Probe card carrying mechanism

Abstract

The utility model relates to a probe card carrying mechanism which comprises a support, a clamping and releasing device is movably arranged on the support, and a movable driving device is arranged between the support and the clamping and releasing device. The movable driving device comprises a linkage table and is vertically arranged above the support in a lifting mode, and a vertical driving piece is arranged between the linkage table and the support; one end of the first surface plate is rotationally arranged on the top end face of the linkage table, and a first driving part is arranged between the linkage table and the first surface plate; one end of the second surface plate is rotationally arranged on the bottom end face of the other end of the first surface plate, and a second driving part is arranged between the first surface plate and the second surface plate; the probe card can be rapidly, stably and accurately carried in a limited space without multiple times of avoiding in the process of carrying the probe card, and use is facilitated.

Description

Technical Field

[0001] This utility model relates to the field of probe card handling mechanisms, specifically to a probe card handling mechanism. Background Technology

[0002] Probe cards are key tools in semiconductor testing, mainly used in the wafer testing process, serving as the interface between the tester and the chips on the wafer.

[0003] Wafer testing needs to be performed inside the chassis. The probe cards are moved from the loading platform inside the chassis to the placement platform located above the loading platform inside the chassis by the probe card handling mechanism.

[0004] While existing probe card handling mechanisms can move probe cards from the loading platform inside the chassis to the placement platform located above the loading platform inside the chassis, they require multiple maneuvers during the probe card handling process. They cannot handle probe cards quickly, smoothly, and accurately within a limited space, which is not conducive to their use.

[0005] The purpose of this invention is to design a probe card handling mechanism to address the problems existing in the prior art. Utility Model Content

[0006] In view of the problems existing in the prior art, the present invention provides a probe card handling mechanism that can effectively solve at least one of the problems existing in the prior art.

[0007] The technical solution of this utility model is:

[0008] A probe card handling mechanism, comprising:

[0009] A support frame, on which a clamping and releasing device is movably mounted, and a movable driving device is provided between the support frame and the clamping and releasing device;

[0010] The active drive device is used to drive the clamping and releasing device to move quickly, smoothly and accurately to the loading platform inside the chassis so that the clamping and releasing device can clamp the probe card on the loading platform. After the clamping and releasing device clamps the probe card on the loading platform, the active drive device is used to drive the clamping and releasing device to move quickly, smoothly and accurately to the placement platform located on the side above the loading platform inside the chassis so that the clamping and releasing device can release the probe card on the placement platform.

[0011] The movable driving device includes a linkage platform, which is vertically and vertically mounted above the support, and a vertical driving member is disposed between the linkage platform and the support; a first flat plate, one end of which is rotatably mounted on the top surface of the linkage platform, and a first driving member is disposed between the linkage platform and the first flat plate; a second flat plate, one end of which is rotatably mounted on the bottom surface of the other end of the first flat plate, and a second driving member is disposed between the first flat plate and the second flat plate; a third flat plate, one end of which is rotatably mounted on the bottom surface of the other end of the second flat plate, and a third driving member is disposed between the second flat plate and the third flat plate; and a fourth flat plate, one end of which is rotatably mounted on the bottom surface of the other end of the third flat plate, and a fourth driving member is disposed between the third flat plate and the fourth flat plate.

[0012] Furthermore, the vertical drive component is a vertical linear module.

[0013] Furthermore, the first driving component, the second driving component, the third driving component, and the fourth driving component are all DO motors.

[0014] Furthermore, the clamping and releasing device includes a bidirectional drive member disposed on the fourth planar plate, and two clamping and releasing blocks are disposed on the bidirectional drive member, the clamping and releasing blocks being connected to the bidirectional drive member via a connecting frame.

[0015] Furthermore, the bidirectional drive component is a bidirectional telescopic motor or a bidirectional telescopic cylinder.

[0016] Furthermore, the inner wall of the release block is provided with a stabilizing element.

[0017] Furthermore, the stabilizing component includes a mating groove disposed on the inner wall of the release block, and a stabilizing layer is disposed on the inner wall of the release block within the mating groove.

[0018] Furthermore, the stabilizing layer is a lightweight foamed elastic rubber layer with anti-slip and wear-resistant properties.

[0019] Therefore, the present invention provides the following effects and / or advantages:

[0020] 1) The bracket is used for installation inside the chassis, the clamping and releasing device is used for clamping or releasing the probe card, and the movable drive device is used to drive the clamping and releasing device to move quickly, smoothly, and accurately to the loading platform inside the chassis so that the clamping and releasing device clamps the probe card on the loading platform. After the clamping and releasing device clamps the probe card on the loading platform, the movable drive device is used to drive the clamping and releasing device to move quickly, smoothly, and accurately to the placement platform located on one side above the loading platform inside the chassis so that the clamping and releasing device releases the probe card on the placement platform. With the cooperation of the linkage platform, vertical drive component, first flat plate, first drive component, second flat plate, second drive component, third flat plate, third drive component, fourth flat plate, and fourth drive component, there is no need to make multiple avoidances during the handling of the probe card. It can be handled quickly, smoothly, and accurately in a limited space, which is beneficial to use.

[0021] 2) The stabilizer is used to cooperate with the probe card when the release block clamps the probe card, so that the probe card will not be shifted or fall off during the clamping of the two release blocks, thereby improving the stability of the two release blocks clamping the probe card.

[0022] Other features and advantages of this invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objects and other advantages of the invention are realized and obtained through the structures particularly pointed out in the description and the drawings.

[0023] It should be understood that the above summary and the following detailed description of the present invention are exemplary and explanatory, and are intended to provide further explanation of the present invention as claimed. Attached Figure Description

[0024] Figure 1 This is a structural schematic diagram of an embodiment of the present utility model.

[0025] Figure 2 For the corresponding Figure 1 Enlarged view of part A.

[0026] Explanation of reference numerals in the attached figures:

[0027] 1. Bracket; 2. Linkage platform; 3. Vertical drive component; 4. First plane plate; 5. First drive component; 6. Second plane plate; 7. Second drive component; 8. Third plane plate; 9. Third drive component; 10. Fourth plane plate; 11. Fourth drive component; 12. Bidirectional drive component; 13. Clamping block; 14. Connecting frame; 15. Mating groove. Detailed Implementation

[0028] To facilitate understanding by those skilled in the art, the structure of this utility model will now be described in further detail with reference to the accompanying drawings:

[0029] refer to Figure 1-2A probe card handling mechanism, comprising:

[0030] A bracket 1 is used to be installed inside a chassis. A clamping and releasing device is movably disposed on the bracket 1. The clamping and releasing device is used to clamp or release the probe card. A movable driving device is disposed between the bracket 1 and the clamping and releasing device.

[0031] The active drive device is used to drive the clamping and releasing device to move quickly, smoothly and accurately to the loading platform inside the chassis so that the clamping and releasing device can clamp the probe card on the loading platform. After the clamping and releasing device clamps the probe card on the loading platform, the active drive device is used to drive the clamping and releasing device to move quickly, smoothly and accurately to the placement platform located on the side above the loading platform inside the chassis so that the clamping and releasing device can release the probe card on the placement platform.

[0032] The movable driving device includes a linkage platform 2, which is vertically lifted and lowered above the support 1, and a vertical driving member 3 is provided between the linkage platform 2 and the support 1; a first flat plate 4, one end of which is rotatably disposed on the top surface of the linkage platform 2, and a first driving member 5 is provided between the linkage platform 2 and the first flat plate 4; a second flat plate 6, one end of which is rotatably disposed on the bottom surface of the other end of the first flat plate 4, and a second driving member 7 is provided between the first flat plate 4 and the second flat plate 6; a third flat plate 8, one end of which is rotatably disposed on the bottom surface of the other end of the second flat plate 6, and a third driving member 9 is provided between the second flat plate 6 and the third flat plate 8; and a fourth flat plate 10, one end of which is rotatably disposed on the bottom surface of the other end of the third flat plate 8, and a fourth driving member 11 is provided between the third flat plate 8 and the fourth flat plate 10.

[0033] The first planar plate 4, the second planar plate 6, the third planar plate 8, and the fourth planar plate 10 are arranged in parallel.

[0034] The vertical drive component 3 is a vertical linear module.

[0035] The first drive component 5, the second drive component 7, the third drive component 9, and the fourth drive component 11 are all DO motors. This improves the smoothness and accuracy of the movement of the active drive device.

[0036] DO motors are high-performance motors that can directly drive loads without the need for traditional transmission mechanisms. By eliminating intermediate links in the mechanical transmission chain, DO motors achieve zero backlash, high precision, and high dynamic response.

[0037] The clamping and releasing device includes a bidirectional drive component 12, which is disposed on the fourth planar plate 10. Two clamping and releasing blocks 13 are disposed on the bidirectional drive component 12, and the clamping and releasing blocks 13 are connected to the bidirectional drive component 12 through a connecting frame 14.

[0038] The bidirectional drive component 12 is a bidirectional telescopic motor or a bidirectional telescopic cylinder.

[0039] The inner wall of the release block 13 is provided with a stabilizing component.

[0040] The stabilizer is used to cooperate with the probe card when the clamping and releasing block 13 clamps the probe card, so that the probe card will not be shifted or fall off during the clamping and releasing block 13, thereby improving the stability of the two clamping and releasing blocks 13 when clamping the probe card.

[0041] The stabilizing component includes a mating groove 15 disposed on the inner wall of the clamping block 13, and a stabilizing layer (not shown) is disposed on the inner wall of the clamping block 13 and within the mating groove 15.

[0042] The stabilizing layer is a lightweight foamed elastic rubber layer with anti-slip and wear-resistant properties.

[0043] It should be noted that any reference signs placed between parentheses in the claims should not be construed as limiting the claims. The word "comprising" does not exclude the presence of components or steps not listed in the claims. The word "a" or "an" preceding a component does not exclude the presence of a plurality of such components. This invention can be implemented by means of hardware comprising several different components and by means of a suitably programmed computer. In a unit claim enumerating several means, several of these means may be embodied by the same item of hardware. The use of the words first, second, and third, etc., does not indicate any order. These words can be interpreted as names.

[0044] Although preferred embodiments of the present invention have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of the present invention.

[0045] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0046] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms should not be construed as necessarily referring to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

Claims

1. A probe card handling mechanism, characterized in that: include: A support frame, on which a clamping and releasing device is movably mounted, and a movable driving device is provided between the support frame and the clamping and releasing device; The active drive device is used to drive the clamping and releasing device to move quickly, smoothly and accurately to the loading platform inside the chassis so that the clamping and releasing device can clamp the probe card on the loading platform. After the clamping and releasing device clamps the probe card on the loading platform, the active drive device is used to drive the clamping and releasing device to move quickly, smoothly and accurately to the placement platform located on the side above the loading platform inside the chassis so that the clamping and releasing device can release the probe card on the placement platform. The movable driving device includes a linkage platform, which is vertically and vertically mounted above the support, and a vertical driving member is disposed between the linkage platform and the support; a first flat plate, one end of which is rotatably mounted on the top surface of the linkage platform, and a first driving member is disposed between the linkage platform and the first flat plate; a second flat plate, one end of which is rotatably mounted on the bottom surface of the other end of the first flat plate, and a second driving member is disposed between the first flat plate and the second flat plate; a third flat plate, one end of which is rotatably mounted on the bottom surface of the other end of the second flat plate, and a third driving member is disposed between the second flat plate and the third flat plate; and a fourth flat plate, one end of which is rotatably mounted on the bottom surface of the other end of the third flat plate, and a fourth driving member is disposed between the third flat plate and the fourth flat plate.

2. The probe card handling mechanism according to claim 1, characterized in that: The vertical drive component is a vertical linear module.

3. The probe card handling mechanism according to claim 1, characterized in that: The first driving component, the second driving component, the third driving component, and the fourth driving component are all DO motors.

4. The probe card handling mechanism according to claim 1, characterized in that: The clamping and releasing device includes a bidirectional drive component disposed on the fourth planar plate. Two clamping and releasing blocks are disposed on the bidirectional drive component, and the clamping and releasing blocks are connected to the bidirectional drive component through a connecting frame.

5. The probe card handling mechanism according to claim 4, characterized in that: The bidirectional drive component is a bidirectional telescopic motor or a bidirectional telescopic cylinder.

6. The probe card handling mechanism according to claim 4, characterized in that: The inner wall of the release block is provided with a stabilizing element.

7. A probe card handling mechanism according to claim 6, characterized in that: The stabilizing component includes a mating groove disposed on the inner wall of the release block, and a stabilizing layer is disposed on the inner wall of the release block within the mating groove.

8. The probe card handling mechanism according to claim 7, characterized in that: The stabilizing layer is a lightweight foamed elastic rubber layer with anti-slip and wear-resistant properties.

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