposed inside the vacuum coating housing (21). The movable inner rod (12) is fixedly connected to the top end of the sealing shell (11). The guide post (23) is fixedly connected to the top end of the vacuum coating housing (21). The movable inner rod (12) is inserted into the inner side of the guide post (23). The rotary drive motor (131) is disposed inside the sealing shell (11). The output end of the rotary drive motor (131) extends from the bottom of the sealing shell (11) to the outside of the sealing shell (11) and is fixedly connected to the coating component (132). The baffle (14) is located on the lower side of the coating part (132). The end of the baffle (14) near the vacuum coating shell (21) is fixedly connected to the side end of the sealing shell (11) through a support arm. The power mechanism (22) is located at the top of the vacuum coating shell (21), and the output end of the power mechanism (22) passes through the top of the vacuum coating shell (21) and is fixedly connected to the top of the sealing shell (11). One end of the connecting pipe (24) is connected to the sealing shell (11), and the other end extends to the outside of the vacuum coating shell (21).

2. The evaporation coating apparatus according to claim 1, characterized in that, Two baffles (14) are provided, and the two baffles (14) are respectively located on both sides of the lower end of the coated part (132).

3. The evaporation coating apparatus according to claim 1, characterized in that, The coated part (132) is a pot-shaped structure with the opening facing downwards.

4. The evaporation coating apparatus according to claim 2, characterized in that, The end of the baffle (14) away from the vacuum coating shell (21) is tilted upward.

5. The evaporation coating apparatus according to claim 1, characterized in that, The bottom of the deposition source (3) is provided with a lifting base (31), and the bottom end of the lifting base (31) is fixed to the bottom inner side of the vacuum coating shell (21).

6. The evaporation coating apparatus according to claim 1, characterized in that, A light controller (111) is provided inside the sealed housing (11).

7. The evaporation coating apparatus according to claim 1, characterized in that, The vacuum coating housing (21) includes an upper housing (211) and a lower housing (212), which are sealed together, and a storage channel is provided on the outer surface of the upper housing (211) or the lower housing (212).

8. The evaporation coating apparatus according to claim 1, characterized in that, The number of guide posts (23) is two, and the two guide posts (23) are symmetrically arranged on both sides of the top of the vacuum coating shell (21).

9. The evaporation coating apparatus according to claim 1, characterized in that, The upper surface of the baffle (14) is provided with a substrate fixing plate.

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