Glass coating equipment and glass production system

Abstract

The utility model provides glass coating equipment and a glass production system. The glass coating equipment comprises a cavity, a cathode, a vacuum pump, a sputtering power supply, a first cooling device and a second cooling device, the cavity is provided with a coating chamber; the cathode is accommodated in the coating chamber and is used for bearing a target material; the vacuum pump is used for extracting air in the coating chamber, so that a vacuum environment is formed in the coating chamber; the sputtering power supply is electrically connected to the cathode; the first cooling device is in heat exchange connection with the cathode so as to cool the cathode; and the second cooling device is in heat exchange connection with the sputtering power supply and the vacuum pump so as to cool the sputtering power supply and the vacuum pump. According to the glass coating equipment provided by the invention, the cooling effect on the cathode, the sputtering power supply and the vacuum pump is effectively improved, so that the reliability of the glass coating equipment is effectively improved.

Description

Technical Field

[0001] This application relates to the field of glass manufacturing technology, and in particular to a glass coating equipment and a glass production system. Background Technology

[0002] In the glass manufacturing process, to give the glass functions such as heat reflection and light reflection, glass coating equipment is typically used to coat the glass surface. Glass coating equipment usually includes a cathode, a vacuum pump, a sputtering power source, and a cooling device. The cooling device is used to circulate a cooling medium to cool components such as the cathode, vacuum pump, and sputtering power source. However, because the cooling medium flows sequentially through each component to be cooled, the temperature of the cooling medium continuously rises, resulting in poorer cooling of downstream components and hindering the reliability of the glass coating equipment. Utility Model Content

[0003] The purpose of this application is to provide a glass coating equipment and a glass production system, which aims to solve the technical problem of the reliability of glass coating equipment in related technologies.

[0004] To achieve the above objectives, the technical solution adopted in this application embodiment is as follows: a glass coating apparatus is provided, including a cavity, a cathode, a vacuum pump, a sputtering power supply, a first cooling device, and a second cooling device; the cavity has a coating chamber; the cathode is housed in the coating chamber and used to support the target material; the vacuum pump is used to extract air from the coating chamber to create a vacuum environment in the coating chamber; the sputtering power supply is electrically connected to the cathode; the first cooling device is heat-exchange connected to the cathode to cool the cathode; the second cooling device is heat-exchange connected to the sputtering power supply and the vacuum pump to cool the sputtering power supply and the vacuum pump.

[0005] The glass coating equipment provided in this application embodiment has at least the following beneficial effects: By setting a first cooling device and a second cooling device, the glass coating equipment provided in this application embodiment can isolate the cooling medium in the first cooling device from the cooling medium in the second cooling device, so that the heat of the cooling medium in the first cooling device will not be transferred to the heat of the cooling medium in the second cooling device, which effectively improves the cooling effect on the cathode, sputtering power supply and vacuum pump, thereby effectively improving the reliability of the glass coating equipment.

[0006] In some embodiments of this application, the first cooling device includes a first internal circulation cooling component and a first external circulation cooling component. The first internal circulation cooling component is used to circulate a first cooling medium and is heat-exchange connected to the cathode to cool the cathode. The first external circulation cooling component is used to circulate a second cooling medium and is heat-exchange connected to the first internal circulation cooling component to cool the first cooling medium.

[0007] In some embodiments of this application, the first cooling medium is pure water or cooling oil.

[0008] In some embodiments of this application, the first external circulation cooling assembly includes a first cooling tower and a first liquid storage tank. The first liquid storage tank is used to store a second cooling medium. The first cooling tower is connected to the first liquid storage tank via pipeline to transport the second cooling medium from the first liquid storage tank to the first cooling tower.

[0009] In some embodiments of this application, the first cooling tower is disposed above the first liquid storage tank.

[0010] In some embodiments of this application, the second cooling device includes a second internal circulation cooling component and a second external circulation cooling component. The second internal circulation cooling component is used to circulate a third cooling medium and is heat-exchange connected to the sputtering power supply and the vacuum pump to cool the sputtering power supply and the vacuum pump. The second external circulation cooling component is used to circulate a fourth cooling medium and is heat-exchange connected to the second internal circulation cooling component to cool the third cooling medium.

[0011] In some embodiments of this application, the third cooling medium is pure water or cooling oil.

[0012] In some embodiments of this application, the second external circulation cooling assembly includes a second cooling tower and a second liquid storage tank. The second liquid storage tank is used to store a fourth cooling medium. The second cooling tower is connected to the second liquid storage tank via pipeline to transport the fourth cooling medium from the second liquid storage tank to the second cooling tower.

[0013] In some embodiments of this application, the second cooling tower is disposed above the second liquid storage tank.

[0014] Secondly, embodiments of this application provide a glass production system, including the glass coating equipment described in any of the above embodiments.

[0015] The glass production system provided in this application has at least the following beneficial effects: the glass production system provided in this application effectively improves the reliability of the glass production system by adopting the glass coating equipment described in any of the above embodiments. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the glass coating equipment provided in an embodiment of this application.

[0018] The following are the labeling elements in the figure:

[0019] 100. Glass coating equipment;

[0020] 10. Cavity; 11. Coating chamber; 20. Cathode; 30. Vacuum pump; 40. Sputtering power supply; 50. First cooling device; 51. First internal circulation cooling assembly; 511. First liquid storage tank; 512. First delivery pipeline; 513. First power pump; 514. Second delivery pipeline; 515. Second power pump; 516. First bypass pipeline; 517. Third power pump; 518. Second bypass pipeline; 519. Fourth power pump; 52. First external circulation cooling assembly; 521. First cooling tower; 522. First liquid storage tank; 523. Third delivery pipeline; 524. Fifth power pump; 525. Third bypass pipeline; 526. 53. Sixth power pump; 64. First heat exchange mechanism; 65. Second cooling device; 66. Second internal circulation cooling assembly; 67. Second liquid storage tank; 68. Fourth delivery pipeline; 69. Seventh power pump; 60. Fifth delivery pipeline; 610. Eighth power pump; 611. Fourth bypass pipeline; 62. Ninth power pump; 612. Fifth bypass pipeline; 63. Tenth power pump; 64. Second external circulation cooling assembly; 65. Second cooling tower; 66. Second liquid storage tank; 67. Sixth delivery pipeline; 68. Eleventh power pump; 69. Sixth bypass pipeline; 60. Twelfth power pump; 611. Second heat exchange mechanism. Detailed Implementation

[0021] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this application, and should not be construed as limiting this application.

[0022] Throughout this specification, references to "an embodiment" or "an embodiment" mean that a particular feature, structure, or characteristic described in connection with an embodiment is included in at least one embodiment of this application. Therefore, the phrases "in one embodiment" or "in some embodiments" appear in various places throughout the specification, and not all refer to the same embodiment. Furthermore, in one or more embodiments, particular features, structures, or characteristics may be combined in any suitable manner.

[0023] In the description of this application, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0024] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined with "first" or "second" may explicitly or implicitly include one or more of that feature.

[0025] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0026] To illustrate the technical solutions provided in this application, the following detailed description is provided in conjunction with specific drawings and embodiments.

[0027] Firstly, please refer to Figure 1This application provides a glass coating apparatus 100, including a cavity 10, a cathode 20, a vacuum pump 30, a sputtering power supply 40, a first cooling device 50, and a second cooling device 60. The cavity 10 has a coating chamber 11. The cathode 20 is housed in the coating chamber 11 and is used to support the target material. The vacuum pump 30 is used to extract air from the coating chamber 11 to create a vacuum environment in the coating chamber 11. The sputtering power supply 40 is electrically connected to the cathode 20. The first cooling device 50 is heat-exchange connected to the cathode 20 to cool the cathode 20. The second cooling device 60 is heat-exchange connected to the sputtering power supply 40 and the vacuum pump 30 to cool the sputtering power supply 40 and the vacuum pump 30.

[0028] The cavity 10 is used to provide a coating environment for the glass, at least a portion of which constitutes the coating chamber 11.

[0029] The cathode 20 serves as the carrier for the target material. An electric field accelerates ions, bombarding the target surface and releasing target atoms which then deposit onto the glass surface. Simultaneously, a magnetic field is used to optimize plasma distribution, thereby achieving the coating of the glass. The cathode 20 can be, but is not limited to, planar cathodes 20, rotating cathodes 20, etc.

[0030] The vacuum pump 30 is used to extract air from the coating chamber 11 to the outside of the coating chamber 11, so as to create a vacuum environment in the coating chamber 11, reduce interference from gas impurities, and ensure the purity and uniformity of the film. The vacuum pump 30 can be, but is not limited to, a molecular pump, a mechanical pump, a diffusion pump, etc.

[0031] The sputtering power supply 40 is the core energy source for the glass coating equipment 100 to coat the glass. The sputtering power supply 40 is used to convert the electrical energy provided by the external power grid into high-voltage DC, radio frequency, or pulsed power to provide an electric field to the cathode 20 to accelerate ions, maintain a stable plasma discharge environment, and thus control the sputtering rate and thin film quality energy conversion.

[0032] In some embodiments, the glass coating apparatus 100 further includes a conveying mechanism for conveying glass.

[0033] As an example, the number of cathodes 20, vacuum pumps 30, and sputtering power sources 40 are all multiple, with each cathode 20 corresponding to a different sputtering power source 40. Along the conveying direction of the conveying mechanism, the coating chamber 11 has multiple coating areas, each with at least one cathode 20. The target material carried by the cathodes 20 in each coating area can be the same or different, thereby forming multiple overlapping film layers on the surface of the glass during the glass conveying process. Each coating area is also equipped with at least one vacuum pump 30 to improve the vacuum level of each coating area.

[0034] The first cooling device 50 is used to cool the cathode 20. In some embodiments, a cooling medium flow path is formed inside the first cooling device 50, and the cathode 20 is disposed on the flow path so that the cooling medium flows through the cathode 20, thereby carrying away the heat of the cathode 20 and achieving the purpose of cooling the cathode 20.

[0035] The second cooling device 60 is used to cool the sputtering power supply 40 and the vacuum pump 30. In some embodiments, a cooling medium flow path is formed inside the second cooling device 60, and the sputtering power supply 40 and the vacuum pump 30 are both disposed on the flow path, so that the cooling medium flows through the sputtering power supply 40 and the vacuum pump 30, thereby carrying away the heat of the sputtering power supply 40 and the vacuum pump 30, achieving the purpose of cooling the sputtering power supply 40 and the vacuum pump 30.

[0036] In some embodiments, the number of cathodes 20, the number of vacuum pumps 30, and the number of sputtering power supplies 40 are all multiple. The multiple cathodes 20 are all disposed on the cooling medium flow path of the first cooling device 50 to cool the multiple cathodes 20. The multiple sputtering power supplies 40 and the multiple vacuum pumps 30 are all disposed on the cooling medium flow path of the second cooling device 60 to cool the multiple sputtering power supplies 40 and the multiple vacuum pumps 30.

[0037] Understandably, the first cooling device 50 and the second cooling device 60 are independent of each other, that is, the cooling medium flow path of the first cooling device 50 and the cooling medium flow path of the second cooling device 60 are not connected to each other, so that the cooling medium in the first cooling device 50 and the cooling medium in the second cooling device 60 do not come into contact with each other.

[0038] The glass coating equipment 100 provided in this application embodiment is equipped with a first cooling device 50 and a second cooling device 60. The first cooling device 50 is used to cool the cathode 20, and the second cooling device 60 is used to cool the sputtering power supply 40 and the vacuum pump 30. In this way, the cooling medium in the first cooling device 50 and the cooling medium in the second cooling device 60 can be isolated from each other, so that the heat of the cooling medium in the first cooling device 50 will not be transferred to the heat of the cooling medium in the second cooling device 60. This effectively improves the cooling effect on the cathode 20, the sputtering power supply 40 and the vacuum pump 30, thereby effectively improving the reliability of the glass coating equipment 100.

[0039] In some embodiments of this application, please refer to Figure 1The first cooling device 50 includes a first internal circulation cooling component 51 and a first external circulation cooling component 52. The first internal circulation cooling component 51 is used to circulate a first cooling medium and is connected to the cathode 20 for heat exchange to cool the cathode 20. The first external circulation cooling component 52 is used to circulate a second cooling medium and is connected to the first internal circulation cooling component 51 for heat exchange to cool the first cooling medium.

[0040] In some embodiments, the first cooling device 50 further includes a first heat exchange mechanism 53, which is used to connect the first internal circulation cooling component 51 and the first external circulation cooling component 52 for heat exchange, so that the first cooling medium and the second cooling medium can exchange heat.

[0041] As an example, the first internal circulation cooling assembly 51 includes a first liquid storage tank 511, a first delivery pipeline 512, a first power pump 513, a second delivery pipeline 514, and a second power pump 515. The first liquid storage tank 511 is used to store a first cooling medium. The first delivery pipeline 512 is used to connect the first liquid storage tank 511 and the cathode 20. The first power pump 513 is disposed on the first delivery pipeline 512 to drive the first cooling medium to circulate between the first liquid storage tank 511 and the cathode 20 along the first delivery pipeline 512. The second delivery pipeline 514 is used to connect the first liquid storage tank 511 and the first heat exchange mechanism 53. The second power pump 515 is disposed on the second delivery pipeline 514 to drive the first cooling medium to circulate between the first liquid storage tank 511 and the first heat exchange mechanism 53 along the second delivery pipeline 514. Understandably, when there are multiple cathodes 20, all cathodes 20 are disposed on the first conveying pipeline 512. The multiple cathodes 20 can be disposed in parallel on the first conveying pipeline 512 or in series on the first conveying pipeline 512.

[0042] As an example, the first internal circulation cooling assembly 51 also includes a first bypass pipe 516 and a third power pump 517. The first bypass pipe 516 is connected to the first delivery pipe 512, and the two ends of the first bypass pipe 516 are respectively located on opposite sides of the first power pump 513 along the flow direction of the first cooling medium. The third power pump 517 is installed on the first bypass pipe 516 so that the first power pump 513 and the third power pump 517 are connected in parallel. In this way, when the first power pump 513 fails, the third power pump 517 can be started to ensure that the first internal circulation cooling assembly 51 can continue to operate normally, thereby further improving the reliability of the glass coating equipment 100.

[0043] As an example, the first internal circulation cooling assembly 51 also includes a second bypass pipe 518 and a fourth power pump 519. The second bypass pipe 518 is connected to the second delivery pipe 514, and the two ends of the second bypass pipe 518 are respectively located on opposite sides of the second power pump 515 along the flow direction of the first cooling medium. The fourth power pump 519 is installed on the second bypass pipe 518 so that the second power pump 515 and the fourth power pump 519 are connected in parallel. In this way, when the second power pump 515 fails, the fourth power pump 519 can be started, thereby ensuring that the first internal circulation cooling assembly 51 can continue to operate normally, further improving the reliability of the glass coating equipment 100.

[0044] By adopting the above technical solution, the cooling effect on the cathode 20 can be further improved, thereby further improving the reliability of the glass coating equipment 100.

[0045] In some embodiments of this application, the first cooling medium is pure water or cooling oil.

[0046] By adopting the above technical solution, the scaling inside the first cooling device 50 can be improved, allowing the cooling medium to flow more smoothly inside the first cooling device 50, which can further improve the cooling effect on the cathode 20, thereby further improving the reliability of the glass coating equipment 100.

[0047] In some embodiments of this application, please refer to Figure 1 The first external circulation cooling assembly 52 includes a first cooling tower 521 and a first liquid storage tank 522. The first liquid storage tank 522 is used to store the second cooling medium. The first cooling tower 521 is connected to the first liquid storage tank 522 by pipeline to transport the second cooling medium from the first liquid storage tank 522 to the first cooling tower 521.

[0048] In some embodiments, the first cooling device 50 further includes a first heat exchange mechanism 53, which is used to connect the first internal circulation cooling component 51 and the first external circulation cooling component 52 for heat exchange, so that the first cooling medium and the second cooling medium can exchange heat.

[0049] As an example, the first external circulation cooling assembly 52 also includes a third delivery pipeline 523 and a fifth power pump 524. The third delivery pipeline 523 is used to connect the first cooling tower 521, the first liquid storage tank 522 and the first heat exchange mechanism 53. The fifth power pump 524 is disposed on the third delivery pipeline 523 to drive the second cooling medium to circulate along the third delivery pipeline 523 between the first cooling tower 521, the first liquid storage tank 522 and the first heat exchange mechanism 53.

[0050] As an example, the first external circulation cooling assembly 52 also includes a third bypass pipe 525 and a sixth power pump 526. The third bypass pipe 525 is connected to the third delivery pipe 523, and the two ends of the third bypass pipe 525 are respectively located on opposite sides of the fifth power pump 524 along the flow direction of the second cooling medium. The sixth power pump 526 is installed on the third bypass pipe 525 so that the fifth power pump 524 and the sixth power pump 526 are connected in parallel. In this way, when the fifth power pump 524 fails, the sixth power pump 526 can be started to ensure that the first external circulation cooling assembly 52 can continue to operate normally, thereby further improving the reliability of the glass coating equipment 100.

[0051] By adopting the above technical solution, in the event of a water outage, the first liquid storage tank 522 can continue to provide the second cooling medium to the first cooling tower 521, thereby ensuring the normal operation of the first cooling device 50 and further improving the reliability of the glass coating equipment 100.

[0052] In some embodiments of this application, please refer to Figure 1 The first cooling tower 521 is located above the first liquid storage tank 522.

[0053] In some embodiments, a first return port is provided at the bottom of the first cooling tower 521, and the second cooling medium can flow back from the first return port to the first storage tank 522 under the action of gravity, thereby effectively reducing the number of pipes and simplifying the structure of the first external circulation cooling assembly 52.

[0054] By adopting the above technical solution, the structure of the first cooling device 50 can be made more compact, thereby effectively reducing the area occupied by the glass coating equipment 100.

[0055] In some embodiments of this application, please refer to Figure 1 The second cooling device 60 includes a second internal circulation cooling component 61 and a second external circulation cooling component 62. The second internal circulation cooling component 61 is used to circulate a third cooling medium and is connected to the sputtering power supply 40 and the vacuum pump 30 for heat exchange, so as to cool the sputtering power supply 40 and the vacuum pump 30. The second external circulation cooling component 62 is used to circulate a fourth cooling medium and is connected to the second internal circulation cooling component 61 for heat exchange, so as to cool the third cooling medium.

[0056] In some embodiments, the second cooling device 60 further includes a second heat exchange mechanism 63, which is used to connect the second inner circulation cooling assembly 61 and the second outer circulation cooling assembly 62 for heat exchange, so that the third cooling medium and the fourth cooling medium can exchange heat.

[0057] As an example, the second internal circulation cooling assembly 61 includes a second liquid storage tank 611, a fourth delivery pipeline 612, a seventh power pump 613, a fifth delivery pipeline 614, and an eighth power pump 615. The second liquid storage tank 611 is used to store a third cooling medium. The fourth delivery pipeline 612 is used to connect the second liquid storage tank 611, the sputtering power supply 40, and the vacuum pump 30. The seventh power pump 613 is disposed on the fourth delivery pipeline 612 to drive the third cooling medium to circulate between the second liquid storage tank 611, the sputtering power supply 40, and the vacuum pump 30 along the fourth delivery pipeline 612. The fifth delivery pipeline 614 is used to connect the second liquid storage tank 611 and the second heat exchange mechanism 63. The eighth power pump 615 is disposed on the fifth delivery pipeline 614 to drive the third cooling medium to circulate between the second liquid storage tank 611 and the second heat exchange mechanism 63 along the fifth delivery pipeline 614. Understandably, when there are multiple sputtering power sources 40 and multiple vacuum pumps 30, both multiple sputtering power sources 40 and multiple vacuum pumps 30 are installed on the fourth delivery pipeline 612. The multiple sputtering power sources 40 can be installed in parallel on the fourth delivery pipeline 612 or in series on the fourth delivery pipeline 612. Similarly, the multiple vacuum pumps 30 can be installed in parallel on the fourth delivery pipeline 612 or in series on the fourth delivery pipeline 612.

[0058] As an example, the second internal circulation cooling assembly 61 also includes a fourth bypass pipe 616 and a ninth power pump 617. The fourth bypass pipe 616 is connected to the fourth delivery pipe 612, and the two ends of the fourth bypass pipe 616 are respectively located on opposite sides of the seventh power pump 613 along the flow direction of the third cooling medium. The ninth power pump 617 is installed on the fourth bypass pipe 616 so that the seventh power pump 613 and the ninth power pump 617 are connected in parallel. In this way, when the seventh power pump 613 fails, the ninth power pump 617 can be started to ensure that the second internal circulation cooling assembly 61 can continue to operate normally, thereby further improving the reliability of the glass coating equipment 100.

[0059] As an example, the second internal circulation cooling assembly 61 also includes a fifth bypass pipe 618 and a tenth power pump 619. The fifth bypass pipe 618 is connected to the fifth delivery pipe 614, and the two ends of the fifth bypass pipe 618 are respectively located on opposite sides of the eighth power pump 615 along the flow direction of the third cooling medium. The tenth power pump 619 is installed on the fifth bypass pipe 618 so that the eighth power pump 615 and the tenth power pump 619 are connected in parallel. In this way, when the eighth power pump 615 fails, the tenth power pump 619 can be started, thereby ensuring that the second internal circulation cooling assembly 61 can continue to operate normally, further improving the reliability of the glass coating equipment 100.

[0060] By adopting the above technical solution, the cooling effect of the sputtering power supply 40 and the vacuum pump 30 can be further improved, thereby further improving the reliability of the glass coating equipment 100.

[0061] In some embodiments of this application, the third cooling medium is pure water or cooling oil.

[0062] By adopting the above technical solution, the scaling inside the second cooling device 60 can be improved, allowing the cooling medium to flow more smoothly inside the second cooling device 60, which can further improve the cooling effect on the sputtering power supply 40 and the vacuum pump 30, thereby further improving the reliability of the glass coating equipment 100.

[0063] In some embodiments of this application, please refer to Figure 1 The second external circulation cooling assembly 62 includes a second cooling tower 621 and a second liquid storage tank 622. The second liquid storage tank 622 is used to store a fourth cooling medium. The second cooling tower 621 is connected to the second liquid storage tank 622 by pipeline to transport the fourth cooling medium from the second liquid storage tank 622 to the second cooling tower 621.

[0064] In some embodiments, the second cooling device 60 further includes a second heat exchange mechanism 63, which is used to connect the second inner circulation cooling assembly 61 and the second outer circulation cooling assembly 62 for heat exchange, so that the third cooling medium and the fourth cooling medium can exchange heat.

[0065] As an example, the second external circulation cooling assembly 62 also includes a sixth delivery pipeline 623 and an eleventh power pump 624. The sixth delivery pipeline 623 is used to connect the second cooling tower 621, the second liquid storage tank 622 and the second heat exchange mechanism 63. The eleventh power pump 624 is disposed on the sixth delivery pipeline 623 to drive the fourth cooling medium to circulate along the sixth delivery pipeline 623 between the second cooling tower 621, the second liquid storage tank 622 and the second heat exchange mechanism 63.

[0066] As an example, the second external circulation cooling assembly 62 also includes a sixth bypass pipe 625 and a twelfth power pump 626. The sixth bypass pipe 625 is connected to the sixth delivery pipe 623, and the two ends of the sixth bypass pipe 625 are respectively located on opposite sides of the eleventh power pump 624 along the flow direction of the fourth cooling medium. The twelfth power pump 626 is installed on the sixth bypass pipe 625 so that the eleventh power pump 624 and the twelfth power pump 626 are connected in parallel. In this way, when the eleventh power pump 624 fails, the twelfth power pump 626 can be started to ensure that the second external circulation cooling assembly 62 can continue to operate normally, thereby further improving the reliability of the glass coating equipment 100.

[0067] By adopting the above technical solution, in the event of a water outage, the second liquid storage tank 622 can continue to provide the fourth cooling medium to the second cooling tower 621, thereby ensuring the normal operation of the second cooling device 60 and further improving the reliability of the glass coating equipment 100.

[0068] In some embodiments of this application, please refer to Figure 1 The second cooling tower 621 is located above the second liquid storage tank 622.

[0069] In some embodiments, a second return port is provided at the bottom of the second cooling tower 621, and the fourth cooling medium can flow back from the second return port to the second storage tank 622 under the action of gravity, thereby effectively reducing the number of pipe fittings and simplifying the structure of the second external circulation cooling assembly 62.

[0070] By adopting the above technical solution, the structure of the second cooling device 60 can be made more compact, thereby effectively reducing the area occupied by the glass coating equipment 100.

[0071] Secondly, embodiments of this application provide a glass production system, including the glass coating equipment 100 described in any of the above embodiments.

[0072] The glass production system provided in this application embodiment effectively improves the reliability of the glass production system by employing the glass coating equipment 100 described in any of the above embodiments.

[0073] The above description is merely a preferred embodiment of this application and is not intended to limit this application. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A glass coating equipment, characterized in that, The glass coating equipment includes: The cavity has a coated chamber; The cathode is housed within the coating chamber and serves to support the target material. A vacuum pump is used to extract air from the coating chamber to create a vacuum environment in the coating chamber. A sputtering power supply is electrically connected to the cathode; A first cooling device is connected to the cathode for heat exchange to cool the cathode; The second cooling device is connected to the sputtering power supply and the vacuum pump for cooling the sputtering power supply and the vacuum pump.

2. The glass coating equipment according to claim 1, characterized in that: The first cooling device includes a first internal circulation cooling component and a first external circulation cooling component. The first internal circulation cooling component is used to circulate a first cooling medium and is heat-exchange connected to the cathode to cool the cathode. The first external circulation cooling component is used to circulate a second cooling medium and is heat-exchange connected to the first internal circulation cooling component to cool the first cooling medium.

3. The glass coating equipment according to claim 2, characterized in that: The first cooling medium is pure water or cooling oil.

4. The glass coating equipment according to claim 2, characterized in that: The first external circulation cooling assembly includes a first cooling tower and a first liquid storage tank. The first liquid storage tank is used to store the second cooling medium. The first cooling tower is connected to the first liquid storage tank by a pipeline to transport the second cooling medium from the first liquid storage tank to the first cooling tower.

5. The glass coating equipment according to claim 4, characterized in that: The first cooling tower is positioned above the first liquid storage tank.

6. The glass coating equipment according to any one of claims 1-5, characterized in that: The second cooling device includes a second internal circulation cooling component and a second external circulation cooling component. The second internal circulation cooling component is used to circulate a third cooling medium and is heat-exchange connected to the sputtering power supply and the vacuum pump to cool the sputtering power supply and the vacuum pump. The second external circulation cooling component is used to circulate a fourth cooling medium and is heat-exchange connected to the second internal circulation cooling component to cool the third cooling medium.

7. The glass coating equipment according to claim 6, characterized in that: The third cooling medium is pure water or cooling oil.

8. The glass coating equipment according to claim 6, characterized in that: The second external circulation cooling assembly includes a second cooling tower and a second liquid storage tank. The second liquid storage tank is used to store the fourth cooling medium. The second cooling tower is connected to the second liquid storage tank by a pipeline to transport the fourth cooling medium from the second liquid storage tank to the second cooling tower.

9. The glass coating equipment according to claim 8, characterized in that: The second cooling tower is positioned above the second liquid storage tank.

10. A glass production system, characterized in that: The glass production system includes the glass coating equipment as described in any one of claims 1-9.

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