Drying equipment

Abstract

The utility model relates to drying equipment. The drying equipment comprises a drying groove, a first air conveying assembly, a filtering assembly and an air outlet assembly. The drying groove is provided with an air inlet and an air outlet. The first gas conveying assembly comprises a gas conveying main path and a gas conveying branch path, the first end of the gas conveying branch path communicates with the first end of the gas conveying main path, the second end of the gas conveying branch path communicates with the drying groove through the gas inlet, and the second end of the gas conveying main path communicates with the external environment. The filtering assembly comprises a first filter and a second filter, and the first filter and the second filter are both arranged on the gas conveying main path. The air outlet assembly comprises an air outlet main path and an air outlet branch path, the first end of the air outlet main path communicates with the air conveying main path, the communicating position is located on the downstream of the first filter and the second filter, the second end of the air outlet main path communicates with the first end of the air outlet branch path, and the second end of the air outlet branch path communicates with the drying groove through an air outlet. According to the technical scheme, the problem that in the prior art, the clean fresh air conveying rate is low, and consequently the drying efficiency is low is effectively solved.

Description

Technical Field

[0001] This application relates to the technical field of photovoltaic equipment, and more specifically, to a drying device. Background Technology

[0002] In the semiconductor and photovoltaic industries, silicon is a key material for manufacturing solar cells and semiconductor devices due to its superior electronic properties and abundant resources. Drying tanks are commonly used equipment for drying silicon wafers, and the air quality within the drying tank is crucial to the drying effect. However, due to insufficient cleanliness in the factory and limitations of wet chemical cleaning processes, fine solid particles and harmful chemical gases, such as HCl and KOH, may be present inside or near the equipment. If these particles and harmful gases diffuse into the drying tank, they will adhere to the surface of the silicon wafers, causing surface contamination and reducing the conversion efficiency of the solar cells. Furthermore, harmful chemical gases may react chemically with the silicon wafers, reducing the carrier lifetime of the cells or causing oxidation on the silicon wafer surface, forming an oxide layer, which will also seriously affect the conversion efficiency of the cells.

[0003] Some existing devices (e.g., patent number CN 222418440U, titled "A Drying Device") include a drying tank, an air supply mechanism, and an air outlet mechanism. The drying tank includes a tank body with a working chamber formed within it. The tank body includes a bottom plate located at the bottom of the working chamber, with an air inlet and an air outlet provided in the bottom plate. The air supply mechanism includes an air supply duct, a filter assembly, and a fan. The air supply duct is connected to the working chamber through the air inlet. The air outlet mechanism includes an air outlet duct, which is connected to the working chamber through the air outlet. This device filters external air and delivers clean fresh air to the working chamber, effectively improving the air cleanliness within the drying tank and preventing contamination of the test specimens in the drying tank. However, to improve the drying effect, it is necessary to ensure the flow of gas within the working chamber. Therefore, as clean fresh air is continuously supplied, the gas in the working chamber needs to be continuously discharged through the air outlet duct. However, since the external air needs to be filtered before input, the gas flow rate is affected, thus the drying efficiency needs to be improved. Utility Model Content

[0004] This application provides a drying device to solve the problem of low drying efficiency caused by low clean fresh air delivery rate in the prior art.

[0005] A drying device according to this application includes: a drying tank, a first air supply assembly, a filter assembly, and an air outlet assembly. The drying tank has an air inlet and an air outlet. The first air supply assembly includes a main air supply path and a branch air supply path. The first end of the branch air supply path is connected to the first end of the main air supply path, and the second end of the branch air supply path is connected to the drying tank through the air inlet. The second end of the main air supply path is connected to the external environment. The filter assembly includes a first filter and a second filter, both of which are disposed on the main air supply path. The air outlet assembly includes a main air outlet path and a branch air outlet path. The first end of the main air outlet path is connected to the main air supply path, and the connection point is located downstream of the first and second filters. The second end of the main air outlet path is connected to the first end of the branch air outlet path, and the second end of the branch air outlet path is connected to the drying tank through the air outlet.

[0006] In some embodiments, the filtering assembly further includes a third filter disposed on the main gas supply line, with the first and second filters disposed near the second end of the main gas supply line and the third filter disposed near the first end of the main gas supply line.

[0007] In some embodiments, the connection point between the main outlet gas line and the main supply gas line is located between the second filter and the third filter.

[0008] In some embodiments, the first gas delivery assembly further includes a circulating fan and a heater, both of which are disposed on the main gas delivery line and are located between the main outlet gas line and the main gas delivery line and the third filter.

[0009] In some embodiments, the first gas delivery assembly further includes a first valve, which is disposed on the main gas delivery line and located between the second filter and the main gas outlet line and the main gas delivery line.

[0010] In some embodiments, the drying equipment further includes a second gas supply assembly, which includes a first gas supply pipeline and a second gas supply pipeline. The two ends of the first gas supply pipeline are respectively connected to a nitrogen source and a main gas supply line, and the connection point between the first gas supply pipeline and the main gas supply line is located between the first valve and the circulating fan. The two ends of the second gas supply pipeline are respectively connected to a nitrogen source and a main gas supply line, and the connection point between the second gas supply pipeline and the main gas supply line is located between the heater and the third filter.

[0011] In some embodiments, the second gas delivery assembly further includes a second valve and a third valve, wherein the second valve is disposed on the first gas delivery line and the third valve is disposed on the second gas delivery line.

[0012] In some embodiments, the air outlet assembly further includes a fourth valve disposed on the main air outlet line.

[0013] In some embodiments, the drying equipment further includes an exhaust assembly, which includes an exhaust pipe, and the drying tank also has an exhaust port. A first end of the exhaust pipe is connected to the exhaust port, and a second end of the exhaust pipe is connected to the external environment.

[0014] In some embodiments, the exhaust assembly further includes a fifth valve disposed on the exhaust pipe.

[0015] The drying equipment using the technical solution of this application includes: a drying tank, a first air supply assembly, a filter assembly, and an air outlet assembly. The drying tank has an air inlet and an air outlet. The first air supply assembly includes a main air supply path and a branch air supply path. The first end of the branch air supply path is connected to the first end of the main air supply path, and the second end of the branch air supply path is connected to the drying tank through the air inlet. The second end of the main air supply path is connected to the external environment. The filter assembly includes a first filter and a second filter, both of which are installed on the main air supply path. External air, after being filtered by the filter assembly, flows sequentially through the main air supply path and the branch air supply path into the drying tank, achieving the delivery of clean fresh air. The air outlet assembly includes a main air outlet path and a branch air outlet path. The first end of the main air outlet path is connected to the main air supply path, and this connection point is downstream of the first and second filters. The second end of the main air outlet path is connected to the first end of the branch air outlet path. The second end of the branch air outlet path is connected to the drying tank via an air outlet. The gas in the drying tank (the gas input from the first air supply assembly) sequentially passes through the branch air outlet path and the main air outlet path before returning to the main air supply path. This configuration allows for the cyclical delivery of filtered gas, reducing unnecessary repeated filtration by the first and second filters and significantly improving the clean air delivery rate and drying efficiency. The technical solution of this application effectively solves the problem of low clean air delivery rate leading to low drying efficiency in the prior art. Attached Figure Description

[0016] The accompanying drawings, which are incorporated in and form part of this specification, illustrate embodiments consistent with this application and, together with the description, serve to explain the principles of this application.

[0017] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, for those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 A schematic diagram of the structure of a drying device according to an embodiment of this application is shown.

[0019] The above figures include the following reference numerals:

[0020] 10. Drying tank; 20. First air supply assembly; 21. Main air supply line; 22. Branch air supply line; 23. Circulating fan; 24. Heater; 25. First valve; 30. Filter assembly; 31. First filter; 32. Second filter; 33. Third filter; 40. Air outlet assembly; 41. Main air outlet line; 42. Branch air outlet line; 43. Fourth valve; 50. Second air supply assembly; 51. First air supply line; 52. Second air supply line; 53. Second valve; 54. Third valve; 60. Exhaust assembly; 61. Exhaust line; 62. Fifth valve; 63. Exhaust fan. Detailed Implementation

[0021] It should be noted that, unless otherwise specified, the embodiments and features described in this application can be combined with each other. This application will now be described in detail with reference to the accompanying drawings and embodiments.

[0022] It should be noted that the following detailed descriptions are illustrative and intended to provide further explanation of this application. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains.

[0023] For ease of description, spatial relative terms such as "above," "on top of," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "on top of" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways, rotated 90 degrees, or in other orientations, and the spatial relative descriptions used herein will be interpreted accordingly.

[0024] like Figure 1As shown, the embodiment relates to a drying device, including: a drying tank 10, a first air supply assembly 20, a filter assembly 30, and an air outlet assembly 40. The drying tank 10 has an air inlet and an air outlet. The first air supply assembly 20 includes a main air supply path 21 and a branch air supply path 22. The first end of the branch air supply path 22 is connected to the first end of the main air supply path 21, and the second end of the branch air supply path 22 is connected to the drying tank 10 through the air inlet. The second end of the main air supply path 21 is connected to the external environment. The filter assembly 30 includes a first filter 31 and a second filter 32, both of which are disposed on the main air supply path 21. The air outlet assembly 40 includes an air outlet main line 41 and an air outlet branch line 42. The first end of the air outlet main line 41 is connected to the air supply main line 21, and the connection position is located downstream of the first filter 31 and the second filter 32. The second end of the air outlet main line 41 is connected to the first end of the air outlet branch line 42. The second end of the air outlet branch line 42 is connected to the drying tank 10 through an air outlet.

[0025] External gas, after being filtered by the filter assembly 30, flows sequentially through the main gas supply path 21 and the branch gas supply path 22 into the drying tank 10, thus delivering clean fresh air. The gas in the drying tank 10 (the gas input from the first gas supply assembly 20) sequentially passes through the outlet branch gas supply path 42 and the outlet main gas supply path 41 before returning to the main gas supply path 21. This arrangement allows for the cyclic delivery of filtered gas, reducing unnecessary repeated filtration by the first filter 31 and the second filter 32, and significantly improving the delivery rate of clean fresh air and the drying efficiency. The technical solution of this embodiment effectively solves the problem of low clean fresh air delivery rate and low drying efficiency in the prior art.

[0026] It should be noted that both the air inlet and outlet are located at the bottom of the drying tank 10. There are multiple sets of air inlets and multiple sets of air delivery branches 22, each corresponding to a specific set of air inlets. The air delivery branches 22 extend into the drying tank 10 along the air inlets. Similarly, there are multiple sets of air outlets and multiple sets of air outlet branches 42, each corresponding to a specific set of air outlets. The air outlet branches 42 extend into the drying tank 10 along the air outlets. This arrangement accelerates the drying process.

[0027] It should also be noted that, such as Figure 1 As shown, two sets of air outlet branches 42 and two sets of air supply branches 22 are set up. The two sets of air outlet branches 42 are located on both sides of the two sets of air supply branches 22. On the vertical projection inside the drying tank 10, the height of the air supply branch 22 is higher than the height of the air outlet branch 42. This setting can make clean fresh air circulate in the drying tank 10, thereby improving the drying effect.

[0028] like Figure 1As shown, in some embodiments, the filter assembly 30 further includes a third filter 33, which is disposed on the main gas supply line 21. The first filter 31 and the second filter 32 are disposed near the second end of the main gas supply line 21, and the third filter 33 is disposed near the first end of the main gas supply line 21. This arrangement allows the first filter 31 and the second filter 32 to filter the gas entering the main gas supply line 21 from the external environment, while the gas entering the main gas supply line 21 from the drying tank 10 is no longer filtered by the first filter 31 and the second filter 32. To ensure the quality of gas circulation, the third filter 33 is added, which can both filter the gas and reduce the impact on the gas flow rate. The first filter 31 is a chemical filter that can filter the gas entering the main gas supply line 21 to prevent chemical gases (mainly ozone) from contaminating the drying tank 10. The second filter 32 and the third filter 33 are both high-efficiency filters that can prevent the gas supplied to the drying tank 10 from containing solid particles.

[0029] like Figure 1 As shown, in some embodiments, the gas in the drying tank 10 is not directly discharged to the external environment, but is recycled and flows back to the main gas supply line 21 through the gas outlet branch 42 and the main gas outlet line 41. The connection point between the main gas outlet line 41 and the main gas supply line 21 is located between the second filter 32 and the third filter 33. The gas is only filtered through the third filter 33 to remove impurities mixed into the gas during long-term circulation.

[0030] like Figure 1 As shown, in some embodiments, the first gas delivery assembly 20 further includes a circulating fan 23 and a heater 24. Both the circulating fan 23 and the heater 24 are disposed on the main gas delivery path 21, located between the main outlet path 41 and the main gas delivery path 21, and the third filter 33. The circulating fan 23 can accelerate the flow rate of gas in the main gas delivery path 21. The heater 24 can heat the gas in the main gas delivery path 21, resulting in better drying efficiency.

[0031] like Figure 1 As shown, in some embodiments, the first gas delivery assembly 20 further includes a first valve 25, which is disposed on the main gas delivery line 21 and located between the second filter 32 and the main gas outlet line 41 and the main gas delivery line 21. The first valve 25 can control the gas in the external environment to enter the main gas delivery line 21.

[0032] like Figure 1As shown, in some embodiments, the drying equipment further includes a second gas supply assembly 50, which includes a first gas supply pipe 51 and a second gas supply pipe 52. The two ends of the first gas supply pipe 51 are connected to a nitrogen source and a main gas supply line 21, respectively. The connection point between the first gas supply pipe 51 and the main gas supply line 21 is located between the first valve 25 and the circulating fan 23. Nitrogen supplied through the first gas supply pipe 51 is heated by the heater 24 and filtered by the third filter 33 before being delivered to the drying tank 10 under the action of the circulating fan 23. The two ends of the second gas supply pipe 52 are connected to a nitrogen source and the main gas supply line 21, respectively. The connection point between the second gas supply pipe 52 and the main gas supply line 21 is located between the heater 24 and the third filter 33. Nitrogen supplied through the second gas supply pipe is delivered to the drying tank 10 only after passing through the third filter 33. Safety can be improved by setting up two nitrogen delivery loops. The nitrogen delivered through the second gas delivery pipeline can serve as an alternative gas delivery pipeline. At the same time, the modular combination can flexibly adapt to different drying process requirements and flexibly adjust the gas delivery volume.

[0033] like Figure 1 As shown, in some embodiments, the second gas delivery assembly 50 further includes a second valve 53 and a third valve 54. The second valve 53 is disposed on the first gas delivery pipeline 51 and can control the delivery of gas in the first gas delivery pipeline 51. The third valve 54 is disposed on the second gas delivery pipeline 52 and can control the delivery of gas in the second gas delivery pipeline 52.

[0034] like Figure 1 As shown, in some embodiments, the gas outlet assembly 40 further includes a fourth valve 43, which is disposed on the main gas outlet path 41. The fourth valve 43 can control the delivery of gas within the main gas outlet path 41. It should be noted that the fourth valve 43 is a one-way valve.

[0035] like Figure 1 As shown, in some embodiments, the drying equipment further includes an exhaust assembly 60, which includes an exhaust pipe 61. The drying tank 10 also has an exhaust port. A first end of the exhaust pipe 61 is connected to the exhaust port, and a second end of the exhaust pipe 61 is connected to the external environment. The exhaust pipe 61 is used to maintain the air pressure balance inside the drying tank 10. It should be noted that the exhaust port is located on the side wall of the drying tank 10 near the bottom.

[0036] like Figure 1 As shown, in some embodiments, the exhaust assembly 60 further includes a fifth valve 62, which is disposed on the exhaust pipe 61. The fifth valve 62 is used to control the delivery of gas within the exhaust pipe 61.

[0037] It should be noted that the second end of the exhaust pipe 61 is connected to the external environment through the exhaust fan 63, which is used to extract the gas in the drying tank 10.

[0038] In this embodiment, the clean fresh air in the drying tank 10 has at least three delivery paths:

[0039] First: First valve 25 is opened, fourth valve 43 is closed, and fifth valve 62 is opened. The gas in the external environment is filtered by first filter 31 and second filter 32, heated by heater 24 under the action of circulating fan 23, and then filtered by third filter 33 before being delivered to drying tank 10. The gas pressure balance in drying tank 10 is maintained through exhaust pipe 61.

[0040] Second: When the first valve 25 is closed and the fourth valve 43 is opened, the gas in the drying tank 10 flows into the main gas supply line 21 through the gas outlet branch line 42 and the main gas outlet line 41. Under the action of the circulating fan 23, it is heated by the heater 24 and filtered by the third filter 33 before being transported to the drying tank 10 to achieve circulation.

[0041] Third: First valve 25 is closed, fourth valve 43 is closed, second valve 53 is open, and fifth valve 62 is open. Nitrogen gas, under the action of circulating fan 23, is heated by heater 24 and filtered by third filter 33 before being delivered to drying tank 10. The gas pressure balance in drying tank 10 is maintained through exhaust pipe 61. Third valve 54 can be flexibly adjusted to open and close according to drying process requirements. Nitrogen gas in second gas supply pipe 52 is delivered to drying tank 10 through third filter 33.

[0042] It should be noted that, depending on the different drying processes, the three conveying paths can be used individually to convey clean fresh air, or they can be combined to improve flexibility and adaptability.

[0043] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0044] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of this application described herein can be implemented, for example, in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.

[0045] The above are merely preferred embodiments of this application and are not intended to limit this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the protection scope of this application.

Claims

1. A drying device, characterized in that, include: A drying tank (10) having an air inlet and an air outlet; The first gas delivery assembly (20) includes a main gas delivery line (21) and a branch gas delivery line (22). The first end of the branch gas delivery line (22) is connected to the first end of the main gas delivery line (21), and the second end of the branch gas delivery line (22) is connected to the drying tank (10) through the air inlet. The second end of the main gas delivery line (21) is connected to the external environment. The filter assembly (30) includes a first filter (31) and a second filter (32), both of which are disposed on the main gas supply line (21). An air outlet assembly (40) includes an air outlet main line (41) and an air outlet branch line (42). The first end of the air outlet main line (41) is connected to the air supply main line (21), and the connection position is located downstream of the first filter (31) and the second filter (32). The second end of the air outlet main line (41) is connected to the first end of the air outlet branch line (42). The second end of the air outlet branch line (42) is connected to the drying tank (10) through the air outlet.

2. The drying equipment according to claim 1, characterized in that, The filter assembly (30) further includes a third filter (33), which is disposed on the main gas supply line (21). The first filter (31) and the second filter (32) are disposed near the second end of the main gas supply line (21), and the third filter (33) is disposed near the first end of the main gas supply line (21).

3. The drying equipment according to claim 2, characterized in that, The connection point between the main outlet gas line (41) and the main supply gas line (21) is located between the second filter (32) and the third filter (33).

4. The drying equipment according to claim 3, characterized in that, The first gas delivery assembly (20) further includes a circulating fan (23) and a heater (24), both of which are located on the main gas delivery line (21). The circulating fan (23) and the heater (24) are located between the main outlet line (41) and the main gas delivery line (21) and the third filter (33).

5. The drying equipment according to claim 4, characterized in that, The first gas delivery assembly (20) further includes a first valve (25), which is disposed on the main gas delivery line (21) and is located between the second filter (32) and the main gas outlet line (41) and the main gas delivery line (21).

6. The drying equipment according to claim 5, characterized in that, The drying equipment further includes a second gas supply assembly (50), which includes a first gas supply pipeline (51) and a second gas supply pipeline (52). The two ends of the first gas supply pipeline (51) are respectively connected to a nitrogen source and the main gas supply line (21), and the connection position between the first gas supply pipeline (51) and the main gas supply line (21) is located between the first valve (25) and the circulating fan (23). The two ends of the second gas supply pipeline (52) are respectively connected to the nitrogen source and the main gas supply line (21), and the connection position between the second gas supply pipeline (52) and the main gas supply line (21) is located between the heater (24) and the third filter (33).

7. The drying equipment according to claim 6, characterized in that, The second gas delivery assembly (50) further includes a second valve (53) and a third valve (54), the second valve (53) being disposed on the first gas delivery line (51) and the third valve (54) being disposed on the second gas delivery line (52).

8. The drying equipment according to claim 1, characterized in that, The air outlet assembly (40) also includes a fourth valve (43), which is disposed on the main air outlet (41).

9. The drying equipment according to any one of claims 1 to 8, characterized in that, The drying equipment also includes an exhaust assembly (60), which includes an exhaust pipe (61). The drying tank (10) also has an exhaust port. The first end of the exhaust pipe (61) is connected to the exhaust port, and the second end of the exhaust pipe (61) is connected to the external environment.

10. The drying equipment according to claim 9, characterized in that, The exhaust assembly (60) also includes a fifth valve (62), which is disposed on the exhaust pipe (61).

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