Tray for spin coater for micro-nano processing

Abstract

The utility model relates to the technical field of micro-nano machining, and discloses a spin coater tray for micro-nano machining, which comprises a tray body, a rotating shaft is coaxially arranged at the bottom of a base, a vacuum cavity is arranged in the tray body, an air passage communicated to the vacuum cavity is arranged in the rotating shaft, a plurality of circular grooves are arranged on the surface of the tray body, and the circular grooves are communicated with the vacuum cavity. A covering plate is arranged in each circular groove, a connecting column is coaxially arranged at the bottom of each covering plate, the connecting columns are rotatably arranged at the bottoms of the circular grooves, fixed air holes are formed in the bottoms of the circular grooves in the side faces of the connecting columns, the fixed air holes are communicated with the vacuum cavity, and movable air holes corresponding to the fixed air holes are formed in the covering plates. The multiple fixed air holes in the surface of the disc body can be independently arranged to be in the open or closed state, multi-point adsorption can be achieved, the number of the opened fixed air holes can be adjusted according to the shapes and sizes of different workpieces, and the applicability of the device is improved.

Description

Technical Field

[0001] This utility model relates to the field of micro-nano fabrication technology, specifically a tray for a spin coater used in micro-nano fabrication. Background Technology

[0002] In the micro-nano fabrication process, a spin coater is required when coating the surface of the workpiece. The working principle of the spin coater is to adsorb the workpiece on the tray, drop different adhesives onto the surface of the workpiece, and use centrifugal force to evenly coat the workpiece with the adhesives through high-speed rotation.

[0003] According to Chinese Patent Publication No. CN218691192U, "A Tray for a Spreading Machine for Micro-Nano Processing," this invention relates to the technical field of tray equipment for spreading machines. The tray includes a main body with a rotating shaft rotatably mounted on its inner bottom via bearings. A vacuum suction block is located at the upper end of the rotating shaft, and suction holes are formed on the surface of the vacuum suction block. A vacuum chamber is located at the bottom of the vacuum suction block, and the upper end of the rotating shaft is fixedly connected to the bottom of the vacuum chamber. An air passage is formed inside the rotating shaft, and the upper end of the air passage is connected to the vacuum chamber. This device fixes the processed parts through multi-point suction by forming multiple sets of suction holes on the vacuum suction block, which are connected to the vacuum chamber. This ensures the fixation of the processed parts while avoiding damage caused by single-point force on the parts. Furthermore, the multiple suction holes distribute the suction force of the vacuum chamber, preventing the problem of excessive suction force at a single point from drawing in glue and causing blockage.

[0004] The device has multiple air holes on the tray to achieve multi-point adsorption, but all the air holes are open, so the number of open air holes cannot be adjusted according to the shape and size of different workpieces, resulting in poor applicability. Utility Model Content

[0005] To address the shortcomings of existing technologies, the purpose of this invention is to provide a tray for a spin coater used in micro-nano processing. The multiple fixed air holes on the surface of the tray can be individually set to open or closed states, enabling multi-point adsorption and allowing the number of open fixed air holes to be adjusted according to the shape and size of different workpieces, thereby improving the applicability of the device.

[0006] To solve the above-mentioned technical problems, this utility model provides the following technical solution:

[0007] A tray for a spin coater used in micro / nano fabrication includes a tray body, a rotating shaft coaxially disposed at the bottom of the base, a vacuum chamber disposed inside the tray body, an air passage communicating with the vacuum chamber disposed inside the rotating shaft, a plurality of circular grooves disposed on the surface of the tray body, a cover plate disposed in each circular groove, a connecting post coaxially disposed at the bottom of the cover plate, the connecting post being rotatably disposed at the bottom of the circular groove, a fixing air hole disposed at the bottom of the circular groove on the side of the connecting post, the fixing air hole communicating with the vacuum chamber, and a movable air hole disposed on the cover plate corresponding to the fixing air hole.

[0008] Preferably, the cover plate is provided with a plurality of movable air holes arranged in a circular array, the plurality of movable air holes being of different sizes, and a cover plate is provided between the plurality of movable air holes to completely cover the fixed air holes.

[0009] Preferably, the cover plate is provided with a cross groove.

[0010] Preferably, a number of small air holes are provided at the center of the upper surface of the disc.

[0011] Preferably, an arc-shaped vent is provided on the outer side of the small vent.

[0012] Compared with the prior art, the beneficial effects achieved by this utility model are:

[0013] Multiple fixed air holes adsorb the workpiece. The fixed air holes are sealed by covering them with a cover plate. By rotating the cover plate, the movable air holes on the cover plate are aligned with the fixed air holes, and the fixed air holes are opened. The multiple fixed air holes on the surface of the disc can be individually set to open or closed, which can not only realize multi-point adsorption, but also adjust the number of open fixed air holes according to the shape and size of different workpieces, thus improving the applicability of the device. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0015] Figure 2 This is a partial structural diagram of the disk body of this utility model;

[0016] Figure 3 This is a schematic diagram of the structure of the cover plate of this utility model;

[0017] Figure 4 This is a schematic diagram of the surface structure of the disc body of this utility model.

[0018] The components are: 1. disc body; 2. rotating shaft; 3. vacuum chamber; 4. air passage; 5. circular groove; 6. cover plate; 7. connecting column; 8. fixed air hole; 9. movable air hole; 10. cross groove; 11. small air hole; 12. arc-shaped air hole. Detailed Implementation

[0019] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0020] This utility model provides the following technical solution:

[0021] Combination Figure 1 and Figure 2 As shown in the figure, this embodiment discloses a tray for a spin coater used in micro-nano processing, including a tray body 1. A rotating shaft 2 is coaxially arranged at the bottom of the base 1. A vacuum chamber 3 is arranged inside the tray body 1. An air channel 4 communicating with the vacuum chamber 3 is arranged inside the rotating shaft 2. A plurality of circular grooves 5 are arranged on the surface of the tray body 1. A cover plate 6 is arranged in each circular groove 5. A connecting post 7 is coaxially arranged at the bottom of the cover plate 6. The connecting post 7 is rotatably arranged at the bottom of the circular groove 5. A fixing air hole 8 is arranged at the bottom of the circular groove 5 on the side of the connecting post 7. The fixing air hole 8 communicates with the vacuum chamber 3. A movable air hole 9 is arranged on the cover plate 6 corresponding to the fixing air hole 8.

[0022] The rotating shaft 2, driven by the motor inside the spin coater, rotates the disc 1. The vacuum chamber 3 and the vacuum equipment are connected through the air passage 4, creating a vacuum in the vacuum chamber 3. The vacuum chamber 3 and the surface of the disc 1 are connected by fixed air holes 8. Multiple fixed air holes 8 adsorb the workpiece. The fixed air holes 8 are covered by a cover plate 6, which closes the fixed air holes 8. By rotating the cover plate 6, the cover plate 6 rotates in the circular groove 5 through the connecting column 7. The movable air holes 9 on the cover plate 6 are rotated until they are aligned with the fixed air holes 8, thus opening the fixed air holes 8. The multiple fixed air holes 9 on the surface of the disc 1 can be individually set to open or closed, which can achieve multi-point adsorption and adjust the number of open fixed air holes 8 according to the shape and size of different workpieces, thus improving the applicability of the device.

[0023] Specifically, in combination Figure 3 As shown, the cover plate 6 is provided with a plurality of movable air holes 9 arranged in a ring array. The plurality of movable air holes 9 are of different sizes, and a cover plate is provided between the plurality of movable air holes 9 to completely cover the fixed air holes 8.

[0024] By covering the fixed air hole 8 with the cover plate between the movable air holes 9, the fixed air hole 8 is sealed. By rotating the cover plate 6, the movable air holes 9 of different sizes can be rotated to align with the fixed air hole 8, thereby changing the adsorption force of a single air hole.

[0025] Specifically, in combination Figure 3 As shown, the cover plate 6 is provided with a cross groove 10.

[0026] The cross groove 10 facilitates the rotation of the cover plate 6.

[0027] Specifically, in combination Figure 4 As shown, a number of small air holes 11 are provided at the center of the upper surface of the disc body 1.

[0028] Specifically, in combination Figure 4 As shown, an arc-shaped air hole 12 is provided on the outer side of the small air hole 11.

[0029] The small air holes 11 and arc-shaped air holes 12 set at the center of the disk body 1 meet the adsorption needs of most workpieces.

[0030] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations may be made to these embodiments without departing from the principles and spirit, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A tray for a spin coater used in micro / nano fabrication, comprising a tray body (1), characterized in that: The base (1) has a rotating shaft (2) coaxially arranged at the bottom. The disk (1) has a vacuum chamber (3) inside. The rotating shaft (2) has an air passage (4) connected to the vacuum chamber (3) inside. The disk (1) has several circular grooves (5) on its surface. Each circular groove (5) has a cover plate (6) in it. The bottom of the cover plate (6) has a connecting column (7) coaxially arranged. The connecting column (7) is rotatably arranged at the bottom of the circular groove (5). The bottom of the circular groove (5) on the side of the connecting column (7) has a fixed air hole (8) connected to the vacuum chamber (3). The cover plate (6) has a movable air hole (9) corresponding to the fixed air hole (8).

2. The tray for a spin coater used in micro / nano fabrication according to claim 1, characterized in that: The cover plate (6) is provided with a plurality of movable air holes (9) arranged in a ring array. The plurality of movable air holes (9) are of different sizes, and a cover plate is provided between the plurality of movable air holes (9) to completely cover the fixed air hole (8).

3. A coating tray for micro / nano fabrication as described in claim 2, characterized in that: The cover plate (6) is provided with a cross groove (10).

4. A coating tray for micro / nano fabrication according to claim 1, characterized in that: Several small air holes (11) are provided at the center of the upper surface of the disc (1).

5. A coating tray for micro / nano fabrication according to claim 4, characterized in that: An arc-shaped vent (12) is provided on the outer side of the small vent (11).

Images